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266 results about "Excimer lamp" patented technology
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An excimer lamp (or excilamp) is a source of ultraviolet light produced by spontaneous emission of excimer (exciplex) molecules.
UV-Curing Apparatus Provided With Wavelength-Tuned Excimer Lamp and Method of Processing Semiconductor Substrate Using Same
InactiveUS20140099798A1Prevents unnecessary riseLow costMaterial analysis by optical meansSemiconductor/solid-state device manufacturingFluorescenceUltraviolet
A UV irradiation apparatus for processing a semiconductor substrate includes: a UV lamp unit having at least one dielectric barrier discharge excimer lamp which is constituted by a luminous tube containing a rare gas wherein an inner surface of the luminous tube is coated with a fluorescent substance having a peak emission spectrum in a wavelength range of 190 nm to 350 nm; and a reaction chamber disposed under the UV lamp unit and connected thereto via a transmission window.
Owner:ASM IP HLDG BV
Dielectric barrier excimer lamp and ultraviolet light beam irradiating apparatus with the lamp
Disclosed is a dielectric barrier excimer lamp which is easy to handle, less expensive and improved in ultraviolet light beam irradiation efficiency to electric power and ultraviolet light beam irradiation efficiency to a work.The dielectric barrier excimer lamp comprises a dual tube having an inner tube, an outer tube and a discharge gas sealed in a space between the inner and outer tubes, a case for housing said dual tube, a light-transmitting outer electrode including a network-shaped region disposed on an external-surface side of said outer tube and an inner electrode disposed on an inner-surface side of said inner tube, or comprises a dual tube in which the above discharge gas is sealed, a network-shaped first electrode disposed on the outer circumferential surface of said outer tube, a second electrode disposed in the inner circumferential surface of said inner tube, and a first tube for internally housing said dual tube together with said electrodes inside thereof, an inert gas being introducible into a space between said first tube and said outer tube, wherein a voltage is applied between the electrodes to radiate an ultraviolet light beam.
Owner:HOYA SCHOTT
Reduced pressure irradiation processing method and apparatus
InactiveUS20060016458A1Semiconductor/solid-state device manufacturingElectrostatic cleaningUltravioletXenon
A system and method for processing substrates, such as porous low-K semiconductor wafers, using ultraviolet (UV) radiation is disclosed. The substrates are first cleaned in a wet processing module and then dried in a UV module under reduced pressure and at a temperature below 100 C., preferably at or below 80 C. A robot module transfers the substrates from the wet processing module to the UV module. The UV module can include a pulse xenon excimer lamp providing incoherent vacuum ultraviolet (VUV) radiation at 172 nm.
Owner:AKRION TECH +1
Excimer lamp device
ActiveCN101131228ASuppress excessive attenuationEasy to cleanLighting applicationsSemiconductor/solid-state device manufacturingWater vaporProcess engineering
To provide an excimer lamp device suitably coping with enlargement of a substrate, reducing running cost, and surely treating the surface of the substrate. The excimer lamp device related to the present invention is provided with a lamp house storing excimer lamps; a gas supply pipe having gas jetting ports disposed in the lamp house and located in parallel and alternately with the excimer lamps; and a gas supply means introducing inert gas containing steam to the gas supply pipe. The inert gas with the absolute humidity controlled to a given value is supplied to the gas supply pipe by the gas supply means. The absolute humidity is preferably controlled to 0.5-6.5 g / kg in terms of the weight absolute humidity.
Owner:USHIO DENKI KK
Excimer Lamp
InactiveUS20090039757A1Increase output powerIncrease radiation intensityDischarge tube luminescnet screensLamp detailsOptical radiationOptoelectronics
The present invention seeks to provide an excimer lamp enhanced in the radiation output of excimer rays, the excimer lamp having at least an optical radiation window provided on the exit side of radiation of rays and a plurality of excimer discharge plates electrodes opposed to one another and having a constitution in which excimer discharge gas present in discharge spaces formed in the said opposed electrodes causes a discharge to radiate excimer rays, said excimer discharge electrodes being flat-plate electrodes, a plurality of said discharge spaces being provided, each of which is between flat-plate electrodes, said optical radiation window being provided in parallel with discharge channels of said discharge spaces.
