Device and method for analyzing an organic sample

Abstract

A device and method for analyzing an organic sample provide high spatial resolution. A focused ion beam is directed onto the organic sample. Fragments detached from the sample are examined using mass spectroscopy.

Description

TECHNICAL FIELD[0001]This application relates to a device and method for analyzing an organic sample (hereinafter also referred to as organic substance) that results in high spatial resolution.BACKGROUND OF THE INVENTION[0002]The use of an ion beam column for repairing semiconductor masks is known from the prior art. The ion beam column has an ion source, which provides a plurality of ions of different suitable elements, which have different ion masses. The ions are combined in an ion beam and directed toward a semiconductor mask to be repaired. A desired type of ions is selected on the basis of their mass and their charge with the help of a filter which provides both an electric field and a magnetic field. Ultimately only these selected ions are focused onto the semiconductor mask as an ion beam. Due to an interaction of the ion beam incident on the semiconductor mask with the material of the semiconductor mask, interaction particles are generated, in particular secondary electrons...

AI Technical Summary

Benefits of technology

[0008]The system described herein is based on the consideration that ions of a certain predefinable mass and / or a predefinable number of elementary charges contribute to relatively large fragments being detachable from an organic sample. These ions induce an organic sample to vibrate, so that relatively large fragments are detached from the organic sample. Large fragments may be easier to analyze compared to relatively small fragments. It is thus possible to draw conclusions about the material, for example, the material composition of an organic sample. The system described herein is also based on the consideration that an interaction zone of the ion beam on the organic sample may be sufficiently small that a high local resolution may be achieved.

[0011]According to another embodiment of the method according to the system described herein, multiple mass spectra may be stored in the database, each of the multiple mass spectra originating from a different material. It m thus possible to simply and easily determine the composition of an organic sample. The mass spectra stored in the database may be obtained by methods different from the method according to the system described herein, for example, using MALDI. Alternatively or additionally, it is provided that the mass spectra stored in the database may be generated using the method according to the system described herein.

[0017]In a further embodiment of the method according to the system described herein, an organic sample may initially be immunolabeled. In this case, a specific organic molecule marked using a gold, platinum, or silver cluster may be introduced into the sample. The specific organic molecule may then be combined (together with the above-mentioned marker) with other organic molecules on the basis of the “key-lock principle.” In an examination with the aid of an electron beam or a light beam, a very strong signal may be obtained at the locations where the specific organic molecules are located due to high backscatter or fluorescence. It is thus possible not only to draw conclusions about the composition of the organic sample, but also to draw conclusions about the behavior of the other organic molecules, for example, their distribution and bonding behavior.

[0019]In a further embodiment of the method according to the system described herein, the ion beam may be focused onto the organic sample. This takes place, for example, in a suitable ion beam column. This makes it possible to perform an analysis of the composition of the organic sample at well-defined locations.

Problems solved by technology

This resolution is insufficient for many applications.

However, SIMS is barely or not at all used in analyzing organic substances in conjunction with a highly energy-rich primary ion beam incident on the organic substance.

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