175 results about "Focal surface" patented technology

The invention relates to the technical field of laser shaping, in particular to a light spot shaping method and system based on a spatial light modulator, and the method comprises the steps: providing and expanding an incident laser beam in Gaussian distribution, and obtaining a collimated and expanded beam; irradiating an incident laser beam to a spatial light modulator, loading a preset phase modulation pattern to modulate a wavefront phase, and outputting a phase modulation beam; the phase modulation light beam is input into a 4f imaging system, a spatial light modulator is located on the front focal plane of a first lens, and the light beam forms a light field with target intensity distribution on the rear focal plane of a second lens after passing through the system; and the light field is focused on the surface of a workpiece to be processed through an objective lens to form a flat-topped light spot. According to the scheme, uniform light intensity distribution can be flexibly generated without replacing optical elements, the uniformity and utilization efficiency of laser energy in a machining area are remarkably improved, and the problem of material damage or insufficient edge machining caused by too strong center energy is effectively solved.

The invention relates to an overlay measurement system and a measurement method, and belongs to the technical field of chip manufacturing. Interference scanning focus measurement and independent focusing imaging of double industrial cameras are combined, an overlay measurement system accurately positions focal planes of different photoetching layers on a wafer by using interference signals through one-time vertical scanning, and then the two cameras are driven to be synchronized to image plane positions of the respective focal planes, so that the alignment precision of the wafer is improved. Therefore, one-time and synchronous high-definition imaging and overlay error calculation of two layers of patterns exceeding the optical focal depth are realized, and the measurement efficiency is remarkably improved.

The invention provides a virtual reality display method and system, a computer and a storage medium. The method comprises the following steps: collecting sight movement data and head movement data of a user; predicting a fixation point area at the next moment based on the historical movement track of the fixation point area; according to the scene depth information, the sight line moving speed and the head motion data of the fixation point area at the next moment, predicting the predicted focal plane depth at the next moment, and dynamically adjusting the configuration of the micro-lens array in the optical assembly to match the predicted focal plane depth. The depth of a focal plane is predicted through fusion data of eye movement tracking and an inertial measurement unit, the configuration of a micro-lens array is dynamically adjusted, meanwhile, a display picture is divided into a fixation point area, a fuzzy display area and an atmosphere rendering area, and based on differentiation rendering processing, the convergence adjustment conflicts of vision are remarkably relieved, the graphic calculation load is reduced, and the display quality is improved. And a self-adaptive high-definition display effect is realized.

The invention relates to an automatic focusing method and device and computer equipment. The method is applied to a microscope, and comprises the following steps: in response to an automatic focusing instruction, controlling an objective lens to move according to a first stepping value corresponding to an imaging parameter of the microscope, and acquiring at least two first reference images at different positions of the objective lens; determining a first objective lens position according to an objective lens position and ambiguity features corresponding to the first reference image; controlling the objective lens to move according to the first objective lens position and a preset second stepping value, and acquiring at least two second reference images at different objective lens positions; and according to the objective lens position and the definition characteristic corresponding to the second reference image, determining a target focal plane position and completing focusing. By adopting the method, the focusing efficiency can be improved and the calculated amount can be reduced on the premise of ensuring the focusing accuracy.

The utility model discloses a laser processing system for rapidly preparing a large-area zero-taper microstructure, and belongs to the technical field of laser processing optical design. The laser processing system comprises a laser device, a beam expanding and collimating system, a shaping system, a translation transformation system and a focusing system which are sequentially arranged on a main shaft of a system light path, the translation transformation system comprises a first lens and a second lens, the focal length of the first lens is f1, the focal length of the second lens is f2, the distance between the first lens and the second lens is f1 + f2, and the focal length of the first lens is f1; the shaping system is located between the rear focal plane of the first lens and the first lens; the focusing system comprises a galvanometer and a field lens arranged at the emergent end of the galvanometer, and the field lens is located between the front focal plane of the second lens and the second lens. Microstructure machining is carried out through the laser machining system, the problem that the machining amplitude of a traditional rotary cutting laser machining system is too small is effectively solved, the machining efficiency is greatly improved, the taper problem existing in laser machining is solved, and the machining quality is better guaranteed.

