43results about "Gamma-ray/x-ray microscopes" patented technology

The invention relates to a reflection optical unit (1) for focusing electromagnetic radiation (300) onto a focal plane (100), comprising at least the following components: - a central stop (12) which is arranged on an optical axis (200) of the reflection optical unit (1) and is designed to prevent electromagnetic beams (300) that are radiated into the reflection optical unit (1) along the optical axis (200) from propagating parallel to the optical axis (200), - an X-ray lens (11) having a tube (11-1) which extends at least between the central stop (12) and the focal plane (100) along the optical axis (200) of the reflection optical unit (1) and delimits a first volume (V1) radially around the optical axis (200), such that electrons (e-) generated by electromagnetic radiation in the first volume (V1) are shielded, wherein the tube (11-2) together with the central stop (12) forms a ring-shaped aperture (18), and - a solid window (13) which delimits the first volume (V1) toward the focal plane (100) and which peripherally terminates flush with the tube (11-2), wherein the solid window (13) is configured such that electrons generated by electromagnetic radiation in the first volume (V1) are shielded from the focal plane (100) by the solid window (13).

A method and system for correcting detector defects in an X-ray microscope system based on deep learning. Normal geometry projections and offset geometry projections are collected for a given detector, mappings between defective regions and healthy regions are created, and a machine learning system is trained using these projections. The trained neural network system is then used to correct the tomographic projection dataset, thereby improving the image quality of the resulting reconstructed tomographic image volume set.

The present invention relates to a reactor and a method for depositing one or more atomic layers of at least one material onto a substrate. The reactor includes a reaction chamber containing a showerhead, a submount, and at least one base support. The showerhead includes at least one gas outlet configured to provide a gas flow of at least one material or a gas flow of at least one component of the at least one material. The abutment is rotatable about an abutment axis of rotation. At least one substrate support is disposed on the submount and configured to rotate the substrate about a substrate axis of rotation. In particular, the substrate holder is configured to rotate the substrate about a substrate axis of rotation, where the abutment axis of rotation and the substrate axis of rotation are inclined relative to each other. The invention also relates to an X-ray microscope for generating an enlarged image of an object using X-rays.

To remove all unwanted heat from a source coil.SOLUTION: An electron beam B is typically dynamically steered on its path to a target 500 after generation. The steering is performed by one or more source coils 132N and 132S. These coils create a magnetic field outside a vacuum vessel 112 and allow air / water / oil cooling to remove unwanted heat. The magnetic field is then picked up within the vacuum vessel with a pole piece and directed toward a region where the magnetic field is needed to steer the electron beam.SELECTED DRAWING: Figure 1

A user interface presented on a display of the microscope system includes a motion control for moving the object stage subsystem, the source subsystem, and the detector subsystem, and a simulation area; the simulation area displays a resolution curve and a flux curve generated by a zoom tool and displayed on a graphical user interface of the system.

A multi-aperture array for manipulating a plurality of charged first single-particle beams, comprising: a base body with a plurality of apertures, wherein, during operation of the multi-aperture array, one of the charged first single-particle beams passes through each aperture; at least a plurality of first electrodes, wherein one of the first electrodes is arranged at each of the apertures to individually influence the first single-particle beam passing through the aperture, and wherein each of the first electrodes is connected to a control unit; wherein the base body has a first depth TG in a z-direction along which the first apertures extend through the base body; wherein the first electrodes each have a depth TE in the z-direction that is less than the depth TG, i.e., TE < TG;wherein the first electrodes are each embedded in the base body such that they are exposed in an area adjacent to and forming the aperture, and are otherwise embedded directly in the base body and thus without an electrical insulating layer; and wherein the material of the base body is glass or consists of glass.

The invention relates to an imaging method and an imaging system for carrying out this method. The object of the invention is to provide an improved multispectral ptychographic imaging method and a corresponding system. To this end, the imaging method of the invention comprises the following process steps: generation of at least partially coherent electromagnetic radiation (3) containing spectral components at at least two different wavelengths; spatial separation of the spectral components of the electromagnetic radiation, in particular by angular dispersion; generation of structured illumination beams (9) by selecting one of the spectral components at a time using a structured aperture (8a, 8b, 8c); and movement of an object (6) in a direction transverse to the path of the illumination beams (9) into a plurality of positions.Detecting an intensity pattern for each of the positions, wherein the intensity patterns are generated by scattering and / or diffraction of the illumination rays (9) at the object (6) in a detection plane; and reconstructing an image of the object (6) from the detected intensity patterns, wherein an image of the object (6) is calculated for each of the at least two wavelengths using a ptychographic reconstruction algorithm.

