The application discloses a
graphene acceleration sensor with a ladder beam structure and belongs to the technical field of acceleration sensors. The
graphene acceleration sensor comprises a support frame, a cross-shaped
mass block, a substrate, ladder-shaped
cantilever beams,
graphene pressure-sensitive resistors, protective films,
metal electrodes and
metal pads. The cross-shaped
mass block is located in the middle of the support frame, and each inner side wall of the support frame is connected with the cross-shaped
mass block through a ladder-shaped
cantilever beam. The substrate is bonded to the bottom of the support frame. Each ladder-shaped
cantilever beam is a variable cross-section beam, which decreases from the cross-shaped mass block to the support frame. Each graphene pressure-sensitive
resistor is arranged on each ladder-shaped cantilever beam, and each protective film covers the upper surface of each graphene pressure-sensitive
resistor. The graphene acceleration sensor has a wide-range measurement range of 50000g, the sensitivity is improved by 36.11%, and the graphene acceleration sensor has excellent wide-range and high-sensitivity characteristics and significantly reduces the influence on the cross-axis sensitivity.