50 results about "Waveguide grating" patented technology

The present application relates to the technical field of photolithography process, and more particularly to a kind of periodical scanning half-period optical waveguide grating preparation method, adopts multi-dimensional defect feature extraction and dynamic compensation algorithm, combined with the space-time synchronous modulation technology of light intensity distribution, significantly improves the defect masking efficiency;Through the multi-parameter collaborative optimization strategy under the closed-loop control architecture, the self-adaptive evolution mechanism of process parameters is formed, and the performance stability of grating structure under complex working conditions is guaranteed.The technical scheme innovates the whole process from light field modeling, motion control to defect repair, solves the common technical problems of grating period distortion and defect residue in the existing process, and provides a mass production solution for high-reliability grating devices for dense wavelength division multiplexing systems.

The invention discloses a topology protection Hong-Ou-Mandel interferometer based on a pi phase regulation and control grating, and belongs to the technical field of integrated photonics and quantum optics. The interferometer comprises a first waveguide and a second waveguide which are arranged side by side on a silicon dioxide substrate, and each waveguide comprises an input waveguide, a grating waveguide and an output waveguide. The two grating waveguides are provided with periodic notch grooves, and the positions of the notch grooves are symmetrically distributed about a waveguide center connecting line, so that a pi coupling phase difference is introduced between coupling in the two waveguides. The TE-TM coupling strength in the waveguides is enabled to be equal to the TE-TE coupling strength and the TM-TM coupling strength between the waveguides by adjusting the waveguide distance and the notch groove size, and the system enters a topological non-trivialness phase when delta phi is equal to pi, so that a compact topological boundary mode is formed. The structure provides an evolution path protected by topology for two-photon HOM interference, realizes interference visibility close to a theoretical limit, shows strong robustness for manufacturing errors and propagation distance changes, is obviously reduced in device size, and is suitable for high-density integrated quantum photon chips.

an optical intensity modulation device (100) comprising: an optical modulator (102) operative to modulate a continuous wave optical carrier signal at a carrier wavelength to generate one or more sidebands on the optical carrier signal; a radio frequency (RF) signal generator (104) operative to provide an RF drive signal to the optical modulator; a first optical waveguide grating (108) having a center reflection wavelength corresponding to the sidebands; and an optical circulator (106) configured to direct the optical carrier signal and the one or more sidebands into the first optical waveguide grating and to direct a reflected optical signal from the first optical waveguide grating towards an output to form an output optical signal, wherein the RF signal generator is operative to switch the drive signal on and off to form an intensity modulated output optical signal.

The application discloses a dense optical fiber coding method based on an optical switch and a weak reflectivity grating string, and comprises the following steps: 1, a light source module emits a C-band pulse signal, and the signal contains optical pulses with different central wavelengths and overlapping in a time domain; 2, a weak reflectivity grating string is used to code each node to obtain different wavelength pulse combination types, and the coding signals of different coding nodes on the same link are spaced apart in the time domain; 3, the coding signal is injected into an array waveguide grating through an optical circulator, and is decomposed into more than one single-wavelength pulse signal; 4, a detector array and a collection card are used to carry out photoelectric conversion on the coding pulse signal, and the collected signal is output to an FPGA and an upper computer for processing and display; the problems that the prior art cannot be applied to realize real-time coding of a large-scale and high-reliability all-optical network and that the real-time coding scale is limited and cannot meet the use requirements of a large-scale network are solved.

Systems and methods for waveguide gratings with adhesive for waveguide-based displays. The waveguide displays as described herein comprise an adhesive material configured to protect the grating structures from contaminants. The waveguide display as described herein can be manufactured with an inkjet printer.

