31 results about "Octafluorocyclobutane" patented technology

The invention relates to a preparation method of octafluorocyclobutane, which comprises the following steps: mixing hexafluorocyclobutene with preheated nitrogen trifluoride, carrying out addition reaction on the mixed gas, and condensing and collecting the octafluorocyclobutane after the reaction is completed. According to the method, octafluorocyclobutane is prepared by using nitrogen trifluoride, continuous production of octafluorocyclobutane with the purity being 99 wt% or above can be achieved, the preparation method has the advantages of being low in raw material cost, simple in process, low in energy consumption, simple in product separation, good in selectivity and convenient to purify, and amplified continuous production can be achieved easily.

Mixtures configured to etch a thin film of an integrated circuit material are disclosed. The mixtures may include a first compound comprising one or more of: A, B, and C; and a second compound comprising one or more of: oxygen, argon, helium, nitrogen, octafluorocyclobutane (C4F8), hexafluorobutadiene (C4F6), carbonyl fluoride (COF2), difluoromethane (CH2F2), trifluoromethane (CHF3), carbon tetrafluoride (CF4), methyl fluoride (CH3F), octafluorocyclopentene (C5F8), 2,3,3,3-tetrafluoropro-l-ene (C3H2F4), 2,3,3,3-tetrafluoropro-l-ene (C3H2F4), hexafluoropropene (C3F6), hexafluorocyclopropane (C3F6), or 1,1,3,3,3-pentafhioropropene (C3HF5).

The present application relates to a kind of for electronic grade octafluorocyclobutane purification adsorbing material, preparation method and application, the preparation method includes the following steps: (1) first ligand, second ligand, transition metal salt, water and multi-walled carbon nanotube are mixed, impregnation, first drying, obtain solid material;Third ligand and organic solvent are mixed, to obtain organic solution;(2) the solid material and the organic solution are mixed, impregnation, second drying is carried out after, under the protection of inert atmosphere, to obtain the adsorbing material.The obtained adsorbing material can remove fluorocarbon impurities in industrial grade 3N purity octafluorocyclobutane raw gas, so that it can be more simply purified into 6N grade product, reaches the requirement of electronic grade.

To provide a method for producing hexafluoropropene in which the formation of octafluorocyclobutane, a by-product, is suppressed, and a composition obtained by the said production method. [Solution] A method for producing hexafluoropropene, comprising preheating trifluoromethane at a first preheating temperature of 350 to 700°C, then contacting it with tetrafluoroethylene to obtain a product containing hexafluoropropene.

In this method for producing tetrafluoroethylene and octafluorocyclobutane, 1,1,1,2,2-pentafluoroethane is converted into tetrafluoroethylene and octafluorocyclobutane in a gas phase in the presence of silicon oxide. In this conversion, no diluent is used, or 60 vol% or less of a diluent is used relative to the total amount of 1,1,1,2,2-pentafluoroethane and the diluent.

A method for producing 1,4-diiodoperfluorobutane involves obtaining a mixture A by mixing iodine and 1,2-diiodoperfluoroethane, and obtaining a reaction product B containing 1,4-diiodoperfluorobutane by reacting the mixture A, and the content of iodine in the mixture A is 5 mol% or more relative to the total molar amount of iodine and 1,2-diiodoperfluoroethane.

A composition contains octafluorocyclobutane and at least one of iodine and an iodine-containing perfluoroalkyl compound, and the content of at least one of the iodine and the iodine-containing perfluoroalkyl compound is 1,000 molar ppm or less with respect to the total molar amount of the composition.

The present invention discloses a gas-insulating medium and its application. The gas-insulating medium includes the following components by mass: 8.4-76.7 parts of trans-1,1,1,4,4,4-hexafluoro-2-butene, and 23.3-91.6 parts of octafluorocyclobutane. The gas-insulating medium of the present invention has a dielectric strength better sulfur hexafluoride, and a low liquefaction temperature, and can be applied in a wider temperature range. In addition, the gas-insulating medium in certain compositions has similar properties with a single component insulating gas. when the gas leaks, the ratio of trans-1,1,1,4,4,4-hexafluoro-2-butene and octafluorocyclobutane remains unchanged, and during the maintenance of electrical equipment, trans-1,1,1,4,4,4-hexafluoro-2-butene and octafluorocyclobutane can be directly supplemented according to a certain ratio, without other operations such as analysis and detection. In addition, the gas-insulating medium of the present invention has good environmental protection performance, the GWP value is low, and the ODP value is 0.