[Problem statement] Provision of a technology relating to a window holding section, an X-ray generator, an X-ray analyzer, a control method for an X-ray generator and a control system for an X-ray generator, wherein the technology is such that it is not necessary to provide an X-ray observation section in a vacuum area and that it is not necessary to use any part of the X-rays used for the measurement of the X-ray analysis. [SOLUTION] According to one embodiment of the present invention, an X-ray generator (20) is provided. The X-ray generator (20) is equipped with an X-ray generating unit (203a) and an X-ray transmission window. The X-ray generating unit (203a) is configured to generate X-rays by receiving an electron beam from an external source. The X-ray transmission window comprises a first X-ray transmission window (204a) and a second X-ray transmission window (205a). The first X-ray transmission window (204a) is configured to transmit first X-rays (L1) directed in a first direction (D1) among the X-rays. The first X-rays (L1) fall onto an X-ray observation section (21) that is arranged on the optical axis of the first X-rays and that can observe the X-ray focal point of the X-rays.The second X-ray transmission window (205a) is arranged such that it transmits second X-rays (L2) from the X-rays, which are oriented in a second direction (D2) that differs from the first direction (D1).

A deep learning based method and system to correct for detector defects in X-ray microscopy systems. Normal geometry projections and shifted geometry projections are collected for a given detector, creating a mapping between defective region and healthy region and a machine learning system is trained using these projections. The trained neural network system is then used to correct tomographic projection datasets improving the image quality of resultant reconstructed tomographic image volume sets.

In order to improve the resolution of a light-emitting substance image excited by X-rays, provided is a microscope (100) provided with an X-ray irradiation unit and an observation optical system. The X-ray irradiation unit (10) generates a patterned X-ray sheet beam (1) for illuminating an object to be observed (7). The patterned X-ray sheet beam has an intensity pattern (2) in which the intensity varies repeatedly with respect to a position in a certain direction included in the spread in a partial region (32) in the sheet region (3) having the spread. The observation optical system (50) receives radiation having an observation wavelength from an observation region (4) disposed so as to include at least a part of the partial region. The embodiment of the invention also provides a shooting method of the light-emitting substance image.

In order to improve the resolution of an image of a luminescent material excited by X-rays, an embodiment of the present disclosure provides a microscope 100 comprising an X-ray irradiation unit and an observation optical system. The X-ray irradiation unit 10 generates a patterned X-ray sheet beam 1 for illuminating an object to be observed 7. This patterned X-ray sheet beam has an intensity pattern 2 whose intensity varies repeatedly within a partial region 32 of a sheet area 3 having spread, with respect to a position in a direction within the spread of the partial region. The observation optical system 50 is arranged to receive radiation of an observation wavelength from an observation area 4, the observation area including at least a portion of the partial region. An embodiment of the present disclosure also provides a method for capturing an image of a luminescent material.

An X-ray imaging system is disclosed, comprising an X-ray source; a sample position; a detector arranged to detect X-ray radiation downstream of said sample position; wherein said X-ray source comprises an electron source arranged to provide an electron beam; a target arranged to produce X-ray radiation upon impact by said electron beam, the target comprising a substrate and a target layer at least partly covering said substrate, wherein said target layer is arranged to produce X-ray radiation upon impact by said electron beam; means for directing the electron beam to a first position on said target layer and a second position selected from a position on said target at which the electron beam impacts directly upon the substrate and a position on an electron beam dump arranged so that substantially no X-ray radiation created by interaction between the electron beam and the electron beam dump reaches the detector; a controller arranged to record, using said detector, a first image with the electron beam directed to said first position, and a second image with the electron beam directed to said second position, and generate a difference image between the first image and the second image. A method for X-ray imaging is also disclosed.

The invention relates to an X-ray optical unit (1) for focusing X-ray radiation (300) into a focal plane (100), comprising at least one diffractive X-ray lens (2), a diffraction order filter aperture (3), OSA, wherein the diffractive X-ray lens (2) and the diffraction order filter aperture (3) are arranged along an optical axis (200) of the X-ray optical unit (1), wherein the X-ray optical unit (1) has a holding device (12) running along the optical axis (200), and a first shielding device (11) running along the optical axis (200), wherein the holding device (12) is connected to the diffractive X-ray lens (2), wherein the first shielding device (11) is designed as a first shielding device (11) surrounding the optical axis (200), and is connected to the diffraction order filter aperture (3) and thus delimits a first volume (V1) in which both the holding device (12) and the diffractive X-ray lens (2) are circumferentially shielded such that electrons (e-) generated by X-ray radiation (300) in the first volume (V1) are shielded by way of the first shielding device (11).