The invention provides a large-aperture optical system focal plane position measuring device and a measuring method, and solves the problems that a traditional method based on small detector scanning is difficult to fully cover and accurately butt joint a focal plane of a large-aperture optical system, so that local focusing is accurate but the whole is deviated; and the imaging performance of the large-aperture optical system is influenced. According to the invention, two functions of wave aberration detection and focal plane position measurement are integrated, one set of platform covers detection of two types of key optical parameters through switchable test path and detector configuration, the equipment utilization rate is improved, and the experiment cost is reduced. The six-degree-of-freedom adjusting table and the two-dimensional rotary table are used in cooperation, high-precision fine adjustment of the detected optical system in the space attitude and the position of the detector is achieved, searching and positioning of the focal plane can be rapidly completed, and the focusing efficiency is high.

The invention relates to the technical field of carbon sequestration geological engineering, and particularly discloses a CO2 water rock reaction induced permeability change evaluation method based on machine learning, which comprises the following steps: firstly, acquiring multi-focal plane image data of a reacted sample on a scanning electron microscope platform; automatically identifying a reaction area by using the trained U-Net instance model, and obtaining porosity and specific surface area information; corresponding calculation coefficients are automatically selected and matched based on the area-depth information of the corrosion holes, normalization calculation is carried out, and the permeability and the spatial distribution of the permeability are directly output. According to the method, destructive detection is not needed, quantitative characterization of the rock permeability physical property is achieved, the analysis accuracy and efficiency are remarkably improved, batch processing statistics is supported, and reliable data support is provided for carbon sequestration safety research and sequestration simulation.

The application provides a differential-based white light lensless single-frame weakly conjugate reconstruction method, which can realize weakly conjugate image reduction and improve single-frame imaging resolution in a white light lensless imaging system without using additional elements and complex algorithms. The method comprises the following steps: step one, obtaining spectral distribution information of a system light source by using a spectrometer and performing differential processing to obtain a reconstruction wavelength; step two, performing preprocessing on a collected single-frame image by using a hologram average value reduction method; step three, generating light intensity diagrams of different defocusing surfaces by using an angular spectrum propagation formula, and determining a defocusing distance range based on a definition discrimination factor; and step four, calculating differential distribution on different focal planes in the distance range obtained in step three based on numerical differentiation, and obtaining a final result by selection. The application can reduce the requirement of spectral width of a traditional lensless microscope, effectively reduce the cost of the system, improve the imaging resolution of the white light lensless microscope, and reduce the weakly conjugate image in the case of single-frame image collection.

This invention proposes a rapid verification method for the imaging performance of an aperture-coded infrared hyperspectral imaging system. This method uses an N×M filter array as the indoor imaging target. This array includes a central infrared window and multiple filters with different center wavelengths surrounding the infrared window, containing rich spectral feature information and geometric and spatial positional information of the filters. Utilizing a large-area blackbody and a collimator with a large focal plane, the system can capture all the necessary information from the filter array. After image reconstruction, using the data from the central window as a reference, the spectral transmittance curves of each filter can be calculated quickly and accurately, thereby verifying the system's ability to acquire spectral information. The system's ability to acquire geometric information can also be verified by observing the geometry and relative positions of the filters in each spectral channel. This invention provides an efficient, reliable, and rapid verification method for aperture-coded infrared hyperspectral imaging systems.

The invention relates to an ultra-large field-of-view dual-waveband aperture multiplexing type optical remote sensing camera, and belongs to the technical field of optical remote sensing. The optical remote sensing camera comprises a visible light optical system and an infrared optical system which share a primary mirror and a secondary mirror. The visible light optical system comprises a primary mirror, a secondary mirror, a visible light third mirror, a reflex mirror and a visible light focal plane in the light path direction; the infrared optical system comprises a primary mirror, a secondary mirror, an infrared third mirror and an infrared focal plane in the light path direction. According to the ultra-large field-of-view dual-waveband aperture multiplexing type optical remote sensing camera, all-weather ground investigation and surveying and mapping can be realized; primary mirrors and secondary mirrors of the visible light optical system and the infrared light optical system can be reused, the focal lengths of the two systems are different, the view fields of the visible light optical system and the infrared light optical system can be 20 degrees or above, and the ultrahigh energy utilization rate of the system is guaranteed through the total reflection mode. The camera is especially suitable for being used as a high-resolution camera of a wide-area detection, small-size and multi-spectrum integrated micro-nano satellite.

