87 results about "Diamond crystal" patented technology

The invention belongs to the technical field of chemical vapor deposition of diamond films, and particularly relates to a high-temperature pulse bias assisted diamond single crystal heteroepitaxial growth method, which comprises the following steps: carrying out ultrasonic cleaning and etching pretreatment on an Ir / YSZ / Si composite substrate; self-assembling a polystyrene nanosphere template on the surface of the substrate; placing the substrate covered by the template in a low-power oxygen plasma etching machine for etching to form a regular nano pit array; putting the etched substrate into a microwave plasma chemical vapor deposition (MPCVD) reaction cavity, and applying-300V short pulse bias voltage to realize nucleation of high-density diamond crystal nuclei; after the bias voltage is closed, conventional diamond epitaxial growth continues to be carried out in the MPCVD cavity; after the growth is finished, the self-supporting diamond film is separated through chemical dissolution, a nano pit template is formed through pre-etching, and one-time-300V short pulse bias is combined, so that high-density and highly-uniform sp3 crystal nucleus nucleation can be realized on the surface of the substrate, and the distribution consistency and nucleation efficiency of diamond crystal nucleation are improved.

The invention provides an argon gas cluster ion polishing machine and a diamond crystal workpiece polishing method. The polishing machine comprises a pulse control valve used for generating pulse type airflow beams, and a nozzle device, a beam splitter, an ionizer, an absorption electrode, an accelerator and a permanent magnet which are sequentially arranged in the spraying direction of the pulse type airflow beams. The nozzle device is used for spraying pulse type airflow beams; wherein the pulse type airflow beam comprises divergent argon atom airflow and neutral cluster particle flow concentrated on a central shaft; the beam splitter is used for screening and separating neutral cluster particles and argon atoms in the pulse type airflow beam; the ionizer is used for ionizing the neutral cluster particles into cluster ions; the suction electrode is used for guiding the ionized ionomer clusters to form an initially converged conical airflow beam; the accelerator is used for focusing and accelerating the conical airflow beam; the permanent magnet is used for separating ions with different masses to form a pure cluster ion beam; and high-quality polishing of the surface of the diamond crystal workpiece can be achieved.

The invention provides a bionic gradient-based TPMS double-channel heat exchanger structure design method, which relates to the technical field of heat exchanger design, and comprises the following steps: S1, creating a cube reference model, determining the position of each node in the reference model according to the spatial topological relation of a diamond crystal structure, and carrying out three-dimensional space connection to form a diamond unit cell support structure; s2, parametric modeling of the multiple tubular objects is conducted through a curved surface tool according to the diamond unit cell support structure, and a tubular curved surface network is generated; s3, performing equidistant offset operation on the tubular curved surface network to obtain a TPMS unit cell structure; s4, performing three-dimensional array on the TPMS unit cell structure to obtain an HRD lattice structure model; and S5, carrying out gradient parameterization regulation and control on the diameter of the fluid channel of the HRD lattice structure model. The heat exchanger has the beneficial effects that unification of light weight and high rigidity is achieved, and the heat exchange efficiency can be remarkably improved while high rigidity and light weight are achieved.

The invention discloses a preparation method of a high-quality self-supporting polycrystalline diamond substrate. The preparation method comprises the following steps: obtaining a larger first substrate and a smaller second substrate; the molybdenum substrate is a polished molybdenum metal substrate; sowing diamond seed crystals on the first substrate by using an ultrasonic sowing method, and growing a nanocrystalline diamond epitaxial layer by using a CVD (Chemical Vapor Deposition) process; cutting the first substrate by using precise laser to obtain an annular polycrystalline diamond solid seed crystal of which the inner diameter is greater than that of the second substrate; placing a second substrate in the inner diameter of the second substrate, guiding generated tiny diamond grains to the second substrate through a boundary induction mechanism and applying direct current bias voltage, and uniformly wrapping the tiny diamond grains to form a self-supporting polycrystalline diamond substrate; according to the preparation method of the self-supporting polycrystalline diamond substrate, the orientation consistency and the crystallization quality of a diamond film are remarkably improved, and the prepared self-supporting polycrystalline diamond substrate has the advantages of being low in surface roughness, compact in structure, simplified in follow-up process and the like.

