1506 results about "Fluorocarbon" patented technology

Improved performance ion exchange membranes for use in REM, AEM and DMFC fuel cells, buffered fuel cells, hydrolysis, other applications comprise a molecular matrix of homopolymers, di-monomer, heteropolymers, copolymers, or block-polymers of fluorocarbon and hydrocarbon compounds combined with (i) skeletal support grid to improve durability, handling, reduce membrane swelling, and sequester dopants and nanoparticles from leakage; (ii) microporous membrane formed using a sacrificial filler process enhancing conductivity and limiting fuel crossover; (iii) hetero-ionomeric matrix of two-or-more membrane-bound acids e.g. sulphonic and phosphonic acid expanding usable range; (iv) permanent fillers enhancing conductivity and porosity including nanoparticles, metal-oxides, zeolites, silicates, GOs, CNTs, MOFs, POSS, and others; (v) ionic liquid doping to enhance membrane conductivity; (vi) membrane nanocoating preventing H2O2 diffusion; and / or (vii) catalytic nanocoating with metals, metal-oxides, and MOFs preventing atmospheric toxin catalyst poisoning. Combined with a heterogenous GDI, the IEM is integrated into iBFC power blade and energy bank applications.

Provided are a nanocomposite polyurethane coating for aviation and a preparation method therefor. The coating is a product obtained by mixing a polyaspartic acid ester resin as a raw material with a fluorine-modified nano-SiO2 containing an active amine group and a fluorocarbon resin and reacting same. The nanocomposite polyurethane coating for aviation solves the problems of poor stain resistance, difficulty in cleaning, and poor toughness of existing aircraft skin coatings, and improves the toughness and ease of cleaning of the coating.

The invention discloses a coating as well as a preparation method and application thereof. The coating comprises the following raw materials: potassium silicate; ethyl orthosilicate; a nanometer titanium dioxide sol; rare earth is doped with nano titanium dioxide; compounding zinc oxide nanoparticles; nano silicon dioxide sol; a fluorosilane coupling agent; a fluorocarbon surfactant; a conductive carbon nanotube; nano aluminum oxide sol; an organic silicon modified acrylate emulsion; a boron nitride nanosheet; hollow glass beads; a shape memory polymer; the invention discloses a self-repairing nanofiber. After a coating is formed by using the coating, the coating has the characteristics of high light transmittance, good self-cleaning effect, high hardness, good adhesive force and excellent weather resistance, and can be applied to a photovoltaic module to replace an existing photovoltaic module coating product.

The invention relates to the technical field of organic chemistry and environmental science, in particular to a fluorine-philic and hydrophobic functional monomer, a synthesis method and application thereof, a fluorine-containing compound detection electrode based on the functional monomer and a preparation method of the fluorine-containing compound detection electrode. The chemical structure of the fluorine-philic and hydrophobic functional monomer comprises pyrrole-3-carboxylic acid and fluorine telomer alcohol bonded with the pyrrole-3-carboxylic acid. A long fluorocarbon chain is introduced into a basic functional monomer, so that the fluorine affinity and hydrophobicity of the monomer to a fluorine-containing compound are remarkably improved. Therefore, a derivative pyrrole-3-carboxylic acid of pyrrole is used as a basic functional monomer, and the fluorine telomeric alcohol is bonded on the pyrrole-3-carboxylic acid, so that a novel functional monomer with fluorine-philic and hydrophobic functions is synthesized. The functional monomer realizes specific capture of fluorine-containing organic matter molecules by simultaneously utilizing amido with affinity to perfluorinated compounds in a pyrrole ring and unique fluorine-fluorine interaction force. A perfluorinated compound detection method established based on the functional monomer can avoid interference caused by a sample matrix.

