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72 results about "Excimer lamp" patented technology

An excimer lamp (or excilamp) is a source of ultraviolet light produced by spontaneous emission of excimer (exciplex) molecules.

Resonance control method for excimer lamp driven by steep pulse edge

The invention provides a resonance control method for an excimer lamp driven by a steep pulse edge, and relates to the technical field of molecular lamps. The resonance control method of the excimer lamp driven by the steep pulse edge comprises the following steps: S1, based on a dielectric barrier discharge equivalent circuit model, adopting a fast Fourier transform spectrum analysis method, measuring fundamental wave impedance characteristics of an LC resonance network through an impedance analyzer, establishing a transfer function containing parasitic parameters: Z (s) = [sLr + 1 / (sCr)] Rarc, and generating an initial resonance parameter set; by establishing a transfer function model containing parasitic parameters, combining fast Fourier transform spectrum analysis and accurately extracting fundamental wave impedance characteristics, the problem of resonance point offset caused by neglecting the parasitic parameters in a traditional method is solved, the precision of an initial resonance parameter set is improved, real-time phase difference data are identified on line by using a recursive least square method, and the real-time phase difference is obtained. Resonant frequency changes are dynamically tracked, frequency drift errors are compensated, resonance point tracking precision is controlled within + / -0.1%, and invalid discharge energy loss is remarkably reduced.
Owner:JIANG SU ZHI ZI NA MI KE JI YOU XIAN GONG SI

Coaxial excimer ultraviolet light-emitting device

The invention discloses a coaxial excimer ultraviolet light-emitting device, and relates to the technical field of excimer lamps, the coaxial excimer ultraviolet light-emitting device comprises an outer electrode, a water path is arranged at two ends of the outer electrode in a penetrating manner, a gas path is arranged at one end of the outer electrode and located on one side of the water path, a semicircular groove is embedded in the bottom of the outer electrode, and a mirror coating is arranged on the inner wall of the semicircular groove. A plurality of air grooves are embedded in the inner wall of the semicircular groove and located on the inner wall of the outer electrode, a plurality of air holes communicated with the air grooves are formed in the bottom of the air channel, and a lamp tube is arranged on the inner wall of the semicircular groove and located at the bottom of the outer electrode. According to the invention, the luminous efficiency and the irradiation intensity are improved, and the service life of the lamp tube is prolonged.
Owner:SUZHOU YUQUAN IND TECH CO LTD

Excimer lamp voltage closed-loop control method, device and equipment and storage medium

The invention discloses an excimer lamp voltage closed-loop control method, device and equipment and a storage medium. The core comprises a current peak detection unit, a peak voltage observer and a closed-loop control unit. Wherein the current peak value detection unit is used for acquiring a current peak value flowing through the excimer lamp in a working period; the peak voltage observer estimates the peak voltage of the excimer lamp in the period in real time to realize accurate observation of the voltage state; and the closed-loop control unit realizes indifference tracking control of the given peak voltage and the estimated peak voltage through a control algorithm according to the given peak voltage and the estimated peak voltage of the excimer lamp, and dynamically adjusts output. The closed-loop control method can effectively restrain interference of parameter changes such as external environment temperature and load fluctuation on peak voltage of the excimer lamp, discharge efficiency reduction caused by voltage deviation is avoided, it is ensured that the excimer lamp is always stably in a high-efficiency discharge state in the full work period, and equipment operation reliability and energy utilization efficiency are improved.
Owner:GUANGDONG UNIV OF TECH