Method of automated spatial patterning of defect centers (6) in a substrate, particularly a diamond crystal lattice (50), comprising the following steps: - providing a defect center (6) distribution to a machine-learning model, the machine-learning model being particularly trained to determine an output for displacement of at least one defect center (6) based on the provided defect center (6) distribution, the machine learning model providing an output for displacement of individual defect centers (6), - particularly providing a substrate, particularly diamond, comprising defect centers (6) in a bulk structure of the substrate, particularly a bulk diamond crystal lattice (50), - detecting the position of at least one defect center (6) in the bulk structure of the substrate, particularly the bulk diamond crystal lattice (50), and - displacing (61) the at least one defect center (6) in the bulk structure of the substrate, particularly the bulk diamond crystal lattice (50), particularly site-specific, in a defined direction.

The invention discloses a design method for crystal face layout and grinding direction of a diamond biological slicing cutter, and relates to the technical field of ultra-precision machining. The method comprises the following steps of: representing the geometric shape of a cutter by adopting a surface patch, respectively taking three crystal orientations (100), (010) and (001) of a monocrystal diamond crystal as an x axis, a y axis and a z axis, and describing a geometric model of the cutter by giving spatial positions of important nodes; setting a characteristic space, and considering deflection angles of a cutter relative to three crystal orientations of the single crystal diamond and grinding angles on front and rear cutting surfaces; setting three optimization targets of machining efficiency, blade use strength and blade straightness; and executing a genetic algorithm to iteratively output a feasible cutter sharpening scheme. A feasible crystal face layout and a grinding direction are tested based on an NSGA-II multi-target genetic algorithm, a surface patch is adopted to represent the geometrical shape of a tool, three optimization targets of machining efficiency, cutting edge strength and cutting edge straightness are comprehensively considered, and an optimal layout scheme is obtained through screening iteration.

The application relates to a deposition chamber structure and an MPCVD device, and belongs to the field of diamond synthesis devices. The technical scheme is as follows: a deposition chamber structure comprises a base, a tubular quartz window is fixedly arranged on the base, an upper cover is sealingly connected above the quartz window, a metal ring is arranged outside the quartz window, a plurality of horizontally arranged and vertically arranged microwave feeding slits are arranged in the middle region of the metal ring, a resonant metal cavity is arranged outside the middle region of the metal ring, the resonant metal cavity is used for being connected with a microwave source, a growth base capable of multi-stage lifting is arranged in the quartz window, the dimension of microwave feeding is increased, a discharge area is coupled above the growth base to form a plasma with the characteristics of large size, uniform stability and high energy density, the growth base can be lifted in multiple stages, the deposition quality of a growth sample is optimized, the deposition area of the growth sample is expanded, and preparation of a high-quality large-size diamond crystal is realized.

The utility model discloses a cleaning device for diamond crystals, and relates to the technical field of diamond machining. The screening device comprises a box body, a feeding mechanism and a cleaning and overturning mechanism are arranged in the box body, and two matched screening mechanisms are arranged in the box body; the screening mechanism comprises two fixing frames arranged in the box body, each fixing frame is provided with two elastic pieces, and a screening plate is arranged at one ends of the multiple elastic pieces. By means of the rotating rod, the cam sleeve can drive the material screening plate to continuously move upwards under the driving of the transmission mechanism, the material screening plate can be driven to rapidly move downwards after rising through the pressure of the rotating rod under the arrangement of the elastic piece, and the material screening plate and the elastic piece are matched for use, so that the material screening efficiency is improved. According to the diamond screening device, the screening plate can be rapidly vibrated, so that the situation that diamonds on the screening plate are accumulated during filtering can be avoided, and the diamond cleaning efficiency is improved.

The invention discloses a low-loss preparation method of a single crystal diamond wafer. The low-loss preparation method comprises the following steps: A, carrying out laser ablation on the surface of a single crystal diamond crystal ingot; b, performing laser-assisted polishing on the surface; c, the ultrafast pulse laser is modulated into N modified light spots, all the modified light spots are made to scan at the corresponding depth positions according to a preset path at the same time, and a scanning face formed by the same modified light spot covers the cross section of the single crystal diamond crystal ingot in the 100 crystal face direction, n laser modified layers distributed in the direction perpendicular to the 100 crystal face in the single crystal diamond crystal ingot are formed after scanning; d, performing stress-induced separation on the monocrystal diamond crystal ingot; e, performing laser ablation on the cutting surface of the single crystal diamond wafer; and F, the cutting face is subjected to laser-assisted polishing. According to the low-loss preparation method of the single-crystal diamond wafer, the material loss of the single-crystal diamond crystal ingot can be reduced, and the wafer yield of the single-crystal diamond crystal ingot can be increased.