The invention belongs to the technical field of high polymer chemical materials, and particularly relates to a self-repairing composite waterproof board and a preparation method thereof. The invention relates to a high-temperature-resistant graphene coating which is prepared from the following raw materials: bisphenol A diglycidyl ether, fluorosilane modified nano SiO2, graphene slurry, polydimethylsiloxane, epoxy-terminated polydimethylsiloxane, a urea-formaldehyde prepolymer, a silane coupling agent, sodium dodecyl benzene sulfonate, an FSO-100 fluorocarbon surfactant, a CTBN adhesive, a curing agent, an epoxy accelerator DMP-30 and a diluent. Through the collaborative design of the gradient structure of the hard framework and the soft coating, low-surface-energy filler chemical anchoring, microcapsule local material supplementing and thermal triggering dynamic bond rearrangement, the board obtains balance among the bearing strength, long-term hydrophobicity, weather-proof barrier and repeatable thermal self-repairing; and meanwhile, the common defects that room-temperature self-repairing is difficult to realize, hydrophobic particles are easy to agglomerate, a coating is easy to layer and the like are avoided.

The invention relates to the technical field of battery materials, and particularly provides porous aluminum oxide powder applied to a lithium ion battery and a preparation method of the porous aluminum oxide powder. The porous alumina powder of the present application comprises: a porous alumina matrix, the aperture of which is gradually reduced from the surface to the center; the silane coupling agent modification layer covers at least part of the surface of the porous aluminum oxide matrix, and a silane coupling agent has a Si-O-Al bonded network structure; the fluorocarbon hydrophobic layer is coated on at least part of the surface of the silane coupling agent modification layer, and the fluorocarbon hydrophobic layer is of a perfluoroalkyl chain structure. According to the preparation method, the wettability, the interface stability and the moisture resistance of the electrolyte are synchronously improved through cooperation of a gradient aperture structure and silane-fluorocarbon double-layer modification.

The invention provides a modified lithium metal negative electrode and a preparation method and application thereof, and belongs to the technical field of lithium batteries. The modified lithium metal negative electrode comprises a negative electrode conductive substrate and an interface passivation layer formed on the surface of the negative electrode conductive substrate, and the interface passivation layer comprises lithium oxide, lithium sulfide, lithium nitride, lithium fluoride and a fluorocarbon compound; the interface passivation layer is obtained by putting lithium metal into chloroform for dipping treatment to obtain modified lithium metal and then performing plasma treatment. According to the lithium ion battery, the interface passivation film containing the lithium oxide, the lithium sulfide, the lithium nitride, the lithium fluoride and the fluorocarbon is formed on the negative electrode conductive substrate, and in the repeated charging and discharging process of the lithium ion battery, due to the existence of the interface passivation film, non-uniform deposition of lithium ions can be avoided, so that growth of lithium dendrites is inhibited. Furthermore, the coulombic efficiency and the cycling stability of the charge-discharge cycle of the lithium ion battery can be improved, and the service life of the lithium ion battery is prolonged.

The invention discloses a wear-resistant and high-temperature-resistant fluorocarbon powder coating and a preparation method thereof. Comprising the following steps: step 1, adding FEVE resin, a modified filler, a curing agent, a flatting agent and an antioxidant into a high-speed mixer, and mixing for 10-15 minutes until the materials are uniform to obtain a mixed raw material; and 2, transferring the mixed raw material into an extruder, extruding, tabletting, cooling, crushing, and screening with a standard sieve to obtain the fluorocarbon powder coating. The preparation method has the beneficial effects that the modified chitosan and the montmorillonite are compounded, the cerium salt is adopted for further modification, and after the obtained modified filler is added into a coating component, the wear resistance and the high-temperature resistance of a coating are remarkably improved.

The invention discloses a photoresist micro-lens array preparation method and system, and relates to the field of micro-nano optical device manufacturing. The preparation method of the photoresist micro-lens array comprises the following steps: carrying out chemical mechanical polishing treatment on a silicon wafer, spin-coating photoresist on a substrate to form a cylindrical array, and eliminating solvent gradient through pre-drying; forming a fluorocarbon nano film on the surface of the photoresist through plasma deposition so as to reduce the surface energy of the photoresist; realizing hot reflux of the photoresist based on gradient annealing, wherein the gradient annealing comprises a preheating section, a main reflux section and a stable section; on the basis of the preheating section, glass transition stress is avoided, fluorine-containing gas and inert gas are synchronously introduced into the main backflow section to act on a plasma sheath layer, so that the flowing direction of photoresist is regulated and controlled, and the edge coffee ring effect is inhibited; the stable section synchronously performs plasma assistance to lock the shape; and the precision and the consistency of the micro-lens array are improved through segmented temperature regulation and control and a plasma auxiliary technology.

