427 results about "Focal surface" patented technology

The invention discloses a high-power microscope intelligent scanning method for a bone marrow smear, which comprises the following steps: S1, automatically dividing a scanning area: acquiring a bone marrow smear image by adopting a front camera, and selecting an optimal scanning area through a multi-dimensional quality evaluation model; s2, intelligent partitioning and focusing point distribution: dividing an optimal scanning area into N * M sub-areas, determining P focusing sampling points by adopting a layered sampling strategy, and establishing a three-dimensional coordinate mapping table; s3, multi-point focusing data acquisition: according to a preset coordinate mapping table, driving an objective table and an objective lens assembly to move to each sampling point in sequence, and constructing an N * M * P-dimensional focusing data matrix; s4, performing focal plane fitting by a least square method: performing three-dimensional plane fitting on the acquired data; and S5, intelligent scanning imaging: calculating the theoretical optimal focal length of each position in the scanning path according to the fitting function, and driving the objective lens assembly to adjust the focal length in real time for scanning imaging. According to the invention, the scanning area identification accuracy and the image definition uniformity are automatically improved in the whole process.

The invention discloses an optical imaging and coding hole technology fused optical imaging system and method, and aims to integrate scattered polarization components in a reflected light signal into coding light field data with clear layers by constructing a polarization coding modulation system, so as to highlight a coupling relationship among optical elements. A refocusing sequence and a focal plane chromatography technology are adopted, spatial geometric information and light intensity distribution characteristics of different depth layers are fully excavated, and a three-dimensional distribution rule of surface topography is disclosed; wavefront correction and deformable mirror control technologies are introduced, imaging parameters of an optical system are adjusted in a self-adaptive mode, and the application range of measurement precision is expanded; light intensity modulation analysis and phase unwrapping window processing are combined, the change trend of the surface curvature is depicted, and key feature points of morphology measurement are grasped; finally, multi-dimensional and multi-level optical measurement information is fused, three-dimensional measurement output with rich content and reliable precision is formed, and comprehensive and high-quality measurement technology resources can be provided for application scenes such as precision optical detection and surface quality evaluation.

The invention is suitable for the field of imaging, and discloses a micro lens array zoom module zoom method and an imaging system, and the method comprises the steps: obtaining a mapping relation table between a deviation objective lens working distance and a micro lens array state of a micro lens array zoom module; acquiring a laser spot image formed by irradiating the to-be-measured object with laser, and calculating the position of the to-be-measured object to the focal plane of the objective lens; determining an adjustment reference distance of the micro-lens array zoom module based on the position from the object to be measured to the focal plane of the objective lens, and comparing the adjustment reference distance with the mapping relation table to determine the micro-lens array state of the micro-lens array zoom module; and on the basis of the determined state of the microlens array, a focusing instruction is generated so as to realize automatic zooming of the microlens array zooming module, automatic zooming of the microlens array zooming module is realized, and the method has the advantages of extremely high focusing speed and high precision.

The invention discloses a four-channel fluorescence detection light path module of a super-resolution biological microscope, which divides a fluorescence signal of an intermediate image plane (5) into four conjugate channels (7a-7d) through multi-stage dichroscope light splitting, reflector guiding and lens focal plane adjustment on the premise of not introducing additional aberration, and realizes real-time synchronous detection by using a single large-target-surface camera (8). By adjusting the distance between the reflectors, the inclination angle of the parallel plate glass or the position of the lens, the device can adapt to different camera target surface sizes and compensate chromatic aberration, and the problems of motor switching delay and dual-channel aberration in the prior art are solved.