An excimer lamp

This utility model relates to the field of ultraviolet lamp technology and discloses an excimer lamp, including a shell, a sealing element, a lamp tube, a water pipe, and a water inlet pipe. The sealing element is installed at the top of the shell and has a connecting hole, a water inlet hole, and a water outlet hole. The connecting hole is located at the bottom of the sealing element and communicates with the water inlet hole and the water outlet hole respectively. The lamp tube is located inside the shell and includes an outer tube and an inner tube. The inner tube is coaxially arranged inside the outer tube, forming a sealed cavity between the inner tube and the outer tube. The water pipe passes through the inner tube, with its bottom end being a closed end. The top end of the water pipe is inserted into the connecting hole and communicates with the water outlet hole. The water inlet pipe is located inside the water pipe, with a gap between the bottom ends of the water inlet pipe and the bottom ends of the water pipe. The top end of the water inlet pipe extends out of the water pipe and is inserted into the water inlet hole. A gap exists between the outer side of the water inlet pipe and the inner side of the water pipe, forming a flow channel. This utility model can ensure the sealing of the excimer lamp shell and also help dissipate heat from the lamp tube.
Owner:GMY LIGHTING TECH CO LTD

Ultraviolet irradiation device

The present application provides a kind of ultraviolet irradiation device, the degree of inhibition caused to human body impact.The ultraviolet irradiation device has: lampshade, at least one face is formed with light extraction surface;Excimer lamp, is housed in the lampshade in the position separated from the light extraction surface in the first direction, and emits the ultraviolet of the first wave band whose main emission wavelength belongs to 190nm above and 225nm below;A pair of electrodes, for applying voltage to the light emitting tube of excimer lamp;Optical filter, is configured to light extraction surface, substantially transmits the ultraviolet of the first wave band, on the other hand, substantially does not transmit the ultraviolet of wavelength 240nm above and 300nm below;And light diffuser, at least a part is configured to excimer lamp side than optical filter in the lampshade in the first direction, and makes the incident light diffuse reflection.
Owner:USHIO INC

Excimer lamp

An excimer lamp includes a tubular discharge vessel configured to form a discharge space, and an exterior vessel configured to form a channel between said discharge vessel and said exterior vessel. At least one end of said channel is on a lamp-center side relative to the end of said discharge vessel in a lamp axis direction.
Owner:ORC MFG

A kind of excimer lamp collaborative control method based on multi-source data fusion

The application relates to the technical field of control, in particular to a kind of excimer lamp cooperative control method based on multi-source data fusion.The method comprises the following steps: obtaining the multi-source sensing data of excimer lamp system, initializing system state vector, state covariance matrix and the inverse Wishart distribution prior parameter of process and measurement noise covariance matrix, obtaining predicted state mean and predicted covariance matrix based on posterior state estimation, calculating innovation, updating process and measurement noise covariance matrix, calculating state-measurement mutual covariance matrix and measurement innovation covariance matrix, determining optimal gihonov regularization parameter and calculating kalman gain, updating state estimation and state covariance matrix, and generating operation instruction of each excimer lamp based on the updated state.The scheme of the application can overcome the limitations of standard unscented kalman filter, ensure the reliability of kalman gain, and thus improve the uniformity and stability of system output light field.
Owner:SUZHOU HUI YING OPTICAL TECH CO LTD

Excimer lamp and light irradiation device

The invention provides an excimer lamp which can be used for a longer period of time by reducing strain generated in a light-emitting tube through a structure which can be implemented more simply. The excimer lamp is provided with: a light-emitting tube which extends in a first direction, includes a first region and a second region having a thicker tube wall than the first region in a first cross-section when cut in a plane orthogonal to the first direction, has recesses and projections formed on an outer wall surface by the first region and the second region, and exhibits light transmittance to ultraviolet light; a pair of electrodes facing each other across the tube wall of the light-emitting tube in the radial direction of the light-emitting tube; and a light extraction unit for extracting the ultraviolet light generated in the light-emitting tube to the outside of the light-emitting tube.
Owner:USHIO INC