The invention provides an efficient environment-friendly silicon-based foam extinguishing agent synergistically compounded by a multi-silicon surfactant and a preparation method of the efficient environment-friendly silicon-based foam extinguishing agent. The cleaning agent is prepared from raw materials in percentage by mass as follows: 5%-35% of an ionic silicon surfactant, 5%-35% of a nonionic silicon surfactant, 0.1%-3% of a polysaccharide foam stabilizer, 1%-10% of a cosolvent, 0.1%-10% of a preservative, 1%-10% of an antifreeze agent, 0.1%-5% of a regulator and the balance of deionized water. According to the invention, the ionic silicon surfactant and the nonionic silicon surfactant are compounded for use, hydrophobic and oleophobic tetrasiloxane groups and trisiloxane groups are used as spreading agents of an oil-water interface, and the formula of the foam extinguishing agent only contains the silicon surfactant; the liquid fuel fire extinguishing agent does not contain a forbidden fluorocarbon surfactant and a hydrocarbon surfactant with an oleophylic end, so that the environmental hazard of the fluorocarbon surfactant is completely eradicated, the oleophylic property of the foam fire extinguishing agent is eliminated, and the liquid fuel fire can be extinguished. The invention has positive significance on environment protection, human health protection and sustainable development of foam fire extinguishing technology.

The invention discloses a single-phase refrigerant medium and a preparation method thereof.The preparation method comprises the following preparation steps that S1, in an inert gas atmosphere, a dimethyl cyclosiloxane mixed ring body and 1, 1, 3, 3-tetramethyldisiloxane react under the action of a second catalyst, and after impurities are removed, a hydrogen-terminated polysiloxane intermediate is obtained; s2, in an inert gas atmosphere, adding the end hydrogen-containing polysiloxane intermediate and a first catalyst into a solvent, then adding isolated diene for reaction, adding alpha-olefin after the reaction is performed for a period of time, and performing low-temperature removal to obtain the single-phase refrigerant medium. The single-phase refrigerant medium has the advantages of being good in fluidity, resistant to high and low temperature, good in insulativity, good in thermal conductivity, high in safe usability and the like, does not contain fluorocarbon compounds, is environmentally friendly, is simple in preparation method and is suitable for industrial production.

The invention relates to the technical field of batteries, in particular to a gel electrolyte prepolymerization solution, a lithium battery and a preparation method of the lithium battery. The gel electrolyte prepolymerization liquid comprises the following components: an electrolyte which accounts for 70%-99% of the total mass of the gel electrolyte prepolymerization liquid; the cross-linking monomer accounts for 1%-10% of the total mass of the gel electrolyte prepolymerization liquid; an initiator accounting for 0.3-5% of the total mass of the crosslinking monomer; the fluorocarbon surfactant accounts for 0.01%-5% of the total mass of the gel electrolyte prepolymerization liquid, the fluorocarbon surfactant comprises a perfluoroalkyl chain CnF2n + 1, and n is larger than or equal to 6. According to the invention, the fluorocarbon surfactant is introduced into the gel electrolyte pre-polymerization liquid, so that the electrode / electrolyte interface composition and structure are improved, the wettability is improved, the interface stability is improved, the loss of the electrolyte is inhibited, the accumulation of by-products of the positive electrode under high voltage and in the circulation of the negative electrode is reduced, and the cycle life and the stability of the battery are remarkably improved.