The invention discloses a transmission-type ultra-wideband multi-focal-plane optical system which comprises a first positive lens, a first negative lens, a second positive lens, a second negative lens and a third negative lens which are sequentially arranged along the same optical axis. Incident light of different wave bands sequentially passes through the first positive lens, the first negative lens, the second positive lens, the second negative lens and the third negative lens, differential focusing is formed by setting different back intercept, and a visible light wave band, a near-infrared wave band, a medium-wave infrared wave band and a long-wave infrared wave band respectively form independent focal planes which are axially separated. The transmission wave band of the optical system is 0.5-12 microns, visible light, near-infrared light, medium-wave infrared light and long-wave infrared light are covered, the common optical element and axial separation multi-focal plane design is adopted, different wave bands share the same set of optical elements, and the target can be detected only by placing the target on the corresponding focal plane. And optical collimation of different wavebands can be realized by changing the position of the focal plane.

The invention relates to a micro display device for a bifocal plane HUD (head up display) system, which solves the problems of halved field of view, limited working bandwidth, low color saturation and low brightness of the existing bifocal plane HUD system, and comprises an image display module and a polarization modulation element arranged above the image display module, the polarization modulation element is used for polarization modulation of display pixels, the effective area of the sub-wavelength medium grating arrangement is equivalent to a 1 / 2 wave plate, the display pixels are separated in a row-by-row or column-by-column staggered mode through the sub-wavelength medium grating arrangement, and the problem that the view field is halved due to an existing target surface space partitioning scheme is solved. The two adjacent sub-wavelength medium gratings convert incident light into linear polarization states in two directions, the two directions are mutually orthogonal, and the two spaced sub-wavelength medium gratings are completely the same, so that the two images are respectively adjusted into the mutually orthogonal linear polarization states, and the two images are generated in a staggered manner.

The invention relates to the technical field of laser shaping, in particular to a light spot shaping method and system based on a spatial light modulator, and the method comprises the steps: providing and expanding an incident laser beam in Gaussian distribution, and obtaining a collimated and expanded beam; irradiating an incident laser beam to a spatial light modulator, loading a preset phase modulation pattern to modulate a wavefront phase, and outputting a phase modulation beam; the phase modulation light beam is input into a 4f imaging system, a spatial light modulator is located on the front focal plane of a first lens, and the light beam forms a light field with target intensity distribution on the rear focal plane of a second lens after passing through the system; and the light field is focused on the surface of a workpiece to be processed through an objective lens to form a flat-topped light spot. According to the scheme, uniform light intensity distribution can be flexibly generated without replacing optical elements, the uniformity and utilization efficiency of laser energy in a machining area are remarkably improved, and the problem of material damage or insufficient edge machining caused by too strong center energy is effectively solved.

The invention relates to the technical field of camera imaging, and particularly discloses a hyperspectral camera semi-automatic focal plane adjustment method based on PI control. In order to solve the problem that the pose relationship between a sensor and a focal plane has great influence on performance indexes during the adjustment of the hyperspectral camera, the method proposes to realize semi-automatic adjustment by using PI control software. By controlling imaging of the hyperspectral camera, displaying light and shadow on a software interface in real time, calculating indexes such as MTF and signal-to-noise ratio and combining feedback adjustment of a PI control algorithm, the optimal pose relation between the focal plane and the detector is rapidly and accurately obtained. According to the method, the installation and adjustment efficiency and precision are improved, the installation and adjustment period is shortened, the dependence on the experience of installation and adjustment personnel is reduced, and standardized focal plane installation and adjustment of the hyperspectral camera are realized. Reliable image support is provided for subsequent hyperspectral application, an effective solution thought is provided for similar engineering requirements, and the method has wide application prospects and value.

The invention belongs to the field of optical systems, and particularly relates to an entrance pupil front refrigeration type free-form surface off-axis four-mirror optical system. The optical system comprises a first reflecting mirror, a second reflecting mirror, a third reflecting mirror, a fourth reflecting mirror, a detector window and a detector cold diaphragm which are sequentially arranged from an object plane to a focal plane, wherein the first reflecting mirror is arranged at a position close to the object plane; the second reflecting mirror is arranged on a reflecting light path of the first reflecting mirror; the third reflecting mirror is arranged on a reflecting light path of the second reflecting mirror; the fourth reflecting mirror is arranged on a reflecting light path of the third reflecting mirror; and a detector window and a detector cold diaphragm are sequentially arranged on a reflection light path of the fourth reflector. According to the invention, the modular design of the reflective off-axis optical system can be realized, and the integration level and interchangeability of the photoelectric system are improved; and the relative aperture is larger, so that the detection sensitivity of the optical system is further improved while the optical path structure is kept compact.

