390 results about "Getter" patented technology

The invention discloses a seal welding jig and semiconductor process equipment, and belongs to the technical field of seal welding. The seal welding jig comprises a base, a pressure applying assembly and a deformation supporting piece, the base is provided with a supporting area used for containing a sample to be sealed and welded, the deformation supporting piece is arranged on the base and protrudes out of the surface, provided with the supporting area, of the base, and the deformation supporting piece is located on the periphery of the supporting area and supports the sample to be sealed and welded in the supporting area. Under the condition that the wafer is supported by the deformation supporting piece, the sample to be sealed and welded is opposite to the wafer, a gap is formed between the sample to be sealed and welded and the wafer, the pressure applying assembly can apply pressure to the wafer, and the deformation supporting piece deforms, so that the wafer is close to the sample to be sealed and welded and is bonded with the sample to be sealed and welded. The semiconductor process equipment comprises the sealing and welding jig. Thus, the wafer is supported by the deformation supporting piece, the wafer is separated from the to-be-sealed sample, the getter of the to-be-sealed sample has a large space to be activated, and the vacuum effect after the wafer and the to-be-sealed sample are sealed can be improved.

The invention relates to a vacuum packaged chip atomic clock getter activation device and a use method thereof.The getter activation device is arranged to be of a structure with a heating module on the upper portion and a heat dissipation module on the lower portion, and the heating module and the heat dissipation module are not in contact during use; an inner cavity of an upper groove in the heating module is fully attached to a ceramic sealing cap of the chip atomic clock, the upper groove is heated to the optimal activation temperature of the getter through a PTC heating piece, and then heat preservation is conducted for a period of time, so that it is guaranteed that the getter on the inner wall of the ceramic sealing cap is fully activated; in the activation process, the semiconductor cooler and the water cooling plate in the heat dissipation module are started at the same time, the double heat dissipation structure effectively ensures that the In0. 97Ag0. 03 welding ring located in the lower groove is not melted due to overheating, and therefore the long-term stability of the vacuum degree of the chip atomic clock vacuum packaging cavity is guaranteed. The getter activating device has the advantages of being high in heating speed, good in heat dissipation effect, simple in design, convenient to operate, capable of saving cost and the like.

The invention discloses a compact accelerator extremely-high vacuum system and an implementation method thereof. The compact accelerator extremely-high vacuum system comprises a dipole iron vacuum chamber, a BUMP iron vacuum chamber, a BPM cavity, a vacuum pump chamber and a quadrupole iron vacuum chamber which are sequentially connected to form a beam main line. A plurality of non-evaporable getter sheets are arranged in the dipole iron vacuum chamber and the quadrupole iron vacuum chamber in an array manner and are used for extracting active gas in a beam main line to obtain extremely high vacuum; a vacuum measuring gauge tube, a sputtering ion pump, a molecular pump and a gate valve are installed on the vacuum pump chamber, the vacuum measuring gauge tube is used for measuring the vacuum degree in the beam main line, the sputtering ion pump is used for extracting argon and methane in the beam main line and conducting baking, and the molecular pump is used for rough extraction of the beam main line and exhaust in the baking process; the gate valve is used for separating the molecular pump from the beam main line. According to the invention, hydrogen, carbon monoxide and other active gases in the system can be extracted under the condition that a titanium sublimation pump cannot be installed due to insufficient space, so that extremely high vacuum can be obtained.

A vacuum insulating panel includes first and second substrates (e.g., glass substrates), a hermetic edge seal, a pump-out port, and spacers sandwiched between at least the two substrates. The gap between the substrates may be at a pressure less than atmospheric pressure to provide insulating properties. The panel may include a getter. The getter may be laser activated in a manner which causes the getter to transform and realize a Ti—Al—V phase (e.g., Al3V0.333Ti0.667) of crystallite material. The getter may be a thin film getter and / or may be elongated in shape.

The invention provides a non-evaporable composite Cu-TiZrV getter film and a preparation method thereof. The non-evaporable composite Cu-TiZrV getter film comprises a getter layer and a metal Cu layer, the air suction layer comprises elements Ti, Zr and V. According to the non-evaporable composite Cu-TiZrV getter film provided by the invention, the surface of the TiZrV getter layer is covered with the Cu metal layer with good conductivity, so that the getter layer is effectively protected, internal oxygen content saturation caused by exposure to the atmosphere for multiple times is avoided, the resistivity of the composite film is remarkably reduced, activation is realized in the baking process of 180-300 DEG C, and the non-evaporable composite Cu-TiZrV getter film has a good application prospect. And good air suction performance is maintained at room temperature. The composite film has important practical significance and application value in the aspects of obtaining and maintaining ultrahigh vacuum of a vacuum chamber.

