1309 results about "Etching rate" patented technology

The invention discloses a semiconductor structure manufacturing method and a semiconductor structure, and the manufacturing method comprises the steps: carrying out the periodic cycle etching of a preset number of times on a substrate through employing an etching technology, forming a first intermediate structure on the substrate, and carrying out the first processing of the first intermediate structure, including employing a first gas and a second gas, removing a part of thickness of the passivation layer deposited on the side wall of the first intermediate structure, and reacting with the substrate material which exists on the side wall and is exposed on the surface of the convex part to generate a reaction product layer; and removing the reaction product layer by using a third gas and a fourth gas so as to remove at least part of the lug boss, and repeatedly executing the etching process and the first processing process until a high aspect ratio etching structure is formed on the substrate. According to the method, the etching process and the side wall processing technology are organically combined, the etching rate and the side wall quality are balanced through alternate circulation, and deep silicon etching with the higher aspect ratio and the smaller nanoscale size can be achieved.

The invention discloses a preparation method of a semiconductor structure and the semiconductor structure, and the preparation method comprises the steps: carrying out the etching of a substrate through employing an etching technology, so as to form a high-aspect-ratio etching structure on the substrate; after a periodic cycle step of a preset number of times of etching process is completed every time, a treatment process different from the etching process is used, and partial thickness of a passivation layer deposited on the side wall of an intermediate structure formed before the high aspect ratio etching structure is formed is removed. And removing at least part of the protruding part which exists on the side wall and is exposed from the surface of the residual passivation layer. According to the method, the etching process and the side wall processing technology are organically combined, the etching rate and the side wall quality are balanced through alternate circulation, and deep silicon etching with the higher aspect ratio and the smaller nanoscale size can be achieved.

The invention relates to the technical field of semiconductor manufacturing, in particular to an intelligent manufacturing process optimization method and system of an integrated industrial large model. Dynamic optimal combination solution of technological parameters such as photoetching dose, etching rate and film thickness is realized; an equipment operation instruction and an abnormal intervention strategy are generated in real time, and the accuracy and timeliness of operation are improved; and cross-process collaborative scheduling and bottleneck prediction are carried out, the whole production process is optimized, and finally the yield, efficiency and flexibility of semiconductor manufacturing are improved.

The invention discloses an automatic control etching system and method for a printed circuit board, and relates to the technical field of circuit boards, and the method comprises the following steps: 1, an operator puts a to-be-etched PCB into an etching groove, and inputs target etching parameters through a human-computer interaction interface; 2, the multi-dimensional sensor module continuously monitors key parameters in the etching tank, and data is transmitted to the central controller; 3, according to the data provided by the sensor, the central controller calculates a real-time etching rate by using a nonlinear kinetic model; 4, when the real-time etching rate deviates from the target rate, the system starts an adaptive control algorithm for adjustment; 5, when the system detects that the set etching depth or width reaches a target value, the etching process is automatically stopped, and key data are recorded; and step 6, the system analyzes based on the stored historical data, provides optimal etching parameters and adjustment strategies for different types of PCBs, and displays the data in real time through a human-computer interaction interface module.

The invention relates to an experimental method for manufacturing a through hole by using gray exposure, and aims to realize a through hole structure with a specific inclination angle and depth-to-width ratio through collaborative design of photoetching and etching processes. The method comprises the following steps: determining a through hole angle and a depth-to-width ratio, selecting an etching condition, designing a gray mask structure based on an etching rate selection ratio, implementing gray exposure to obtain a mask pattern, etching, removing residual photoresist and finally forming a target through hole. And by regulating and controlling the selection ratio k of the mask to the substrate material, the inclination angle beta of the through hole and the depth H, designing the gray-scale mask morphology conforming to the target structure. The gray mask can be constructed by adopting gray photoresist or an optical modulation mask, and the inclination morphology parameter, the etching time and the etching rate of the gray mask meet a specific relation, so that high-precision structure control is realized. The method is suitable for the fields of MEMS, micro-optical devices and the like with high requirements on the morphology precision of the through hole, and has the effects of good structure consistency and high process repeatability.

