30 results about "Diamondoid" patented technology

The invention discloses a wear-resistant diamond-like carbon composite film on the surface of a rubber material and a preparation method and application of the wear-resistant diamond-like carbon composite film. The abrasion-resistant diamond-like carbon composite film sequentially comprises a Ti transition layer and a DLC functional layer. Wherein the Ti transition layer is sputtered and deposited on the surface of a rubber material through a direct-current magnetic control power supply, so that the bonding strength of the film can be greatly improved; the DLC functional layer is deposited on the Ti transition layer, and the structure of the DLC functional layer can be flexibly regulated and controlled by adjusting on and off of a Ti target power supply, so that the tribological performance and the environmental adaptability of the composite film are optimized. The abrasion-resistant diamond-like composite film has the advantages of being high in bonding strength, low in friction coefficient, high in environmental adaptability and the like, can be used for surface strengthening and service life prolonging of rubber sealing materials in the marine environment, and is suitable for large-scale industrial production.

This invention discloses a DLC diamond coating, its preparation, and its application method, relating to the field of diamond-like carbon coating technology. Specifically, it includes the following steps: Step S1, substrate graded cleaning and ion etching pretreatment; Step S2, in-situ synthesis of a Ti-TiC-SiC gradient transition layer; Step S3, construction of a silicon / boron co-doped nanocomposite functional layer. This invention alleviates interfacial stress by constructing a gradient transition layer, utilizes a periodic modulation process to form a soft-hard alternating nanolayered structure, and combines a silicon-boron co-doping strategy; effectively solving the problems of high internal stress, poor adhesion, and easy high-temperature failure in coatings, achieving a balance between high hardness, high toughness, and excellent high-temperature wear resistance.

The invention provides anti-halation glass and a vehicle. The anti-halation automobile glass comprises a glass plate; an anti-halation film is arranged on the surface of the glass plate, and a transition layer of the anti-halation film is arranged on the surface; the anti-halation film comprises a transition layer, a silicon-doped diamond-like layer and an oleophobic layer which are sequentially arranged, and the oleophobic layer is located in at least part of the area of the surface of the silicon-doped diamond-like layer; and the content of silicon atoms in the silicon-doped diamond-like carbon layer is 15-20 at%. The invention further provides a vehicle provided with the anti-halation glass. The anti-halation film of the anti-halation glass provided by the invention can eliminate halation defects and radial defects generated during imaging.

The application discloses a laparoscope and a preparation method thereof. In order to improve the wear resistance of the surface of the laparoscope, a silicon oxide / diamond-like carbon composite coating is prepared. Research shows that a low content of diamond-like carbon has little influence on the contact angle of the composite coating, and all can meet the demand of the anti-fog of the coating, but when the content of the diamond-like carbon reaches 50%, the contact angle of the composite coating is obviously increased, and at this time, the composite coating is not suitable for being used as the laparoscope material. At the same time, with the increase of the content of the diamond-like carbon in the composite coating, the wear resistance of the composite coating is gradually improved. In consideration of the wear resistance and the anti-fog performance of the material, the carbon content is preferably controlled in a range of 7% to 29%.

The invention discloses an anti-oxidation special steel high-speed wire decarburization prevention material which is prepared from the following components in parts by weight: 30-50 parts of a component A, 30-50 parts of a component B, 10-30 parts of a component C, 10-30 parts of a component D and 5-10 parts of a pigment, the component A is internally provided with boron modified adamantane, epoxy bentonite, silicon phosphate, amino acid potassium and amino modified triazine, and the component D is internally provided with boron modified adamantane, epoxy bentonite, silicon phosphate, amino acid potassium and amino modified triazine. The component B is internally provided with nano graphene, polyvinyl alcohol, a transparent film and benzoic acid, and the component C is internally provided with SiO2, Al2O3, talcum powder and gypsum powder. After the product is brushed, a coating is compact, the texture is hard, no gap or void exists, the oxidation loss of steel and iron during heat treatment and the procedure of removing oxide skin are avoided through coating smearing, and the coating quality is improved. The specification and the size of the workpiece are more accurate; fatigue strength reduction caused by metal decarburization during heat treatment is avoided, surface gas absorption of metal during heat treatment is avoided, and metal embrittlement is prevented.