The present invention proposes a multimode laser frequency comb device and a degenerate multimode control method. The device includes a diamond crystal, an optical frequency degeneration module, and a degeneracy control module. Based on the multimode laser frequency comb device, the present invention applies stress to the diamond crystal according to the degenerate multimode control method, regulating the lattice constant of the diamond crystal, thereby regulating the degeneracy of Raman vibrations and controlling the optical frequency degeneration mode. This converts an existing single-mode laser comb into a multimode laser comb output. This can generate a multimode optical frequency comb consisting of a single mode or multiple single-mode frequency combs with spectral width spacing. This multimode optical frequency comb has the advantages of wide wavelength coverage, large spectral spacing, and multiple spectral width spacings that are tunable.

The invention discloses a preparation method of a large-size diamond-based gallium nitride wafer, and belongs to the technical field of semiconductor materials. The method comprises the steps that gallium nitride wafers are separately placed in grooves of a diamond deposition tray for diamond deposition, the diamond nucleation process on the surface of gallium nitride is creatively designed, it is guaranteed that diamond crystal nuclei stably and orderly grow on the surface of the gallium nitride wafers, and a foundation is laid for subsequent stable and orderly deposition of a diamond substrate. According to the method, the problems of wafer warping, wafer fragmentation, diamond and gallium nitride stripping and the like caused by mismatching of thermal expansion coefficients of diamond and gallium nitride are solved, the thermal mismatching rate is reduced, and the bonding stability and the interface thermal conductivity between the gallium nitride wafer and the diamond substrate are improved.

The invention provides substrate table system MPCVD equipment. The substrate table system MPCVD equipment comprises a microwave reflection table and a large molybdenum table which are arranged in a stacked mode. The substrate table is arranged on one side, far away from the microwave reflection table, of the large molybdenum table; wherein one side, far away from the microwave reflecting table, of the large molybdenum table is provided with an annular bulge, and the annular bulge is coaxial with the substrate table and surrounds the periphery of the substrate table. By means of the arrangement, the annular boss is arranged on the periphery of the substrate table, plasma formed above the substrate table can be evenly distributed, the temperature difference between the center and the edge is further reduced, it is guaranteed that the diamond growth rate is consistent, the stress of diamond crystals is reduced, and the cracking rate is reduced.

A quantum device according to the present invention comprises a first diamond crystal layer that has a first center point and is shaped to extend in four mutually orthogonal directions from the first center point, a second diamond crystal layer that has a second center point and is shaped to extend in four mutually orthogonal directions from the second center point, and a color center that is on one of the first diamond crystal layer and the second diamond crystal layer. The first diamond crystal layer and the second diamond crystal layer comprise a quantum bit element that is layered such that at least a portion of the first center point and the second center point overlap, a first optical waveguide that is connected to each of four first end parts of the first diamond crystal layer, and a second optical waveguide that is connected to each of four second end parts of the second diamond crystal layer.　

Provided are a substrate for epitaxially growing a diamond crystal, having at least a surface made of a metal, in which the above surface made of the metal is a plane having an off angle φ of more than 0°, and the full width at half maximum of the X-ray diffraction peak from the (002) plane by the X-ray rocking curve measurement at the above surface made of the metal is 300 seconds or less; and a method of manufacturing a diamond crystal, including epitaxially growing a diamond crystal on the above surface made of the metal of the above substrate.

The invention provides a diamond surface quality online sorting method and system for MPCVD, relates to the technical field of diamond growth monitoring, is applied to MPCVD equipment, and the MPCVD equipment is used for generating diamond crystals. Preprocessing the original image to obtain a preprocessed image; s2, extracting and processing the preprocessed image through multi-dimensional surface features to respectively obtain texture features, light intensity distribution features and geometric morphology features of the diamond; s3, a quality evaluation model is constructed and used for inputting texture features, light intensity distribution features and geometric morphology features of the diamond and outputting a diamond surface quality detection result, online real-time monitoring of the surface quality in the MPCVD diamond growth process is achieved, a traditional off-line detection mode is broken through, and the quality of the diamond is evaluated. The problem that the surface defect of the crystal cannot be dynamically tracked within a hundreds of hours of growth cycle is solved.

