8 results about "Excimer lamp" patented technology

This utility model relates to the field of ultraviolet lamp technology and discloses an excimer lamp, including a shell, a sealing element, a lamp tube, a water pipe, and a water inlet pipe. The sealing element is installed at the top of the shell and has a connecting hole, a water inlet hole, and a water outlet hole. The connecting hole is located at the bottom of the sealing element and communicates with the water inlet hole and the water outlet hole respectively. The lamp tube is located inside the shell and includes an outer tube and an inner tube. The inner tube is coaxially arranged inside the outer tube, forming a sealed cavity between the inner tube and the outer tube. The water pipe passes through the inner tube, with its bottom end being a closed end. The top end of the water pipe is inserted into the connecting hole and communicates with the water outlet hole. The water inlet pipe is located inside the water pipe, with a gap between the bottom ends of the water inlet pipe and the bottom ends of the water pipe. The top end of the water inlet pipe extends out of the water pipe and is inserted into the water inlet hole. A gap exists between the outer side of the water inlet pipe and the inner side of the water pipe, forming a flow channel. This utility model can ensure the sealing of the excimer lamp shell and also help dissipate heat from the lamp tube.

The technology described herein relates to excimer lamps. An exemplary excimer lamp includes a lamp envelope configured to confine a gas within a sealed cavity, wherein at least a portion of the lamp envelope is configured to attenuate or block UV light with wavelengths greater than 230 nanometers (nm) and transmit UV light with wavelengths between 190 and 230 nm.

The techniques described herein relate to excimer lamps. An example excimer lamp includes a lamp envelope configured to confine a gas in a sealed cavity, at least a portion of the lamp envelope being configured to attenuate or block UV light of a wavelength greater than 230 nanometers (nm) and to transmit UV light of a wavelength between 190 and 230 nm.

This application relates to the field of semiconductor equipment, and mainly to a silver paste electrode protection structure for flat panel excimer lamps and its fabrication method. The silver paste electrode protection structure for flat panel excimer lamps is disposed on a substrate containing a low-temperature silver paste electrode. The structure sequentially comprises an epoxy primer layer, a gradient transition layer, a fluorocarbon resin layer, a silicone resin layer, a micro / nano roughened structure, and a silicone resin layer. This application achieves effective sealing, UV resistance, high-temperature resistance, hydrophobicity and antifouling protection, and insulation protection for the silver paste electrode, ensuring that the overall electrode lifespan, discharge uniformity, and environmental adaptability meet the requirements for long-term stable and reliable operation.

This utility model relates to the field of excimer lamp technology and discloses a fixing structure for the inner electrode of an excimer lamp, including a lamp tube, a support tube, an inner electrode, and a fixing assembly. The support tube is coaxially disposed inside the lamp tube, and the inner electrode is sleeved on the support tube. The fixing assembly includes a mounting cylinder, a connecting cylinder, and a connecting rod. The mounting cylinder is sleeved on the inner electrode, and the connecting cylinder is fixed to the side of the mounting cylinder. Multiple connecting cylinders are provided and arranged along the outer periphery of the mounting cylinder. A connecting rod is inserted into the connecting cylinder, one end of the connecting rod extends out of the connecting cylinder and is fused to the inner side of the lamp tube, and the other end of the connecting rod has a gap with the outer side of the support tube. In this utility model, the lamp tube is supported and fixed by the fixing assembly to the inner electrode and the support tube. Since there is a gap between the end of the connecting rod away from the lamp tube and the mounting cylinder, when the connecting rod expands and contracts due to temperature changes, it will not affect the support tube, thereby preventing the support tube and the lamp tube from cracking due to the thermal expansion and contraction of the connecting rod.

The application relates to the technical field of lamps, in particular to a coaxial excimer lamp and a preparation process thereof, wherein the excimer lamp comprises a lamp tube and a first electrode and a second electrode for exciting excimer working gas in the lamp tube; the lamp tube comprises an outer tube, an inner tube and an end cover; the outer tube is a quartz outer tube, a tube surface of the outer tube serves as a light transmission surface; the inner tube is a 316L stainless steel inner tube; the outer tube is coaxially arranged at the periphery of the inner tube; the two ends of the outer tube and the inner tube are sealed by the two end covers; a discharge working cavity is formed between the outer tube, the inner tube and the end cover; and the coaxial excimer lamp and the preparation process thereof solve the problem of high manufacturing cost caused by the fact that the outer tube and the inner tube of the existing coaxial excimer lamp are both made of quartz material.