This application discloses a diamond-like carbon (DLC) crystal material, its preparation method, and its application as an infrared nonlinear optical material, belonging to the field of crystal preparation technology. The DLC crystal material has a triclinic structure with the chemical formula AM5Q8; wherein A is selected from at least one of Na, K, Rb, and Cs; M is selected from at least one of Ga and In; and Q is selected from at least one of S, Se, and Te. This crystal material exhibits a frequency doubling effect 0.5-5 times that of AgGaS2 and a laser damage threshold 1-50 times that of AgGaS2, demonstrating significantly improved performance and making it a potential infrared nonlinear optical material.

The invention provides a seven-layer interpenetrating Zn-MOF material, which has a chemical general formula of [Zn (SDC) (pyan) (H2O)] n, belongs to a monoclinic system, has a space group of C < 2 > / c, and has cell parameters of a = 14.2585, b = 24.0295 (18), c = 9.5895 (6) and V = 3284.5 (4) 3. The component SDC2 <-> is obtained by removing two protons from rigid dicarboxylic acid stilbene diacid, the structure of H2SDC is as shown in a formula I, and the structure of pyan is as shown in a formula II. The prepared seven-layer interpenetrating Zn-MOF material does not contain rare earth elements, and the calculated value of the Zn element content is 9.59%. A metal-organic framework with a diamond-like network structure is adopted, a stable complex network is formed through seven-fold interpenetration, and organic components SDC2-and pyan have a large conjugate pi electronic system. The preparation conditions are mild, the yield is about 67%, and the good thermal stability is achieved; the hybrid light-emitting device HLED made of the new material can emit high-brightness blue-green light during working.

The invention provides a slip sheet and a manufacturing method thereof, a compressor and refrigeration equipment, relates to the technical field of compressors, and aims to solve the problems of poor wear resistance and poor lubricating effect of the slip sheet in the prior art. The sliding vane provided by the invention is applied to the compressor and comprises a sliding vane base body and a plurality of sliding vanes, the diamond-like supporting layer is arranged on one side of the slip sheet base body; and the lubricating layer is arranged on the surface, away from the slip sheet base body, of the diamond-like carbon supporting layer, and the lubricating layer comprises sulfur-molybdenum compounds and graphite. The diamond-like supporting layer and the lubricating layer with specific components are sequentially arranged on the surface of the sliding vane base body, the advantages of high hardness, high abrasion resistance, high corrosion resistance and the like of a diamond-like material are reserved, the friction coefficient is remarkably reduced through the synergistic lubricating effect of the sulfur-molybdenum compound and the graphite, and the super-lubricating effect is achieved.

The invention discloses a diamond-like carbon (DLC) coating and a preparation and use method thereof, and relates to the technical field of diamond-like coatings, and the preparation and use method specifically comprises the following steps: step S1, graded cleaning and ion etching pretreatment of a base material; step S2, in-situ synthesis of a Ti-TiC-SiC gradient transition layer is carried out; and S3, constructing the silicon / boron co-doped nano-composite functional layer. According to the invention, the interface stress is relieved by constructing the gradient transition layer, a soft and hard alternate nano layered structure is formed by using a periodic modulation process, and a silicon-boron co-doping strategy is combined; the problems that the coating is large in internal stress, poor in binding force and prone to failure at high temperature are effectively solved, and unification of high hardness, high toughness and excellent high-temperature wear resistance is achieved.

The application discloses a salt-containing chalcogenide crystal material, a preparation method thereof and application thereof as an infrared nonlinear optical material, and belongs to the technical field of crystal preparation. The salt-containing chalcogenide has a diamond-like structure; the chemical formula of the salt-containing chalcogenide is one of [A5X][M 14 Q 23 ], [A5BaX][M 18 Q 30 ], [A 13 BaX5][M 22 Q 38 ], [A 14 LiX5][M 22 Q 38 ]; wherein A is at least one selected from Na, K, Rb and Cs; X is at least one selected from Cl, Br and I; M is at least one selected from Ga and In; and Q is at least one selected from S, Se and Te. The NLO effect of the material is 0.3-10 times that of a commercial AgGaS2, the laser damage threshold is 1-50 times that of AgGaS2, and the comprehensive performance is greatly improved, so that the material is a potential infrared NLO material.

