3results about "Lamp details" patented technology

The technology described herein relates to excimer lamps. An exemplary excimer lamp includes a lamp envelope configured to confine a gas within a sealed cavity, wherein at least a portion of the lamp envelope is configured to attenuate or block UV light with wavelengths greater than 230 nanometers (nm) and transmit UV light with wavelengths between 190 and 230 nm.

A microwave generator, an ultraviolet light source, and a substrate processing method. The microwave generator includes a core assembly, a first magnetic element, a second magnetic element, and a heat sink. The core assembly includes a first electrode element and a second electrode element sleeved on the first electrode element. The first magnetic element is sleeved on the first electrode element, and the second magnetic element is sleeved on the first electrode element and separated from the first magnetic element. The second electrode element is located between the first magnetic element and the second magnetic element. The heat sink includes at least one heat dissipation fin, and the heat dissipation fin extends towards the second magnetic element.

A cathode-ray tube ultraviolet light source includes a metal housing provided with a light-transmissive window, a heatsink disposed within the metal housing, a phosphor having a first surface and an opposing second surface, wherein the second surface of the phosphor is in thermal contact with the heatsink, and an electron gun capable of developing an electron beam to impinge upon the first surface of the phosphor, whereby light emitted from the second surface of the phosphor is directed through the light-transmissive window.