The invention discloses an aspheric keratoprosthesis lens column, a keratoprosthesis and an application method of the aspheric keratoprosthesis lens column, the whole lens column is cylindrical, the front surface of the lens column is a convex surface, the rear surface of the lens column is a concave surface, the rear surface of the lens column is a surface close to the retina, the front surface of the lens column is a surface far away from the retina, and the front surface and the rear surface of the lens column are both curved surfaces. And the spherical surfaces are rotationally symmetrical aspheric surfaces. The artificial cornea comprises a lens column and a support, and the lens column is installed on the support. The fixed position of the lens column is that the distance between the vertex of the rear surface of the lens column and the retina is 10-120mm, the focal plane is perpendicular to the optical axis, and the inclination angle of the focal plane is 0 degree. According to the lens column, spherical aberration and coma can be effectively corrected, and the imaging quality is improved; light scattering is reduced, the visual contrast at night and in a low-light environment is improved, and the visual experience of a patient is improved; the deviation tolerance of the implantation position is higher, and the operation difficulty and the risk of postoperative complications are reduced.

The invention relates to an overlay measurement system and a measurement method, and belongs to the technical field of chip manufacturing. Interference scanning focus measurement and independent focusing imaging of double industrial cameras are combined, an overlay measurement system accurately positions focal planes of different photoetching layers on a wafer by using interference signals through one-time vertical scanning, and then the two cameras are driven to be synchronized to image plane positions of the respective focal planes, so that the alignment precision of the wafer is improved. Therefore, one-time and synchronous high-definition imaging and overlay error calculation of two layers of patterns exceeding the optical focal depth are realized, and the measurement efficiency is remarkably improved.

The invention relates to the technical field of optical imaging, and discloses a novel reflective dark field imaging method and system based on Fourier conjugate plane modulation, and the method comprises the steps: controlling a first spatial light modulator to load a dynamic annular illumination pattern, and projecting the dynamic annular illumination pattern to a rear focal plane of an objective lens; light field distribution formed by scattering signal light and annular reflected light is separated on a rear focal plane by using an objective lens; relaying the light field distribution to a conjugate plane where a second spatial light modulator is located through a second relay light path; and controlling the second spatial light modulator to load a dynamic blocking pattern, blocking the annular reflected light and enabling the scattered signal light to pass through, and finally imaging. According to the invention, two electronically synchronous spatial light modulators are adopted to construct a dynamic illumination light field and realize adaptive spatial filtering respectively, so that cooperative matching of an illumination pattern and a blocking pattern is realized, active compensation of optical chromatic aberration is facilitated, the problem of background leakage under wide-spectrum illumination is solved, and the illumination quality is improved. And a high-numerical aperture objective lens lacking a dark field channel is compatible.

The invention discloses a bifocal plane imaging system and a multidirectional beam splitter, and the bifocal plane imaging system comprises an illumination module which is configured to provide an illumination light beam for a to-be-measured piece, and the illumination light beam forms a signal light beam on the surface of the to-be-measured piece; the objective lens assembly is configured to receive the signal light beam and optically focus on the second to-be-measured layer; the light splitting assembly is arranged on an emergent light path of the objective lens assembly and is configured to split the signal light beam to form a first light beam transmitted in a first direction and a second light beam transmitted in a second direction; the first imaging module is configured to receive the first light beam in a first direction and optically focus the first light beam on a first to-be-measured layer through focusing processing, and the first light beam is used for imaging the first to-be-measured layer; and the second imaging module is configured to receive a second light beam in a second direction, and the second light beam is used for imaging a second layer to be measured. According to the invention, the detection efficiency of the two to-be-detected layers can be improved.

