37 results about "Getter" patented technology

The utility model discloses an upper adsorber equipment, including conveying device and blanking device, conveying device includes conveyer belt and conveying frame, and conveyer belt rotatable is established on conveying frame, blanking device includes frame body, base, storage tube and horizontal push mechanism, and frame body is erected on conveying frame, and base sets up on frame body and is located conveying belt top, and storage tube sets up on base, and forms storage cavity in storage tube, and the lower extreme of storage tube is the discharge gate, and forms the push material space between discharge gate and base, and horizontal push mechanism sets up on base, and horizontal push mechanism includes the horizontal push piece of push material space transverse movement. The utility model discloses through setting up conveying device and blanking device, realizes the automatic adsorber on core material, is applicable to the automatic batch production of vacuum heat insulation board.

The utility model discloses a kind of high-purity germanium detector vacuum life measuring device, including vacuum generation module and detection component, detection component is by first detection module and second detection module intercommunication composition, vacuum generation module and detection component intercommunication;First detection module includes first vacuum angle valve, vacuum leak and release gas test chamber and first vacuum gauge;Second detection module includes second vacuum angle valve, getter test chamber, getter sample chamber, second vacuum gauge, fine adjustment valve and high-purity test gas tank;The high-purity germanium detector vacuum life measuring device of this is vacuumized to detection component by vacuum generation module, subsequently detects the leak and release gas amount of high-purity germanium detector by first detection module, and then detects the getter gas suction capacity by second detection module, i. e. The vacuum life of high-purity germanium detector can be detected and calculated;The device can effectively detect the vacuum performance of high-purity germanium detector, provide support for the maintenance of high-purity germanium detector, ensure its detection accuracy.

Semiconductor-on-insulator substrate, SOI substrate, comprising: a handling substrate (104); a device layer (108) that lies above the handling substrate (104); and an insulating layer (106) separating the handling substrate (104) from the device layer (108), wherein the insulating layer (106) meets the device layer (108) at a first interface and meets the handling substrate (104) at a second interface, wherein the insulating layer (106) has a getter material with a getter concentration profile, the getter concentration profile having a first peak concentration at the first interface, a second peak concentration at the second interface and a trough concentration at a location between the first interface and the second interface, wherein the trough concentration is smaller than each of the first peak concentration and the second peak concentration, the getter material contains fluorine.

The present disclosure provides a kind of molybdenum alloy super high temperature heat pipe internal pressure creep test method, comprising the following steps: molybdenum alloy internal pressure creep sample and active metal getter material are placed in inner layer quartz glass tube;The inner layer quartz glass tube is evacuated and is fused and sealed, and the inner layer vacuum assembly is formed;The inner layer vacuum assembly is placed in the outer layer quartz glass tube arranged concentrically;The outer layer quartz glass tube is evacuated and is fused and sealed, to form vacuum layer between the inner layer vacuum assembly and the outer layer quartz glass tube, to obtain multilayer vacuum protection device;The multilayer vacuum protection device is placed in high temperature furnace and heated to predetermined temperature for creep test.

A charged particle wire device is characterized by comprising: a charged particle source (202) consisting of a single crystal needle (204), a filament (205) connected to the single crystal needle, and an insulator (207) for holding the filament; a plurality of non-evaporating getter materials (201); an extraction electrode (203); and a housing (209) arranged around the axis of the electron wire emitted from the charged particle source; wherein a heater (212) for heating the plurality of non-evaporating getter materials is disposed at the extraction electrode, the plurality of non-evaporating getter materials are arranged side by side in the housing, the housing is connected to the extraction electrode, and an elastic member (250) is disposed between the non-evaporating getter materials and the housing, the elastic member (250) being configured to push the non-evaporating getter materials. This charged particle beam device comprises: a charged particle source 202 composed of a single crystal needle 204, a filament 205 connected to the single crystal needle, and an insulator 207 that holds the filament; a plurality of non-evaporation getter materials 201; a lead-out electrode 203; and a housing 209 disposed so as to surround the axis of an electron beam emitted by the charged particle source, the charged particle beam device being characterized in that a heater 212 for heating the plurality of non-evaporation getter materials is disposed in the lead-out electrode, the plurality of non-evaporation getter materials in the housing are disposed side by side, the housing is connected to the lead-out electrode, and elastic members 250 configured to press the non-evaporation getter materials are disposed between the non-evaporation getter materials and the housing.