Owner:HOYA CANDEO OPTRONICS
Analyzer system and method incorporating excimer UV fluorescence detection
Owner:COSA XENTAUR CORP
Device for treating waste water with microwave electrodeless excimer lamp and gas distributing system for lamp
InactiveCN101857283AHigh strengthAdjustable wavelengthWater/sewage treatment by irradiationUltraviolet lightsEngineering
The invention discloses a device for treating waste water with a microwave electrodeless excimer lamp and a gas distributing system for the electrodeless excimer lamp in the device. A waster water treatment pond of the device is arranged below the shell of a microwave generator; 1 / 5 to 1 / 3 of the electrodeless excimer lamp is fixed in a resonant cavity, and the part of the electrodeless excimer lamp, which is not arranged in the resonant cavity, is sheathed with a quartz casing tube with a closed lower end; the microwave generator comprises a fan and a cooling copper tube which are used for cooling the resonant cavity, the fan is fixed on the inner side wall of the shell, and the cooling copper tube is welded around the external surface of the shell; the gas distributing system for the electrodeless excimer lamp is also provided with a cold well in front of a vacuum pump; and the pipeline, which is connected with a third port of a second three-way valve, is connected with a gas bottle, a gas storage bottle, a pressure indicating meter, a buffer bottle and a gas filling pipeline in parallel. The vacuum gas distributing system has a high vacuum degree, and can fill different gases according to the specific ultraviolet wavelength required by waste water treatment, so that the electrodeless excimer lamp can emit ultraviolet light with high intensity and high light effect.
Owner:NANTONG HONGLIAN GARMENTS +1
Phototherapy apparatus using excimer radiation
InactiveUS20070135872A1Good effectHarm can be reducedSurgical instrument detailsLight therapyLight treatmentUv b radiation
A phototherapy device using excimer radiation in which, by skillful use of the individual peak wavelength of 308 nm and of the emission range of shorter wavelengths than 308 nm, the therapy effect is enhanced, and in which, at the same time, harm can be reduced is achieved using a XeCl excimer lamp and in which diseased sites of skin disorders are irradiated with UV-B radiation with an optical filter being used for changing the spectral shape of the UV-B radiation with which the diseased sites are irradiated.
Owner:USHIO DENKI KK
Photomask substrate made of synthetic quartz glass and photomask
ActiveUS20060246363A1Low birefringenceGlass shaping apparatusPhotomechanical exposure apparatusExcimer lampPhotomask
It is to provide a photomask substrate which has a low birefringence and with which polarized illumination can be employed or immersion exposure can be carried out. A photomask substrate made of a synthetic quartz glass to be used for production of a semiconductor employing a light source having an exposure wavelength of at most about 200 nm, which has a birefringence of at most 1 nm / 6.35 mm at the exposure wavelength, and of which the amount of decrease in light transmittance is at most 1.0% as a difference in light transmittance at a wavelength of 217 nm, between before and after irradiation with Xe excimer lamp with an illuminance of 13.2 mW / cm2 for 20 minutes.
Owner:ASAHI GLASS CO LTD
Excited quasi-molecule lamp
InactiveCN1494105AEasy to operateSolution to short lifeElectric discharge lampsMetal alloyEngineering
Provided is an excimer lamp having an outer electrode that can be manufactured at low cost with reliability. The excimer lamp comprises a discharge tube 10 having an inner tube 11 and an outer tube 12, formed as coaxial cylinders. A high voltage is applied between an inner electrode 15 inside the inner tube 11 and the outer electrode 14 arranged on outside surface of the outer tube 12 to cause the gas encapsulated in a space 15 between the inner tube 11 and the outer tube 12 to perform discharge light emission. The outer electrode 14 is formed by transferring a metal electrode pattern from a transferring paper to the surface of the outer tube 12, and baked. In an embodiment, the outer electrode 14 is a mesh having an open area ratio of 70% or more. The outer electrode 14 is formed of a metal or a metal alloy made of two or more metals out of gold, silver, platinum, nickel, or chromium.