The invention discloses an arbitrary-curved-surface wide-field-of-view turntable confocal tomography microimaging system and method, and belongs to the technical field of optical microimaging, the system comprises an illumination light source and a detection module, and the light output side of the illumination light source is provided with an illumination adaptive modulation module; a first relay lens module is arranged on the light output side of the lighting module; the light output side of the first relay lens module is provided with a zoom pinhole turntable; a second relay lens module is arranged between the zoom pinhole turntable and the sample; a dichroscope is arranged between the zoom pinhole turntable and the first relay lens module; a third relay lens module is arranged between the dichroscope and the detection module; the illumination adaptive modulation module generates a dynamic illumination template according to pre-stored curved surface morphology data; matching the illumination area to the current focal plane imaging area through the first relay lens module and the second relay lens module; and the signal synchronous processing system controls zoom compensation working parameters of the illumination adaptive modulation module, the detection module and the zoom pinhole turntable.

The invention provides a virtual reality display method and system, a computer and a storage medium. The method comprises the following steps: collecting sight movement data and head movement data of a user; predicting a fixation point area at the next moment based on the historical movement track of the fixation point area; according to the scene depth information, the sight line moving speed and the head motion data of the fixation point area at the next moment, predicting the predicted focal plane depth at the next moment, and dynamically adjusting the configuration of the micro-lens array in the optical assembly to match the predicted focal plane depth. The depth of a focal plane is predicted through fusion data of eye movement tracking and an inertial measurement unit, the configuration of a micro-lens array is dynamically adjusted, meanwhile, a display picture is divided into a fixation point area, a fuzzy display area and an atmosphere rendering area, and based on differentiation rendering processing, the convergence adjustment conflicts of vision are remarkably relieved, the graphic calculation load is reduced, and the display quality is improved. And a self-adaptive high-definition display effect is realized.

According to the display device and the vehicle, a phase modulation element is arranged on the light emitting side of an image source, a light splitting element is arranged on the light emitting side of the phase modulation element, and the phase modulation element converts first polarized light emitted by the image source into second polarized light to be emitted in the first stage and transmits the first polarized light in the second stage; the light splitting element reflects one of the first polarized light and the second polarized light emitted by the phase modulation element and transmits the other one, so that through the cooperation of the phase modulation element and the light splitting element, the emergent light of the image source can be transmitted to the projection imaging medium through different light paths to generate a bifocal plane image; and the image source does not need to be partitioned, so that the resolution ratio of the generated front and back image planes positioned on different focal planes is not reduced, and the problem that the resolution ratio is reduced in the existing multi-focal-plane AR-HUD display scheme adopting the single PGU and the double optical paths is solved.

The invention relates to an automatic focusing method and device and computer equipment. The method is applied to a microscope, and comprises the following steps: in response to an automatic focusing instruction, controlling an objective lens to move according to a first stepping value corresponding to an imaging parameter of the microscope, and acquiring at least two first reference images at different positions of the objective lens; determining a first objective lens position according to an objective lens position and ambiguity features corresponding to the first reference image; controlling the objective lens to move according to the first objective lens position and a preset second stepping value, and acquiring at least two second reference images at different objective lens positions; and according to the objective lens position and the definition characteristic corresponding to the second reference image, determining a target focal plane position and completing focusing. By adopting the method, the focusing efficiency can be improved and the calculated amount can be reduced on the premise of ensuring the focusing accuracy.

The present application discloses a method, system and device for intelligent automatic focusing of a microscope, which relates to the field of microscope focusing. The method includes: performing target detection on a set of scanned images by using an adaptive search algorithm to obtain a detection result; if there is a target sample in the set of scanned images, extracting multiple frames of scanned images based on the existing position area, and calculating the clarity score value of each frame of scanned image extracted based on multiple image features; selecting the scanned image with the highest clarity score value, and marking the corresponding focal plane as the final focal plane of the path point; using the adaptive search algorithm to determine the next path point, and then returning to the step of obtaining the set of scanned images; if the result indicates that there is no target sample in the set of scanned images, using the adaptive search algorithm to determine the next path point, and then returning to the step of obtaining the set of scanned images. The present application can improve the efficiency, accuracy and adaptability of microscope automatic focusing.

