The invention discloses a regenerated
wafer scanning method, and relates to the technical field of
semiconductor wafer scanning, and the method comprises the steps: obtaining the identification information of a target
wafer transmission box when the target wafer transmission box is detected; detecting the in-place state of the wafer through a light curtain sensor, and generating a slot mapping table; controlling a preset micro-rotation mechanism to carry out micro-rotation on the wafer at each slot position within a set angle range, and collecting an annular
structure light image; constructing polar coordinates and calculating a first attitude angle of each wafer; driving a micro-rotation mechanism to adjust the wafer to a preset reference angle according to the first attitude angle to obtain a standard attitude wafer; the mechanical arms are driven to be sequentially conveyed to a scanning
station; respectively controlling a rotary positioning module to rotate in a first angle range and a second angle range, and acquiring a coded image and a
spectral image; the wafer code is analyzed, confidence
verification is carried out, and a wafer
process type label is identified; and warehousing and recording the wafer codes, the process labels and the transmission box identification information. According to the invention, the
storage management efficiency of the regenerated wafer can be effectively improved.