The utility model relates to getter activation technical field discloses a vertical activation device of strip getter for vacuum glass, vacuum glass is provided with strip getter in, including conveying mechanism, holding mechanism and at least one heater, holding mechanism includes the vertical plate that sets up in the verticality inclination state, vacuum glass is located on conveying mechanism and leans against vertical plate, and conveying mechanism is used for bearing and conveying vacuum glass, and heater can produce relative motion with vacuum glass in the length direction of strip getter, and the heating head of heater can aim at and heat strip getter in the relative motion process of heater and vacuum glass. The utility model makes the relative motion direction between vacuum glass and heater and the length direction of strip getter consistent, and sets up heater to heat strip getter to realize the activation of strip getter. The vertical activation device has the advantages of small floor area, convenient site arrangement etc.

This invention provides a non-evaporative getter coating method that can coat a vacuum vessel with an NEG film that does not easily degrade in exhaust capacity when the vacuum vessel is repeatedly opened to the atmosphere, and a vacuum component that does not easily degrade in exhaust capacity when the vacuum vessel is repeatedly opened to the atmosphere. [Solution] The non-evaporative getter coating method includes forming a film of a low-temperature activatable non-evaporative getter alloy on the inner wall surface of a vacuum component by a cold spray method.

This invention provides an intelligent dimming laminated vacuum composite roof glass structure and its manufacturing method, comprising an outer tempered or semi-tempered glass, a film layer, an EC-coated glass, an edge sealing layer, and an inner vacuum glass layer, stacked sequentially from the outside of the roof to the inside of the vehicle. The EC-coated glass and the inner vacuum glass are edge-sealed by the edge sealing layer to form an EC-coated insulated glass structure. Then, a getter is activated by laser evaporation to adsorb air from the insulated glass structure, forming an EC-coated vacuum glass structure. The film layer is then laminated and fixed to the outer tempered or semi-tempered glass to form a laminated vacuum composite structure. Multiple vacuum support pillars are provided on the side of the inner vacuum glass facing the EC-coated glass to form and maintain the vacuum cavity. This invention uses vacuum glass to isolate external heat conduction, combined with the active modulation of visible light and infrared radiation by the EC-coated glass, to achieve intelligent temperature regulation, significantly improving driving comfort.

Method for the regeneration of a volume getter pump in a vacuum apparatus with a volume getter pump and an ion getter pump where the operating voltage of the ion getter pump is reduced, the current through the ion getter pump is recorded for determination of the pressure in the vacuum apparatus and then a heating element of the NEG is controlled as a function of the current of the ion getter pump for the purpose of heating the NEG material.

The application relates to a kind of activation method and device of vacuum glass getter, belong to vacuum glass manufacturing field, at least one unit length getter is arranged in vacuum glass, when multiple unit length getters are arranged, multiple unit length getters are arranged in straight line;Activation device is arranged with multiple heating units along the glass conveying direction, at least one heating element is arranged in each heating unit;The quantity information of glass and unit length getter in each glass in the glass quantity of the previous station of activation device is acquired, glass is matched with heating unit and is transmitted into glass to activation device, and heating unit heats and activate getter;Both can satisfy single large-size glass activation, and can satisfy multiple small-size glass independent activation simultaneously;The getter is divided into multiple portions, the activation time of each portion of getter is reduced, and multiple getters are activated simultaneously, the activation efficiency of getter is improved.

This invention belongs to the field of optical device technology. It proposes a MEMS micromirror structure and packaging method. The structure mainly includes the design and fabrication of a chip substrate, a glass cover, a getter, and a thermally conductive layer. A CMOS circuit and a movable micromirror array structure are fabricated on an SOI wafer structure layer. The glass cover is connected to the SOI wafer support layer via anodic bonding to achieve hermetically sealed packaging of the micromirror array. An AlN thin film is deposited on the back side of the substrate, and TSV technology is used to lead wires from the back side of the SOI wafer. This scheme uses the buried oxide layer of the SOI wafer to isolate the substrate layer from the micromirror array and CMOS circuit, avoiding the impact of high voltage on device performance and ensuring compatibility with CMOS processes. The back-side AlN thin film deposition improves heat dissipation during the process and device operation. Furthermore, the wafer-level packaging process offers advantages such as simple process, low cost, and ease of mass production.