The present disclosure belongs to the field of carbon material technology, and specifically relates to a method for preparing carbonaceous materials, carbonaceous materials, and applications. A carbonized material formed from biomass materials is sintered at high temperature in a difluorochloromethane atmosphere. During this process, difluorochloromethane decomposes to generate tetrafluoroethylene gas and hydrogen chloride gas, and tetrafluoroethylene generates octafluorocyclobutane, which reacts with silicon dioxide to generate silicon tetrafluoride, carbon dioxide, and carbon; the generated hydrogen chloride gas reacts with metal impurities at high temperatures to generate metal chlorides. The preparation method provided by the present disclosure can remove metal impurities such as iron and calcium while removing silicon dioxide, and does not require acid washing and alkali washing processes, and does not involve waste liquid treatment.

The application provides a simulation running method and medium for octafluorocyclobutane purification equipment, relates to the technical field of simulation and analog, and the method comprises the following steps: obtaining structure design information, generating a three-dimensional model of the purification equipment; carrying out node disassembly on the octafluorocyclobutane purification process to obtain N purification process nodes; constructing a purification equipment running data space, obtaining N node purification equipment running data sets through classification identification; creating N node running simulation mechanisms; mapping to the three-dimensional model of the purification equipment for simulation and analog fusion, determining a digital simulation model of the purification equipment, and performing simulation running control. The application solves the technical problem that the purification efficiency of the octafluorocyclobutane purification equipment is affected due to low process parameter optimization efficiency caused by the lack of simulation and analog in the prior art, realizes the full-process optimization of the octafluorocyclobutane purification process through simulation and analog, and improves the purification efficiency of the octafluorocyclobutane purification equipment.

The present application relates to the technical field of semiconductor integrated circuits, and particularly relates to a method for realizing steep and high-uniformity dielectric etching based on high-purity octafluorocyclobutane and application thereof. The method for dielectric etching of the present application prepares a patterned mask on the surface of a dielectric layer material to be etched through an electron beam lithography process; etches the dielectric layer material covered with the patterned mask using plasma formed from an etching gas to realize a vertical etching groove with a width of 20 nm to 150 nm; and the etching gas comprises high-purity octafluorocyclobutane gas with a purity of more than 99.99999%. The method for dielectric etching of the present application takes advantage of the high purity of high-purity octafluorocyclobutane gas, reduces the damage of etching gases such as oxygen and high-fluorocarbon ratio gas to the sidewall etching protection layer, thereby improving the steepness of the sidewall of nanoscale silicon oxide via etching, and simultaneously making the etching process relatively stable under different etching sizes.

The application belongs to the field of electronic special gas, and particularly relates to a method for electrolytically preparing octafluorocyclobutane from dichlorohexafluorocyclobutane. The method comprises the following steps: S1. electrolyte preparation: uniformly mixing potassium fluoride and anhydrous hydrogen fluoride according to a molar ratio of 1:1-1:15, and dehydrating to obtain a mixed solution, and adding the mixed solution into an electrolytic cell; S2. electrolytically preparing octafluorocyclobutane: adding dehydrated dichlorohexafluorocyclobutane into the mixed solution, uniformly mixing, heating, and electrifying to obtain crude octafluorocyclobutane, wherein the addition amount of the dichlorohexafluorocyclobutane is 5-15% of the mass of the mixed solution, the heating temperature is 5-25 DEG C, the voltage of electrification is 4-20 V, and the current is 12-45 A. The application uses dichlorohexafluorocyclobutane as an electrolytic raw material to electrolytically prepare octafluorocyclobutane, improves the conversion rate of the raw material, reduces the waste of unreacted raw material, and thus reduces the production cost.

The invention relates to a synthesis process of octafluorocyclobutane, which comprises the following steps: taking dichlorohexafluorocyclobutane and hydrogen fluoride as raw materials, adding a lewis acid substance antimony pentachloride or fluorocobaltate as a catalyst to catalyze the raw materials to react, generating octafluorocyclobutane through circular reaction, and then purifying and separating the generated octafluorocyclobutane. The catalyst used in the method is simple and easy to obtain, the temperature in the reaction process is low, energy consumption is low, and the whole technological process is easy to amplify. The problems that in the prior art, a catalyst for reaction is difficult to obtain, energy consumption is high due to high reaction temperature, and the process is complex and not easy to popularize and amplify are solved.