A coupling device for a multi-channel optical fiber array and a multi-layer arrayed waveguide grating, includes: a first clamping component and a second clamping component. A plurality of optical fibers that are spaced apart in an X-axis direction are connected on the first clamping component, each optical fiber extends in a Y-axis direction, and a plurality of arrayed waveguide gratings that are spaced apart in the X-axis direction are connected on the second clamping component. Each arrayed waveguide grating extends in the Y-axis direction, the optical fibers and the arrayed waveguide gratings are disposed in a one-to-one coaxial mapping manner, each arrayed waveguide grating is right-trapezoid-shaped, and beveled surfaces of any two arrayed waveguide gratings are located on a same plane. A wavelength division multiplexing technology is combined with a multi-channel parallel transmission technology.

The invention discloses a waveguide grating filter based on an optical phase change material and a filtering tuning method, the waveguide grating filter comprises a substrate, a buffer layer and a phase change material layer, a waveguide grating structure is defined in the phase change material layer through an external energy field, and the waveguide grating structure comprises a core waveguide and periodic lateral gratings arranged on the two sides of the core waveguide. According to the invention, the reversible phase change characteristic of a phase change material is utilized, and a tuning method of writing-erasing-rewriting is adopted: laser is selectively irradiated on a phase change material layer to form a crystalline waveguide grating structure; the crystalline region is recovered to be in an amorphous state through heating or laser scanning, so that erasing is realized; and flexible regulation and control of the spectral response of the filter are realized by writing structural parameters such as the tooth width, the duty ratio and the core waveguide size of the dynamic tuning grating again through laser. The filter works in a communication wave band of 1.5-1.6 microns, and has the outstanding advantages of reconfigurable structure, non-volatile property, flexible tuning, simple manufacturing and the like.

The application discloses a multi-dimensional multiplexing modulation integrated photonic circuit of thin film lithium niobate, which comprises eight MRR type modulators, eight wavelength multiplexers based on reflective Bragg gratings, two polarization rotation beam splitters, a tapered waveguide based on a subwavelength waveguide grating and a double-polarization first-order mode multiplexer / demultiplexer. The photonic integrated circuit modulates input wavelength signals of λ0 and λ1, then wavelength multiplexes the signals by using reflective Bragg gratings with different working wavelengths, and then performs mode-polarization multiplexing, so as to realize the functions of wavelength, mode and polarization mixed multiplexing and signal modulation. The multi-dimensional multiplexing modulation integrated photonic circuit has the expandable characteristics of channels, and is expected to be used in optical interconnection to realize super-large capacity data transmission in an optical network.

The invention provides a waveguide active integrated device. The waveguide active integrated device comprises a substrate, a waveguide layer, a modulator, a detector, a first reflector and a second reflector, the substrate comprises a lower cladding, a waveguide layer is arranged on the lower cladding, the waveguide layer comprises a silicon waveguide, and the silicon waveguide comprises a waveguide grating; the modulator and the detector are respectively arranged on the silicon waveguide; the first reflector is arranged in the lower cladding at the lower part of the waveguide grating, and the first reflector and the waveguide grating form a grating coupling structure; and the second reflector is arranged in the middle of the silicon waveguide on one side of the detector and is used for reflecting the signal light into the detector. The invention also provides a preparation method of the waveguide active integrated device. According to the invention, the reflector is prepared at the lower part of the waveguide grating to form a grating coupling structure, so that the intensity of incident light can be effectively improved; furthermore, a modulator and a detector are integrated in the device, and a reflector is arranged close to the detector, so that the detection efficiency of the detector can be further improved.

The grating coupler (1) includes a first optical waveguide chip (20), a second optical waveguide chip (30), and a transparent component (40). The first optical waveguide chip (20) includes a first substrate (21), a first waveguide grating (25), and a first chip end face (20c). The second optical waveguide chip (30) includes a second waveguide grating (35) and a second chip top face (30a). The optical path of light in the wavelength range used by the grating coupler (1) is filled by the transparent component (40) between the first light incident and exit surface (20i) of the first optical waveguide chip (20) and the second light incident and exit surface (30i) of the second optical waveguide chip (30).

