The invention discloses a preparation method of
a diamond-like carbon functional layer with high
binding force on a hard
alloy surface, which comprises the following steps: in a vacuum variable pulse
carburizing stage, heating a processed hard
alloy tool from
room temperature to 650-850 DEG C by adopting a segmented heating mode, preserving heat until the temperature of the core and the surface is uniform, and then heating to the
carburizing temperature of 950-1350 DEG C; a
carburizing medium is introduced for carburizing in a variable
pulse mode, each
pulse period comprises the processes of inflation, pressure maintaining and air exhaust
diffusion, the pressure maintaining time is shortened along with the prolonging of the total carburizing duration, and the air exhaust
diffusion time is prolonged along with the prolonging of the total carburizing duration; in the magnetron
sputtering coating stage, when the vacuum degree in a cavity is smaller than or equal to 4 * 10 <-3 > Pa,
argon is introduced, when the working air pressure is stabilized to be 0.5 Pa-1 Pa, the
negative bias voltage of the base body is adjusted to be larger than or equal to 200 V,
ion cleaning is conducted,
foreign matter on the surface is removed, the surface is activated, and the cleaning time is larger than or equal to 30 min; and depositing the DLC film at the temperature of less than or equal to 200 DEG C. The limitation of a single film preparation mode such as magnetron
sputtering is broken through, and industrial application of the DLC film is promoted.