This invention proposes a device and method for suppressing zero-order diffraction spots of a spatial light modulator based on a coaxial optical system. The device comprises a laser coupler, a spatial light modulator, a movable coaxial optical system, and a subsequent imaging system, all coaxially connected via a cage-like fixing assembly. The coaxial optical system includes a first lens, a blocking assembly, and a second lens. The method includes the following steps: S1, a laser source is coupled through the laser coupler and then incident on the spatial light modulator for phase modulation, forming a composite reflected beam containing modulated and unmodulated light; S2, the composite reflected beam is introduced into the coaxial optical system for filtering; S3, the filtered beam is output to the subsequent imaging system to obtain a holographic image with suppressed bright spots. In this application, no modifications to the hardware structure of the spatial light modulator or the holographic algorithm are required. Zero-order diffraction suppression can be achieved by introducing a combination of focal plane separation and anti-pinhole blocking in the optical path, resulting in a simple and easy-to-implement structure.

The invention discloses a focal plane splicing structure, and relates to the technical field of space optical loads, the focal plane splicing structure comprises a focal plane frame, the focal plane frame is arranged to be in a hollow and one-way opening shape, and the two sides of the outer wall of the focal plane frame are symmetrically and fixedly connected with a left side focal plane group and a right side focal plane group through bolts respectively; the inner cavity wall of the focal plane frame is symmetrically and fixedly connected with a left side splicing mirror and a right side splicing mirror through bolts. According to the scheme, the structure is simple and compact, the weight is light, the device can better adapt to parts, a mixed splicing mode of optical and mechanical splicing is adopted at the same time, the device is innovative, the number of parts used in the scheme is small, the structure is simple, the reliability is high, the splicing use possibility of small-image-plane large-packaging detection is improved, and the detection efficiency is improved. And the scheme is optimal to use when the focal plane length of the detector is less than half of the packaging size.

The invention relates to the technical field of carbon sequestration and geological sequestration, and particularly discloses a slice CO2 water-rock reaction corrosion identification and pore evaluation method based on machine learning, and the method comprises the steps: firstly collecting multi-focal-plane images of the same view field of a slice before and after a reaction on a scanning electron microscope platform, and carrying out the registration; utilizing the trained U-Net instance segmentation model to automatically identify a corrosion area and extract a contour; generating a relative height map through a depth-of-field reconstruction and calibration technology in combination with a multi-focal-plane sequence, and obtaining the effective corrosion depth of each corrosion area; and carrying out volume normalization calculation based on area-depth information, and directly outputting porosity increment and spatial distribution thereof. According to the method, destructive detection is not needed, quantitative volume characterization of corrosion characteristics is achieved, the analysis efficiency and accuracy are remarkably improved, batch processing and mineral phase layering statistics are supported, and reliable data support is provided for CO2 geological storage reaction mechanism research and reservoir simulation.

The present application relates to optical detection device and method, specifically to a kind of snapshot point source encoding wave front detection system and method.For solving the deficiency of poor stability, complex system and delay in prior art by using phase recovery method to realize optical system aberration inversion, a kind of snapshot point source encoding wave front detection system of the present application, including first light source module, second light source module, first beam splitter, second beam splitter, microscopic objective, first plane mirror, first imaging lens, polarized camera, first light source module and second light source module are respectively used to provide first linearly polarized light and second linearly polarized light with orthogonal polarization direction, first linearly polarized light is focal plane parallel light, and second linearly polarized light is off-focus parallel light.Based on the above system, a kind of snapshot point source encoding wave front detection method of the present application includes system calibration, system adjustment, image acquisition and pre-processing and wave front inversion etc.