The application discloses a kind of nitrogen-doped diamond / intrinsic diamond periodic multilayer structure and preparation method thereof, belong to surface treatment technical field.The application includes: bearing matrix surface is polished and polished, and is washed and dried;Using multi-arc ion plating process, carbon target is used as reaction target material, nitrogen is input, and nitrogen-doped diamond layer is deposited on the surface of bearing matrix;Nitrogen is closed, carbon target is used as reaction target material, and intrinsic diamond layer is deposited on the surface of nitrogen-doped diamond layer;The deposition step is repeated, and nitrogen-doped diamond layer and intrinsic diamond layer are alternately stacked in the way of cyclic deposition until reaching the preset total thickness, and nitrogen-doped diamond / intrinsic diamond periodic multilayer structure is formed.By multilayer interface, stress is effectively released, crack is deflected, and the problem of large brittleness and easy peeling of traditional single-layer DLC coating is overcome, and the coating toughness is significantly improved on the basis of maintaining excellent wear-resistant and friction-reducing performance.

The invention discloses a metal-doped diamond-like carbon film on the surface of a magnesium-based material and a preparation method and application of the metal-doped diamond-like carbon film. The preparation method of the metal-doped diamond-like carbon film on the surface of the magnesium-based material comprises the following steps that (1) the magnesium-based material is selected and subjected to forming treatment; (2) carrying out surface pretreatment on the magnesium matrix material; and (3) preparation of the metal-doped diamond-like carbon film: a pulse arc source and plasma immersion ion implantation composite technology is adopted, and the prepared metal-doped, especially copper-doped diamond-like carbon film reduces the corrosion rate of a magnesium-based material in simulated body fluid by more than one order of magnitude; the binding force, antibacterial property and corrosion resistance are comprehensively superior to those of unmodified and conventional diamond-like coatings, and reliable guarantee is provided for safe and long-acting application of the degradable magnesium alloy in the medical fields of orthopedic implantation, cardiovascular stents and the like and in severe service environments of aerospace, ocean engineering and the like.

The invention relates to the field of medical instruments, in particular to a nano diamond-like film intravascular stent and a preparation method thereof.The preparation method comprises the following steps that firstly, a base material is pretreated, then the nano diamond-like film stent is prepared through a plasma enhanced chemical vapor deposition technology, and after an equipment reaction chamber is adjusted to be in a vacuum state, the nano diamond-like film intravascular stent is prepared under argon protection; the method comprises the following steps: inputting benzene into a vacuum reaction chamber of direct-current arc discharge plasma, introducing silane gas at the same time, bombarding the generated plasma to a negative voltage cathode, and forming a diamond-like carbon film containing a silicon element on the surface when the plasma passes through a substrate material support sample, the silicon element content in the diamond-like carbon film being 15-45%; the silicon element is mainly added to form the elastic concentration gradient type diamond-like carbon film stent, so that the adhesive force, toughness, tensile strength and other physical properties of the coating are improved, the stent has good biocompatibility, and later thrombosis and restenosis after stent implantation are avoided.

The application discloses a color decoration method for an outer surface of an intelligent ring and a titanium alloy intelligent ring, and the method comprises the following steps: after cleaning and activating a ring shell, a titanium transition layer is deposited, and a high-hardness diamond-like carbon film bottom layer is magnetron sputtered; the carbon film bottom layer is activated by oxygen plasma, oxygen-containing functional groups are introduced, and the water contact angle is reduced to the hydrophilic range; ultraviolet curing ink containing nano alumina oxide particles and inorganic coloring pigments is coated, and a nano ceramic color layer is obtained through ultraviolet curing. Oxygen plasma activation is used to introduce oxygen-containing functional groups on the surface of the diamond-like carbon film to form a chemical bonding interface, so that the problem that the surface of the diamond-like carbon film layer is difficult to color is solved, and color diversification decoration and diamond-like abrasion resistance protection are simultaneously realized.

The application relates to the technical field of diamond-like thin films, in particular to a high-hardness diamond-like thin film coating method. The high-hardness diamond-like thin film coating method comprises the following steps: polishing, cleaning, drying, heat treatment and reducing to room temperature of a metal base material; feeding into a vacuum coating device, passing in argon through an ion source, and starting ion source etching of the base material; respectively taking titanium and titanium carbide as target materials to perform sputtering deposition to form a deposition layer with a thickness of 200-400 nm; passing in a mixed gas of argon and acetylene, and adopting a bipolar pulse bias mode to form a first coating layer with a thickness of 0.5-1.5 microns; passing in a mixed gas of argon, acetylene and silane, the flow ratio of the argon, acetylene and silane being 1-2:1-2:0.1-1, and adopting a bipolar pulse bias mode to form a second coating layer with a thickness of 1-2 microns; and naturally cooling to room temperature after heat treatment under the protection of argon.