The invention belongs to the technical field of laser processing, and provides a quartz crystal etching solution which comprises the following components in volume concentration: 10-30% of hydrofluoric acid, 1-5% of sulfuric acid, 0.1-0.3% of surfactant and the balance of water. By optimizing the proportion, the manufacturing precision and the production and manufacturing efficiency of the tuning fork wafer are improved. And the stable etching rate and the optimal etching surface are obtained, and meanwhile, the cost is saved for process replacement. The invention further provides a method for cutting the tuning fork of the quartz crystal through the laser. The method comprises the steps that S1, the cutting contour line of the tuning fork is preset on the quartz crystal; s2, performing laser cutting on the quartz crystal based on a preset cutting contour line, and forming a tuning fork contour on the quartz crystal; and S3, integrally soaking the quartz crystal in the quartz crystal etching solution, and separating out the tuning fork. The machining process of the quartz crystal tuning fork is simplified, the cutting quality is optimized, the method is suitable for the large-piece manufacturing process, and the cutting efficiency and the yield are greatly improved.

The invention provides an etching parameter adjusting method and device in MOSFET chip production, and relates to the technical field of semiconductors, and the method comprises the steps: obtaining plasma density distribution data and an etching rate monitoring value of a wafer surface, and dynamically dividing the wafer surface into a plurality of segment independent control units; adjusting a radio frequency power distribution weight, and synchronously adjusting a reaction gas injection parameter; carrying out coupling analysis on the concentration gradient of the etching by-product and the matching degree of the surface morphology of the wafer; and when the deviation of the target value threshold is detected, temperature compensation and air pressure compensation are carried out. According to the method and the device, the technical problem of poor etching precision of the MOSFET chip caused by non-uniform etching rates of different regions in the etching process is solved, and the uniformity of the etching rates is improved through real-time monitoring and dynamic compensation, so that the etching precision of the MOSFET chip is improved.

The invention relates to an intelligent wafer etching process in the technical field of information, and the process comprises the steps: obtaining the etching rates of different materials under various liquid medicine formulas, constructing an etching rate database covering various material systems, screening out a material combination with high etching selectivity by comparing the etching rate differences in the database, and carrying out the etching of the material combination. Determining a targeted liquid medicine formula optimization direction; a multi-parameter online monitoring unit is installed in etching equipment, the concentration of liquid medicine is measured in real time through an optical fiber spectrometer, the temperature and the pH value of the liquid medicine are measured in real time through a thermocouple and a pH electrode, when monitoring parameters exceed a set range, a liquid medicine proportion adjusting program is started, and dynamic regulation and control over the property of the liquid medicine are achieved by controlling the liquid inlet amount and the liquid outlet amount. And the stability and the consistency of the etching process are ensured.

The invention discloses an integrated circuit equipment data optimization monitoring system and method based on big data, and relates to the technical field of integrated circuit manufacturing. The method is used for solving the problems of insufficient multi-physical field monitoring, difficulty in abnormal traceability and lack of closed-loop control in plasma etching. A plasma sheath thickness inversion model and an etching selection ratio model are constructed by collecting radio frequency reflection phase, mass spectrum ion strength and wafer temperature data, and process parameter-plasma state dynamic coupling is established. Interference image distortion features and electron microscope size data are fused, micro-groove geometric parameters are analyzed, morphology instability risk indexes are generated, and nanoscale early warning is achieved. And designing a dual-channel fusion network, embedding a physical constraint attention mechanism, and generating an etching rate optimization instruction. On the basis of incremental learning, model parameters are updated online, a'monitoring-decision-feedback 'closed-loop system is formed, anomaly detection sensitivity and decision reliability are improved, and technical support is provided for intelligence of integrated circuit equipment.

The invention relates to a method for optimizing electroplating and etching process parameters, which comprises the following steps of: establishing an interface migration behavior relationship by analyzing the influence of metal ions, doped impurities and surface roughness factors on a reaction interface migration rate and a boundary layer flow behavior in an electroplating and etching process; interface migration behaviors are combined with parameter sensitivity analysis, the influence of process parameters on the interface behaviors is dynamically evaluated, and priority optimization sorting is carried out; dynamic interval zooming is carried out on the sensitive parameters by using the fitted sensitivity function, and a local adjustment range is generated according to material types and graph complexity; a preorder process memory mapping relation is introduced, and morphology evolution information recorded in the electroplating process is transmitted to an etching parameter optimization module; local fine adjustment is carried out on the etching rate, angle control and a disturbance mechanism, and the previous electroplating state is responded; collecting a fluctuation interface feedback signal; establishing a closed-loop optimization control loop of micro-disturbance, response evaluation and parameter correction; and the process consistency and the structure uniformity are improved.