The invention discloses a new medicine application of a local injection acoustic response stent in enhancing ultrasound histotripsy. The acoustic response scaffold (ARS) comprises a scaffold material, fluorocarbon gas or liquid fluorocarbon particles with liquid-vapor phase change capacity, and microbubble cloud in the scaffold generates a strong cavitation ablation treatment effect in a target area under the action of low-frequency and low-sound-pressure ultrasound. Fluorocarbon gas or liquid fluorocarbon particles contained in the ARS form microbubble cloud and ideal cavitation nuclei under low-frequency low-sound-pressure ultrasonic excitation, inertia cavitation resonance is achieved under the ultrasonic action, and then cavitation mechanical damage with local tissue controllable strength is generated. The low-intensity ultrasonic histotripsy has the characteristics of low sound pressure, low sound intensity, high targeting property, small tissue damage outside a target region, simplicity in instrument manufacturing and the like, and the targeting property and the safety of treatment are improved. The method does not need very accurate ultrasonic focusing, reduces the operation difficulty, and has application prospects in multiple medical fields such as prostatic hyperplasia, tumor ablation and tumor immunotherapy.

An emulsion comprises a first discontinuous phase comprising first droplets, a second discontinuous phase comprising second droplets, and a continuous aqueous phase. The first droplets include at least one first surfactant and at least one first fluorocarbon, and have a first diameter of more than 100 nm. The second droplets include at least one surfactant, at least one drug, and at least one solvent, and have a second diameter of no more than 100 nm.

The invention discloses a lithium ion battery compound fire extinguishing agent and a preparation method and application thereof, and belongs to the technical field of lithium ion battery fire extinguishing agents. The fire extinguishing agent comprises the following raw materials in parts by weight: 10-50 parts of perfluorohexanone, 20-80 parts of hexafluoropropylene tripolymer and 1-3 parts of preservative. The compound fire extinguishing agent has the beneficial effects of efficient fire extinguishing capacity, excellent cooling efficiency, good corrosion resistance, stability, wide applicability and the like, in the fire extinguishing process, the fluorocarbon organic solvent can rapidly evaporate and absorb a large amount of heat, the temperature of a fire source is remarkably reduced, and therefore fire spreading is further inhibited. And the cooling efficiency can be accurately controlled by regulating and controlling the ratio of different solvents, so that the fire extinguishing requirements of different occasions are met, and powerful support is provided for development and application of the fire extinguishing technology.

The invention relates to the technical field of coatings, in particular to an acrylate-epoxy resin composite coating and a preparation method thereof. According to the technical scheme, the coating is prepared from 25 to 35 parts of methyl methacrylate, 15 to 25 parts of butyl acrylate, 10 to 20 parts of epoxy resin E-5110, 8 to 15 parts of organic silicon modified acrylate prepolymer, 5 to 12 parts of fluorocarbon modified epoxy resin, 4 to 8 parts of core-shell structure corrosion inhibition nano container, 1 to 3 parts of functionalized graphene quantum dots and 4 to 10 parts of polyhedral oligomeric silsesquioxane maleimide modified amine curing agent. And 1-3 parts of a hindered amine light stabilizer. By integrating the core-shell structure corrosion inhibition nano container, the functionalized graphene quantum dots and the photo-thermal dual responsive curing agent component, the sensing, response and self-repairing of the coating on damage are realized, and long-acting corrosion resistance, weather resistance, bacteria resistance, mechanical property balance and intelligent maintenance are considered; and efficient and economical full-period protection is provided for equipment in an extreme environment.

The invention relates to the technical field of polymer composite materials, and discloses a nano-ceramic-based composite insulating coating and a preparation method thereof, and the coating is prepared from a composite resin matrix, a composite functional ceramic filler, a double-reactivity organosilicon linker and an initiator. Wherein the composite resin matrix is composed of vinyl-terminated polydimethylsiloxane and a vinyl ether functionalized fluorocarbon copolymer, and a soft and rigid interpenetrating network structure is formed. The composite functional ceramic filler is prepared from needle-shaped silicon nitride, flaky hexagonal boron nitride, nano silicon dioxide, nano cerium oxide and nano barium titanate. According to the invention, a chemical bonding interface is constructed between the inorganic filler and the organic resin, and the synergistic effect of the composite matrix and the multifunctional filler is optimized, so that the coating has excellent adhesive force, flexibility and thermal shock resistance, obtains high volume resistivity and breakdown strength, and meets the insulation protection requirements under harsh working conditions.

