The invention discloses an
electron beam focusing parameter adaptive calibration method based on regional recursive splitting and analytic field guidance, and belongs to the technical field of
electron beam equipment precision control. In order to solve the problems of low full-field uniform sampling efficiency and poor sparse sampling precision in large-view-field
electron beam
processing, the invention provides a dual-drive adaptive sampling strategy. According to the method, a theoretical curvature
distribution diagram is constructed by using an electron optical analytical field to serve as prior guidance, and a
distortion sensitive area in a view field is identified according to a multi-dimensional
feature fusion criterion of physical prior, differential field nonlinearity and an actual measurement form; a recursive regional geometric
subdivision structure is adopted to perform recursive splitting and encrypted sampling on the sensitive region, and narrow window rapid search is realized in combination with a parameter inheritance strategy; and finally, reconstructing a full-field high-precision model based on a scattered data interpolation
algorithm. According to the method, sparse sampling can be automatically carried out in the smooth field curvature change region,
encryption sampling can be carried out in the severe
distortion region, and the calibration efficiency is remarkably improved on the premise of ensuring high focusing precision.