The present invention relates to the field of infrared detector dewar technology, and specifically provides an adsorbent adaptive packaging structure and installation method, including: a fixing ring, including: an annular portion, the annular portion having an opening, the annular portion forming two end portions at the opening; two connecting portions, the two connecting portions being respectively connected to one end of the two end portions of the annular portion; a first support leg and a second support leg, the first support leg and the second support leg being respectively connected to the other end of the two connecting portions; wherein the two end portions are arranged to overlap, or the two connecting portions are arranged to overlap, or the first support leg and the second support leg are arranged to overlap. The present invention optimizes the fixing ring into an elastic adaptive structure, making it more convenient and firm to fix the adsorbent, and optimizes one end of the support plate into an arc structure, so that it can cooperate well with the limiting groove of the dewar shell.

A process for manufacturing a combined microelectromechanical device envisages: forming, in a sensor wafer, at least a first and a second microelectromechanical structures, at a main surface; forming, in a cap wafer, at least a first and a second cavities, at a respective main surface; forming a getter region inside the first cavity; bonding the main surfaces of the sensor and cap wafers by means of a bonding region, to define a first and a second hermetic environments for the microelectromechanical structures at different pressure values. A raised frame is formed, before the bonding step, in such a way as to be located around the first cavity; the bonding region determines the bonding of the sensor and cap wafers at the raised frame and the definition of the first hermetic environment associated with the first cavity, in a time interval prior to hermetic closure of the second cavity.

The invention discloses a method and equipment for detecting a getter of a ring laser based on machine vision, and belongs to the technical field of laser gyroscope detection. According to the method, the thin film image of the getter is collected, the consumption condition of the getter is recognized by combining the color fading property of the getter after the getter reacts with the impurity gas, meanwhile, the getter parameter and the activation parameter of the ring laser are calculated according to the working condition data of the ring laser during standing and working, and the residual gas capacity of the getter is predicted based on the activation parameter. And combining the suction parameters to fit a suction characteristic function of the ring laser, and further predicting the remaining working time of the getter. According to the method, products with unqualified getter allowance can be effectively screened out, and the application reliability of the ring laser in the fields of aviation, spaceflight and the like is improved.

The invention relates to a method and a device for plating non-evaporable getter films in a high-length-diameter-ratio small-aperture pipeline in batches, the device comprises an upper cavity and a lower cavity, at least four groups of pipe assemblies communicating the upper cavity with the lower cavity are arranged between the upper cavity and the lower cavity, the pipe assemblies are uniformly arranged along the circumferential direction, and the upper cavity and the lower cavity are communicated with each other through the pipe assemblies. Each pipe assembly comprises an upper transition corrugated pipe, an electrode, an upper transition pipe, a pipeline to be coated, a lower transition pipe and a lower transition corrugated pipe which are sequentially communicated from top to bottom; an electrode threaded rod in the electrode is connected with the upper end of a titanium-zirconium-vanadium alloy target through a connector, the lower end of the titanium-zirconium-vanadium alloy target is an overhanging end, and the titanium-zirconium-vanadium alloy target sequentially penetrates through the upper transition pipe, the pipeline to be coated, the lower transition pipe and the lower transition corrugated pipe. And the solenoid is sleeved on the pipe assembly. According to the technical scheme, the quality and performance of the non-evaporable getter film are improved, and meanwhile the batch preparation efficiency is improved.

The present application discloses a pixel-level packaging structure for an uncooled infrared detector and a manufacturing method thereof, comprising an integrated circuit substrate and a pixel device disposed on the upper surface of the integrated circuit substrate; the pixel device comprises a pixel unit and an air-intake unit disposed on one side of the pixel unit, the air-intake unit comprising a getter layer disposed on the upper surface of the integrated circuit substrate, a support layer, and a sealing layer disposed on the upper surface of the support layer; the cavity in the air-intake unit is connected to the cavity in the pixel unit; or the pixel device comprises a getter layer and a reflective layer disposed on the upper surface of the integrated circuit substrate, and an infrared sensor unit disposed above and corresponding to the reflective layer. The pixel device comprises a pixel unit and an air-intake unit disposed on one side of the pixel unit, the getter layer not being disposed in the pixel unit; or the getter layer in the pixel device does not correspond to the infrared sensor unit, thereby avoiding the influence of the getter layer on the infrared sensor unit and improving the performance of the uncooled infrared detector.