The present invention discloses a method for designing an optical system that produces uniform annular light, and belongs to the field of optical design. Technical solution: The optical system involved is formed by a combination of a conical mirror and a cylindrical mirror. A beam of circular parallel light is incident on the conical mirror, and the light emitted from the conical mirror is reflected on the cylindrical mirror. The concave and convex areas on the cylindrical mirror divide the light beam, and then are stacked and converged at the focal plane at the same time to form a focused annular light of a certain width. The conical mirror is formed by a cone line rotating around the optical axis Z; the concave and convex areas on the cylindrical mirror are a curved surface formed by a plurality of parabolas with alternating concave and convex rotating around the optical axis Z; the focused annular light has a width of 6 mm and an energy uniformity of more than 89%. In the present invention, the more concave and convex areas there are on the cylindrical mirror, the higher the uniformity of the annular light on the focal plane.

The invention belongs to the technical field of microobjective optical design, and provides a long-working-distance flat-field apochromatic microobjective capable of forming phase difference, so as to solve the technical problem that an existing microobjective is poor in imaging effect on a transparent sample, a switchable phase ring with a coating film is arranged at a rear focal plane and used for delaying the light wave phase of the sample, and the imaging effect of the sample is improved. Phase difference is formed by interference with background light; the optical system is sequentially and coaxially provided with a first balsaming lens, a third lens, a second balsaming lens, a seventh lens and an eighth lens from the image space to the object space along the optical axis, and the focal lengths of the lenses meet the condition that fG1 / f is larger than-6 and smaller than 0; 0 < fG2 / f < 6; 0 < f3 / f < 10; 0 < f7 / f < 3; and f8 / f is greater than 0 and less than 10, so that a working distance of 3.0 mm and system resolution are ensured, secondary spectral aberration can be corrected to realize apochromatic, the field curvature defect of an optical system is overcome, the imaging quality of the field edge is improved, and the optical system can be applied to the technical fields of bioengineering and medicine.

The invention provides a line scanning differential confocal Raman microscopic spectrum co-fusion imaging system, which belongs to the microscopic imaging technology, and comprises a light spot illumination module, a confocal imaging module, a Raman imaging module, a line scanning module and a control module, the confocal imaging module is used for enabling reflected light of a sample to be detected to equivalently enter the first camera, the second camera and the third camera so as to obtain pre-focus, focal plane and post-focus images of the sample to be detected, and the Raman imaging module is used for obtaining chemical Raman component spectrum information; the control module obtains a confocal image with surface height information of the to-be-detected sample according to the pre-focus image, the focal plane image and the post-focus image of the to-be-detected sample, and synchronously fuses the confocal image and the chemical Raman component spectrum information to obtain a four-dimensional image comprising the three-dimensional surface topography and the chemical Raman component spectrum of the to-be-detected sample. According to the invention, map co-fusion can be realized, and more visual multi-dimensional measurement information can be obtained.

The invention discloses a Linnik type wide spectrum measurement automatic focusing system and method. The Linnik type wide spectrum measurement automatic focusing system comprises a sample objective lens, a reference objective lens, a beam splitter prism, a beam splitter, an astigmatic lens group, a first detector, a barrel lens and a second detector. Light with sample morphology information enters the beam splitter prism through the sample objective lens, light reflected by the reference mirror enters the beam splitter prism through the reference objective lens, the light with the sample morphology information and the light reflected by the reference mirror are combined in the beam splitter prism and then enter the beam splitter, and the beam splitter divides the combined light into a first light beam and a second light beam. The first light beam enters the astigmatic lens group and irradiates the first detector, and the second light beam irradiates the second detector through the barrel lens. According to the invention, the focal plane can be searched in a large range, and the problem of short detection distance due to the coherent gap of the existing wide-spectrum interference measurement system is solved.