Disclosed is a method for producing hexafluoropropene, with which a product containing hexafluoropropene is obtained by bringing a compound (A) represented by formula (A) into contact with at least one compound (B) that is selected from the group consisting of octafluorocyclobutane, pentafluoroethane, octafluoro-1-butene, and octafluoro-2-butene, and subsequently heating the resultant mixture at a reaction temperature of 780°C or higher in a reactor. In formula (A), X is a hydrogen atom, a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom.　(A): CHF2-X

A kind of membrane coupling recovery process of fusible polytetrafluoroethylene production tail gas, by the coupling integration of unit operation such as staged compression, shallow cooling, membrane separation, low-temperature condensation, circulating rectification, the process can realize the efficient separation of tetrafluoroethylene polymerization tail gas, respectively obtain hydrogen, tetrafluoroethylene, and the mixture of octafluorocyclobutane and perfluoropropyl vinyl ether, realize the efficient use of various high-value components.The membrane coupling recovery process and system proposed in the application ensure that more than 92.8% of the polymerization tail gas enters the recovery device, wherein the effective recovery rate of tetrafluoroethylene is more than 90.0%, and the effective recovery rate of octafluorocyclobutane and perfluoropropyl vinyl ether is more than 92.0%.Taking a 10000 tons / year fusible polytetrafluoroethylene production device as an example, 516.9 tons of tetrafluoroethylene, 31.3 tons of octafluorocyclobutane and 115.6 tons of perfluoropropyl vinyl ether can be recovered per year, which greatly reduces the raw material cost of fusible polytetrafluoroethylene production device.

The utility model discloses an efficient purification device for high-purity octafluorocyclobutane, which belongs to the technical field of purification devices and comprises a supporting disc, a supporting rod is fixedly connected to the top end of the supporting disc, a top cover is arranged at one end, far away from the supporting disc, of the supporting rod, and a purification assembly is arranged between the supporting disc and the top cover. According to the technical scheme, when an impurity decomposer is gradually saturated and inactivated, a worker can control the purification box to rotate by 180 degrees, so that the positions of the pair of purification tanks are exchanged, the impurity decomposer in the replaced placement barrel can continue to react with octafluorocyclobutane, and the impurity decomposer is separated from the purification tank, so that the impurity decomposer is separated from the octafluorocyclobutane. And in addition, the placing barrel is moved out of the purification tank, so that the impurity decomposing agent in the placing barrel is replaced, and the impurity decomposing agent is placed into the purification tank again for standby application, the time of purification work stop and production interruption can be shortened to the maximum extent, and the utilization rate of the purification device is increased.

The invention belongs to the technical field of chemical production, and particularly relates to a method for industrially and continuously synthesizing octafluorocyclobutane. The preparation method specifically comprises the following steps: S1, adding 1, 1, 2, 2, 3, 4-hexafluoro-3, 4-dichlorocyclobutane, alkali metal fluoride and an organic aprotic solvent into a reaction kettle, heating and stirring to carry out fluorine-chlorine exchange reaction to obtain a crude product octafluorocyclobutane; and S2, carrying out rectification and adsorption two-stage impurity removal on the crude octafluorocyclobutane, and finally collecting the refined octafluorocyclobutane. According to the method provided by the invention, the product yield can reach 70.8%, and the product content is gt; the water content is 1t; 0.1%, chloride ion detection result; and 0.1%. According to the octafluorocyclobutane preparation method, the production process is free of pollution, the prepared octafluorocyclobutane is high in selectivity, equipment is simple, continuity can be achieved, the yield is high, raw materials are cheap, the production cost is reduced, the product purity is high, and the octafluorocyclobutane preparation method is suitable for industrial production.

The invention discloses an etching method of a hard mask layer of a metal grating, which comprises the following steps: performing first etching, forming a first groove in a second oxide layer and a nitride layer, exposing the nitride layer at the bottom of the first groove, forming the second oxide layer on the nitride layer, forming the nitride layer on the first oxide layer, and forming a second groove in the second oxide layer; the first oxide layer is formed on the metal layer, the first oxide layer, the nitride layer and the second oxide layer form a hard mask layer for etching the metal layer, the metal layer is formed on the back surface of the wafer, the wafer is used for forming a CIS, and the metal layer is used for forming a metal grating of the CIS; and second etching is carried out, the nitride layer and the first oxide layer below the first groove are removed, a second groove is formed in the hard mask layer, the metal layer at the bottom of the second groove is exposed, reaction gas used in the second etching process comprises octafluorocyclobutane and fluorocarbon gas, the chemical general formula of the fluorocarbon gas is CHxFy, and x and y are natural numbers.