The application discloses a packaging method for improving the air tightness and vacuum degree of ceramic tube shell vacuum packaging, which comprises the following steps: once pretreatment is conducted on a gold-plated ceramic tube shell, a gold-plated cover plate, a preformed soldering sheet one and a preformed soldering sheet two; the gold-plated ceramic tube shell is fixed with a device to be packaged; a getter film is sputtered on the gold-plated cover plate; twice pretreatment is conducted on the gold-plated ceramic tube shell, the gold-plated cover plate and the preformed soldering sheet two, and etching treatment is conducted on the getter film alone; and vacuum packaging is conducted. The application conducts twice different plasma etching treatment on the tube shell, the cover plate, the preformed soldering sheet two and the getter film, can enhance the solder wettability and fully exert the getter capacity of the getter, so that the air tightness and internal vacuum degree of the ceramic tube shell vacuum packaging can be improved, and the service performance and reliability of the device can be enhanced.

The application belongs to the field of infrared detector manufacturing, and specifically discloses a kind of ceramic package pulse current activation methods of infrared detector. The method comprises: providing a ceramic package infrared detector assembly, the two ends of the sheet-shaped non-evaporable getter in the assembly are fixed on two first type conductive columns;Electricity contact probe is contacted with the first type conductive column;Preheating current is applied to the getter through the first type conductive column, then high-frequency pulse current is applied to activate, so that the getter body reaches the activation temperature due to Joule effect;During the pulse current activation process or after activation, the detector chip is subjected to low-temperature thermal stabilization treatment. The application realizes the rapid local activation of the getter by pulse current, shortens the process time, reduces the energy consumption, avoids thermal damage, and improves the performance of the detector, and is especially suitable for ceramic packaged infrared detectors.

The application discloses a precision assembling method of an infrared detector process Dewar, and belongs to the technical field of Dewar assembling of infrared detectors. The method comprises the following steps: cleaning and pretreating materials, and assembling a cold finger and a detector. In the application, the method adopts a nanometer-level thermal interface of the cold finger and the detector chip, can effectively guarantee thermal conductivity, effectively reduce thermal noise, improve a signal-to-noise ratio, and can effectively control a thermal load of the cold finger, so that the detector can stably work at a lower temperature and the performance of the detector is improved. The method adopts electron beam and laser welding, can greatly reduce a leakage rate, and adopts a non-evaporable getter to adsorb residual gas, can improve vacuum maintenance time in the infrared detector, and improve product quality. The method realizes breakthroughs of the infrared detector Dewar in sensitivity, stability, service life and the like through optimization of a whole chain of materials, processes and detection, and is especially suitable for high-precision military and space infrared systems.

A vacuum insulating panel includes first and second substrates (e.g., glass substrates), a hermetic edge seal, a pump-out port, and spacers sandwiched between at least the two substrates. The gap between the substrates may be at a pressure less than atmospheric pressure to provide insulating properties. The panel may include a getter. The getter may be a thin film getter and / or may be elongated in shape.

The present application relates to the technical field of particle accelerators, in particular to a method for preparing a composite coating on the inner wall of a vacuum pipe and a vacuum pipe. The preparation method comprises: roughening the inner wall of the vacuum pipe; coaxially installing the treated vacuum pipe in a solenoid of a magnetron sputtering coating device; using a magnetron sputtering coating process to coat an Au film on the inner wall of the vacuum pipe; and using a magnetron sputtering coating process to coat a TiZrV film on the side of the Au film away from the vacuum pipe. In the present application, the Au / TiZrV double-layer film is coated on the inner wall of the vacuum pipe, so that a double-layer structure of a dense barrier layer and an active getter layer is formed on the surface of the vacuum pipe, which can effectively block the diffusion of the gas of the pipe wall material into the vacuum system by using the dense characteristics of the Au film, and can also make the TiZrV film fully play the gettering efficiency, thereby reducing the beam bombardment desorption rate of the vacuum pipe.

The application relates to the technical field of accelerators and discloses a cleaning method for an accelerator vacuum cavity. The cleaning method comprises the following steps: high-pressure water flushing is performed on the inner wall of the vacuum cavity, and the vacuum cavity is dried; the vacuum cavity is subjected to deep cleaning; the vacuum cavity subjected to the deep cleaning is subjected to ultrasonic cleaning; the vacuum cavity subjected to the ultrasonic cleaning and dried is placed in a vacuum furnace, the vacuum cavity is heated to a first preset temperature at a first speed and kept for a first preset time, and then the vacuum cavity is cooled to a second preset temperature at a second speed; nitrogen is filled into the vacuum furnace, and the vacuum cavity is taken out of the vacuum furnace after the temperature in the furnace is reduced to a third preset temperature. In the application, the technical problems that powder and metal particle composite pollutants caused by thermal runaway of non-evaporative getter alloy are difficult to completely remove are solved by sequentially adopting the synergistic treatment process of high-pressure water flushing, mechanical polishing or pickling, ultrasonic cleaning and finally vacuum furnace low-temperature degassing combination.