The invention relates to the field of semiconductor MEMS (Micro Electro Mechanical System) devices, and discloses a medium-high-entropy alloy air suction target material which is composed of a main element A, an element C and an element B. The content of the main element A is 25-40 at%, the content of the element B is 30-45 at%, and the content of the element C is 30-45 at%; the formula equation is as follows: A < 25-40 > B < 30-45 > C < 30-45 >; the main element A is selected from one or two of V and Co; the element C is selected from one or more of Fe, Pr, Y, Gd, Nd, Er, Sm and Ce. And the element B is selected from one or two of Ti and Zr. According to the invention, the problem of serious contradiction between the air suction performance and the mechanical property of the current semiconductor MEMS sensor packaging material is solved by utilizing the advantages of rich or multi-principal-element alloy, high mixing entropy and the like in the medium-high-entropy alloy.

The utility model discloses a novel environment-friendly gas insulated looped network box which comprises a box body. The box doors are arranged on the front face of the box body, the box doors are all hinged to the box body, strip-shaped plates are hinged to one sides of the box doors, and gaps between the strip-shaped plates and the box doors are very small; the first U-shaped pipe and the second U-shaped pipe are arranged on the side edges of the front face and the back face of the box body, the middle of the top end of the first U-shaped pipe and the middle of the top end of the second U-shaped pipe are communicated through a guide pipe, double air suction pumps are arranged in the middle of the guide pipe, and when the box door is opened for overhauling, the box door is opened to drive the strip-shaped plate to press the pressing switch, so that the time delay switch works; after a certain period of time, the double getter pumps are driven to generate ultra-large suction force which is transmitted into the first U-shaped pipe and the second U-shaped pipe, so that gas on the side of the box body is sucked back into the sleeve through the gas holes, the gas is detected by the nitrogen detector, whether leakage occurs or not is judged, and detection can also be performed by manually pressing the pressing switch when maintenance is not performed.

The utility model discloses a getter film with high initial outbreak rate and lasting moisture absorption rate for a perovskite battery, a support framework layer is an expanded polytetrafluoroethylene microporous film layer, and an active layer is a getter active layer formed by infiltrating a getter into a pore structure of the expanded polytetrafluoroethylene microporous film layer. The composite layer is a getter composite layer formed on at least one side surface of the expanded polytetrafluoroethylene microporous membrane layer through a getter. Through the above mode, the periphery of the active material layer of the perovskite cell in a service environment can be kept in a vacuum state for a long time, and the perovskite cell is ensured to be in a high photoelectric conversion efficiency and a stable state for a long time; the getter film is coated with a back adhesive layer and is non-corrosive, and the getter film can be directly pasted on a glass cover plate of a perovskite cell or on silver, aluminum and copper electrodes for packaging after the release film is uncovered during use; and the initial explosion rate is high, and moisture and oxygen can be quickly absorbed in the packaging cavity within two hours, so that a vacuum state is achieved.

According to the packaging method for the chip atomic clock physical system, the getter with the low activation temperature and the solder ring with the high heat sealing temperature are selected, meanwhile, the temperature gradient with the degassing temperature, the getter activation temperature and the vacuum heat sealing temperature rising in sequence is designed, the getter is deposited on the inner wall of the ceramic cap through the chemical vapor deposition technology, and the chip atomic clock physical system is obtained. The integrated structure of the ceramic cap and the getter is formed, the adsorption area is increased through the full-coverage design of the getter, in the out-of-furnace assembly link, the photoelectric component is fixed through a preset bearing area of the ceramic base, the solder ring is limited through an edge sealing area, and the alignment deviation is detected and adjusted in cooperation with an assembly clamp for positioning and a detection tool for detecting and adjusting. The system to be packaged is ensured to be accurately aligned before entering the furnace, part dislocation caused by view limitation in traditional in-furnace assembly is avoided, the comprehensive effects of equipment demand reduction, production efficiency improvement and packaging precision improvement are finally achieved, and it is ensured that the frequency stability and the service cycle of the chip atomic clock meet the use demand.

