The invention discloses a non-uniform
metal polarization
grating structure based on equal spacing and a preparation method thereof, and belongs to the field of
infrared polarization integrated detection.The preparation method comprises the following steps that firstly, a layer of
metal film is evaporated on a super-flat double-polished
silicon substrate through the
electron beam
evaporation technology, then a layer of
dielectric film is grown on the super-flat double-polished
silicon substrate through PECVD to serve as a
hard mask, and then the super-flat double-polished
silicon substrate is formed; and then, non-uniform
grating patterns with equal intervals and unequal line widths are photoetched by adopting a stepping
photolithography technology, the
dielectric layer and the
metal Al layer are etched by utilizing
fluorine-based
plasma and
chlorine-based
plasma respectively, and finally, the preparation of the non-uniform metal polarization
grating is completed. According to the invention, by improving the grating structure, on the premise of not additionally arranging special process steps, the consistency and
controllability of the
exposure energy and the
etching rate are realized, the problems of complicated
exposure process, non-uniform
etching rate and the like of the traditional non-uniform grating are successfully solved, and the quality and the performance of the non-uniform grating are remarkably improved.