The utility model discloses a laser processing system for rapidly preparing a large-area zero-taper microstructure, and belongs to the technical field of laser processing optical design. The laser processing system comprises a laser device, a beam expanding and collimating system, a shaping system, a translation transformation system and a focusing system which are sequentially arranged on a main shaft of a system light path, the translation transformation system comprises a first lens and a second lens, the focal length of the first lens is f1, the focal length of the second lens is f2, the distance between the first lens and the second lens is f1 + f2, and the focal length of the first lens is f1; the shaping system is located between the rear focal plane of the first lens and the first lens; the focusing system comprises a galvanometer and a field lens arranged at the emergent end of the galvanometer, and the field lens is located between the front focal plane of the second lens and the second lens. Microstructure machining is carried out through the laser machining system, the problem that the machining amplitude of a traditional rotary cutting laser machining system is too small is effectively solved, the machining efficiency is greatly improved, the taper problem existing in laser machining is solved, and the machining quality is better guaranteed.

The invention provides a large-aperture optical system focal plane position measuring device and a measuring method, and solves the problems that a traditional method based on small detector scanning is difficult to fully cover and accurately butt joint a focal plane of a large-aperture optical system, so that local focusing is accurate but the whole is deviated; and the imaging performance of the large-aperture optical system is influenced. According to the invention, two functions of wave aberration detection and focal plane position measurement are integrated, one set of platform covers detection of two types of key optical parameters through switchable test path and detector configuration, the equipment utilization rate is improved, and the experiment cost is reduced. The six-degree-of-freedom adjusting table and the two-dimensional rotary table are used in cooperation, high-precision fine adjustment of the detected optical system in the space attitude and the position of the detector is achieved, searching and positioning of the focal plane can be rapidly completed, and the focusing efficiency is high.

The utility model discloses an off-axis bifocal plane HUD optical system, which comprises an image source, an eye box, a lens, a first reflecting mirror, a second reflecting mirror and an automobile windshield, the image source comprises a first output part and a second output part, light of the first output part passes through the first reflecting mirror, the second reflecting mirror and the automobile windshield to enable the eye box to obtain a near focal plane, and light of the second output part passes through the first reflecting mirror, the second reflecting mirror and the automobile windshield. The light of the second output part passes through the lens, the first reflecting mirror, the second reflecting mirror and the automobile windshield to enable the eye box to obtain a far focal plane. The image source is divided into two parts, the lens is arranged on the light path of the second output part of the image source, and a near-focus virtual image and a far-focus virtual image are formed in front of the windshield, so that a driver can see the virtual image surface and timely obtain the driving information of the vehicle under the condition of poor visual field such as vehicle following or traffic jam, and the driving safety of the vehicle is improved. Therefore, the thickness of the crystalline lens can be adjusted when human eyes watch far and near focuses, and fatigue caused by long-time observation of a certain focal plane is avoided.

The invention provides a head-up display system and a vehicle, and belongs to the technical field of optics. The head-up display system comprises an image source, a first plane lens, a second plane lens and a free-form mirror. The image source includes a first display area and a second display area. The first plane lens is located on an emergent light path of the first display area, and the second plane lens is located on an emergent light path of the second display area. The optical path of light emitted by the first display area on the first plane lens is different from the optical path of light emitted by the second display area on the second plane lens. The free-form mirror is located on transmission light paths of the first plane lens and the second plane lens. Because the optical path of the light in the first plane lens is different from the optical path of the light in the second plane lens, the equivalent object distances of the first display area and the second display area are different, and the virtual image distances of two focal planes corresponding to the first display area and the second display area are different. Therefore, the head-up display system can generate two focal planes with different virtual image distances.