The invention relates to the technical field of waterproof materials, and particularly discloses a high-elasticity waterproof emulsion and a preparation method thereof. The invention discloses a high-elasticity waterproof emulsion. The water-based paint is prepared from the following raw materials in parts by mass: 40 to 60 parts of modified acrylic resin emulsion, 25 to 40 parts of waterborne polyurethane, 3 to 6 parts of hydroxyethyl methylacrylate, 0.5 to 1 part of mercaptopropionic acid, 6 to 8 parts of fluorinated mica sheet, 3 to 6 parts of organic silicon emulsion, 2 to 4 parts of fluorocarbon surfactant, 0.8 to 1.5 parts of adipic dihydrazide, 0.3 to 0.8 part of dynamic cross-linking agent, 3 to 8 parts of compatilizer, 0.5 to 1 part of antioxidant, 0.5 to 1 part of anti-aging agent, 0.5 to 1.5 parts of defoaming agent and 40 to 55 parts of solvent. The modified acrylic resin emulsion is prepared from a monomer comprising diacetone acrylamide. The high-elasticity waterproof emulsion prepared by the invention has relatively good elasticity, waterproof performance and aging resistance.

The invention discloses a high-stability silicon monoxide lithium ion battery negative electrode material and a preparation method thereof. The preparation method comprises the following steps: carrying out hydrothermal reaction on modified silicon monoxide micro powder and chromium nitrate nonahydrate to obtain MOF / silicon monoxide composite powder, and mixing the MOF / silicon monoxide composite powder with carbon nanotubes to obtain powder to be carbonized; and carbonizing the powder to be carbonized in a tubular furnace, and fluorinating with fluorine gas to obtain the high-stability silicon monoxide lithium ion battery negative electrode material. According to the preparation method, Cr-MOF coating is generated on the surface of the silicon monoxide powder in situ, agglomeration of the silicon monoxide powder is reduced, carbon nanotubes are evenly attached to Cr-MOF and then heated and carbonized, the carbon nanotubes are cured by a carbonization layer formed at a high temperature, the combination degree of the carbon nanotubes, a carbon layer and silicon monoxide is high, and the silicon monoxide powder is prepared. And under the synergistic effect with carbon fluoride formed by fluorination of fluorine, the stability of the silicon monoxide lithium battery negative electrode material is improved, the expansion rate of silicon monoxide is reduced, and the cycling stability of a lithium ion battery is improved.

The invention discloses a preparation method of DNA nano-frame assisted monodisperse perfluorinated carbon nano-particles and application of the DNA nano-frame assisted monodisperse perfluorinated carbon nano-particles to fluorine nuclear magnetic imaging. The preparation method comprises the following steps: introducing fluorocarbon chain modification into a DNA nano-frame structure space through hybridization complementation; the preparation method comprises the following steps: dispersing perfluorocarbon PFC in a surfactant to form a dispersion solution, co-incubating the dispersion solution and a DNA nano-frame structure modified by an introduced fluorocarbon chain, and capturing PFC particles entering a space by taking the fluorocarbon chain in the DNA nano-frame structure as a seed, so that the PFC is self-assembled in the DNA nano-frame structure to form nano-particles with uniform size, namely the nano-fluorine probe is obtained. According to the method, the PFC nano-particles are prepared by utilizing the three-dimensional DNA nano-frames (DNF) with various different structures, the method has the advantages of design controllability, uniform size and the like, and the prepared fluorine probe is single and sharp in nuclear magnetic signal and has a good application prospect.

