The invention relates to a production process of a
capacitor chip, which comprises the following steps of:
etching a
silicon substrate to form a
bottle-shaped groove structure, and forming an upper
electrode and a lower
electrode with convex shapes in a groove through the steps of depositing
silicon crystal grains, implanting ions, forming an intermediate
dielectric layer,
etching the intermediate
dielectric layer and depositing a conductive layer; and hole
etching is carried out on gaps among the three adjacent trench capacitors, and a heat dissipation insulating material is deposited to form a heat dissipation isolation structure. According to the invention, the
bottle-shaped groove is formed through two etching processes, and the
capacitance value of the
chip is further improved in combination with the
convex structure of the
electrode; in addition, by forming a heat dissipation isolation structure, the
chip integration density is improved, the heat dissipation performance of the
capacitor chip is improved, and meanwhile the electrical insulation performance between capacitors is further improved.