The application discloses a DMD digital lithography exposure system and a detection method thereof, and the system comprises a light source, an illumination system, a DMD, a projection system, a rear lens and a digital camera which are sequentially arranged, and the digital camera is installed on the back focal plane of the rear lens; the light emitted by the light source is irradiated on the DMD through the illumination system, the DMD is conjugated with the image plane to form an image, and the pattern of the DMD is imaged on the image plane through the projection system. The application can check the exposure system adjustment by observing the energy distribution, shape and size of the spectrum plane, and the spectrum plane of the exposure system is imaged on the focal plane of the rear lens and observed through the digital camera by reasonably selecting the light aperture and focal length of the rear lens according to the numerical aperture and focal length of the exposure system; when the focal length of the exposure system is unknown and only part of the spectrum plane can be observed, the pattern can be spliced by moving the digital camera, the structure is simple, the design is convenient, the spectrum plane can reflect more exposure details, and the matching problem of the illumination system and the projection system in the exposure system adjustment process can be better reflected.

The invention provides a bubble line defect detection method and related equipment, and relates to the technical field of transparent tubular defect detection. Multi-focal-plane scanning is performed by using the zoom image acquisition system to obtain sequence image sets with different focal lengths, so that the problem of blurring of bubble lines under a single focal plane is effectively solved. By introducing a rotating target detection model, linear defects at any inclination angle can be accurately identified, a rotating detection frame closely surrounding the defects is output, and the problem that a traditional horizontal detection frame introduces irrelevant backgrounds is avoided. Furthermore, in combination with a linear feature extraction algorithm, the position information, the weighted average slope and the total length of the linear defect can be accurately obtained from the region of interest, and high-speed, high-precision and full-automatic quantitative detection of the fine bubble line defect in the transparent tubular object to be detected is realized.

The utility model discloses a back alignment device with annular lighting, which is used for determining accurate positioning of a substrate placed on a loading part, a light hole is arranged on the loading part corresponding to a back alignment mark of the substrate, and the back alignment device comprises a back alignment device and a second lighting part, the second lighting part is arranged on the loading part and located below the light transmitting hole, a through hole is formed in the second lighting part, and the through hole and the light transmitting hole are coaxially arranged; the back alignment device comprises a lens cone, one end of the lens cone is connected with an imaging part, the other end of the lens cone is connected with a light path turning part, a first illumination part is further arranged on the lens cone and located between the imaging part and the light path turning part, and the light path turning part is located below a second illumination part. According to the utility model, a more uniform and stable illumination effect is achieved, and meanwhile, the requirements of alignment application scenes of base materials made of different materials are met; in addition, the time for debugging the focal plane is short, and the product yield is improved while the operation stability of the alignment device is improved.

The invention relates to the technical field of photoelectric measurement and calibration, in particular to a space-time calibration system and method for whole-board high-flux photoelectric joint detection. The system comprises a time alignment module used for accurately measuring and aligning an exposure window; the space alignment module is used for multi-level dynamic focal plane compensation; the self-adaptive light source shaping system is used for exciting light pixel-level uniformity; and the electrode artifact positioning and correcting system is used for eliminating the electrode optical artifacts. The invention provides a space-time calibration system and a space-time calibration method for whole-board high-flux photoelectric joint detection, which solve or at least alleviate the problems of time synchronization, focal plane drift, illumination uniformity, electrode artifacts and the like of whole-board high-flux photoelectric detection in the prior art, and realize comprehensive focal plane compensation and signal fidelity. Space-time precision and uniformity challenges are effectively solved, and an efficient and accurate technical basis is provided for biological medicine detection.

The application discloses an infrared micro scanning lens displacement testing system and method, which comprises the following steps: self-calibrating a lens to be tested; focusing an infrared sensor, and inputting a digital video image of the infrared sensor with the adjusted focal plane into a display control testing unit; selecting a target based on a target generating unit, and selecting a target frequency according to a set multiple of a sampling frequency; adjusting a differential black body temperature of the target generating unit to a non-saturation imaging interval of the infrared sensor, testing a first center position of target imaging of the lens to be tested; adjusting the lens to be tested to a position after micro scanning, and testing a second center position of target imaging of the lens to be tested again; and determining a micro displacement variation of an image plane of the lens to be tested before and after micro scanning based on the first center position and the second center position. The application provides a micro scanning system process detection means, and provides original data support and testing means for a system to obtain a high-quality super-resolution reconstructed image.