Method (20) for displacing defect centers (6) in a substrate for quantum applications in a defined direction, the method comprising the following steps - in particular providing a substrate, in particular diamond, which comprises defect centers (6) in a bulk substrate structure, in particular a massive diamond crystal lattice (50), - detecting the position of at least one defect center (6) in the bulk substrate structure, in particular the massive diamond crystal lattice (50), and - Displacing (61) the at least one defect center (6) in the volume substrate structure, in particular the massive diamond crystal lattice (50), in particular in a location-specific manner, in a defined direction.

The invention discloses a deposition chamber structure and MPCVD equipment, and belongs to the field of diamond synthesis equipment. According to the technical scheme, the deposition chamber structure comprises a base, a tubular quartz window is fixedly arranged on the base, an upper cover is connected to the upper portion of the quartz window in a sealed mode, a metal ring is arranged on the outer side of the quartz window in a sleeving mode, and a plurality of transversely-arranged and vertically-arranged microwave feed-in gaps are formed in the middle area of the metal ring; the outer side of the middle area of the metal ring is sleeved with a resonance metal cavity, the resonance metal cavity is used for being connected with a microwave source, a growth base table capable of lifting in a multi-stage mode is arranged in the quartz window, the microwave feed-in dimension is increased, and plasma which is large in discharge area, uniform, stable and high in energy density is formed above the growth base table in a coupling mode. And the growth base table can be lifted in a multi-stage manner, so that the deposition quality of the growth sample is optimized, the deposition area of the growth sample is expanded, and the preparation of the high-quality large-size diamond crystal is realized.

Provided in the present disclosure are a substrate stage system and an MPCVD apparatus. The substrate stage system comprises a microwave reflection stage and a large molybdenum stage, which are arranged in a stacked manner; and a substrate stage, which is arranged on the side of the large molybdenum stage away from the microwave reflection stage, wherein an annular boss is arranged on the side of the large molybdenum stage away from the microwave reflection stage, and the annular boss is coaxially arranged with the substrate stage and surrounds the periphery of the substrate stage. In this way, by means of the arrangement of the annular boss on the periphery of the substrate stage, plasma formed above the substrate stage can be relatively uniformly distributed, such that the temperature difference between the center and the edge is reduced so as to ensure that the diamond growth rate is consistent, thereby reducing the diamond crystal stress and thus also reducing the splitting rate.

The invention provides a preparation method of a self-supporting substrate for uniform growth of diamond, and relates to the field of diamond crystal growth. The method comprises the following steps: 1) growing a special diamond layer and a self-supporting diamond layer to obtain a self-supporting diamond substrate; (2) plasma etching is conducted on the back face of the self-supporting diamond substrate; (3) polishing the growth surface of the self-supporting diamond substrate; the method comprises the steps of (1) preparing a base with a rough layer surface, (2) preparing a back surface of the self-supporting diamond substrate, (3) preparing a rough layer surface of the base, (4) taking the base with the rough layer surface, and placing the back surface of the self-supporting diamond substrate on the rough layer surface of the base, and (5) carrying out compression joint on the self-supporting diamond substrate and the base to obtain the self-supporting substrate.The self-supporting substrate provided by the invention is beneficial to realizing heat distribution of a uniform interface.

The application discloses a narrow linewidth tunable Raman laser and an emission method, relates to the field of Raman lasers, and comprises a half-wave plate, a pump source and a focusing lens which are arranged on the two sides of the half-wave plate, a laser resonant cavity is arranged on the other side of the focusing lens, a cavity locking frequency doubler is arranged on the other side of the laser resonant cavity, a shaping lens group is arranged between the laser resonant cavity and the cavity locking frequency doubler, a dichroic mirror is arranged on the other side of the cavity locking frequency doubler, the laser resonant cavity is arranged in a V-shaped cavity structure which is composed of an input mirror, an output mirror and a reflective blazed grating, a diamond crystal is arranged between the input mirror and the output mirror, and the reflective blazed grating is arranged below the diamond crystal. The stability of the laser resonant cavity is improved through the design of the cavity mirror, the wavelength adjustment is accurate to 0.01 nm, and the loss in the transmission process is reduced through the cavity locking frequency doubler of the ring-shaped cavity structure.