Disclosed is a powder surface element doped diamond deposition device, wherein a vibration table provides adjustable vibration, a plasma reaction cavity contains powder and forms a deposition area at the bottom, the plasma reaction cavity is supported by the vibration table to vibrate and disperse the powder, a target base is arranged at the bottom of a sealing cover, a target is installed on the target base, a pulse power source is connected to the target base to provide pulse power to sputter the target to generate doped elements, an inductance coil is installed outside the plasma reaction cavity, the inductance coil is connected to a high-frequency matching circuit to generate high-density plasma in the plasma reaction cavity, a bias electrode is arranged at the lower part of the plasma reaction cavity, and the bias electrode is connected to a low-frequency matching circuit to adjust the ion energy of the deposition area.

The invention relates to the field of thermoelectric materials and semiconductor refrigeration, and discloses a thermoelectric refrigeration material based on a P-type diamond-like carbon-based Cu3SbSe4 crystal and a preparation method of the thermoelectric refrigeration material, the material is an Ag solid solution P-type Cu3SbSe4 crystal material, and the molar ratio of Cu to Ag to Sb to Se is (3-x): x: 1: 4; wherein x is more than or equal to 0.03 and less than or equal to 0.24, and a Bridgman method is adopted. The compact Cu3SbSe4 crystal material is successfully prepared by a method of firstly adjusting a slow cooling temperature zone by optimizing a preparation process and then filling nitrogen to adjust pressure. And the crystal quality and mobility are improved through solid solution Ag, meanwhile, the carrier concentration of the material is maintained, and finally the electrical transport performance of the material is optimized. The P-type Cu3SbSe4 crystal provided by the invention has the advantages of rich source materials, low price, high mechanical strength and the like, a thermoelectric refrigeration device constructed by the P-type Cu3SbSe4 crystal realizes an effective refrigeration effect, and the diamond-like thermoelectric material Cu3SbSe4 has a great potential of becoming a thermoelectric refrigeration material.

The invention discloses a preparation method of a hydrogen-resistant composite coating. The preparation method comprises the following steps: step S11, depositing a metal titanium transition layer on the surface of a pretreated matrix; s12, a titanium target and carbon target co-sputtering mode is adopted, and a titanium-carbon gradient layer is deposited on the surface of the metal titanium transition layer; s13, the titanium target is closed, and a diamond-like carbon layer is deposited on the surface of the titanium-carbon gradient layer through the carbon target; step S14, repeating the step S12 to the step S13 at least once; and S15, a titanium target and carbon target co-sputtering mode is adopted, and a gradient protection layer is deposited on the surface of the outermost diamond-like carbon layer. Through multi-layer compounding and gradient transition design, unification of high binding force, low internal stress and super-strong hydrogen resistance among the layers is achieved, the whole composite coating is compact and has few defects, the hydrogen permeation current density can be reduced by 99% or above, and the hydrogen permeation time is remarkably prolonged.

The application provides adamantane-modified fullerenes (C 60 ) pyrrolines with enhanced fluorescent properties. The application discloses adamantane-modified fullerenes pyrrolines with enhanced fluorescent properties, and a preparation method thereof. The preparation method comprises the following steps: uniformly mixing and dispersing fullerenes, paraformaldehyde, 1-adamantane methylamine and o-dichlorobenzene, reacting, evaporating a solvent under reduced pressure, separating by column chromatography, and recrystallizing to obtain adamantane-modified fullerenes pyrrolines. The adamantane-modified fullerenes pyrrolines are dissolved in m-xylene, and a poor solvent, isopropanol, is slowly added dropwise to form a clear liquid-liquid interface. The reaction liquid is shaken until the liquid-liquid interface disappears, and then is subjected to ultrasonic treatment, standing, precipitation, washing, and drying to obtain microcrystals. The synthesis process is simple, and raw materials are cheap and easy to obtain. The crystallization method is simple and effective, and the crystallization is good, so that the crystal morphology and size can be controlled. The obtained adamantane-modified fullerenes pyrrolines and cubic crystals have good solubility in organic solvents, excellent fluorescent properties, and symmetrical structure, which is beneficial to subsequent application.

The application belongs to the technical field of material surface treatment, and particularly relates to a material surface hydrogen-containing diamond film and a preparation method thereof. A metal bonding layer, a carbide (or carbonitride) support layer and a ta-C:H film are sequentially arranged on the surface of a substrate or a workpiece. The thickness of the metal bonding layer is 0.1-1.0 microns, the thickness of the carbide or carbonitride support layer is 0.2-2.0 microns, and the thickness of the ta-C:H film is 0.1-5 microns. The metal bonding layer and the carbide (or carbonitride) support layer are prepared by using a magnetron sputtering or an arc ion plating technology, and the ta-C:H film is prepared by using an arc-enhanced glow discharge technology. The nanoindentation hardness of the film reaches 60 GPa or more, so that the preparation of a high-quality, high-performance and large-thickness ta-C:H film is realized.