To provide a method for producing hexafluoropropene in which the formation of octafluorocyclobutane, a by-product, is suppressed, and a composition obtained by the said production method. [Solution] A method for producing hexafluoropropene, comprising preheating trifluoromethane to a first preheating temperature of 450 to 700°C, supplying it to a reactor, and heating the trifluoromethane in the reactor to a reaction temperature of 800°C or higher to obtain a product containing hexafluoropropene.

A method for producing 1, 1, 2, 2-tetrafluorocyclobutane, the method including a reaction step for reacting tetrafluoroethylene, ethylene, and a third component using a starting material composition containing tetrafluoroethylene, ethylene, and the third component being at least one selected from the group consisting of chlorodifluoromethane and octafluorocyclobutane.

This invention discloses a method for purifying octafluorocyclobutane, comprising adsorption, oxidation, and distillation of octafluorocyclobutane feed gas. The oxidation process involves further oxidizing the adsorbed feed gas using an oxidation column. The oxidation column includes a support loaded with an oxidant, the support having a porous structure and providing passageways for the feed gas to flow in the direction of flow. This method yields a product with a purity greater than 99.999%, and offers advantages such as high safety, low equipment investment, low energy consumption, low cost, simple operation, and high product purity.

The invention provides a hydrophobic modification method for a polymer micro-fluidic chip runner, which comprises the following steps: firstly, etching the surface of a micro-fluidic chip by adopting oxygen and carbon tetrafluoride plasmas to roughen the surface of the micro-fluidic chip, and then, treating the surface of the micro-fluidic chip by adopting octafluorocyclobutane plasmas to hydrophobize the surface of the micro-fluidic chip. The method provided by the invention solves the problems of difficulty in realizing uniform hydrophobicity of the inner and outer surfaces of the chip, easy attenuation of effect, complex operation and difficulty in batch production in the existing method.

The present invention relates to the technical field of optical microlenses, and in particular to a superhydrophobic surface electrohydrodynamic inkjet printing MLA process and its structure, which includes a moving platform, an electro-inkjet printing device, a heavy release film, a PDMS layer, a zinc oxide layer, and a perfluorocyclobutane layer. The heavy release film is installed on the moving platform, the PDMS layer is disposed on the upper surface of the heavy release film, the zinc oxide layer is evaporated on the upper surface of the PDMS layer, and a plurality of cylindrical grooves are provided on the upper surface of the zinc oxide. The plurality of grooves are arranged in an array, and the perfluorocyclobutane layer is evaporated on the upper surface of the zinc oxide layer. In the present invention, a superhydrophobic surface can be obtained by modifying a low surface energy substance on the surface of zinc oxide. Relying on the surface tension of the polymer, droplets are avoided from remaining in the non-MLA formation area; the MLA has high appearance consistency and good quality, and is suitable for AR / VR glasses or related AR / VR devices.

Mixtures configured to etch a thin film of an integrated circuit material are disclosed. The mixtures may include a first compound corresponding in structure to Formula (I): (I), wherein R may be CnF2n+1-mHm, wherein n is greater than, or equal to, 1, and less than, or equal to, 3, and wherein m is greater than, or equal to, 0, and less than, or equal to, (2n+1); wherein R may be CH2-CF=CF2; or wherein R may be CH2-CH=CH2. The mixture may additionally include a second compound comprising one or more of: oxygen (O2), argon (Ar), helium (He), nitrogen (N2), octafluorocyclobutane (C4F8), hexafluorobutadiene (C4F6), carbonyl fluoride (COF2), difluoromethane (CH2F2), trifluoromethane (CHF3), carbon tetrafluoride (CF4), octafluorocyclopentene (C5F8), 2,3,3,3-tetrafluoropro-1-ene (C3H2F4), hexafluoropropene (C3F6), hexafluorocyclopropane (C3F6), or 1,1,3,3,3- pentafluoropropene (C3HF5), nitrogen trifluoride (NF3), and sulfur hexafluoride (SF6).