Owner:ORC MFG
Apparatus with ultra violet spectrum lamp, for the treatment of psoriasis
InactiveUS7198624B2Convenient treatmentEasy to operateSurgical instrument detailsLight therapyLight treatmentUltraviolet
A phototherapy apparatus for the treatment of psoriasis which includes a dielectric-discharge excimer lamp 32, which is equipped with a reflector 34 and optical system 36 for ensuring a substantially uniform density of energy, is mounted on a maneuverable arm 40. The arm 40 is mounted to a stand 24. An electronic control unit 20 and a radiofrequency power supply unit 22 are connected to the lamp 32. A pipe of a cooling circuit 9 is connected to the lamp 32 via the arm 40. The pipe 9 connects to an air-liquid exchanger 3 with a de-ionizer having a temperature sensor 5 and a sensor 7. The sensors 5, 7 and 10 are connected to a microcontroller 12, which is connected to an operating panel 14 and to a display 16 and a printer 18. A hardware container 26 is provided on the stand to hold the radiofrequency power supply unit 22, the printer 28, the microcontroller 12, the control panel 30, and the air-liquid exchanger 3.
Owner:EL EN SPA
Excimer lamp apparatus
InactiveUS20060097657A1Long life-timeNumberGas-filled discharge tubesElectric lighting sourcesStart up timeVoltage variation
The invention provides an excimer lamp apparatus that has advanced start-up properties, in terms of start-up time and start-up stability, in the presence of voltage variations, without any trigger electrode, by arranging a pair of electrodes along the entire length of a discharge container. An ultra-violet emitter is arranged to irradiate discharge gas in the discharge container with ultra-violet light, and the excimer lamp is started up by means of exposure with ultra-violet light from the ultra-violet emitting unit.
Owner:HOYA CANDEO OPTRONICS
Decomposition apparatus of organic compound, decomposition method thereof, excimer UV lamp and excimer emission apparatus
InactiveUS6888041B1Improve breathabilityPromote decompositionVacuum tubesWater/sewage treatment by irradiationDecompositionOrganic compound
A decomposition apparatus is provided that includes an excimer lamp emitting UV light for decomposing an organic compound and a decomposition container provided with the excimer lamp for decomposing the organic compound in a liquid or a gas. In the decomposition apparatus, since the UV light irradiated from the excimer lamp is emitted to the liquid or the gas, the organic compound in the liquid or the gas can be decomposed easily by the simple decomposition apparatus and method. The decomposition apparatus and method are effective to decompose the organic compound, such as dioxin (polychlorinated dibenzo-para-dioxin), PCB (polychiorinated biphenyl), trichloroethylene or the like, polluting the air or water to purify the environment.
Owner:WAKOMU ELECTRIC ZAIRYO
Process for scratch- and abrasion-resistant coating and physical matting of plastics substrates, more particularly polymethyl methacrylate, with nanocomposite coating material
The invention relates to a process for the surface-finishing of plastics substrates, preferably polymethyl methacrylate (abbreviated hereinafter to PMMA), by coating with a clear coating material comprising nanoparticles (hereinafter nanocomposite coating material) and irradiating the same with vacuum UV light of wavelength 172 nm from an Xe* excimer lamp. This process leads to excellent adhesion of the coating substance on the substrate. It is moreover possible to give the coating surface a topography. The mechanical and chemical properties and performance characteristics of uncoated substrate are substantially exceeded when a substrate is coated in this way.