The application discloses an FP cavity electro-optic modulator array which can be used for a multi-wavelength channel transmitter. The modulator array is mainly formed by sequentially connecting N modulator units; a single modulator unit comprises a 2*2 Fabry-Perot cavity structure, a substrate and a pair of modulation electrodes, the 2*2 Fabry-Perot cavity structure and the modulation electrodes are arranged on the upper surface of the substrate, the two modulation electrodes are symmetrically distributed on the two sides of the 2*2 Fabry-Perot cavity structure, the multiplexing end of a first mode demultiplexer is connected with the input end of an anti-symmetrical multimode waveguide grating, the two anti-symmetrical multimode waveguide gratings are connected through an intermediate waveguide, and the output end of the other anti-symmetrical multimode waveguide grating is connected with the multiplexing end of the first mode demultiplexer. The application has the advantages of compact structure, excellent electro-optic modulation performance of the modulator unit, large modulation bandwidth, flexible cascade mode, can be used for the multi-wavelength channel transmitter, and is suitable for being applied to large-capacity optical communication, optical calculation and the like.

A chip structure and a semiconductor package including the same are provided. The chip structure comprises: a redistribution structure; an electronic integrated circuit chip on an upper surface of the redistribution structure; and a photonic integrated circuit chip including: a first substrate on an upper surface of the electronic integrated circuit chip and including an active surface and a non-active surface opposite the active surface; a first reflector on the non-active surface of the first substrate; and a first wiring structure on the active surface of the first substrate, where the photonic integrated circuit chip further includes a waveguide, a grating coupler, and a second reflector, and the patterned surface of the grating coupler faces the redistribution structure.

The present application relates to an array waveguide grating. The array waveguide grating comprises an input coupler, a waveguide array and an output coupler, wherein the waveguide array is coupled between the input coupler and the output coupler, and the waveguide array comprises a plurality of waveguides; the input coupler is used for allocating received optical signals to the plurality of waveguides, and the waveguides are used for guiding the allocated optical signals; and the output coupler is used for coupling the optical signals, which are transmitted on the plurality of waveguides. The input coupler has a first refractive index, each waveguide has a second refractive index, and the output coupler has a third refractive index, wherein the first refractive index and the third refractive index are both greater than the second refractive index. The array waveguide grating can solve both the problem of an insertion loss of a star coupler being relatively high and the problem of a phase error being relatively large due to the roughness of a side wall of a waveguide, and insertion loss of the array waveguide grating is relatively low.

The utility model discloses a passive large-view-field silicon-based optical phased array which comprises a silicon substrate, a silicon dioxide buried oxide layer and a silicon nitride layer. The silicon nitride layer comprises an inverted-cone-shaped coupling waveguide, an optical beam splitting module, a phase delay module and a waveguide grating antenna module, the inverted-cone-shaped coupling waveguide is used for coupling input light into the optical beam splitting module, and the optical beam splitting module is used for equally dividing an optical signal generated by the input light into N paths of sub optical signals with equal power, the phase delay module comprises an n-shaped waveguide array and a sine-type waveguide array, the n-shaped waveguide array is used for carrying out phase regulation and control on each path of sub-optical signals, the sine-type waveguide array is used for reducing waveguide spacing, and the waveguide grating antenna module is used for radiating light energy output by the sine-type waveguide array. According to the optical phased array, the phase does not need to be changed through electric tuning or thermal tuning, and meanwhile large-view-field scanning of the optical phased array can be achieved after the optical phased array passes through the sinusoidal waveguide array arranged compactly.

Optical intensity modulation apparatus including: an optical modulator operative to modulate a continuous-wave optical carrier signal at a carrier wavelength to generate at least one sideband on the optical carrier signal; a radio frequency, RF, signal generator operative to provide an RF drive signal to the optical modulator; a first optical waveguide grating having a central reflection wavelength corresponding to a sideband; and optical circulator configured to direct the optical carrier signal and the at least one sideband to the first optical waveguide grating and to direct a reflected optical signal from the first optical waveguide grating towards an output to form an output optical signal. The RF signal generator is operative to switch the drive signal on and off so as to form an intensity modulated output optical signal.

