17results about "Gamma-ray/x-ray microscopes" patented technology

To remove all unwanted heat from a source coil.SOLUTION: An electron beam B is typically dynamically steered on its path to a target 500 after generation. The steering is performed by one or more source coils 132N and 132S. These coils create a magnetic field outside a vacuum vessel 112 and allow air / water / oil cooling to remove unwanted heat. The magnetic field is then picked up within the vacuum vessel with a pole piece and directed toward a region where the magnetic field is needed to steer the electron beam.SELECTED DRAWING: Figure 1

A multi-aperture array for manipulating a plurality of charged first single-particle beams, comprising: a base body with a plurality of apertures, wherein, during operation of the multi-aperture array, one of the charged first single-particle beams passes through each aperture; at least a plurality of first electrodes, wherein one of the first electrodes is arranged at each of the apertures to individually influence the first single-particle beam passing through the aperture, and wherein each of the first electrodes is connected to a control unit; wherein the base body has a first depth TG in a z-direction along which the first apertures extend through the base body; wherein the first electrodes each have a depth TE in the z-direction that is less than the depth TG, i.e., TE < TG;wherein the first electrodes are each embedded in the base body such that they are exposed in an area adjacent to and forming the aperture, and are otherwise embedded directly in the base body and thus without an electrical insulating layer; and wherein the material of the base body is glass or consists of glass.

The invention relates to an imaging method and an imaging system for carrying out this method. The object of the invention is to provide an improved multispectral ptychographic imaging method and a corresponding system. To this end, the imaging method of the invention comprises the following process steps: generation of at least partially coherent electromagnetic radiation (3) containing spectral components at at least two different wavelengths; spatial separation of the spectral components of the electromagnetic radiation, in particular by angular dispersion; generation of structured illumination beams (9) by selecting one of the spectral components at a time using a structured aperture (8a, 8b, 8c); and movement of an object (6) in a direction transverse to the path of the illumination beams (9) into a plurality of positions.Detecting an intensity pattern for each of the positions, wherein the intensity patterns are generated by scattering and / or diffraction of the illumination rays (9) at the object (6) in a detection plane; and reconstructing an image of the object (6) from the detected intensity patterns, wherein an image of the object (6) is calculated for each of the at least two wavelengths using a ptychographic reconstruction algorithm.

[Problem statement] Provision of a technology relating to a window holding section, an X-ray generator, an X-ray analyzer, a control method for an X-ray generator and a control system for an X-ray generator, wherein the technology is such that it is not necessary to provide an X-ray observation section in a vacuum area and that it is not necessary to use any part of the X-rays used for the measurement of the X-ray analysis. [SOLUTION] According to one embodiment of the present invention, an X-ray generator (20) is provided. The X-ray generator (20) is equipped with an X-ray generating unit (203a) and an X-ray transmission window. The X-ray generating unit (203a) is configured to generate X-rays by receiving an electron beam from an external source. The X-ray transmission window comprises a first X-ray transmission window (204a) and a second X-ray transmission window (205a). The first X-ray transmission window (204a) is configured to transmit first X-rays (L1) directed in a first direction (D1) among the X-rays. The first X-rays (L1) fall onto an X-ray observation section (21) that is arranged on the optical axis of the first X-rays and that can observe the X-ray focal point of the X-rays.The second X-ray transmission window (205a) is arranged such that it transmits second X-rays (L2) from the X-rays, which are oriented in a second direction (D2) that differs from the first direction (D1).

A deep learning based method and system to correct for detector defects in X-ray microscopy systems. Normal geometry projections and shifted geometry projections are collected for a given detector, creating a mapping between defective region and healthy region and a machine learning system is trained using these projections. The trained neural network system is then used to correct tomographic projection datasets improving the image quality of resultant reconstructed tomographic image volume sets.

An X-ray imaging system is disclosed, comprising an X-ray source; a sample position; a detector arranged to detect X-ray radiation downstream of said sample position; wherein said X-ray source comprises an electron source arranged to provide an electron beam; a target arranged to produce X-ray radiation upon impact by said electron beam, the target comprising a substrate and a target layer at least partly covering said substrate, wherein said target layer is arranged to produce X-ray radiation upon impact by said electron beam; means for directing the electron beam to a first position on said target layer and a second position selected from a position on said target at which the electron beam impacts directly upon the substrate and a position on an electron beam dump arranged so that substantially no X-ray radiation created by interaction between the electron beam and the electron beam dump reaches the detector; a controller arranged to record, using said detector, a first image with the electron beam directed to said first position, and a second image with the electron beam directed to said second position, and generate a difference image between the first image and the second image. A method for X-ray imaging is also disclosed.