The invention discloses a preparation method of a magic angle nano-cavity and a topological body cavity based on a quantum dot single photon source, and the method comprises the steps: carrying out the preprocessing of a substrate, and enabling the substrate to comprise a quantum dot layer, a substrate layer, and a sacrificial layer located between the quantum dot layer and the substrate layer; treating the pretreated substrate by adopting oxygen plasma; photoresist is spin-coated on the surface of the quantum dot layer of the substrate, exposure and development are carried out, and a pattern is formed on the surface of the photoresist; transferring the pattern on the photoresist to the quantum dot layer through etching; and removing the sacrificial layer by wet etching to prepare two photonic crystal cavities, namely a magic angle nano cavity and a topological body cavity. Through fine electron beam exposure dose control, precise inductively coupled plasma gas component and etching rate control and appropriate corrosive liquid concentration and time control, a high-stability and high-repeatability photonic crystal suspension cavity structure, namely a magic angle nano cavity and a topological body cavity, with a line width of 30-50 nm is realized.

Method to selectively diffuse dipole dopants into the high-k gate dielectric layer is provided. A method of the present disclosure includes an etching back process controlling DC and bias power, a periodical switching of the bias power is synchronized with a periodical switching of the DC power, leading to a balanced etching rate and uniform depth of recesses in dummy materials within the gate trenches for the subsequent selective diffusion process across different devices. Additionally, during the etching back process, a protective passivation layer can be formed as a barrier on the sidewall of the recess and / or at the bottom of the recess.

The invention discloses an aluminum-based circuit acidic etching solution, which relates to the technical field of etching, and comprises the following components by mass concentration: 30-60 g / L of composite inorganic acid, 10-20 g / L of a wetting agent, 5-15 g / L of a stabilizer, 5-15 g / L of an accelerator, 6-15 g / L of a brightener, 0.5-2.5 g / L of a composite anti-lateral corrosion agent, and 2-4 g / L of a complexing agent. According to the acid etching solution for the aluminum-based circuit, the lateral etching rate of a 50-75-micron thin circuit can be lower than 30%, the etching rate is stable, the etched appearance is bright and uniform, and the circuit does not have a burr phenomenon; the wetting agent is added, so that the etching uniformity can be improved, the burr phenomenon can be prevented, the adsorption rate of inorganic acid can be increased for the burr part which is difficult to treat, and the corrosion efficiency of the burr part can be improved; by adding the brightener, the phenomena of uneven partial etching and blackening of the surface after etching can be solved.

In order to solve the problem that an existing BOE etching solution cannot consider the etching rate, the etching uniformity and the service life of the etching solution at the same time, the invention provides a BOE etching solution which comprises the following components: hydrogen fluoride, ammonium fluoride and a corrosion inhibitor, the corrosion inhibitor comprises a compound shown as a structural formula 1: # imgabs0 # structural formula 1, R1 is selected from substituted or unsubstituted C2-C6 alkyl, and R2 is selected from substituted or unsubstituted C2-C6 ether-containing alkyl. The BOE etching solution provided by the invention has a relatively high silicon oxide / silicon nitride and Si etching selection ratio, can effectively improve the etching uniformity, is beneficial to reducing surface defects, and ensures the flatness and smoothness of an etched surface. In addition, the BOE etching liquid is stable in chemical composition and long in service life.

The invention provides an ion beam etching system with an etching rate in-situ monitoring function and an etching method, the ion beam etching system is provided with an objective table which can deflect by 90 degrees and an electrical test detection element which can move close to or far away from the objective table, and by the etching method, an ion source is not closed, a sample is not taken out, and the etching rate can be accurately measured. The etching depth can be accurately monitored by measuring the surface resistance of the sample in situ, the etching rate can be reduced in time, and the method is more suitable for the tape-out process. According to the ion beam etching system and the etching method, sputter spectrum monitoring is replaced by sample surface resistance detection, so that the test sensitivity is higher, the system cost is lower, the etching precision in magnetic tunnel junction preparation is greatly improved, the sample is prevented from being excessively etched, the thickness of a sample layer can be kept consistent, the resistance distribution is uniform, and the quality of the magnetic tunnel junction is improved. And the high success rate preparation of the SOT-MRAM memory with large capacity and small size is realized.

