The invention relates to an FBAR-based MIM on-
chip capacitor, a high-integration
chip structure of the FBAR-based MIM on-
chip capacitor in a
hybrid FBAR circuit, and
electronic equipment. The chip structure comprises a film bulk acoustic
resonator and a
capacitor which are arranged on the same substrate; the film bulk acoustic
resonator comprises an
acoustic wave reflection structure, and a lower
electrode, a piezoelectric layer and an upper
electrode which are laminated on the
acoustic wave reflection structure. The capacitor comprises an upper
electrode, a lower electrode and a central
dielectric layer, wherein the upper electrode and the lower electrode are stacked on at least three
metal layers formed on a substrate; the
dielectric constant of the central
dielectric layer is greater than 6; the thickness of each
metal layer in the upper electrode and the lower electrode of the capacitor is not less than the
skin depth, and the outermost upper electrode sub-layer and the outermost lower electrode sub-layer are the sub-
layers with the largest thickness in the
metal layers; the middle layer upper electrode sub-layer and the
resonator upper electrode are made of the same material, the middle layer lower electrode sub-layer and the resonator lower electrode are made of the same material, the innermost layer upper electrode sub-layer and the innermost layer lower electrode sub-layer are not diffused with the material of the central
dielectric layer, and the area of the capacitor is not larger than five times of the area of the film body acoustic resonator.