The invention relates to an X-ray optical unit (1) for focusing X-ray radiation (300) into a focal plane (100), comprising at least one diffractive X-ray lens (2), a diffraction order filter aperture (3), OSA, wherein the diffractive X-ray lens (2) and the diffraction order filter aperture (3) are arranged along an optical axis (200) of the X-ray optical unit (1), wherein the X-ray optical unit (1) has a holding device (12) running along the optical axis (200), and a first shielding device (11) running along the optical axis (200), wherein the holding device (12) is connected to the diffractive X-ray lens (2), wherein the first shielding device (11) is designed as a first shielding device (11) surrounding the optical axis (200), and is connected to the diffraction order filter aperture (3) and thus delimits a first volume (V1) in which both the holding device (12) and the diffractive X-ray lens (2) are circumferentially shielded such that electrons (e-) generated by X-ray radiation (300) in the first volume (V1) are shielded by way of the first shielding device (11).

A method and system for scanning a sample to minimize effects of aberrant detector pixels and fixed imperfections in the imaging path in X-ray microscopy. The method involves moving, i.e., dithering, the sample perpendicular to the X-ray beamline between the source and the detector while capturing projections of the sample, possibly in a continuous fashion. Projection parameters associated with the sample movement, including non-ideal movement of the sample toward and away from the detector, are calculated based on the exact or average position at the time of exposure / trigger. The projections are compensated for the non-ideal movement by changing the geometry description. View angles can be re-estimated and the projections are sorted according to view angle instead of acquisition order. Finally, the reconstruction of the sorted projections is performed using varying magnification reconstruction methods to compensate for the slightly changed geometric magnification.

A user interface rendered on a display of a microscopy system comprises motion controls for moving the object stage subsystem, source subsystem, and detector subsystem and a simulation region showing a resolution curve and a throughput curve is generated by a zoom tool and displayed on the systems graphical user interface.

An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector has an energy resolution not less than 1 keV or the X-ray detector has no energy analysis function.

An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.

An X-ray microscopy system and method for phase contrast and dark-field imaging are provided, utilizing a partially coherent X-ray beam generated by a micro-focused X-ray source with a small focal spot size. A spatial beam modulator such as a random phase object, e.g., silicon carbide sandpaper, is placed between the source and the sample to create a random granular speckle pattern. The system employs a high-resolution detection setup with a thin scintillator and a spatially resolved detector with small pixel size to capture shifts in the speckle pattern caused by the sample's refraction effects. By analyzing these shifts, the system computes phase gradients and integrates them to produce detailed phase images, enhancing contrast in low-atomic-number materials like soft tissues and polymers. The compact design reduces source-to-detector distance, improving flux efficiency and system throughput while enabling high-resolution, three-dimensional tomographic imaging.

The invention relates to a reflection optic (1) for focusing electromagnetic radiation (300) into a focal plane (100), comprising at least the following components: - A central stop (12) arranged on an optical axis (200) of the reflection optics (1) and configured to prevent electromagnetic rays (300) incident along the optical axis (200) into the reflection optics (1) from propagating parallel to the optical axis (200), - an X-ray lens (11) with a tube (11-1) extending at least between the center stop (12) and the focal plane (100) along the optical axis (200) of the reflection optics (1) and defining a first volume (V1) radially around the optical axis (200), so that electrons (e-) generated by electromagnetic radiation in the first volume (V1) are shielded, wherein the tube (11-2) with the center stop (12) forms an annular aperture (18), - a massive window (13) that limits the first volume (V1) towards the focal plane (100) and is enclosed all around by the tube (11-2), wherein the massive window (13) is designed such that electrons generated by electromagnetic radiation in the first volume (V1) are shielded from the focal plane (100) by the massive window (13).

To provide a method and a system for liquid-cooling an insulated radiolucent target.SOLUTION: An x-ray source includes a target assembly including a target, an electron source for producing electrons that impinge on the target, and a flight tube assembly that separates the target assembly from the electron source and transports a coolant to the target assembly. The flight tube assembly includes a flight tube interface ring, a target cartridge tube, and an electrically insulating ring between the flight tube interface ring and the target cartridge tube.SELECTED DRAWING: Figure 1

The invention belongs to the field of microscopic imaging, and relates to a response energy spectrum self-adaptive quasi-single-energy KB microscopic imaging device and a response energy spectrum self-adaptive quasi-single-energy KB microscopic imaging method. The front reflector is plated with a single-layer film and is used for focusing X-rays emitted by an object point in a single direction and then reflecting the X-rays to the rear reflector; the single-layer film has the characteristics of wide spectrum response and wide angle bandwidth; the rear reflecting mirror is plated with a periodic multilayer film, wide-spectrum X-rays emitted by the front reflecting mirror are incident to the rear reflecting mirror, X-rays matched with response energy points are screened out through the periodic multilayer film, and then the X-rays are focused on an imaging surface; the response energy point adaptively changes along with the view field position of the object point, and the response efficiency distribution in the view field is flat; therefore, when the KB microscope is used for X-ray imaging in a laser inertial confinement fusion experiment, the drifting influence of the position of an imaging object is smaller, and the problems that the image is distorted and the intensity cannot be quantified are effectively avoided.