Preparation method of ultra-matte skin-touch coating

The invention relates to a preparation method of an ultra-matte skin-touch coating, which comprises the following steps: coating a substrate with a skin-touch coating, then carrying out LED (light-emitting diode) pre-curing, then carrying out excimer lamp radiation curing, and then carrying out UV (ultraviolet) high-pressure mercury lamp radiation curing molding. The skin-touch coating does not comprise matting powder or matting agent, and comprises the following components in parts by mass: 20-25 parts of poly (1, 2-propylene glycol monomethacrylate); 25 to 30 parts of tris (2-acryloyloxyethyl) isocyanurate; 15 to 20 parts of an acrylic ester-polyethylene glycol-amino group; 1 to 5 parts of butyl mercaptan; 1 to 3 parts of PPG-7-butanol polyether-10; 1 to 3 parts of bis [2-(trimethylsiloxy) ethyl] ether; and 0.5 to 2 parts of a photoinitiator.
Owner:DONGGUAN SHUNCHI PLASTIC TECH CO LTD

Excimer lamp, lamp unit, and method for producing excimer lamp

An excimer lamp does not cause a significant decrease in the emission intensity of ultraviolet light and transmission capacity, and that takes into consideration the adverse effect on the human body while securing a sufficient intensity of ultraviolet light. The excimer lamp includes a discharge vessel, a discharge gas sealed in the discharge vessel, and an ultraviolet light transmitting thin film provided on at least an inner surface of the discharge vessel, in which the ultraviolet light transmitting thin film includes first particles that are dispersed in the ultraviolet light transmitting thin film and that scatter ultraviolet light, and second particles that fill voids between the first particles, and an average particle diameter of the first particles is larger than an average particle diameter of the second particles.
Owner:STANLEY ELECTRIC CO LTD

Excimer lamp

To provide an excimer lamp in which generation of microcracks on an inner wall surface of an inner tube is suppressed.SOLUTION: The excimer lamp includes an arc tube including an outer tube extending in a tube axis direction and an inner tube extending in the tube axis direction and disposed in the outer tube, the outer tube and the inner tube being sealed at end portions in the tube axis direction, a light-emitting gas enclosed in a light-emitting space between the outer tube and the inner tube, an outer electrode disposed on an outer wall surface of the outer tube and having a net shape or a linear shape, and an inner electrode disposed on an inner wall surface of the inner tube and extending in a circumferential direction from one end to the other end. At an end portion of the inner electrode in the tube axis direction, a corner portion located at a circumferential end portion in the circumferential direction is located inside an outer edge region formed by virtually extending both a side of the inner electrode extending in the tube axis direction and a side of the inner electrode extending in the circumferential direction.SELECTED DRAWING: Figure 1
Owner:USHIO INC

Excimer lamp

Provided is an excimer lamp in which an undesirable situation in the conduction of an electrode provided on a wall of a light-emitting tube and a power supply member that applies a voltage to the electrode is suppressed. The excimer lamp includes: a light-emitting tube composed of a dielectric and extending in a first direction; a light-emitting gas enclosed in the light-emitting tube; a base composed of an electrically conductive material and having an insertion opening recessed in the first direction and into which an end portion of the light-emitting tube on one side in the first direction is inserted; a first electrode provided on a wall of the light-emitting tube, at least a portion of which is located inside the insertion opening; a second electrode provided separately from the first electrode on the wall of the light-emitting tube; and an elastic member provided on an inner wall surface of the insertion opening, in contact with the first electrode, elastically deformed in a second direction parallel to a plane orthogonal to the first direction, composed of an electrically conductive material, and provided on more than half of the area of the inner wall surface of the insertion opening in a peripheral direction of the light-emitting tube.
Owner:USHIO INC

Ultraviolet irradiation device

ActiveCN114423493BLight extraction efficiency decreasesReduced extraction efficiencyExcimer lampMaterials science
The present application provides a kind of ultraviolet irradiation device, which is greatly miniaturized compared with existing configuration.The ultraviolet irradiation device includes: a lampshade, which is formed with a light extraction surface; an excimer lamp, which is housed at a position separated from the light extraction surface in a first direction; a first electrode block, which is arranged in contact with the outer surface of the light emitting tube of the excimer lamp from the side opposite to the light extraction surface in the first direction; a second electrode block, which is arranged in contact with the outer surface of the light emitting tube of the excimer lamp from the side opposite to the light extraction surface in the first direction at a position separated from the first electrode block in a second direction parallel to the tube axis of the excimer lamp; and a pressing member, which is arranged at least one of a position further away from the second electrode block than the first electrode block in the second direction and a position further away from the first electrode block than the second electrode block in the second direction, and abuts against the excimer lamp.
Owner:USHIO INC