The utility model relates to a vacuum plate structure, which is applied to the technical field of vacuum plates and comprises an aluminum plastic film, a core material and a getter, the aluminum-plastic film is provided with two layers, namely an upper aluminum-plastic film layer and a lower aluminum-plastic film layer, and the upper aluminum-plastic film layer and the lower aluminum-plastic film layer are annularly sealed; the core material is filled between the upper aluminum-plastic film layer and the lower aluminum-plastic film layer, the getter is arranged between the upper aluminum-plastic film layer and the lower aluminum-plastic film layer, and the space between the upper aluminum-plastic film layer and the lower aluminum-plastic film layer is vacuumized; the aluminum-plastic film comprises a nylon protective layer, a first aluminum foil layer and a polyethylene PE layer which are sequentially stacked, and the polyethylene PE layer in the upper aluminum-plastic film layer and the lower aluminum-plastic film layer is arranged on the side close to the core material. The space between the upper aluminum plastic film layer and the lower aluminum plastic film layer is filled with the core material and the getter, and vacuumizing treatment is carried out, so that the sound insulation characteristic of the vacuum plate is improved; and the first aluminum foil layer in the aluminum-plastic film can improve the sound insulation index of high-frequency sound in the vacuum plate, reduce the air leakage rate and improve the durability of the vacuum plate.

The invention relates to the technical field of vacuum heat insulation materials, and provides refrigeration equipment, a manufacturing method of a vacuum barrier film, a vacuum heat insulation plate and a manufacturing method of the vacuum heat insulation plate, and the manufacturing method of the vacuum barrier film comprises the steps that the environment where a base material and a getter are located is subjected to vacuum treatment; the base material and the getter are heated respectively, and the activated getter is deposited on the surface of the base material through an atomic layer deposition method to form the getter layer. Wherein the getter and the base material are integrally arranged, so that the production process is simplified to a certain extent, and the production cost is reduced; besides, the getter is uniformly plated on the surface of the base material, so that the contact area of the core material and the getter layer is increased, the gas adsorption efficiency and the vacuum maintaining capability are improved, gas leakage and water seepage of the membrane material can be effectively inhibited, and the space utilization rate of the VIP is optimized; in addition, by optimizing the thickness and distribution of the air suction layer, the heat insulation performance and long-term stability of the VIP can be improved, and therefore the service life of the VIP can be prolonged.

A vacuum insulating panel includes first and second substrates (e.g., glass substrates), a hermetic edge seal, a pump-out port, and spacers sandwiched between at least the two substrates. The gap between the substrates may be at a pressure less than atmospheric pressure to provide insulating properties. The panel may include a getter. The getter may be a thin film getter and / or may be elongated in shape.

The invention relates to a MEMS component having a MEMS element with a chamber, the chamber being at least partially delimited by an ASIC component, the ASIC component having a plurality of conductor track layers which lie one above the other in the y-direction between a cover layer and a bottom layer, the conductor track layers being connected to circuit elements of the ASIC component and / or sensor elements and / or actuator elements of the MEMS element, the ASIC component is adjacent to the chamber via the cover layer, the conductor track layers comprise at least one first conductor track layer and at least one second conductor track layer, the first conductor track layer is arranged between the second conductor track layer and the cover layer, the first conductor track layer comprises at least one first conductor track, and the second conductor track layer comprises at least one second conductor track. The first conductor path has a layer stack consisting of an aluminum layer and a titanium layer arranged one above the other in the y-direction, the titanium layer being arranged between the second conductor path layer and the aluminum layer, the titanium layer having a thickness in the y-direction greater than 40 nm, the second conductor path layer having a copper-containing second conductor path, the thickness of the titanium layer being greater than 40 nm, and the thickness of the aluminum layer being greater than 40 nm. The titanium layer is provided as a getter layer for bonding hydrogen, the hydrogen being releasable from the copper layer of the second conductor track, in particular from the stack of copper-based conductor track layers, and the titanium layer reducing or preventing the entry of the released hydrogen into the chamber.