The invention relates to the technical field of plasma etching, and particularly provides a variable-pressure plasma etching system and method and etching equipment, and the system comprises an etching reaction chamber; an etching gas supply assembly; the voltage distribution adjusting assembly is arranged below the wafer to be etched and is used for adjusting the voltage of different etching areas; the etching rate acquisition assembly is arranged in the etching cavity and is used for acquiring the actual etching rate corresponding to each etching area; the controller is used for controlling the voltage distribution adjusting assembly to adjust the voltage of each etching area according to the preset etching rate and the actual etching rate, so that the difference value between the preset etching rate and the actual etching rate of each etching area is adjusted to be within a preset range; the system can effectively solve the problems that a device obtained by a plasma etching process is inconsistent with a target device, the performance of the device is affected and even waste products are generated due to the fact that the distribution uniformity of the etching rate is reduced.

The invention relates to the technical field of semiconductor etching, in particular to a semiconductor etching method based on plasma coordinated regulation, which comprises the following steps: alternately using first plasma and second plasma on a semiconductor to be etched to obtain a plurality of groove structures with a preset depth-to-width ratio, the second plasma is used for cleaning side wall residues; detecting by using a laser interference measurement method to obtain an etching rate ratio and a side wall angle corresponding to each groove structure, and determining corresponding treatment according to the change condition of the etching rate ratio and the side wall angle, including maintaining the etching and cleaning parameters of the current stage, or adjusting the corresponding parameters of the first plasma according to the need, or corresponding parameters of the second plasma are adjusted according to needs. According to the method, the first plasma and the second plasma are cooperatively controlled to adjust the groove structure in each stage, so that the uniformity of the groove structure is improved, and the damage to the surface of the side wall is reduced.

An edge ring for use in a plasma chamber includes a first pair of edge ring segments with each one of the first pair of edge ring segments having a first thickness and a second pair of edge ring segments with each one of the second pair of edge ring segments having a second thickness. Each of the first pair of edge ring segments is oriented adjacent to each of the second pair of edge ring segments and each of the second pair of edge ring segments is oriented adjacent to each of the first pair of edge ring segments.

The invention discloses an aluminum etching solution and a preparation method and application thereof, the aluminum etching solution is composed of the following raw materials in percentage by mass: 55-75% of phosphoric acid, 1.5-8.5% of nitric acid, 2-10% of glacial acetic acid, 1-6% of an additive and the balance of deionized water, and the additive is composed of a surfactant accounting for 0.005-1% of the total mass of the aluminum etching solution and a buffering agent accounting for 1-5% of the total mass of the aluminum etching solution; all the raw materials can be used for etching aluminum-silicon-copper after being uniformly mixed, and the method has the advantages that the lateral erosion amount is small, the etching depth-to-width ratio can reach 2.23 or above, meanwhile, the etching taper angle is large, the etching rate is controlled between 5800-6200 / min, and the requirement of the market for the etching rate can be met.

The invention discloses a copper-titanium etching solution and a preparation method thereof, and belongs to the technical field of etching solution preparation. The etching solution is prepared from the following components in percentage by mass: 4.5-7.5% of potassium peroxymonosulfate composite salt, 1.2-2.8% of sodium percarbonate, 1.2-2.8% of benzotriazole-2, 3, 4-triazole-2, 3, 4-triazole-2, 3, 4-triazole-2, 3, 4-triazole-2, 3- The cleaning agent is prepared from the following components in percentage by weight: 1.2%-1.8% of 1, 3-dicarboxylic acid, 0.3%-0.8% of 5-aminotetrazole, 0.15%-0.45% of ethylenediamine tetraacetic acid tetrasodium salt, 0.15%-0.45% of hydroxyethylidene diphosphonic acid, 0.15%-0.45% of cocamidopropyl betaine, 0.3%-0.8% of benzotriazole, 0.15%-0.45% of 2-mercaptobenzothiazole, 0.02%-0.08% of poly-N-isopropylacrylamide, 0.7%-1.8% of potassium perchlorate and the balance of ultrapure water. According to the etching solution, the copper-titanium etching rate can be accurately regulated and controlled, back cutting and titanium residues are effectively inhibited, the stability of the etching solution is improved, and the service life of the etching solution is prolonged.

