Coating process for lotus leaf-like diamond film

A diamond-like film and process technology, which is applied in the direction of metal material coating process, superimposed layer plating, gaseous chemical plating, etc., can solve the problems of poor thermal stability, insufficient satisfaction, large internal stress, etc., and achieve fatigue life improvement , reduce internal stress, improve the effect of bonding strength

Inactive Publication Date: 2013-12-25
HEFEI YONGXIN PLASMA TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] (2) Large internal stress
[0006] (3) Poor thermal stability
The surface energy of ordinary diamond-like carbon film is lower than that of ordinary workpiece surface, but it is not enough to meet the application of actual working conditions

Method used

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  • Coating process for lotus leaf-like diamond film
  • Coating process for lotus leaf-like diamond film
  • Coating process for lotus leaf-like diamond film

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Experimental program
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Embodiment Construction

[0043] The technical solutions of the present invention are described below to facilitate the understanding of those skilled in the art.

[0044] A coating process for preparing a lotus leaf diamond-like film, the specific steps are as follows:

[0045] (1) Cleaning and drying of the workpiece surface

[0046] It is very important to clean the surface of the workpiece before coating, which is directly related to the bonding force of the lotus leaf diamond-like film. In addition, the rust and stains on the surface will also cause the surface to spark during the plasma cleaning and coating process, thus leaving a residue on the surface of the workpiece. Arc spots, which are all to be avoided. There are different processes for cleaning different workpieces. The specific steps are as follows:

[0047] Divide the workpiece surface condition into three types: (A) rough surface workpiece containing oxide and phosphide; (B) smooth surface workpiece containing oxide and phosphide; (C...

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Abstract

The invention relates to a coating process for a lotus leaf-like diamond film. According to the process, gases such as octafluorocyclobutane, monomethylsilane and dimethylsilane are introduced into a vacuum tank, denpending on plasma immersion ion deposition equipment; and the lotus leaf-like diamond film is coated on a workpiece surface by a plasma-enhanced chemical vapor deposition method. The coating process mainly comprises five steps of plasma cleaning, plasma nitriding, transition layer plating, diamond-like plating and lotus leaf-like film plating. The lotus leaf-like diamond film has very high hardness. Since the lotus leaf-like diamond film has a structure similar to the surface of the lotus leaf, the lotus leaf-like diamond film has extremely low surface energy. In consideration of high wear-resistant and hydrophobic properties of the lotus leaf-like diamond film, the lotus leaf-like diamond film can be successfully applied in the fields such as coal mine screen meshes, metal molds, aerospace aircraft wings and oil pipelines.

Description

technical field [0001] The invention relates to the field of coating, in particular to a coating process capable of preparing coatings with extremely low surface energy and excellent wear resistance. Background technique [0002] In the field of equipment manufacturing, substandard performance of core components has always been a key factor restricting product marketization. Ion all-round ion deposition technology is a branch of surface treatment technology. After the diamond-like film is coated on the surface of the workpiece, the technology can significantly improve the wear resistance and corrosion resistance of the workpiece. The working life of the coated workpiece is longer than that of the untreated workpiece. more than 4 times. [0003] Diamond-like carbon (DLC) film contains diamond phase (sp 3 key or sp 3 hybrid state) amorphous carbon film. The carbon atoms in it are partly in the sp of the diamond 3 Hybrid state, partly in the sp of graphite 2 hybridized st...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C28/04C23C16/27C23C8/36
Inventor 李灿民陶满陶圣全
Owner HEFEI YONGXIN PLASMA TECH
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