A holographic optical waveguide and a sight, relating to the technical field of optics. A hologram and a holographic waveguide grating are integrated on one element, and optical waveguide transmission characteristics and grating diffraction characteristics are used to achieve an aiming function by means of one optical element, thereby improving the assembly precision of the holographic optical waveguide, reducing the assembly difficulty, and improving the assembly yield. An optical waveguide is added to a conventional hologram, waveguide light transmission characteristics are used to replace conventional geometric optics, and light transmission is implemented by means of refraction and reflection by the optical element, thereby achieving a smaller volume and higher precision. The optical waveguide is provided with an in-coupling waveguide holographic grating and an out-coupling waveguide holographic grating, so that chromatic aberration correction can be performed on a wavelength, and therefore the imaging effect is better than that of conventional monolithic gratings. In addition, a light beam is totally reflected in a substrate and transmitted to the out-coupling waveguide holographic grating, thereby reducing transmission, reducing energy loss, improving the light effect, enabling human eyes to clearly observe reticle information on the hologram, and improving user experience.

Gradient encapsulation of waveguide outcoupler gratings to control diffraction efficiency and directionality.SOLUTION: The device includes a first grating formed over a substrate, the first grating having a plurality of first structures extending away from the substrate, the first grating corresponding to an out-coupler. The device includes a first encapsulant disposed in one or more gaps formed between adjacent first structures, wherein a fill ratio of the first encapsulant decreases along the first grating. A method of manufacturing the device is also described.SELECTED DRAWING: Figure 1B

The invention discloses an angle-insensitive optical light trapping filter based on local guided-mode resonance, which is characterized in that a metal-medium composite planar waveguide grating method is adopted, a metal grating structure is embedded into a multilayer film, and when a near-infrared band is incident to the thickness-constrained multilayer film structure at an angle of 0-70 degrees, the metal grating structure is embedded into the multilayer film structure. Under the periodic constraint of the metal grating, a localized guided-mode resonance effect is generated, under the periodic constraint of the metal grating, a strong light field limitation and coupling effect is generated, a spectral response curve with a sharp stop-band characteristic is formed, the thickness of the waveguide layer is adjusted, and tuning of the working wavelength is achieved. Compared with the prior art, the device has a localized guided-mode resonance effect, generates strong light field limitation and coupling effect under periodic constraint of the metal grating, forms a spectral response curve with sharp stop-band characteristics, and greatly inhibits the angle sensitivity problem caused by transverse wave vector change. The method can be widely applied to the fields of optical communication, spectral analysis, imaging systems and the like, and improves the reliability and application angle range of the optical system.

The application discloses a waveguide grating device, which comprises a substrate and a plurality of dielectric layers formed on the substrate, the plurality of dielectric layers comprising a waveguide core layer, a grating being formed in the waveguide core layer, wherein the substrate is completely etched at a position directly below the grating to expose the dielectric layers, so that the waveguide grating device forms radiation channels on both sides of the grating. The application also discloses an optical waveguide phased array and an optical scanning device with the waveguide grating device. According to the embodiment of the application, radiation on the grating substrate side is utilized to form a waveguide grating with bidirectional radiation, energy utilization efficiency is improved, and noise is inhibited.

The application discloses a programmable integrated chip and a control method for a high-speed communication network. The chip comprises a fiber coupler array, a plurality of electro-optical modulators, a plurality of optical switches, a plurality of cross waveguides and an array waveguide grating. The fiber coupler array comprises a plurality of first fiber couplers, a plurality of second fiber couplers and a third fiber coupler. Each output end of the first fiber couplers is connected to each input end of the plurality of electro-optical modulators in one-to-one correspondence. Each output end of the plurality of electro-optical modulators is connected to each input end of the plurality of optical switches in one-to-one correspondence. Each optical switch comprises two output ends. One output end is connected to the input end of the second fiber coupler directly or through a cross waveguide. The other output end is connected to the input end of the array waveguide grating directly or through a cross waveguide. The output end of the array waveguide grating is connected to the input end of the third fiber coupler. The chip can be applied to both a multi-wavelength transmission scene and a single-wavelength transmission scene.

