The invention discloses an optical element surface measuring device and method. The device comprises a
light source module, a motion table, a
laser energy monitoring module, a photoelectric detection module, a space triangular focus positioning module, a projection module, a
binocular vision module and a
processing module. According to the technical scheme, the
laser energy monitoring module records
laser pulse energy in real time, the photoelectric detection module accurately measures the
radius of a focusing
light spot, the space triangular focus positioning module accurately positions the focus position, and the projection module projects interference fringes of a periodic structure to the surface of the optical element to be measured. The
binocular vision module is used for capturing interference fringe changes, and micro-deformation or damage is judged by combining a phase shift and unwrapping
algorithm, so that three-dimensional reconstruction of the micro-deformation and damage morphology of the surface of the optical element is realized. The real-time online measurement of the micro-deformation and the damage threshold of the optical element is realized, and the damage threshold evaluation process is optimized. The method has the advantages of high precision, high real-time performance, high
automation degree, wide application range and the like.