This invention discloses a SiC substrate MOCVD gallium oxide epitaxial wafer, belonging to the field of wide-bandgap semiconductor epitaxial material preparation technology. The epitaxial wafer comprises, from bottom to top, a silicon carbide substrate, a β-Ga2O3 carbon getter layer, and a β-Ga2O3 drift layer. The carbon concentration ratio of the β-Ga2O3 carbon getter layer to the β-Ga2O3 drift layer is not less than 100, forming a decreasing carbon concentration gradient. The β-Ga2O3 drift layer contains periodically distributed annealing repair interfaces. The preparation method employs a precursor spatiotemporal separation alternating gas supply mode to grow the β-Ga2O3 drift layer, with periodic insertion of in-situ flash annealing steps. A three-stage carbon purification mechanism synergistically removes carbon from three stages: carbon source generation, defect complex formation, and cumulative stabilization, solving the technical bottleneck of uncontrollable carrier compensation ratio caused by organometallic precursor carbon contamination during MOCVD growth of ultra-thick drift layers.

Heat shield element 10 for a non-evaporable getter (NEG) pump, comprising a shielding element 12 made from a sheet metal having a first end 12a and an opposite second end 12b, wherein the first end an

A gas generator includes (i) a plurality of sources composed of a first material, the plurality of sources including a first source having a first source area and a second source having a second source area less than the first source area, (ii) a plurality of getters composed of a second material different from the first material, the plurality of getters including a first getter having a first getter area and a second getter having a second getter area less than the first getter area, and (iii) a substrate on which the plurality of sources and the plurality of getters are mounted such that none of the plurality of sources directly touch each other, none of the plurality of getters directly touch each other, and none of the plurality of sources directly touch the plurality of getters.

The method for producing a zirconia-based part of a timepiece or jewellery component includes: shaping and sintering (E1) the zirconia-based part to obtain the zirconia-based part in its finished or semi-finished shape; then—depositing (E2) a layer including a material that acts as a getter, which has a greater affinity for oxygen than the zirconium of the zirconia-based part, on at least one portion of the surface of the zirconia-based part;—heating (E3) the zirconia-based part in a vacuum atmosphere or a neutral atmosphere to obtain a darkening, or a black or grey coloration, of at least one portion of the zirconia-based part;—removing (E4) the layer including the material that acts as a getter.

This invention belongs to the field of optical device technology and discloses a MEMS device and packaging method based on SU8 adhesive. The method includes a structural substrate and a packaging wafer anoly bonded by an SU8 adhesive bonding ring. The packaging wafer has grooves to form a moving microcavity. A getter is deposited within the moving microcavity of the packaging wafer. The moving microcavity also accommodates a movable MEMS structure disposed on the surface of the structural substrate. Chip pads and metal leads are laid on the outer side of the moving microcavity. The packaging wafer also has an anti-reflow groove located at one end of the packaging wafer near the SU8 adhesive bonding ring. This invention uses SU8 adhesive to fabricate a polymer bonding ring on a complex packaging wafer with a microcavity. By optimizing the SU8 adhesive pretreatment process and designing an anti-reflow structure, contamination of the device due to SU8 adhesive flow is avoided. Polymer wafer-level bonding is used to achieve MEMS device packaging, and chip separation is achieved through two dicing operations. This method has advantages such as low temperature, low stress, flexible process, and low cost.

The application discloses a kind of semiconductor material winding equipment, including base, first vertical plate, second vertical plate, winding roller, getter device, multiple auxiliary compression devices, first driving device and second driving device, wherein, first vertical plate and second vertical plate vertically and side by side fixedly arranged on base, and first vertical plate is detachably provided with gate;Winding roller rotationally arranged between second vertical plate and gate, and one end of winding roller penetrates out of second vertical plate and extends to outside, the other end of winding roller is connected with gate, channel is provided in winding roller, and a row of through holes are provided in winding roller and communicated with channel.

