Super-hard self-lubricating diamond/diamond-like composite laminated coating material and preparation method thereof

A multi-layer material, self-lubricating technology, applied in metal material coating process, coating, gaseous chemical plating and other directions, can solve the problems of wear resistance limitation, no diamond, large residual stress of diamond film, etc. Good anti-wear and wear-resistant properties, excellent self-lubricating anti-friction and wear properties, precise and controllable synthesis conditions

Active Publication Date: 2010-09-01
CHINA UNIV OF GEOSCIENCES (BEIJING) +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the diamond crystal has a perfect tetrahedral structure, the residual stress of the diamond film is large, and the wear resistance is limited, while the hardness of the diamond-like film is relatively low, and the wear resistance needs to be improved. Using the same composition and structural similarity of the two Combining the high hardness of the diamond film with the self-lubricating properties of the diamond-like film to improve the wear performance of the material is an important idea for the modification of this type of material
At present, there is no literature report on the diamond-like composite coating with diamond as the main body of the hard film and the surface layer is covered with self-lubricating properties.

Method used

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  • Super-hard self-lubricating diamond/diamond-like composite laminated coating material and preparation method thereof
  • Super-hard self-lubricating diamond/diamond-like composite laminated coating material and preparation method thereof
  • Super-hard self-lubricating diamond/diamond-like composite laminated coating material and preparation method thereof

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Experimental program
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Embodiment 1

[0031] WC-6%Co is selected as the coating substrate, and the cemented carbide is made into the international standard shape SNGN1204 08 0.3×30° (12.7×12.7×4.76mm) blade, and the process described in (2) is used for cleaning and pretreatment After that, use a drying oven to dry for later use.

[0032] Put the pretreated cemented carbide substrate into the vacuum chamber of the hot-wire CVD deposition device. The distance between the substrate and the hot-wire is 25mm. First, tetramethylsilane and hydrogen are used as reaction gases, and SiC with a thickness of about 10μm is deposited as a transition layer. Among them, the volume fraction of tetramethylsilane is 0.1Vol.%, the total pressure of the working gas is 0.5kPa, the gas flow is 2000sccm, the temperature of the tungsten wire is 1900℃, and the temperature of the substrate is 780℃; subsequently, methane and hydrogen are used as reaction gases to deposit the diamond film. Fraction 1.5Vol.%, working gas pressure 3.0kPa, gas flow...

Embodiment 2

[0037] A stainless steel with a size of 60mm×50mm is selected as the coating substrate, and after cleaning and pretreatment using the process described in (2) above, it is dried in a drying oven for use.

[0038] Put the pretreated substrate into the vacuum chamber of the hot filament CVD deposition device. The distance between the substrate and the hot filament is 25mm. First, use tetramethylsilane, nitrogen and hydrogen as reactive gases, and deposit SiCN with a thickness of 25μm as the transition layer. The volume fraction of methylsilane is 0.1Vol.%, the volume fraction of nitrogen is 0.15Vol.%, the total pressure of working gas is 0.6kPa, the gas flow is 2000sccm, the temperature of the tungsten wire is 1900℃, and the temperature of the substrate is 400℃; subsequently, methane and hydrogen are used as reaction gases for deposition Diamond, methane volume fraction 1.5Vol.%, working gas pressure 3.0kPa, gas flow 300sccm, tungsten wire temperature 2100℃, substrate temperature 40...

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Abstract

The invention relates to a tool coating material and a preparation method thereof, and belongs to the technical field of material preparation and application. The material is a diamond/diamond-like composite laminated coating material with super-hard self-lubricating property. The method for preparing the diamond/diamond-like composite laminated coating material is characterized by comprising the following steps of: firstly, pretreating a matrix by using mixed solution of acid and alkali respectively; secondly, synthesizing diamond with ultrahigh hardness and good crystalline form on the matrix, which serves as the main body of the composite coating, by adopting hot filament chemical vapor deposition; and finally, depositing a high-hardness diamond-like thin film on the main body of the diamond, which serves as a self-lubricating surface layer, by using magnetic filtration cathodic vacuum arc. In order to improve the binding force between the diamond thin film and the matrix and between the diamond-like thin film and the diamond thin film, a transition layer is coated between adjacent layers respectively. The method has the advantages of simple process, precise and controllable synthesis conditions, high film-forming quality, high product yield, low cost, and the like. The obtained diamond/diamond-like composite laminated coating material has ultrahigh hardness, extremely low friction factor and extremely low wear rate, shows excellent self-lubricating friction and wear resistance, and has significance for application of tools or molds under rigorous service conditions.

Description

Technical field [0001] The invention relates to a diamond / diamond-like composite multilayer coating material with superhard and self-lubricating properties and a preparation method thereof, belonging to the technical field of material preparation and application. Background technique [0002] Diamond has the highest hardness, excellent mechanical properties, highest thermal conductivity and excellent chemical stability among natural substances, so it is a very ideal tool coating material. [0003] Diamond-like carbon refers to a kind of 3 The composition and performance are very similar to the amorphous carbon film of diamond. It has extremely excellent properties, such as low friction coefficient, self-lubricating and anti-wear properties, high corrosion resistance, high resistivity and good biocompatibility, etc., with a very wide range of Application prospects. [0004] However, the diamond crystal has a perfect tetrahedral structure, the residual stress of the diamond film is la...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/27C23C16/52C23C16/02
Inventor 彭志坚陈新春于翔王成彪付志强岳文
Owner CHINA UNIV OF GEOSCIENCES (BEIJING)
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