This invention discloses a method for preparing a low-stress superhard diamond-like carbon (DLC) coating based on composite plasma enhancement. The method employs a vacuum coating apparatus combining a magnetically controlled cathode arc source and a closed-loop unbalanced magnetron sputtering source. The plasma ionization rate is increased through a closed magnetic circuit, and large particles are dually suppressed by a dynamic scanning magnetic field and bent-tube filtration. The coating is a five-layer nano-gradient composite structure, consisting of a metal activation layer, a carbonitride gradient transition layer, a doped stress control layer, a tetrahedral amorphous carbon (ta-C) superhard framework layer, and a fluorinated diamond-like carbon (F-DLC) lubricating layer, sequentially from the substrate to the surface. The preparation process involves workpiece cleaning and furnace loading, ion cleaning and etching, gradient deposition of each functional layer, and cooling before unloading. The step-by-step deposition achieves compositional and stress gradient control, making it suitable for high-end applications such as precision molds, automotive engine parts, and 3C wear-resistant components.

The application discloses a micro-channel plate detector reading system, and relates to the field of nuclear and particle detection. The detector system comprises a micro-channel plate combination, a resistive layer, a bias voltage electrode layer, a sensing reading layer and multi-channel reading electronics arranged in sequence. The sensing reading layer comprises an insulating layer and a sensing reading electrode layer. The sensing reading electrode layer is arranged in the insulating layer. The resistive layer is a diamond-like carbon film. The application can improve the working life and position resolution of the MCP detector.

The invention discloses a high-temperature super-lubricating molybdenum disulfide doped hydrogen-containing diamond-like carbon coating as well as a preparation method and application thereof. The coating comprises a Ti base layer and a MoS2-H-DLC functional layer which are sequentially deposited on the surface of a base body. The high-temperature super-lubricating molybdenum disulfide doped hydrogen-containing diamond coating has excellent tribological performance within the temperature range of 25 DEG C to 200 DEG C. Especially in a 200 DEG C high-temperature atmospheric environment, the coating shows continuous super-lubrication performance. The preparation method comprises the following steps: sequentially depositing the Ti base layer on the surface of the substrate by adopting a direct-current magnetron sputtering technology, and depositing the MoS2-H-DLC functional layer on the Ti base layer by adopting a plasma enhanced chemical vapor deposition composite direct-current magnetron sputtering technology. The method has the remarkable advantages of being low in deposition temperature, high in material utilization rate, good in coating uniformity, good in repeatability, wide in practicability and the like. The obtained coating can be widely applied to the fields of high-temperature friction and wear protection of key parts of aerospace equipment and the like.

The invention provides a preparation method of an arc light electron enhanced deposition composite diamond-like coating, which comprises the following steps: S1, heating a substrate, and then carrying out ion cleaning on the substrate; s2, depositing a metal bottom layer on the surface of the substrate; s3, depositing a transition layer on the surface of the substrate obtained in the step S2; and S4, starting an arc ion source and an auxiliary anode electrode, switching a bias power supply into an intermediate-frequency bipolar pulse power supply, and depositing the diamond-like carbon coating on the surface of the substrate obtained in the step S3. The invention further provides the composite diamond-like carbon coating. According to the method, the arc ion source and the auxiliary anode power supply are turned on, so that electrons frequently collide with the gas in the vacuum chamber, the ionization rate of the gas is greatly improved, the ultra-high-density plasma far superior to that of a traditional PECVD method is generated, and the deposition rate of the DLC coating is improved.

The invention provides a carbon-silicon target material, a diamond-like carbon film and application of the carbon-silicon target material. The carbon-silicon target material comprises CxSiyMz (x is larger than or equal to 0.50 and smaller than or equal to 0.99, y is larger than or equal to 0.005 and smaller than or equal to 0.50, and z is smaller than or equal to 0.20), wherein M represents a metal component; the metal comprises one or more of aluminum, iron, magnesium, titanium, calcium, vanadium, chromium, manganese, cobalt, nickel, copper, zinc, tungsten and zirconium. By adjusting the content of carbon, silicon and metal components in the carbon-silicon target material, the proportion of sp2 bonds to sp3 bonds in the diamond-like carbon film is changed, and therefore adjustment and control of indexes such as hardness, abrasion resistance and optical parameters of the diamond-like carbon film are achieved.