The invention relates to an X-ray optical unit (1) for focusing X-ray radiation (300) into a focal plane (100), comprising at least one diffractive X-ray lens (2), a diffraction order filter aperture (3), OSA, wherein the diffractive X-ray lens (2) and the diffraction order filter aperture (3) are arranged along an optical axis (200) of the X-ray optical unit (1), wherein the X-ray optical unit (1) has a holding device (12) running along the optical axis (200), and a first shielding device (11) running along the optical axis (200), wherein the holding device (12) is connected to the diffractive X-ray lens (2), wherein the first shielding device (11) is designed as a first shielding device (11) surrounding the optical axis (200), and is connected to the diffraction order filter aperture (3) and thus delimits a first volume (V1) in which both the holding device (12) and the diffractive X-ray lens (2) are circumferentially shielded such that electrons (e-) generated by X-ray radiation (300) in the first volume (V1) are shielded by way of the first shielding device (11).

An X-ray microscopy system and method for phase contrast and dark-field imaging are provided, utilizing a partially coherent X-ray beam generated by a micro-focused X-ray source with a small focal spot size. A spatial beam modulator such as a random phase object, e.g., silicon carbide sandpaper, is placed between the source and the sample to create a random granular speckle pattern. The system employs a high-resolution detection setup with a thin scintillator and a spatially resolved detector with small pixel size to capture shifts in the speckle pattern caused by the sample's refraction effects. By analyzing these shifts, the system computes phase gradients and integrates them to produce detailed phase images, enhancing contrast in low-atomic-number materials like soft tissues and polymers. The compact design reduces source-to-detector distance, improving flux efficiency and system throughput while enabling high-resolution, three-dimensional tomographic imaging.

The invention belongs to the field of microscopic imaging, and relates to a response energy spectrum self-adaptive quasi-single-energy KB microscopic imaging device and a response energy spectrum self-adaptive quasi-single-energy KB microscopic imaging method. The front reflector is plated with a single-layer film and is used for focusing X-rays emitted by an object point in a single direction and then reflecting the X-rays to the rear reflector; the single-layer film has the characteristics of wide spectrum response and wide angle bandwidth; the rear reflecting mirror is plated with a periodic multilayer film, wide-spectrum X-rays emitted by the front reflecting mirror are incident to the rear reflecting mirror, X-rays matched with response energy points are screened out through the periodic multilayer film, and then the X-rays are focused on an imaging surface; the response energy point adaptively changes along with the view field position of the object point, and the response efficiency distribution in the view field is flat; therefore, when the KB microscope is used for X-ray imaging in a laser inertial confinement fusion experiment, the drifting influence of the position of an imaging object is smaller, and the problems that the image is distorted and the intensity cannot be quantified are effectively avoided.

The invention relates to a reflection optical unit (1) for focusing electromagnetic radiation (300) onto a focal plane (100), comprising at least the following components: - a central stop (12) which is arranged on an optical axis (200) of the reflection optical unit (1) and is designed to prevent electromagnetic beams (300) that are radiated into the reflection optical unit (1) along the optical axis (200) from propagating parallel to the optical axis (200), - an X-ray lens (11) having a tube (11-1) which extends at least between the central stop (12) and the focal plane (100) along the optical axis (200) of the reflection optical unit (1) and delimits a first volume (V1) radially around the optical axis (200), such that electrons (e-) generated by electromagnetic radiation in the first volume (V1) are shielded, wherein the tube (11-2) together with the central stop (12) forms a ring-shaped aperture (18), and - a solid window (13) which delimits the first volume (V1) toward the focal plane (100) and which peripherally terminates flush with the tube (11-2), wherein the solid window (13) is configured such that electrons generated by electromagnetic radiation in the first volume (V1) are shielded from the focal plane (100) by the solid window (13).

The application discloses a series connection type orthogonal equal-magnification X-ray microscopic imaging optical structure and relates to the technical field of microscopic imaging. The technical scheme is as follows: the optical structure comprises an object plane, a first reflecting mirror, a second reflecting mirror, a third reflecting mirror and an image plane; the object plane is provided with an object point; the image plane is provided with an image point; the object plane, the first reflecting mirror, the second reflecting mirror, the third reflecting mirror and the image plane are sequentially arranged; the first reflecting mirror and the third reflecting mirror focus and image in the meridian direction; and the second reflecting mirror focuses and images in the sagittal direction. The optical structure helps to solve the problem that the magnification is inconsistent in the two focusing directions of the series connection type orthogonal grazing incidence X-ray microscopic imaging optical structure, reduces the image distortion caused by the inconsistent magnification, and improves the ability of X-ray microscopic imaging to depict the shape and contour of an object.