An inspection apparatus for inspecting an inspection target object, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection target object, and a plurality of X-ray detectors, wherein each of the plurality of X-ray detectors detects X-rays emitted from a foreign substance existing on an inspection target surface of the inspection target object irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.

The invention relates to a reflection optical unit (1) for focusing electromagnetic radiation (300) onto a focal plane (100), comprising at least the following components: - a central stop (12) which is arranged on an optical axis (200) of the reflection optical unit (1) and is designed to prevent electromagnetic beams (300) that are radiated into the reflection optical unit (1) along the optical axis (200) from propagating parallel to the optical axis (200), - an X-ray lens (11) having a tube (11-1) which extends at least between the central stop (12) and the focal plane (100) along the optical axis (200) of the reflection optical unit (1) and delimits a first volume (V1) radially around the optical axis (200), such that electrons (e-) generated by electromagnetic radiation in the first volume (V1) are shielded, wherein the tube (11-2) together with the central stop (12) forms a ring-shaped aperture (18), and - a solid window (13) which delimits the first volume (V1) toward the focal plane (100) and which peripherally terminates flush with the tube (11-2), wherein the solid window (13) is configured such that electrons generated by electromagnetic radiation in the first volume (V1) are shielded from the focal plane (100) by the solid window (13).

The application discloses a series connection type orthogonal equal-magnification X-ray microscopic imaging optical structure and relates to the technical field of microscopic imaging. The technical scheme is as follows: the optical structure comprises an object plane, a first reflecting mirror, a second reflecting mirror, a third reflecting mirror and an image plane; the object plane is provided with an object point; the image plane is provided with an image point; the object plane, the first reflecting mirror, the second reflecting mirror, the third reflecting mirror and the image plane are sequentially arranged; the first reflecting mirror and the third reflecting mirror focus and image in the meridian direction; and the second reflecting mirror focuses and images in the sagittal direction. The optical structure helps to solve the problem that the magnification is inconsistent in the two focusing directions of the series connection type orthogonal grazing incidence X-ray microscopic imaging optical structure, reduces the image distortion caused by the inconsistent magnification, and improves the ability of X-ray microscopic imaging to depict the shape and contour of an object.

A specimen radiography system may include a controller and a cabinet. The cabinet may include an x-ray source, an x-ray detector, and a specimen drawer disposed between the x-ray source and the x-ray detector. The specimen drawer may be automatically positionable along a vertical axis between the x-ray source and the x-ray detector.

An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane, and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector includes a long X-ray receiver.

The invention relates to an X-ray optic (1) for focusing X-rays (300) into a focal plane (100), comprising at least one diffractive X-ray lens (2), a diffraction order filter aperture (3), and an optical system (OSA), wherein the diffractive X-ray lens (2) and the diffraction order filter aperture (3) are arranged along an optical axis (200) of the X-ray optic (1), wherein the X-ray optic (1) has a holding device (12) extending along the optical axis (200) and a first shielding device (11) extending along the optical axis (200), wherein the holding device (12) is connected to the diffractive X-ray lens (2), wherein the first shielding device (11) is designed as a first shielding device (11) encompassing the optical axis (200) and is connected to the diffraction order filter aperture (3) and thus defines a first volume (V1) in which both the holding device (12) and the diffractive X-ray lens (2) are fully shielded,so that electrons (e-) generated by X-ray radiation (300) in the first volume (V1) are shielded by the first shielding device (11).

An imaging optical arrangement serves to image an object illuminated by X-rays. An imaging optics serves to image a transfer field in a field plane into a detection field in a detection plane. A layer of scintillator material is arranged at the transfer field. A stop is arranged in a pupil plane of the imaging optics. The imaging optics has an optical axis. A center of a stop opening of the stop is arranged at a decentering distance with respect to the optical axis. Such imaging optical arrangement ensures a high quality imaging of the object irrespective of a tilt of X-rays entering the transfer field. The imaging optical arrangement is part of a detection assembly further comprising a detection array and an object mount. Such detection assembly is part of a detection system further comprising an X-ray source.