The utility model belongs to the technical field of printing waste gas treatment, and particularly relates to a voc waste gas treatment device for printing, which comprises a treatment box serving as a treatment cavity, a negative pressure pump mounted on the outer side of the treatment box, a gas suction component connected onto the treatment box and a gas suction pump mounted on the front side of the treatment box, and an output port of the gas suction pump is communicated with the treatment box. The input port of the getter pump is communicated with a connecting pipe, the end part of the connecting pipe is communicated with a corrugated pipe, the outer side of the corrugated pipe is connected with a plurality of groups of branch pipes and a pretreatment component, and the pretreatment component is arranged in the treatment box and is used for filtering and deinsectizing waste gas input by the getter component; the corrugated pipe and the branch pipes are combined, the length of the corrugated pipe is changed, the branch pipes are in butt joint with an external fan cover, then large-area voc waste gas treatment is adapted, the negative pressure pump is matched with the air suction pump, double air inlet negative pressure actions are formed, and waste gas input power is effectively guaranteed.

To suppress the decline in exhaust performance. [Solution] The non-evaporative getter coated component 100 includes a non-evaporative getter material layer 102 and a noble metal layer 103 formed on top of the non-evaporative getter material layer 102, and includes a barrier layer 104 between the substrate 101 and the non-evaporative getter material layer 102. The non-evaporative getter material layer 102 is, for example, a Ti layer. The noble metal layer 103 is, for example, a Pd layer. The barrier layer 104 is a film of either an oxide film 104a of the non-evaporative getter material or a nitride film 104b of the non-evaporative getter material. The oxide film 104a of the non-evaporative getter material is, for example, a TiO2 layer. The nitride film 104b of the evaporative getter material is, for example, a TiN layer.

The utility model relates to the technical field of getter testing, in particular to an automatic cycle testing system for a getter pump. The system comprises a vacuum chamber, a vacuumizing system, a baking temperature control system, an activation power supply, a cooling device and an air supply system, wherein valves, instruments, a heating power supply, a cooling power supply and an activation power supply on a connecting pipeline are connected with a data acquisition system and an automatic control system; besides, the vacuum chamber is divided into a Pm chamber and a Pg chamber by an orifice plate, the Pm chamber is connected with an air supply system, a to-be-detected getter pump is arranged in the Pg chamber, a valve switch in the system is controlled through a data acquisition system and an automatic control system, and circulation of heating activation, low-pressure air chamber pressure adjustment, cooling and air suction test is automatically completed. Meanwhile, the pressure of the Pm chamber and the pressure of the Pg chamber are recorded, and the inspiration rate, the inspiration capacity and corresponding curves are automatically calculated. According to the detection system and method, automatic control of multi-cycle inspiration testing can be realized, and the testing efficiency and the testing accuracy are improved.

The utility model relates to the technical field of bearing production, and discloses a suction device for bearing steel balls, which comprises a support and a getter pump arranged on the rear side of the support. The length of a sliding groove on the right side of a storage box can be changed when the sliding groove moves left and right, and at the moment, the number of the steel balls discharged into the sliding groove can be controlled; therefore, after the second telescopic column extends, the air suction piece moves downwards, an air suction disc of the air suction piece sucks the steel balls after the air suction pump operates, then the second telescopic column retracts to drive the steel balls to move upwards, and then the first telescopic column extends to suck the steel balls. Therefore, the number of the discharged steel balls can be controlled by simply pushing and pulling the sliding groove, the suction number of the steel balls is further controlled, the suction device for the bearing steel balls can suck the specific number of steel balls so as to be matched with other devices for use, the structure is simple, operation is convenient, later overhaul and maintenance are simple, and the production efficiency is high. And the suction device for the bearing steel balls is convenient to use.

The utility model discloses an upper adsorber equipment, including conveying device and blanking device, conveying device includes conveyer belt and conveying frame, and conveyer belt rotatable is established on conveying frame, blanking device includes frame body, base, storage tube and horizontal push mechanism, and frame body is erected on conveying frame, and base sets up on frame body and is located conveying belt top, and storage tube sets up on base, and forms storage cavity in storage tube, and the lower extreme of storage tube is the discharge gate, and forms the push material space between discharge gate and base, and horizontal push mechanism sets up on base, and horizontal push mechanism includes the horizontal push piece of push material space transverse movement. The utility model discloses through setting up conveying device and blanking device, realizes the automatic adsorber on core material, is applicable to the automatic batch production of vacuum heat insulation board.

Coated components and their methods of formation are provided. The coated component includes: a ceramic matrix composite substrate comprising silicon carbide and having a surface; a bond coat on the surface of the substrate; and an environmental barrier coating on the bond coat. The bond coat includes a plurality of discrete particles dispersed within a matrix phase that includes mullite. The plurality of discrete particles includes an oxygen getter and a transition metal oxide.