This invention provides an optomechanical interleaved splicing focal plane module, belonging to the field of optical inspection or optical image acquisition. The splicing focal plane module includes a focal plane module and an optical reflecting prism, with two focal plane modules arranged on both sides of the optical reflecting prism. The focal plane module includes multiple focal plate units arranged at a set interval on the module back plate. Each focal plate unit includes a focal plate, a data transmission unit, and a photosensitive chip unit. The splicing scheme of this application adopts an optomechanical interleaved splicing method, introducing an optical reflecting prism on the basis of the mechanical interleaving method, which can effectively shorten the splicing distance between the upper and lower chips. The splicing focal plane structure is symmetrically arranged on the left and right sides, with the two splicing modules being independent of each other, and each focal plane in each splicing module being independent of each other, which improves the range of splicing focal plane expansion, is easy to maintain, and can be widely applied in scenarios requiring optical image acquisition, such as semiconductor lithography, wafer optical inspection, photomask inspection, and overlay inspection.

The application discloses a dynamic large-area focusing and leveling mode of a photoetching machine. In the process that a mask table carries a mask from an initial position to an exposure alignment position, the mask table passes a first measuring area at a uniform speed, and global focusing and leveling work of the mask is completed in the first measuring area. In the process that a worktable carries a workpiece from an upper piece position to an exposure position, the worktable passes a second measuring area at a uniform speed, and focusing and leveling work of i exposure fields of the workpiece is completed in the second measuring area. The i exposure fields on the workpiece enter the exposure position one by one to perform fine focusing and leveling, so that each exposure field reaches the best focal plane of an objective lens and then performs exposure. The dynamic large-area focusing and leveling mode of the photoetching machine realizes dynamic focusing and leveling work in the process that the mask reaches the exposure alignment position and dynamic large-area focusing and leveling work in the process that the workpiece moves to the exposure position, shortens the overall focusing and leveling time before exposure, and improves exposure precision.

This invention belongs to the field of precision measurement technology, specifically a multi-focal-plane superimposed microscopic imaging simulation system based on inverse geometric ray tracing. The system includes: a system parameter configuration module for setting various parameters matching the actual multi-focal-plane superimposed microscopic measurement system, achieving precise alignment between the simulation system and the actual system; and a ray tracing module, based on an inverse geometric ray tracing algorithm, combining a lens model and Gaussian imaging formula to constrain the spatial conjugate relationship between the object and image, realizing sequential imaging simulation of a multi-focal-plane superimposed microscopic measurement system at a specific depth of field. This invention can efficiently and accurately simulate the sequential imaging process of multi-focal-plane superimposed microscopic measurements, providing scientific guidance for measurement algorithm verification and optical system hardware optimization, and broadening the application prospects of multi-focal-plane superimposed microscopic measurement technology.

The invention discloses a spliced infrared lens array imaging consistency test system and method, and mainly solves the technical problem that the multi-lens spliced imaging consistency cannot be directly tested in the prior art. The testing system comprises a light source assembly, a target wheel, a collimator, a lens supporting unit, a microscope, a detector, a plane mirror, a first displacement system and a processing unit. The light source assembly comprises a white light source and a blackbody light source. The target wheel is arranged at the light emitting end of the light source assembly and located on the focal plane of the collimator. The lens supporting unit comprises a second displacement system and a lens support installed on the second displacement system. The lens support is used for installing all to-be-tested lenses. The microscope and the detector are both mounted on the first displacement system, and a turntable is mounted at the bottom of the first displacement system; the detector is located at the image plane of the microscope and is connected with the processing unit. According to the invention, test reference errors caused by frequent lens replacement can be reduced, operation is simple, and measurement precision is high.