Owner:EVONIK ROEHM GMBH
Matting powder-free ultra-matte skin feeling UV coating and preparation and curing method thereof
InactiveCN111057452AAchieve a matte skin feelNo pollution in the processAntifouling/underwater paintsPretreated surfacesPolymer scienceAcrylic resin
The invention relates to a matting powder-free ultra-matte skin feeling UV coating and a preparation and a curing method thereof. The formula comprises the following components in parts by weight: 30to 40 parts of hyperbranched polyester multifunctional acrylic resin, 20 to 25 parts of modified epoxy acrylic resin, 35 to 45 parts of an active monomer, 0.5 to 2.0 parts of a photoinitiator and 0.5to 3.0 parts of an antifouling auxiliary agent. The raw materials are mixed and stirred to obtain the matting powder-free ultra-matte skin feeling UV coating. The coating prepared by the invention ismainly applied to wood material surface ultra-matte skin feeling coating and the like; the manufacturing process is simple, and a gallium lamp, a 172nm excimer lamp, a nitrogen oxygen-expelling lamp and a mercury lamp UV light source are adopted; due to the fact that the ultraviolet output energy of the 172nm excimer lamp is concentrated, the ultraviolet output intensity is high and can reach 100mW / cm<2>, expensive matte powder and skin feeling auxiliaries are not needed, after a coating film is cured, the gloss of matte is below 2 degrees (60 degrees), and the coating film is good in skin feeling, stain-resistant and scratch-resistant.
Owner:CHANGZHOU WEIXING DECORATIVE MATERIALS +1
Ultraviolet irradiation set and ultraviolet irradiation processing unit
ActiveCN101527255ASmall volumeLow costSemiconductor/solid-state device manufacturingPhotosensitive material processingUltravioletEngineering
The invention provides an ultraviolet irradiation set which can fill the non-active gas rapidly around the quasi-molecule lamp and comprises: a plurality of quasi-molecule lamps enclosed with the discharging gas in a sealed space formed in a discharging container and forming a pair of electrodes on the outer surface of the capacitor isolated by the sealed space; a lampshade surrounding the plurality of quasi-molecule lamps, opening at one direction of the vertical direction and a gas supply mechanism for supplying the non-active gas to the interior of the lampshade. The ultraviolet irradiation set is characterized in that in the lampshade the space shielding body is disposed in a space out of the space of the quasi-molecule lamp.
Owner:USHIO DENKI KK
Excimer lamp
ActiveUS20150364317A1Simple structurePromote activationDischarge tube luminescnet screensElectric discharge tubesFluorescenceUltraviolet lights
Provided is an excimer lamp having a simple and small structure, which can be used in, for example, a refrigerator, and can emit ultraviolet light at a wavelength effective in disinfection processing without generating ozone in a surrounding atmosphere, without leaving gas impurities and moisture in an electrical discharge vessel, and without causing a steep illuminance decrease. A fluorescent substance is disposed on an inner face of the electrical discharge vessel for converting ultraviolet light emitted upon excimer electrical discharge of a light emitting gas to ultraviolet light having a longer wavelength. An inner electrode has a coil shape. A tight winding portion is formed at a certain area of the interior electrode which extends in the center axial direction of the interior electrode such that the coil is tightly wound in the tight winding portion. A getter is attached to the tight winding portion.
Owner:USHIO DENKI KK
Excimer lamp
InactiveCN1822312APromote high temperatureImprove efficiencyElectric discharge tubesGas discharge lamp detailsDielectricIlluminance
Provided is an excimer lamp provided with a getter, aimed at improvement of getter function, capable of preventing the lowering of luminance maintaining ratio and prolonging the lamp lifetime. The excimer lamp is composed of a discharging container, of which at least one part is constituted of a dielectric member transmitting ultraviolet-ray, in which discharge gas is sealed; an inner electrode, extending in longitudinal direction in the discharging container, sealed airtightly at sealing parts at the end parts of the discharging container; and an external electrode arranged on outer face of the discharging container. An inner tube, made of dielectric, is arranged in the discharging container, the inside electrode is inserted into the inner tube, and a getter is arranged inside the inner tube.