An atomic clock having a highly integrated vacuum package in combination with a highly integrated and efficient electronics package is disclosed. The vacuum package includes trapping RF electrodes for trapping an ion cloud, optics for guiding an excitation laser beam, an emitter for replenishing ions to the ion cloud, a getter for controlling the vacuum level, and a viewport for admitting the excitation laser beam and transmitting ionic fluorescence. This highly integrated vacuum package occupies a volume of less than 1 mL. The highly integrated and efficient optoelectronics package employs an interposer to which a laser, a photodetector, and various control and drive electronics are attached.

A getter composition for use in controlling the amount of moisture and organic gases in a sealed electronic or optoelectronic device, comprising a blend of a first getter and a second getter powder in a mass ratio comprised between 0.1 and 5.0, the first getter being polyphenylene oxide (PPO) or poly(2,6-diphenyl-p-phenylene oxide) (PPPO) and the second getter being faujasite (FAU) zeolite or a mixture of faujasite (FAU) zeolite and Linde type A (LTA) zeolite in a ratio comprised between 0.1 and 5.0. The present invention also relates to a dispensable paste comprising a resin and the getter composition.

The application provides a miniaturized cold Rydberg atom antenna device and a noise double-mode suppression method, relates to the technical field of quantum information, and vacuum compatible integrated atom source modules maintain the vacuum degree of a glass vacuum cavity through outgassing sheets and getter sheets; a low-temperature magnetic optical trap can cool atomic gas and gather the cold atomic gas into an F-P cavity; a Rydberg atom detection module can use coupling light to excite atoms to a Rydberg state, use detection light to detect information when cold Rydberg state atoms are split by EIT-AT after a microwave electric field is applied, and generate a main detection signal; an F-P cavity fluorescence suppression module can collect fluorescence emitted by cold Rydberg state atoms and generate a fluorescence noise signal; and a signal processing module can eliminate fluorescence noise based on the main detection signal and the fluorescence noise signal. Through the above mode, the problems that a Rydberg atom antenna device based on cold atoms is large in size and difficult to suppress fluorescence noise are solved, and the detection performance of the device can be improved.

The utility model discloses a getter feeding device for vacuum glass production line relates to getter field, including the storage jar, the top of storage jar is equipped with the motor, the output of motor is connected with the rotating rod, the bottom of rotating rod is fixed with the rubbing roller, one end of rubbing roller is installed with the conveying rod, the outer wall of conveying rod is installed with the vane, the outer wall movable mounting of fixed column has the fixed frame, the outer wall of fixed frame is installed with multiple groups of the stirring board. The utility model getter stores in the inside of storage jar, and the vane will be located in the conveying bin bottom getter and be sent to the rubbing bin, and the rubbing roller is broken to the agglomerate getter through multiple rubbing teeth, and the getter in the storage bin is mixed and stirred by multiple stirring boards, and the orifice plate inside the stirring board is extruded and crushed to the massive getter, thereby reducing the getter and appearing a large amount of getter powder block before filling into the vacuum glass.

This invention discloses a novel ceramic X-ray tube and its manufacturing method. The novel ceramic X-ray tube includes a beryllium window assembly and a cathode assembly. The beryllium window assembly includes a beryllium window support, within which a beryllium plate is sealed and fixedly connected. A target material is coated on the side of the beryllium plate closest to the cathode assembly. The cathode assembly includes a core assembly and a focusing sleeve. The core assembly includes a first electrode, a second electrode, and a ceramic inner tube. The focusing sleeve is fixedly mounted on the first electrode of the core assembly. Two Kovar wires are disposed within the focusing sleeve, respectively fixedly mounted on the first and second electrodes of the core assembly, and respectively fixedly connected to the two ends of a filament. A non-evaporable getter is fixedly mounted on the outside of the focusing sleeve. This invention has the advantages of reducing production steps, improving production efficiency, and facilitating mass production.

This invention discloses a MEMS suspended getter structure for wafer-level packaging and its manufacturing method. The structure includes a readout circuit wafer, a low-melting-point metal anchoring structure, a suspended getter support structure, and a rocker structure. During getter electroactivation, the rocker structure deforms due to heat, causing the getter support structure to rise and detach from the molten low-melting-point metal, achieving thermal isolation. After activation, the rocker deforms in the opposite direction, causing the getter support structure to descend and anchor to the re-solidified low-melting-point metal, providing stable support. This structure effectively solves the problem of high-temperature damage to thermally sensitive pixels during getter activation in wafer-level packaging, while ensuring the structural support reliability and improving the performance and lifespan of the infrared detector. Its manufacturing method is compatible with traditional MEMS processes, facilitating integration.