The utility model discloses a kind of high-purity germanium detector vacuum life measuring device, including vacuum generation module and detection component, detection component is by first detection module and second detection module intercommunication composition, vacuum generation module and detection component intercommunication;First detection module includes first vacuum angle valve, vacuum leak and release gas test chamber and first vacuum gauge;Second detection module includes second vacuum angle valve, getter test chamber, getter sample chamber, second vacuum gauge, fine adjustment valve and high-purity test gas tank;The high-purity germanium detector vacuum life measuring device of this is vacuumized to detection component by vacuum generation module, subsequently detects the leak and release gas amount of high-purity germanium detector by first detection module, and then detects the getter gas suction capacity by second detection module, i. e. The vacuum life of high-purity germanium detector can be detected and calculated;The device can effectively detect the vacuum performance of high-purity germanium detector, provide support for the maintenance of high-purity germanium detector, ensure its detection accuracy.

The invention relates to the technical field of getters, and discloses a getter for a vacuum insulated panel and a preparation method of the getter. The getter for the vacuum insulated panel comprises the following components in percentage by mass: 55-65% of calcium oxide, 12-18% of activated aluminum oxide, 6-8% of manganese dioxide, 4-6% of copper oxide, 3-5% of yttrium oxide, 5-7% of zirconium dioxide and 1-2% of chromium powder. The preparation method of the getter comprises the following steps: S100, carrying out ball milling treatment on calcium oxide, activated aluminum oxide, manganese dioxide, copper oxide, yttrium oxide, zirconium dioxide and chromium powder to obtain powder, and drying the powder; s200, mixing the dried powder with deionized water and polyvinyl alcohol, and drying to prepare porous spherical particles; s300, after gradient sintering is conducted on the porous spherical particles, rapid cooling is conducted, and particles of a multi-stage pore channel structure are obtained; and S400, dipping the particles with the hierarchical porous structure in a chromic acid solution, and drying to obtain the getter. According to the technical scheme, the technical problems of low efficiency and insufficient adsorption capacity of a getter in the prior art are solved.

The present invention relates to the field of new materials. Disclosed are a composite getter material capable of efficiently absorbing nitrogen, and a preparation method therefor. The composite getter material comprises a main component A and an additive component B. The main component A and the additive component B form an aAbB composite getter, wherein a+b=100%, 50 wt%≤a<100 wt%, and 0 wt%<b<50 wt%. The composition of the main component A is (SiO2)1-x-y-z(Al2O3)x(CaO)yCz, wherein 20 wt%≤x≤70 wt%, 10 wt%≤y≤60 wt%, and 0 wt%≤z≤40 wt%. The additive component B is a metal compound Zr-Ti-V getter material. The aAbB composite getter of the present invention has greatly improved absorption capacity for CO and H2O; moreover, the getter material can also absorb N2 on the basis of absorbing CO and H2O, thereby ameliorating the problem of existing metal oxides having poor N2 absorption capacity, and also improving the absorption capacity of the metal oxide (SiO2)1-x-y-z(Al2O3)x(CaO)yCz for CO, H2O and N2.

The invention relates to the field of getter pumps, and discloses a composite getter pump which comprises a getter pump part and an ion pump part which share the same shell. The getter pump part comprises a getter pump core arranged in the air suction cavity of the shell; the ion pump part comprises an anode barrel, a pair of magnets, a pair of cathode plates, a pair of bottom plates and shielding iron; the anode barrel is arranged in the shell and is electrically connected with an electrode arranged on the shell; the pair of magnets, the pair of cathode plates, the pair of bottom plates and the shielding iron are arranged on the periphery of the anode barrel to form an ion pump air exhaust cavity; and the air suction cavity is communicated with the ion pump air exhaust cavity. The structure is compact, the integration degree is high, and the size and the weight are obviously reduced.

A method for manufacturing a glass panel unit includes a working step, an assembling step, a bonding step, and a gas exhausting step. The working step includes a getter material making step including obtaining a getter material containing a zeolite and a cerium compound. The assembling step includes preparing an assembly. The bonding step includes melting a peripheral wall to hermetically bond a first glass pane and a second glass pane. The gas exhausting step includes exhausting a gas from an internal space through an exhaust port to turn the internal space into a vacuum space.