The utility model provides a plasma cleaning device, and belongs to the technical field of semiconductor production equipment, the plasma cleaning device comprises a cavity, and a chamber is arranged in the cavity; the cover plate covers the upper end of the cavity; the remote plasma source is connected to the central position of the protruding part; the gas blocking part is arranged in the conical cavity; the first gas homogenizing plate is arranged below the gas blocking part; the second gas uniformizing plate is arranged below the first gas uniformizing plate; and a substrate table. The cover plate and the gas blocking part can uniformly disperse plasma gas fed by a remote plasma source into the cavity, then the plasma gas is further homogenized through the first gas homogenizing plate to ensure the gas uniformity of a substrate area, and meanwhile, the vacuum mechanism is generally connected to the bottom of the cavity, so that the gas is downwards pumped through the second gas homogenizing plate during gas pumping, and the gas uniformity of the substrate area is ensured. The gas uniformity in the chamber can be effectively ensured, so that the etching uniformity and the etching rate are improved.

The invention discloses a compatible molybdenum-aluminum mixed acid etching solution which comprises the following components in percentage by mass: 4%-7% of nitric acid, 55%-65% of phosphoric acid, 17%-28% of acetic acid, 0.5%-3% of an oxidizing additive, 0.05%-5% of a metal corrosion inhibitor and 10%-20% of deionized water, and the oxidizing additive is ceric nitrate and at least one selected from sodium nitrate, potassium nitrate and ammonium nitrate; the etching liquid does not contain other organic components except for organic carboxylic acid and organic carboxylate. According to the compatible molybdenum-aluminum mixed acid etching solution, on the basis that ceric nitrate is introduced, the content of nitric acid is reduced, the nitrate ion concentration is increased by adding nitrate, the overall oxidation performance of an etching solution system is improved, the etching rate ratio of different metals is adjusted, CD-Bias is reduced, the etching dip angles of a molybdenum single layer and a molybdenum-aluminum laminated layer are controlled to be kept at 20-50 degrees, and the problem of aluminum thorns is solved. The invention further discloses a molybdenum-aluminum etching method based on the compatible molybdenum-aluminum mixed acid etching solution.

The invention discloses an alkaline medium-coarsening micro-etching solution as well as a preparation method and a micro-etching method thereof, and relates to the technical field of printed circuit board production. The alkaline medium-coarsening micro-etching liquid is prepared from the following components in mass concentration: 5-30 g / L of ammonium chloride, 0.5-2 g / L of tetramethylammonium hydroxide, 5-15 g / L of ammonia water, 2-10% of a catalyst, 0.1-1% of a wetting agent, 0.2-2% of an accelerator, 0.3-1.5% of a stabilizer, 0.5-5% of a color difference regulator and the balance of deionized water. The invention provides an alkaline medium-coarsening micro-etching solution and a preparation method and a micro-etching method thereof, which can solve the problem of color change of a board surface after micro-etching of a circuit board and overcome the defect that a sulfuric acid hydrogen peroxide micro-etching system is easily polluted by chloride ions, and can effectively improve the problem that hydrogen peroxide is easily decomposed by replacing sulfuric acid hydrogen peroxide with an alkaline substance. And the micro-etching rate is stable.

The invention relates to the technical field of photovoltaic cells, and discloses a selective passivation contact structure, a preparation method thereof and application of the selective passivation contact structure to preparation of a selective TOPCon cell. The method comprises the steps that a first tunneling oxide layer, first thin intrinsic amorphous silicon with the high crystallization rate and second thick intrinsic amorphous silicon with the low crystallization rate are sequentially prepared on the back face of a silicon wafer; boron diffusion doping is carried out, so that the first boron-doped polycrystalline silicon and the second boron-doped polycrystalline silicon have difference in doping concentration and crystallization rate; in the alkali etching process after laser patterning, first boron-doped polycrystalline silicon and a first tunneling oxide layer in a back non-electrode contact area are reserved by utilizing the etching rate difference of an alkaline solution on BSG and two layers of boron-doped polycrystalline silicon with different doping concentrations and crystallization rates; and the first tunneling oxide layer, the first boron-doped polycrystalline silicon and the second boron-doped polycrystalline silicon in the back electrode contact region are reserved. According to the method, the process steps can be simplified, parasitic absorption and recombination are reduced, passivation and transverse transmission are improved, and the cell efficiency is improved.