The invention provides an automatic focusing device, an automatic focusing method and wafer quantity detection equipment, and belongs to the field of semiconductor optics, and the device comprises a light source, an illumination dimming mirror group, a beam splitting element, a reflector, an objective lens, a distance measurement dimming mirror group, a focal plane measurement unit, a dispersion compensation mirror group and a focusing compensation mirror group; the focal plane measuring unit can measure the focal planes of a plurality of process layers of the wafer and determine the focal length from the target focal plane to the objective lens, thereby realizing automatic focusing. According to the scheme, the dispersion compensation and objective lens measurement combined design is adopted, high precision and a large measurement range are achieved through dispersion curve control, specific quantity detection scanning can be conducted on a specific process layer of a wafer through the focusing compensation lens set, and the measurement precision is improved. And the method is convenient to popularize and apply in equivalent detection scenes of wafer nanoscale key dimensions, defects, overlay alignment and the like and in the photoetching processing field.

The invention discloses an off-axis alignment device, an off-axis alignment method and photoetching equipment. The device comprises a light source module used for providing a first light source signal for a silicon wafer, the silicon wafer is provided with a coarse alignment mark and a fine alignment mark, and the coarse alignment mark and the fine alignment mark feed back a first reflection light signal and a second reflection light signal respectively based on the first light source signal; the automatic focusing module is used for forming a first focusing mark on the surface of the silicon wafer and acquiring a third reflected light signal fed back based on the first focusing mark, and the third reflected light signal is used for performing focal plane compensation on the silicon wafer; the first detection module is used for acquiring first deviation information based on the first reflected light signal so as to perform first compensation on the position of the silicon wafer; and the second detection module is used for obtaining second deviation information based on the second reflected light signal after the first compensation so as to carry out second compensation. According to the scheme, the defocusing condition of the silicon wafer can be judged and compensated in real time, and the alignment efficiency and the overlay precision are improved.

The invention discloses a micro-lens array focal length detection method and detection equipment based on an image moving fitting method, and the method comprises the steps: setting a camera, adjusting the camera until the camera is focused on a micro-lens array, adjusting the optical axis distance between the camera and the array in a floating manner, and collecting star point light spot images and Perot plate line-to-plate images at a plurality of adjusted positions; according to the light spot sub-images corresponding to the same sub-lens in the plurality of light spot images, focal plane coordinates are determined, and corresponding PSF reconstruction is carried out; selecting a pair of light plate images and line-to-plate images, and performing recovery processing on sub-images corresponding to the sub-lenses in the images by using a Wiener filtering algorithm; performing convolution operation on the restored image and the reconstructed PSF function to obtain a reconstructed line-to-board image corresponding to the focal plane coordinates; and the focal length of the sub-lens is calculated according to the focal length of the collimator, the actual line distance of the Perot plate and the line distance determined by the reconstruction line to the plate image. Array images near the focus are collected in an image moving mode, and the focal lengths of the multiple sub-lenses are detected in parallel.

The invention relates to the technical field of optical equipment testing, and particularly discloses a large-caliber large-range second-of-arc intense laser multi-optical-axis parallelism testing machine which comprises a light pipe body, a light inlet and a light outlet, a supporting table is arranged at the end, close to the light inlet, of the light pipe body, and a three-dimensional adjusting frame is installed at the top of the supporting table; a focal plane observation system is installed in the light outlet, a two-dimensional adjusting frame is installed at the end, close to the light outlet, of the light pipe body, and a trepanning diaphragm plate is installed at the top of the two-dimensional adjusting frame. A second driving assembly is installed at the end, away from the rotating table, of the lifting table, a first driving assembly is installed at the end, below the second driving assembly, of the bottom plate, and a third driving assembly is installed at the end of the inclined plate. According to the invention, a series of structures are arranged, so that the testing machine can carry out large-aperture multi-optical-axis synchronous testing, manual or servo numerical control operation is carried out by means of the three-dimensional adjusting frame, the position of a to-be-detected product is adjusted, large-range and small-range precision adjustment is satisfied, and the testing precision is improved.