The invention discloses a three-stage step type nanoindentation creep test indenter and a preparation method thereof. A working part of the pressure head body is composed of three platform-shaped steps which are sequentially distributed in the direction of a central axis, the cross sectional areas of the three platform-shaped steps are increased in a stepped mode, the overall outline of the pressure head body is in a triangular pyramid shape, the surface of the pressure head body is an sp3 hybrid diamond crystal surface subjected to low-temperature catalytic molten salt etching treatment and without an amorphous carbon damage layer, and the curvature radius of the tip of the first step is smaller than 10 nm; the preparation method comprises the following steps: processing a blank by using a focused ion beam; performing pre-passivation to form a tungsten-containing solid precursor film; immersing into low-temperature molten salt containing a vanadium catalyst for reaction; and finally quenching and cleaning. According to the method, through a catalytic cooling and adsorption shielding cooperation mechanism, the sharp point sharpness is effectively kept while an amorphous carbon damaged layer is removed, parasitic creep interference caused by an amorphous layer is eliminated, and cross-scale graded high-precision testing is achieved.

The application discloses an ultrathin diamond clamping device, which comprises, from top to bottom, a graphite pressing block, a polycrystalline diamond limiting sheet, a polycrystalline diamond bottom sheet, a graphite bottom plate and graphite screws for fixing the above-mentioned elements; the polycrystalline diamond limiting sheet is provided with at least one rectangular notch, and the limiting groove for positioning the ultrathin diamond crystal sheet is formed by the rectangular notch and the polycrystalline diamond bottom sheet; the graphite pressing block covers the ultrathin diamond crystal sheet, the graphite screws pass through the graphite pressing block, the polycrystalline diamond limiting sheet and the polycrystalline diamond bottom sheet in sequence and are connected with the graphite bottom plate, the graphite pressing block is extruded by twisting the graphite screws, pressure is applied to the ultrathin diamond crystal sheet to realize clamping. According to the application, the ultrathin diamond clamping device has the advantages of low thermal load, small clamping stress, small radiation damage and the like, reliably supports the stable and efficient generation of the seed laser by the monochromator, and finally helps to realize the high-stability operation of the fully-coherent free electron laser.

The invention relates to a position sensor for the fluorescence-image-based position sensor system of at least one magnetised body (MK). The position sensor comprises a plurality of sensor elements (SE) which are arranged in one or more sensor element layers (SES). Said sensor element layer (SES) can expressly form a continuum, wherein the sensor elements can form a continuous layer of sensor elements lying directly on one another. Detection takes place via paramagnetic centres (NV), in particular NV centres in diamond crystals, which are excited by pump radiation (LB) to emit fluorescent radiation (FL). The intensities of the fluorescent radiation are optically captured by means of photodetector arrays (LSA). The magnetised body (MK) has magnetically differentiated surface regions and can move in up to six mechanical degrees of freedom. The fluorescence images are used to capture or estimate the position, orientation, curvature or distance of the body (MK) by means of computer- or machine-implemented algorithms. The position sensor is suitable in particular for high-precision position capture, even in the event of minimal movements or at a standstill, for example for applications in electric motors.

The present invention provides an intracavity-pumped diamond mid-infrared Raman laser generating device and method. The device: a high-brightness laser pump source, a reflective laser beam expander-focusing device, a resonator input mirror, a laser gain medium, and a resonator output mirror are sequentially arranged at intervals to form a laser generating device. The method: according to the target laser wavelength, the optimal pump wavelength is calculated by the first-order and second-order Raman frequency shift formulas; according to the Raman gain relationship between the pump wavelength and the diamond crystal, the optimal values of the pump spot size, the mode field diameter of the Raman signal laser, and the diamond crystal length are designed; the resonator input mirror and the resonator output mirror are precisely adjusted to obtain the required Raman signal laser output; the switching of the output laser wavelength is achieved through the type of dielectric film of the resonator output mirror; continuous tunability of any wavelength from 2500 nm to 3780 nm of the output laser is realized. The device and method can achieve multi-wavelength output and can effectively output mid-infrared lasers in the 2 μm - 5 μm band.

1. Name of the Design Product: Diamond Crystal Flower Vase. 2. Use of the Design Product: For flower arrangement. 3. Design Key Points of the Design Product: Lies in the shape. 4. Picture or Photograph that Best Illustrates the Design Key Points: Perspective View 1.

