A
charged particle wire device is characterized by comprising: a
charged particle source (202) consisting of a
single crystal needle (204), a filament (205) connected to the
single crystal needle, and an insulator (207) for holding the filament; a plurality of non-evaporating
getter materials (201); an extraction
electrode (203); and a housing (209) arranged around the axis of the
electron wire emitted from the
charged particle source; wherein a heater (212) for heating the plurality of non-evaporating
getter materials is disposed at the extraction
electrode, the plurality of non-evaporating
getter materials are arranged side by side in the housing, the housing is connected to the extraction
electrode, and an elastic member (250) is disposed between the non-evaporating getter materials and the housing, the elastic member (250) being configured to push the non-evaporating getter materials. This
charged particle beam device comprises: a charged
particle source 202 composed of a
single crystal needle 204, a filament 205 connected to the single
crystal needle, and an insulator 207 that holds the filament; a plurality of non-
evaporation getter materials 201; a lead-out electrode 203; and a housing 209 disposed so as to surround the axis of an
electron beam emitted by the charged
particle source, the
charged particle beam device being characterized in that a heater 212 for heating the plurality of non-
evaporation getter materials is disposed in the lead-out electrode, the plurality of non-
evaporation getter materials in the housing are disposed side by side, the housing is connected to the lead-out electrode, and elastic members 250 configured to press the non-evaporation getter materials are disposed between the non-evaporation getter materials and the housing.