The invention relates to the technical field of OLED (Organic Light Emitting Diode) manufacturing process etching processes, in particular to a silver etching solution for an OLED manufacturing process as well as a preparation method and application of the silver etching solution. The silver etching liquid comprises nitric acid, phosphoric acid, a buffer agent, a metal ion chelating agent and an ionic liquid inhibitor, the ionic liquid inhibitor comprises 1-butyl-3-methylimidazole phosphate, the metal ion chelating agent is selected from at least one of pyromellitic acid, diethylenetriamine pentaacetic acid and ethylenediamine tetramethylene phosphoric acid, and the buffer agent is selected from at least one of sodium chloride, sodium chloride and sodium chloride. The buffering agent comprises acetic acid, and all the components are prepared according to a specific mass ratio. The etching solution can balance the etching rate of silver and indium tin oxide, avoid silver residues and black spot defects, prolong the service life of the solution, reduce the use of a volatile buffer agent, adapt to the OLED fine manufacturing process, improve the product yield and reduce the production cost, and is suitable for etching of a metal substrate in the OLED manufacturing process.

The invention provides a chip, a manufacturing method thereof and electronic equipment, the chip comprises a transistor, a metal silicide layer, an etching stop layer, an interlayer dielectric layer and a plurality of first contact holes, the metal silicide layer is at least arranged on a source electrode and a drain electrode of the transistor, and the first contact holes penetrate through the etching stop layer and the interlayer dielectric layer; the chip further comprises a barrier layer, the barrier layer is arranged between the metal silicide layer and the etching stop layer, and under the etching condition of the etching stop layer, the etching rate of the etching stop layer is larger than that of the barrier layer. Therefore, when the etching stop layer is etched, the barrier layer can be prevented from being etched, so that the barrier layer can play a role in stopping etching, the metal silicide layer is prevented from being etched, the metal silicide layer is protected, a source electrode and a drain electrode in the transistor cannot be influenced even if the metal silicide layer is thin, and the reliability of the transistor is improved. And the source electrode and the drain electrode are protected, so that the manufacturing yield of the chip is improved.

The purpose of the present invention is to provide: an etching method exhibiting an excellent etching rate with respect to silicon; a method for manufacturing a semiconductor device; an etching apparatus; and an etching gas composition. The present invention pertains to an etching method for etching silicon by using a plasma gas obtained by converting an etching gas composition containing fluorine gas into plasma.

A Micro LED table with an ITO buffer layer and a method for preparing the etching uniformity thereof belong to the technical field of semiconductor devices and their processing technology. The present invention improves the original process flow, uses the ITO layer as an ICP etching buffer layer, and when etching the Micro LED table, etches at a rate according to the part with a faster etching rate in the wafer, and further over-etches to ensure that the epitaxial layer is etched through. The present invention uses ITO as a buffer layer to protect the underlying structure, and then uses wet etching or physical etching to remove the excess buffer layer to eliminate the impact of uneven etching. Furthermore, since the ITO buffer layer has good conductivity, it can improve the current expansion effect of the chip and enhance the brightness of the chip; to solve the problem of uneven etching rate for the wafer as a whole in the current Micro LED table etching process, and achieve the yield optimization of the Micro LED chip.

The utility model discloses a double-cavity processing system, which comprises two processing cavities used for respectively carrying out process processing on substrates arranged in the processing cavities; the main gas inlet channel is connected with a process gas source, and the gas flow divider assembly is arranged on the main gas inlet channel and used for dividing one path of process gas into four paths of process gas flows and supplying the four paths of process gas flows into the two processing cavities respectively; and the flow adjusting control unit is used for controlling the gas flow divider assembly according to the substrate processing results of the two processing cavities so as to adjust the process gas flow entering the two processing cavities. According to the utility model, the process gas flow in the two processing cavities is adjusted, so that the difference of the etching rate between the two processing cavities is reduced.

The invention discloses a self-adaptive etching control method for automobile circuit board manufacturing, and relates to the technical field of automobile circuit board manufacturing. The self-adaptive etching control method for manufacturing the automobile circuit board comprises the following steps: S1, real-time multi-source sensing: synchronously acquiring a copper layer etching rate, a three-dimensional shape and a bath solution temperature gradient through a multispectral confocal unit, an ultrasonic thickness measuring unit and a distributed temperature sensing unit which are integrated in an etching bath; s2, dynamic decision analysis; s3, multi-parameter cooperative execution: independently adjusting the pressure gradient, the atomization particle size and the oscillation frequency through a spraying pressure regulation and control unit, an etching agent atomization unit and a mechanical oscillation unit; s4, closed-loop process verification: feeding back etching uniformity, and dynamically correcting the decision model; through the steps of real-time multi-source sensing, dynamic decision analysis, multi-parameter cooperative execution and closed-loop process verification, accurate control over the automobile circuit board etching process is achieved, and the etching quality and efficiency are improved.