The present invention relates to the field of cable technology, and discloses a flame-retardant and wear-resistant charging pile cable and a preparation method thereof. The charging pile cable prepared by the present invention comprises a cable core, a heat insulation layer, a shielding layer, and an outer sheath layer. The outer sheath layer is made of thermoplastic polyurethane elastomer as the main raw material, with the addition of maleic anhydride grafted POE, reinforcing fillers, and composite flame retardants and other functional additives, so that the cable has excellent flame retardant and wear resistance. Among them, the reinforcing filler utilizes the synergistic effect between hexagonal boron nitride and polyimide containing siloxane segments and long-chain fluorocarbon structures to improve the wear resistance of the outer sheath layer. The composite flame retardant has higher flame retardant efficiency than traditional inorganic flame retardants.

Non-aqueous membrane emulsion methods for producing polymeric and polymer-coated microparticles are provided. Some embodiments provide methods for producing a sustained release or controlled release microparticle by combining micronized protein powder and a polymer into a hydrocarbon solvent to form a non-aqueous first solution, agitating the first non-aqueous solution to form a suspension, feeding the suspension into a dispersion pump, wherein the suspension is infused through a porous membrane into a continuous phase comprising a fluorocarbon liquid and a fluorosurfactant to form a hydrocarbon-in-fluorocarbon emulsion. The hydrocarbon solvent, the fluorocarbon liquid, and the fluorosurfactant are removed, and the microparticles are collected.

The invention belongs to the technical field of drier preparation, and particularly relates to a dishwasher drier and a preparation method and application thereof. The dishwasher drier provided by the invention comprises fatty alcohol-polyoxyethylene ether, a fatty alcohol polyethylene / polypropylene ether copolymer, water-based fluorine-containing polyether siloxane, a polyacrylate modified polymer, sodium isooctanol sulfate, a chelating agent, a suspension stabilizer, a preservative and water. The stainless steel foam inhibitor is applied to an automatic dish-washing machine, and by introducing a modified silicone oil or fluorocarbon compound composite system, a combination of a high-molecular-weight polymer and a low-surface-tension regulator and a biocompatible defoaming agent, the drying performance of the stainless steel surface is remarkably improved, and the foam inhibition effect is optimized; foam generated by protein and an anionic surfactant is efficiently eliminated, meanwhile, environmental protection and sustainability are emphasized, and an efficient, clean and environment-friendly solution is brought to the automatic dish washing machine industry.

The present invention discloses a composite wear-resistant superhydrophobic coating and a method for using the same. The composite wear-resistant superhydrophobic coating is composed of a surface layer material and a bottom layer material stacked. The bottom layer material includes a mixture of fluorocarbon resin and epoxy resin; the surface layer material includes hydrophobic modified ceramic microspheres, hydrophobic modified nanocellulose coated on the surface of the hydrophobic modified ceramic microspheres, and hydrophobic modified nanocellulose filled inside the hydrophobic modified ceramic microspheres; it has good superhydrophobic performance, strong adhesion, high hardness, and strong scrub resistance.

The invention discloses an exposed polymer cement waterproof coating with a permeable crystallization function and a preparation method thereof. The waterproof coating comprises a component A and a component B, the component A comprises acrylic polymer emulsion, fluorocarbon emulsion, methyl silicic acid, soluble inorganic silicate and other auxiliaries; and the component B comprises cement, a filler, a geopolymer, a nanoscale silicon-containing compound, cellulose ether and an optional pigment. The waterproof coating disclosed by the invention has the functions of repairing structural cracks by permeable crystallization in the structure and enhancing the waterproof function of the structure; the high-elasticity and high-strength coating film outside the structure has an external waterproof effect, and the structure is protected; and meanwhile, the comprehensive long-acting waterproof effect is achieved through the self-repairing function when the coating film is broken. The LED lamp has exposure performance, and is particularly suitable for maintenance engineering needing to be exposed and repaired.