The application discloses a long-period waveguide grating type sensor, which comprises a glass substrate, a linearly-extended waveguide core layer arranged in the glass substrate and a cladding layer arranged around the waveguide core layer; the waveguide core layer comprises a first cylindrical core layer, a long-period waveguide grating core layer and a second cylindrical core layer arranged in sequence from front to back, and the radius of the long-period waveguide grating core layer changes periodically in a sinusoidal mode from front to back; the first cylindrical core layer is an optical signal input end, and the second cylindrical core layer is an optical signal output end. The high-sensitivity response of the characteristic absorption peak wavelength of the transmission spectrum wave trough to the external environmental refractive index disturbance is utilized to realize high-sensitivity and rapid measurement of the gas, and the manufacturing method is simple and the cost is low.

A kind of large bandwidth mode spot converter based on silicon dioxide optical waveguide grating type trident structure belongs to integrated optoelectronics technical field.From bottom to top, it is composed of substrate layer, lower cladding layer, core layer waveguide and upper cladding layer, lower cladding layer is located on substrate layer, core layer waveguide and upper cladding layer are located on lower cladding layer and core layer waveguide is covered by upper cladding layer;Core layer waveguide is composed of grating type trident input waveguide (composed of Core1, Core2 and Core3) and output waveguide Core4 of straight waveguide structure, Core1 and Core3 structure in grating type trident waveguide are completely same, composed of N similar small taper waveguide and uniformly arranged, Core2 is composed of N similar small inverted taper waveguide and uniformly arranged;Mode spot converter prepared by the application has the characteristics of high coupling efficiency, large bandwidth, compact structure, easy packaging and low process complexity, and has wide application prospect.

Disclosed in the present invention is a calibration-free non-volatile integrated silicon-based optical switch. A mode (de)multiplexer is connected to two ends of a multi-mode waveguide grating by means of adiabatic tapered waveguides, a phase-change material is arranged on and covers the multi-mode waveguide grating, and external excitation is applied to the phase change material; by means of changing the pulse power and pulse width of the external excitation, the crystalline state of the phase change material is changed in a non-volatile manner, such that the wavelength range of the multi-mode waveguide grating that meets the Bragg condition is changed, thereby changing the transmission and reflection characteristics of a signal with a specific wavelength in a multi-mode waveguide grating region; furthermore, the mode (de)multiplexer is used to realize switching between different output ports, thereby realizing the function of a non-volatile optical switch. The present invention can work in a relatively wide wavelength range, and does not need to be calibrated since the pulse power and pulse width of the external excitation required for changing the crystalline state of the phase change material float within a large range, and therefore the problem of existing silicon-based optical switches having a high power consumption and all requiring calibration before use is solved, and the present invention has broad application prospects.

This invention belongs to the field of semiconductor laser beam emitters, and particularly relates to an external cavity feedback type narrow linewidth semiconductor laser. The external cavity feedback type narrow linewidth semiconductor laser includes a semiconductor gain chip and a waveguide grating serving as an external cavity mode selector. The waveguide grating is constructed by alternating stacks of high-refractive-index thin films and low-refractive-index thin films to form a multilayer waveguide with a high refractive index difference, and the grating is embedded within it. This design utilizes the strong optical field confinement capability of the multilayer waveguide and the narrowband filtering characteristics of the grating to achieve extremely narrow linewidth, high spectral stability, and precise wavelength control of the laser beam output. This invention is particularly suitable for high-end applications such as space optical communication and laser beam radar, which have stringent requirements for light source performance and environmental adaptability.