The invention belongs to the technical field of optical microscopic imaging, and discloses a microscopic imaging system and a stimulated radiation loss microscope. The microscopic imaging system comprises an illumination mechanism used for providing a first light beam and a second light beam which are coaxially incident; the phase modulation optical device comprises multiple layers of diffractive optical elements, and the multiple layers of diffractive optical elements are arranged at intervals in the transmission direction of the first light beam and the second light beam and used for conducting phase modulation and convergence on the first light beam and the second light beam in a matched mode. And the first light beam and the second light beam can form a first light spot and a second light spot at the focal plane of the stimulated radiation loss microscope, and the first light spot and the second light spot are in one-to-one correspondence and coincide in center. According to the technical scheme of the invention, the stimulated radiation depletion microscope can be normally matched with a commercial laser which has a large bandwidth and wavelength drift and is used as an excitation beam and a depletion beam.

The application discloses a camera automatic calibration method for deflection measurement, and belongs to the technical field of visual measurement, and comprises the following steps: fixing a soft rack on a focusing ring of a camera, and installing a motor with a gear on one side of the camera, so that the focusing ring can be controlled by the motor; adjusting a focal plane position in a preset motor rotor angle range and performing manual camera calibration; collecting training data; and establishing a mapping model of the motor rotor angle and camera internal parameters through Gaussian process regression, so that the camera internal parameters corresponding to different focal plane positions are directly obtained by inputting the rotor angle of the motor into the trained regression model, and manual calibration is no longer needed. The application can solve the problems of complicated operation and difficulty caused by the need to frequently adjust the focal plane position to ensure the precision in deflection measurement, thereby effectively improving the deflection measurement efficiency.

The invention discloses a satellite imaging jitter measurement system based on area array detection. The satellite imaging jitter measurement system comprises a camera management controller, a camera main body, an imaging / jitter measurement detector and a signal processor, wherein the camera management controller receives a primary power supply, a bus and a second pulse signal from a satellite, and manages and controls the camera main body, the imaging / jitter measurement detector and the signal processor; the camera main body is used for imaging a ground object to a rear focal plane of the camera main body; the imaging / jitter measurement detector is mounted on the rear focal plane of the camera main body, acquires an object optical image at the rear focal plane of the camera main body, converts the object optical image into an image electric signal through photoelectric conversion, and transmits the image electric signal to the signal processor; and the signal processor is used for receiving the image electric signal, processing the image electric signal and outputting the image electric signal to the data transmission compression encoder. The satellite imaging quality is effectively improved.

The invention relates to the field of space remote sensing, in particular to an optical splicing focal plane assembly applied to a space remote sensing camera, which comprises a focal plane substrate, and a direct detector assembly, a reflection detector assembly, an optical splicing focal plane reflector assembly, a module support assembly and a thermal control assembly which are respectively mounted on the focal plane substrate, wherein the direct radiation detector assembly is used for directly receiving optical signals and converting the optical signals into electric signals, the reflection detector assembly is used for receiving the optical signals reflected by the optical splicing focal plane reflector assembly and converting the optical signals into electric signals, and the module supporting assembly is used for supporting rear end modules of the direct radiation detector assembly and the reflection detector assembly. The thermal control assembly is used for guiding out heat generated by the direct radiation detector assembly, the reflection detector assembly and the module supporting assembly. The problem of thermal deformation caused by working temperature rise of the detector is effectively inhibited, and the imaging positioning precision of the space remote sensing camera is remarkably improved.

The invention discloses an omni-directional quantitative schlieren measurement device and method based on a 4f system and a radial gradual change filter, and belongs to the field of fluid experiment mechanics and optical precision measurement. The device is provided with a first lens, a linear radial gradual change filter, a second lens and a photosensitive element which are sequentially arranged along an optical path; parallel light emitted from the transparent medium field enters the first lens, and forms a Fourier spectrum surface on a rear focal plane after Fourier transform of the first lens; the filter plate is accurately arranged at the Fourier spectrum surface, and the transmissivity of the filter plate is linearly changed along a set direction; and the frequency spectrum light after intensity modulation is subjected to inverse Fourier transform by the second lens, and finally the light intensity distribution of the image surface is acquired by the photosensitive element. According to the invention, the refractive index, density and pressure distribution of the transparent medium flow field can be rapidly, accurately and quantitatively measured.