A double-roller crushing device for abrasive machining comprises rotating rollers which are arranged in pairs and driven by a power device to rotate and work, the two rotating rollers are arranged side by side, polycrystalline diamond layers are arranged on the peripheral faces of the rotating rollers, the double-roller crushing device further comprises a shell, and the rotating rollers are arranged in the shell. A material receiving groove is formed in the position, corresponding to an area formed by projections of the outer side faces and the end faces of the two rotating rollers, of the inner bottom of the shell, and abrasion-resistant ceramic protective layers are arranged on the material receiving groove and the inner wall of the shell. According to the rotating roller, the polycrystalline diamond material is selected as the working surface layer of the rotating roller, the hardness of the rotating roller is equal to that of diamond, the rotating roller is formed by sintering diamond micro-powder and a binder at high temperature and high pressure, the size can be several centimeters and is larger than that of a diamond crystal, and the rotating roller has cuttable and weldable workability; the wear resistance and durability of the equipment can be ensured, and batch production can be carried out; and the feeding device arranged at the upper part of the shell adopts a flat opening design, so that uniform blanking is facilitated, local abrasion of a roller surface is reduced, and the service life of equipment is prolonged.

The utility model relates to the technical field of large diamond single crystals, in particular to a cleaning device for large diamond single crystals, which comprises a bottom plate and a main body, the main body is arranged at the upper end of the bottom plate, a supporting frame is arranged on one side of the main body, supporting legs are fixedly mounted at the upper end of the bottom plate, a material conveying mechanism is arranged on one side of the main body, a material conveying frame is arranged in the material conveying mechanism, and the supporting legs are fixedly mounted at the lower end of the main body. A side plate is arranged on one side of the material conveying frame, an inclined plate is arranged on the material conveying frame, a second servo motor is arranged on one side of the material conveying frame, a second main gear is rotationally installed at the output end of the second servo motor, a first conveying roller is arranged on one side of the second main gear, and a second auxiliary gear is arranged on one side of the second main gear. A second conveying roller is arranged on one side of the second auxiliary gear, a cleaning mechanism is arranged in the main body, a cleaning tank is arranged in the cleaning mechanism, a tank cover is arranged at the upper end of the cleaning tank, a feeding port is formed in the tank cover, and a water injection pipe is arranged on one side of the tank cover.

A magnetic field gradiometer for determining a magnetic field gradient includes at least one excitation light source for emitting excitation light, and two spatially spaced-apart measuring areas for magnetic field measurement. Color centers in diamond are arranged in the two measuring areas. The color centers emit fluorescent light upon excitation using the excitation light. The magnetic field gradiometer further includes at least one microwave emitter for applying at least one microwave field to the spatially spaced-apart measuring areas, two detectors for detecting the fluorescent light from the two spatially spaced-apart measuring areas, and an evaluator for determining the magnetic field gradient based on the fluorescent light detected by the two detectors. The two measuring areas are configured as freestanding measuring waveguides of a common diamond crystal. The diamond crystal is used as a substrate for the measuring waveguides.

1. The name of this design product: Home lamp (diamond-shaped crystal lamp). 2. Application of this design product: for indoor lighting. 3. The key point of the design of this product lies in its shape. 4. The picture or photo that best illustrates the design points: Stereoscopic drawing 1.

The invention belongs to the technical field of diamond processing, and particularly relates to an MPCVD diamond high-efficiency crystal growth process based on multi-parameter coordinated regulation, which comprises the following steps: selecting a proper seed crystal for detection: pretreating the seed crystal to implement a crystal growth step; carrying out post-treatment operation on the prepared crystal; carrying out cleaning treatment; carrying out cutting treatment; grinding and polishing the finished diamond crystal; and carrying out quality inspection after grade identification on the finished product, and screening out unqualified products. According to the method, efficient diamond crystal growth can be achieved by optimizing gas components and gas flow distribution and combining cooperative regulation and control of radio frequency power and bias voltage, the growth rate is remarkably increased, in addition, through multi-parameter cooperative control, especially accurate regulation of temperature, gas flow and gas components, the diamond crystal quality is remarkably improved, and the method is suitable for large-scale production. According to the process, the defect density and stress are effectively controlled, the reaction conditions are optimized, and the energy consumption and resource waste are reduced, so that the production cost is reduced.