The application belongs to the technical field of material preparation, and particularly relates to a superstructure glass carbon material and application thereof. The application first provides a porous support structure, wherein the porous support structure has a stable structure with uniform distribution of anisotropic stress; the porous support structure takes a three-period minimal surface cell as a minimum repeating unit; the three-period minimal surface cell comprises a diamond or diamond-like structure; and a material constituting the porous support structure is a high polymer. Further, the superstructure glass carbon material can be obtained by pyrolysis of the porous support structure. The application designs a porous structure with uniform stress and mechanical stability, and develops a high-strength glass carbon material with precise controllable shape and size, which has good application prospect in multiple fields.

The invention discloses a preparation method and application of an N-type copper-based defect type diamond-like structure compound. The preparation method comprises the following steps of S1, weighing, wherein raw materials including a Cu elementary substance, a Ga elementary substance, a Sn elementary substance and a Se elementary substance are weighed according to the molar ratio of Cu to Ga to Sn to Se being 1: 1: 1: 4 and mixed to be uniform; and S2, ball milling is conducted, specifically, the raw materials weighed in the step S1 are subjected to ball milling treatment, and the N-type copper-based defect type diamond-like structure compound CuGaSnSe4 can be obtained. The Cu-based defect type diamond-like structure compound CuGaSnSe4 thermoelectric material with low lattice thermal conductivity is prepared by adopting a ball milling method, the method is simple in process, the prepared product is stable, the purity of a synthesized sample is relatively high, and the finally obtained CuGaSnSe4 sample is single in phase structure, high in density and good in crystallinity.

The utility model relates to a multifunctional optical film and a display device. The multifunctional optical film comprises a transparent substrate layer, an anti-dazzle layer, an anti-reflection layer, an anti-peeping layer, an anti-ultraviolet layer, a diamond-like carbon layer and an anti-fingerprint layer, the anti-dazzle layer and the anti-reflection layer are arranged between the transparent base material layer and the peep-proof layer in a stacked mode, the peep-proof layer is provided with a grating structure, the anti-ultraviolet layer is a macromolecule adhesive layer containing an ultraviolet absorbent, the anti-ultraviolet layer covers the peep-proof layer and fills gaps of the grating structure, the side, away from the peep-proof layer, of the anti-ultraviolet layer is provided with a flat face, and the diamond-like carbon layer is formed on the flat face. The anti-fingerprint layer is arranged on the side, away from the anti-ultraviolet layer, of the diamond-like carbon layer. And the diamond-like carbon layer can improve the hardness, the wear resistance and the scratch resistance of the thin film, the grating structure of the peep-proof layer is protected, and the service life is prolonged. The anti-ultraviolet layer covers the peep-proof layer, blocks ultraviolet rays, slows down aging and yellowing of the peep-proof layer, provides a flat surface for deposition of the diamond-like carbon layer, and improves the protection effect of the diamond-like carbon layer.

The application provides a DLC self-lubricating film and a preparation method thereof, and relates to the technical field of surface modification treatment. In view of inherent defects and application bottlenecks of the diamond-like carbon film, the application combines material composition and structure gradient by using composite magnetic filter cathode arc deposition (FCVA) and plasma enhanced chemical vapor deposition (PECVD) film coating technology, adopts the method of adding a transition layer film to improve the thermal stability of the material, improve the internal stress of the material and improve the film base bonding force. The DLC self-lubricating film provided by the application has strong bonding force with the substrate, good wear resistance and thermal stability, long service life and high reliability.

The application discloses a quaternary alloy doped diamond-like film and a preparation method thereof, and belongs to the technical field of high-entropy carbide films. The film is obtained by high-power pulse magnetron sputtering of a HfMoNbZr quaternary alloy target and direct-current magnetron sputtering of a carbon target with a silicon wafer as a substrate. The atomic percentage content of each element in the film is as follows: Hf 3.55-9.46%, Mo 3.70-12.08%, Nb 3.19-11.63%, Zr 3.12-11.66% and C 55.17-86.44%. The film has a face-centered cubic structure (FCC), and the fracture morphology shows a dense structure. The application has low trial and error cost, simple process, and can be used for mass production. The film can effectively improve the hardness of the film, and the prepared film is suitable for a mold surface protective layer and can prolong the service life of a workpiece.