Owner:USHIO DENKI KK
Excimer lamp
ActiveCN101540264AResolve the breakAvoid exposureElectric discharge tubesGas discharge lamp detailsEngineeringXenon
The invention provides an excimer lamp which generates excimer discharge in discharge space to radiate vacuum ultraviolet light. Melted quartz glass forms a part of a discharge container. The excimer lamp (1) has a discharge container (2) made of quartz glass and composed of a dual pipe of which the inside pipe (4) and the outside pipe (3) are disposed in the coaxial direction; a pair of electrodes (5), (6) is disposed in a state of the quartz glass forming the discharge container (2); xenon gas is sealed in the discharge space (S); excimer discharge happens in the discharge space (S) of the discharge container (2). The invention is characterized in that the inside pipe (4) is made from melted quartz glass and the outside pipe (3) is made from synthesized quartz glass.
Owner:USHIO DENKI KK
Apparatus for measuring light intensity of excimer lamp
InactiveUS6657384B1Material analysis by optical meansPhotoelectric discharge tubesLight beamWavelength
Provided is a small-sized less expensive light-intensity measuring apparatus for measuring a xenon excimer lamp that radiates a light beam having a central wavelength of 172 nm for an intensity.The light-intensity measuring apparatus of the present invention comprises a photoelectric converting means 23, preferably a photodiode, having photosensitivity in the range of from 800 to 1,000 nm, an operating means 25 for relatively determining the intensity of a light beam having a central wavelength of 172 nm depending upon an output of the photoelectric converting means 23 and a transmitting means 26 for transmitting the light intensity determined with the operating means 25.
Owner:HOYA SCHOTT
Fluorescent excimer lamps
ActiveUS20110254449A1Guaranteed normal transmissionDischarge tube luminescnet screensGas plasma lampsHigh energyHigh pressure
Excimers are formed in a high pressure gas by applying a potential between a first electrode (14, 214) and a counter electrode (25, 226) so as to impose an electric field within the gas, or by introducing high energy electrons into the gas using an electron beam. A phosphor for converting the wavelength of radiation emitted from the formed excimers is disposed within the gas and outside a region (62, 162) where the excimers are expected to be formed, so as to avoid degradation of the phosphor.
Owner:RUTGERS THE STATE UNIV
Preparation method of super-matte floor
InactiveCN111299105ACreates an ultra-matte technical finishPretreated surfacesCoatingsNitrogen gasExcimer lamp
Owner:ZHEJIANG KINGDOM NEW MATERIAL GRP CO LTD
Excimer lamp
ActiveUS20110156581A1Improve reliabilityHigh emission outputSolid cathode detailsGas discharge lamp detailsCapacitanceNoble gas
An excimer lamp has a single tubular discharge chamber configured to enclose a discharge gas that is a noble gas or a mixing gas consisting of a noble gas and a halogen gas; a pair of electrodes configured to be arranged along opposite sides of the exterior surface of the discharge chamber; and an outer tube configured to cover the discharge chamber and the electrodes. Excimer molecules are produced by either dielectric barrier discharge or capacitive-coupled high-frequency discharge. An interior of a space formed between the outer tube and the discharge chamber is either in a vacuum state that is necessary and sufficient for preventing discharge, or is filled with an arc-suppression gas.
Owner:ORC MFG
Decomposition apparatus of organic compound, decomposition method thereof, excimer UV lamp and excimer emission apparatus
InactiveUS20050156497A1Improve breathabilityPromote decompositionVacuum tubesLaser detailsSimple Organic CompoundsDecomposition
Owner:WAKOMU ELECTRIC ZAIRYO
Light irradiation apparatus
InactiveCN103128080AInhibition of inflowCleaning using gasesNon-linear opticsLight irradiationOptoelectronics
A light irradiation apparatus is provided and restricts the air to flow between a processed object substrate and a lamp, so that light can irradiate the processed object substrate in high efficiency. The light irradiation apparatus is provided with a chimney, an excimer lamp irradiating light to one surface of the processed object substrate transmitted along a substrate transmission path arranged in the chimney, and a gas supply unit for supplying inert gases between the processed object substrate and the excimer lamp. On an upper side of the chimney of the substrate transmission path, a pressure buffer space is formed near the chimney. The light irradiation apparatus is characterized in that an air exhaust unit is disposed on the upper side of the pressure buffer space of the substrate transmission path and is used for exhausting the air flowing along a surface irradiated by the light.