The present invention provides a method for preparing soluble polytetrafluoroethylene pipes, which relates to the technical field of polytetrafluoroethylene, aiming to improve the high-temperature resistance of polytetrafluoroethylene materials and enhance their mechanical properties at the same time. This method includes three main steps: S1, mixing tetrafluoroethylene, perfluoroalkyl vinyl ether, octafluorocyclobutane, perfluorosodium octanoate, ammonium perfluorooctanoate, hydrogen peroxide and metal oxides, and then carrying out electrification modification; S2, adding carbon fiber and ceramic fiber into a mixed solution of ethanol, phenol and hydrochloric acid, adding antioxidant and nucleating agent, and then carrying out heat treatment; S3, mixing the electrically modified tetrafluoroethylene material, initiator, chain transfer agent, modified carbon fiber and modified ceramic fiber, reacting under the protection of nitrogen or helium to obtain soluble polytetrafluoroethylene, and then making pipes through pushing, extrusion, shaping, stretching and cooling.

The invention relates to a high-synergism gas extinguishing agent and a preparation method thereof. The fire extinguishing agent comprises fire extinguishing components and inert gas. The fire-extinguishing component comprises a fire-extinguishing main agent and a fire-extinguishing assistant; the fire extinguishing main agent is octafluorocyclobutane, and the fire extinguishing auxiliary agent is heptafluoropropane or pentafluoroethane; wherein the fire extinguishing component comprises the following components in percentage by volume: 60-80% of a fire extinguishing main agent and 20-40% of a fire extinguishing auxiliary agent; the inert gas is nitrogen, argon or carbon dioxide. The fire extinguishing agent is high in fire extinguishing efficiency, good in fire extinguishing effect, not prone to tempering and reburning and free of environment pollution.

This disclosure aims to provide a new high-purity octafluorocyclobutane. [Solution] High-purity octafluorocyclobutane.

The invention relates to an adsorption material for purifying electronic-grade octafluorocyclobutane as well as a preparation method and application thereof, the preparation method comprises the following steps: (1) mixing a first ligand, a second ligand, transition metal salt, water and a multi-walled carbon nanotube, dipping and primarily drying to obtain a solid material; mixing the third ligand with an organic solvent to obtain an organic solution; and (2) mixing the solid material with the organic solution, dipping, carrying out secondary drying, and roasting under the protection of an inert atmosphere to obtain the adsorption material. The obtained adsorbing material can remove fluorocarbon impurities in industrial-grade octafluorocyclobutane raw material gas with the purity of 3N, so that the octafluorocyclobutane raw material gas can be purified into a 6N-grade product more simply and conveniently, and the electronic-grade requirement is met.

The invention provides an analog simulation operation method for octafluorocyclobutane purification equipment and a medium, and relates to the technical field of analog simulation, and the method comprises the steps: obtaining structural design information, and generating a three-dimensional model of the purification equipment; the method comprises the following steps: carrying out node disassembly on an octafluorocyclobutane purification process to obtain N purification process nodes; a purification equipment operation data space is constructed, and N node purification equipment operation data sets are obtained through classification identification; creating N node operation simulation mechanisms; and mapping to a three-dimensional model of the purification equipment for analogue simulation fusion, determining a digital simulation model of the purification equipment, and performing simulation operation control. The technical problem that the purification efficiency of the octafluorocyclobutane purification equipment is affected due to low process parameter optimization efficiency caused by lack of analogue simulation in the prior art is solved, full-flow optimization of the octafluorocyclobutane purification process is realized through analogue simulation, and the purification efficiency of the octafluorocyclobutane purification equipment is improved.

This invention relates to the field of haloalkanes preparation, specifically to a method and apparatus for simultaneously preparing multiple perfluoroalkanes. The method includes the following steps: (1) thermally cracking polytetrafluoroethylene to form a pyrolysis gas containing fluoroolefins; (2) reacting the pyrolysis gas with fluorine gas to form crude perfluoroalkanes gas; (3) subjecting the crude perfluoroalkanes gas to deep catalytic fluorination under the action of a catalyst to remove fluoroolefins, followed by distillation to obtain hexafluoroethane, octafluoropropane, or hexafluoroethane, octafluoropropane, octafluorocyclobutane, and decafluorobutane, respectively. This invention achieves the preparation of high-purity perfluoroalkanes such as hexafluoroethane, octafluoropropane, octafluorocyclobutane, and decafluorobutane through pyrolysis, fluorine addition, catalytic fluorination, and distillation processes, featuring low cost, high efficiency, and suitability for industrial production.