Catalyst for catalytic conversion of impurities in octafluorocyclobutane, and preparation method and application thereof

Abstract

The invention discloses a catalyst for catalytic conversion of impurities in octafluorocyclobutane, and a preparation method and an application thereof. The catalyst is composed of an active carbon loaded active component and auxiliary agents, the active component is palladium, the auxiliary agents are X1 and X2, the content of the active component palladium is 0.2-1.5 wt%, the content of the auxiliary agent X1 is 0.1-2.5 wt%, and the content of the auxiliary agent X2 is 0.05-0.8 wt%. The content of alkene-containing fluorocarbon impurities in octafluorocyclobutane can be reduced to 1 ppmv orbelow. The catalyst has the advantages of good performances, high separation efficiency and simplicity in operation.

Description

technical field

[0001] The invention belongs to the field of fine chemicals, and in particular relates to a catalyst for catalytic conversion of impurities in octafluorocyclobutane, a preparation method and application thereof. Background technique

[0002] Perfluorocycloalkanes are widely used in high-voltage insulation, aerosols, sprays, VLSI etchant, heat pump working fluid, among which octafluorocyclobutane (also known as perfluorocyclobutane) is particularly important. Octafluorocyclobutane has stable chemical properties, is non-toxic, has zero ozone depletion index, and has low greenhouse effect. It is a green and environmentally friendly special gas. With the implementation of the Montreal Protocol and the rapid growth of the electronics industry, the role of octafluorocyclobutane is becoming more and more important, and its usage is increasing year by year. Has a wide range of applications.

[0003] Octafluorocyclobutane is one of the etching or cleaning gases comm...