The application provides a diffraction grating waveguide grating region visual difference quantitative evaluation method, comprising: acquiring a waveguide appearance image of a diffraction grating waveguide to be measured; performing region division on the waveguide appearance image of the diffraction grating waveguide to be measured to obtain a grating region and a non-grating region; constructing a grating structure visual perception quantitative evaluation index of the diffraction grating waveguide to be measured based on the grating region and the non-grating region; and determining the visible degree of the grating structure of the diffraction grating waveguide to be measured according to the grating structure visual perception quantitative evaluation index of the diffraction grating waveguide to be measured. The diffraction grating waveguide grating region visual difference quantitative evaluation method provided by the application can quantitatively evaluate the visual difference between the grating region and the non-grating region of the diffraction grating waveguide in the design, process optimization and quality detection process of the diffraction grating waveguide, thereby improving the visual naturalness of observation of the outside world by the user through the diffraction grating waveguide and improving the wearing comfort of the user.

A light emitter apparatus comprising: a plurality of point emitters arranged in an array, each of the plurality of point emitters comprising: a grating coupler configured to receive light along a transmission direction and to emit a respective light beam to an outer surface of the array for emission in an emission direction; each grating coupler comprises: a plurality of periodically spaced first optical waveguide grating structures forming a directional grating layer for emitting light to the outer surface of the array; and a plurality of periodically spaced second optical waveguide grating structures forming an outer grating layer spaced apart from the directional grating layer in a lateral direction toward the outer surface of the array.

The invention discloses a three-channel wavelength division multiplexer based on thin film lithium niobate and a wavelength division multiplexing method, the device comprises three stages of filters which are connected in sequence, and each filter comprises a multi-mode combined waveguide, a bent gradient waveguide, a multi-mode waveguide grating and a straight waveguide, the multimode waveguide grating adopts a silicon Bragg grating heterogeneous integrated lithium niobate waveguide structure, the device receives multi-wavelength fundamental mode optical signals, filtering is completed, conversion from TE0 to three high-order modes is achieved, and optical signals with different wavelengths are sequentially obtained in three channels. The wavelength division multiplexer has the advantages of high extinction ratio, low channel crosstalk and small channel space.

This invention discloses a semiconductor laser device based on a tilted grating and its fabrication method. In the fabrication of the semiconductor laser's optical waveguide grating, the tilt angle of the waveguide grating is controlled by adjusting the waveguide tilt angle, forming a tilted grating composed of a tilted seed grating and a tilted sampling structure. A phase-shifting structure is introduced into the tilted grating, and phase matching of the laser resonator cavity at the phase-shifting structure is achieved through microstructure quasi-phase matching technology. Single-wavelength lasing output of a laser at a specific wavelength is formed by energizing a single electrode. This invention provides a laser source with precise wavelength control, simple structure, low power consumption, and high integration.

The application discloses a kind of computing spectrometer and spectral reconstruction method based on random multimode waveguide grating.It includes silicon substrate layer, silicon dioxide buried oxygen layer, lithium niobate waveguide layer, silicon dioxide coating layer and interdigital electrode arranged in turn from bottom to top.The lithium niobate waveguide layer is formed with mode multiplexer, multimode waveguide spiral and multimode waveguide grating, the mode multiplexer and multimode waveguide spiral are communicated, the multimode waveguide spiral includes at least one multimode straight waveguide, and the multimode straight waveguide is provided with a plurality of non-periodically distributed multimode waveguide gratings, each multimode waveguide grating unit adopts Bragg grating structure, and each multimode waveguide grating unit includes two groups of grating tooth structures located on both sides of the multimode straight waveguide.The application can simplify the electrical control logic, and the unordered resonance of different modes in the spiral can provide high spectral reconstruction resolution, and lithium niobate electro-optic modulation can realize fast and low-power measurement channel scanning.

In a light emitter device, when point emitters are placed on a focal plane of a lens system, each point emitter will point to a specific free space angle depending on its position relative to a longitudinal center axis of the lens system. A plurality of point emitters is arranged in an array comprising a plurality of rows of point emitters and a plurality of columns of point emitters. Each of the plurality of point emitters comprises a grating coupler configured to emit a respective light beam in a respective transmission direction. Each grating coupler comprises a plurality of periodically spaced first optical waveguide grating structures, at least some of the optical waveguide grating structures comprising a notch, whereby a first portion of each optical waveguide grating structure extends to a different height compared to a second portion.