The invention discloses a device and a method for preparing methyl
silane standard gas in
hydrogen, and relates to the technical field of preparation of methyl
silane standard gas in
hydrogen, the method for preparing methyl
silane standard gas in
hydrogen comprises the following steps: a
gas cylinder is subjected to heating and vacuumizing cleaning treatment, the
heating temperature is 80 DEG C, and the vacuum degree is lt; 5P,
secondary treatment of the
gas cylinder: the
gas cylinder is vacuumized, and the vacuum degree is lt; 5 Pa, weighing the
mass of the gas cylinder, introducing 5N
methylsilane and 5N hydrogen through a gas distribution
busbar, weighing the
mass of the gas cylinder again, repeating the operation until the difference value between the
mass of the gas cylinder and the mass of the gas cylinder weighed for the first time after
secondary treatment of the gas cylinder is greater than or equal to 2 g, rolling and uniformly mixing, standing the gas subjected to rolling and uniformly mixing overnight for 8-12 h, and cooling to
room temperature. Due to the design of the VCR interface, the gas cylinder can be mounted and dismounted more simply, conveniently and quickly, and meanwhile, gas distribution is performed by a weighing method, so that the proportion of each component can be accurately controlled.