The utility model relates to the technical field of suspension spraying equipment, and discloses suspension spraying equipment for aluminum veneer fluorocarbon production, which comprises a spraying box, a suspension mechanism is arranged in the spraying box, a spraying mechanism is arranged in the spraying box, the suspension mechanism comprises a rotating component and a suspension component, and the rotating component is connected with the suspension component. The rotating assembly is arranged in the spraying box, the hanging assembly is arranged in the rotating assembly, the rotating assembly comprises a supporting plate, and the supporting plate is fixedly connected to the interior of the spraying box. According to the suspension spraying equipment for aluminum veneer fluorocarbon production, a sliding block slides outside a guide rail, the sliding block drives a gear through a rotating block, the gear rotates through a meshing gear ring, the gear drives the rotating block, the rotating block rotates in the sliding block, then the rotating block drives a groove plate, the groove plate drives a fixing plate through a sliding frame, and therefore the fixing plate drives a workpiece to rotate; and multiple surfaces of the workpiece can be sprayed, refixing is not needed, and using is fast.

Methods and apparatus for etching high aspect ratio features in substrates having mixed material stacks are provided herein. Methods involve using low plasma power, high chamber pressure, and / or low temperature while exposing the substrate to a metal-containing additive gas during etching using a fluorocarbon gas.

The invention relates to the technical field of high polymer materials, and discloses a high-chemical-resistance TPO material which comprises the following components in parts by mass: 55-65 parts of polypropylene; 35 to 45 parts of a styrene-ethylene / butylene-styrene block copolymer; 0.4 to 0.6 part of a furan end-capping reagent; 0.2 to 0.4 part of a maleimide cross-linking agent; 4-6 parts of modified shell powder; 8 to 12 parts of epoxidized cardanol; 2-4 parts of a heat-sensitive microcapsule, wherein the heat-sensitive microcapsule comprises a shell layer and an inner core; and 0.5 to 1.5 parts of a nano cellulose surface treating agent. Through the synergistic effect of a dynamic cross-linked network and fluorocarbon chain surface modification, when the material is in contact with acid, alkali and an organic solvent, reversible cross-linked bonds release local stress through a fracture-reconstruction mechanism, and microcrack propagation is inhibited; and the compact fluorocarbon layer on the surface forms a chemical inert barrier, so that the permeation rate of a corrosive medium is remarkably reduced, and the structural stability and long-term durability of the material in a complex chemical environment are guaranteed.

The invention relates to the technical field of fluorination equipment, in particular to high-purity fluorocarbonate-based solvent purification equipment, which comprises a purification main body internally provided with a purification cavity; the liquefaction separation module is arranged at the top of the purification cavity and is used for exchanging heat with the crude gas entering the purification cavity, so that the crude gas is liquefied and then subjected to gas-liquid separation; the rotary crystallization module comprises a crystallization pond, a rotary crystal plate group and a collection assembly, the crystallization pond is arranged below the purification cavity and used for receiving the liquefied and separated liquid phase, the rotary crystal plate group partially extends into the crystallization pond, and the rotary crystal plate group continuously rotates, so that liquid in the crystallization pond is crystallized on the surface of the rotary crystal plate group; and then the crystals are collected by the collecting assembly after rotating to the upper part of the crystallizing pond. According to the purification equipment for the high-purity fluorocarbonic ester-based solvent, the high-purity fluorocarbonic ester-based solvent can be continuously obtained in a manner of liquefying and then continuously crystallizing and collecting, so that the purification equipment has a good industrial value.

A method for forming a high aspect ratio (HAR) structure during a HAR etch process, the method comprises sequentially or simultaneously exposing the substrate to a vapor of an etchant including one or more hydrofluorocarbon or fluorocarbon compounds or one or more hydrogen-containing molecules and an additive compound, the substrate having a film disposed thereon and a patterned mask layer disposed on the film; activating a plasma to produce activated one or more hydrofluorocarbon or fluorocarbon compounds or activated one or more hydrogen-containing molecules and an activated additive compound; and allowing an etching reaction to proceed between the film uncovered by the patterned mask layer and the activated hydrofluorocarbon or fluorocarbon compounds or the activated one or more hydrogen-containing molecules and the activated additive compound to selectively etch the film from the patterned mask layer, thereby forming the HAR patterned structure.