Owner:USHIO DENKI KK
Device and method for waste gas photocatalytic degradation using electrodeless excimer lamp
ActiveCN103182245AEasy to handleWide wavelength rangeDispersed particle separationReaction zonePhotocatalytic degradation
The invention discloses a device and a method for waste gas photocatalytic degradation using an electrodeless excimer lamp. A used reactor comprises a three quartz medium layer, an inner electrode, an outer electrode and a high-voltage power supply, wherein the three-layer quartz medium layer comprises a first quartz tube, a second quartz tube and a third quartz tube, which are coaxial and are sequentially arranged from inside to outside; the inner cavity of the first quartz tube is a zone I reaction zone; a hermetic circular cavity is formed between the second quartz tube and the first quartz tube, and is used as a gas filling zone II; and a zone III reaction zone is formed between the third quartz tube and the second quartz tube. During waste gas photocatalytic degradation, gas in the gas filling zone II is excited to generate excimer UV-light, and then sends radiation towards the zone I reaction zone and the zone III reaction zone; and the waste gas to be degraded all passes through the zone I reaction zone, or all passes through the zone III reaction zone, or split-flows into the zone I reaction zone and the zone III reaction zone, and is then degraded under the action of the excimer UV-light radiation.
Owner:JIANGSU UNIV OF TECH
Excimer lamp
ActiveUS20150035429A1Improve securityEasy to useDischarge tube luminescnet screensLamp detailsEngineeringExcimer lamp
A first excimer lamp includes: a quartz glass-made light-emitting tube containing an excimer emission gas sealed therein; and a pair of electrodes for generating dielectric barrier discharge. One of the pair of electrodes is disposed in the inner space of the light-emitting tube so as to extend in the direction of a tube axis of the light-emitting tube, and the other one of the pair of electrodes is embedded in the tube wall of the light-emitting tube so as to extend in the direction of the tube axis of the light-emitting tube. The one electrode is electrically connected to a conductive foil hermetically embedded in an end portion of the light-emitting tube.
Owner:USHIO DENKI KK
Production method of skin-touch floor
The invention discloses a production method of a skin-touch floor. The production method comprises the following steps: (1) manufacturing a semi-finished floor plain plate; (2) sanding or polishing, coloring, applying an adhesive primer and filling an ultraviolet photocuring primer in sequence; (3) coating a matte primer, then coating an ultra-matte or matt UV (ultraviolet) photocuring finishing coat, and curing by using a UV mercury lamp; (4) coating one or more skin-feeling UV light curing paint on the cured semi-finished product floor plain board; (5) using an LED lamp and an excimer lamp to jointly carry out extinction pre-curing on the semi-finished product floor plain plate which is coated with the skin-feeling UV light-cured paint in a rolling manner; and (6) carrying out full curing by using a UV mercury lamp to finally obtain an ultra-matte or light-free floor finished product. The skin feeling and matte effect of the floor are achieved through multiple means, and therefore the texture and the visual sense are improved.
Owner:德宝新材料科技(浙江)有限公司
Excimer lamp apparatus
InactiveUS7187138B2Stable start-up propertyNumberGas-filled discharge tubesElectric lighting sourcesUltravioletStart up time
The invention provides an excimer lamp apparatus that has advanced start-up properties, in terms of start-up time and start-up stability, in the presence of voltage variations, without any trigger electrode, by arranging a pair of electrodes along the entire length of a discharge container. An ultra-violet emitter is arranged to irradiate discharge gas in the discharge container with ultra-violet light, and the excimer lamp is started up by means of exposure with ultra-violet light from the ultra-violet emitting unit.
Owner:HOYA CANDEO OPTRONICS
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