A specimen radiography system may include a controller and a cabinet. The cabinet may include an x-ray source, an x-ray detector, and a specimen drawer disposed between the x-ray source and the x-ray detector. The specimen drawer may be automatically positionable along a vertical axis between the x-ray source and the x-ray detector.

An imaging optical arrangement serves to image an object illuminated by X-rays. An imaging optics serves to image a transfer field in a field plane into a detection field in a detection plane. A layer of scintillator material is arranged at the transfer field. A stop is arranged in a pupil plane of the imaging optics. The imaging optics has an optical axis. A center of a stop opening of the stop is arranged at a decentering distance with respect to the optical axis. Such imaging optical arrangement ensures a high quality imaging of the object irrespective of a tilt of X-rays entering the transfer field. The imaging optical arrangement is part of a detection assembly further comprising a detection array and an object mount. Such detection assembly is part of a detection system further comprising an X-ray source.

A reactor for depositing one or more atomic layers of at least one material onto a substrate. The reactor including a reaction chamber. The reaction chamber accommodating: a showerhead comprising at least one gas outlet configured for providing a gas stream of at least one precursor, at least one reaction gas, or of at least one component of the at least one material, a base stage rotatable around a base stage rotation axis, and at least one substrate holder arranged on the base stage and configured for rotating the substrate around a substrate rotation axis in such a way that the base stage rotation axis and the substrate rotation axis are inclined with respect to each other.

The disclosure relates to an imaging method and an imaging system for carrying out this method. The disclosure provides an improved multispectral ptychographic imaging method and a corresponding system. For this, the imaging method of the disclosure comprises the following steps: Generation of at least partially coherent electromagnetic radiation (3) which contains spectral components at at least two different wavelengths; spatial separation of the spectral components of the electromagnetic radiation, for example by angular dispersion; generation of structured illumination beams (9) by selecting respectively one of the spectral components by means of a structured aperture (8a, 8b, 8c); moving an object (6) in a direction transverse to the path of the illumination beams (9) into a plurality of positions; detecting an intensity pattern for each of the positions, wherein the intensity patterns are generated by scattering and / or diffraction of the illumination beams (9) at the object (6) in a detection plane; and reconstructing an image of the object (6) from the detected intensity patterns, wherein for each of the at least two wavelengths an image of the object (6) is calculated by means of a ptychographic reconstruction algorithm.

A reflection optic (1) for focusing electromagnetic radiation (300) into a focal plane (100), comprising at least the following components: - a central stop (12) which is arranged on an optical axis (200) of the reflection optics (1) and is configured to prevent electromagnetic rays (300) incident into the reflection optics (1) along the optical axis (200) from propagating parallel to the optical axis (200), - a reflection-based focusing element (11) with a tube (11-1) extending at least between the center stop (12) and the focal plane (100) along the optical axis (200) of the reflection optics (1) and defining a first volume (V1) radially around the optical axis (200), such that electrons (e) generated by electromagnetic radiation in the first volume (V1) - ) be shielded, - a massive window (13) which limits the first volume (V1) towards the focal plane (100) and is enclosed all around by the tube (11-1), wherein the massive window (13) is designed such that electrons generated by electromagnetic radiation in the first volume (V1) are shielded from the focal plane (100) by the massive window (13).

An X-ray optic (1) for focusing X-ray radiation (300) into a focal plane (100), comprising at least the following components: - a diffractive X-ray lens (2) and - a diffraction order filter aperture (3), OSA, wherein the diffractive X-ray lens (2) and the diffraction order filter aperture (3) are arranged along an optical axis (200) of the X-ray optics (1), characterized in that the X-ray optics (1) has a holding device (12) extending along the optical axis (200) and a first shielding device (11) extending along the optical axis (200), wherein the holding device (12) is connected to the diffractive X-ray lens (2), wherein the first shielding device (11) is designed as a first shielding device (11) enclosing the optical axis (200), and is connected to the diffraction order filter aperture (3) and delimits a first volume (V1) in which both the holding device (12) and the diffractive X-ray lens (2) are fully shielded, so that electrons generated by X-rays (300) in the first volume (V1) (e -) are shielded by the first shielding device (11).