A water-based dual-curing matte touch coating, a preparation method and application thereof

The application discloses a kind of water-based double-cured matt hand feel coating and its preparation method and application, including coating component and curing agent component, the preparation raw material of the coating component includes the following components by weight parts: water-based elastic resin 20~30 parts, water-based six functional group aliphatic polyurethane acrylic emulsion 40~50 parts, photo initiator 1~3 parts, solvent 3~8 parts and water 15~35 parts.The water-based six functional group aliphatic polyurethane acrylic emulsion can be surface cured under 254nm excimer lamp, and through excimer curing+UV curing+post-curing process, realize super-matt effect.The water-based double-cured matt hand feel coating obtained by the application has the characteristics of smooth film, good elasticity, good adhesion, good stain resistance, good wear resistance, etc.
Owner:HUNAN SOKAN NEW MATERIALS CO LTD

Control method of air conditioner and air conditioning system thereof

The application provides a control method of an air conditioner and an air conditioner system thereof, the air conditioner comprising a prompt module and a sterilization module, the sterilization module comprising an excimer lamp for executing a sterilization mode, the control method comprising: when the air conditioner receives a sterilization start signal, controlling the air conditioner to enter the sterilization mode; and controlling the prompt module to push a prompt information; wherein the prompt information comprises prompt sound information. The application solves the problem that the user cannot directly perceive the sterilization condition during the sterilization process of the existing air conditioner, thereby affecting the user experience.
Owner:NINGBO AUX ELECTRIC CO LTD +1

Excimer lamp exciter with emi solution

The application discloses an exciter of an excimer lamp for solving EMI, which comprises an EMC filter circuit, a rectifier bridge circuit, an APFC circuit for input current power factor correction, an alternate conduction circuit, an LLC resonant circuit and a boost output circuit connected in sequence, and a fuse F11 is arranged between the EMC filter circuit and a power supply end X11A. The technical scheme is characterized in that a band pass filter with large impedance is adopted to block strong interference in a fundamental frequency band range, and a low pass filter with small impedance is adopted to pass independent pulses in working frequency multiplication, electromagnetic interference generated during high-voltage gas discharge is effectively solved, the working process of the excimer lamp is optimized, and commercialization of the product is realized.
Owner:ZHEJIANG KAIYAO LIGHTING

Excimer lamp power supply intelligent control method and system

The invention belongs to the technical field of power supply control, and particularly relates to an excimer lamp power supply intelligent control method and system, and the method comprises the following steps: S1, obtaining the real-time output voltage and output current of an excimer lamp and the DC bus voltage of a phase-shifted full bridge; estimating an equivalent complex impedance amplitude, a phase angle and a phase angle change rate of the excimer lamp in a next switching period according to voltage and current sampling values in a plurality of continuous switching periods by adopting an extended Kalman filtering model; and S2, according to the deviation between the target output power and the real-time power, a basic phase shift angle is calculated through a proportional-integral controller, and the gain of the proportional-integral controller is determined according to the change rate of the phase angle. According to the invention, the accuracy of power control and the inhibition capability on load disturbance and voltage fluctuation are improved, the stability of output power is ensured, the switching loss is reduced, the rapid success of the lighting process is ensured, and the stable switching to closed-loop control is realized.
Owner:SUZHOU HUI YING OPTICAL TECH CO LTD

Bipolar narrow pulse type power supply suitable for excimer lamp

The invention discloses a bipolar narrow pulse type power supply suitable for an excimer lamp so as to meet the requirement of a dielectric barrier discharge load for a power supply waveform and improve the working stability and the energy utilization rate. The device is composed of a constant current source part, a bipolar narrow pulse generation part and a three-winding transformer. The constant current source part is formed by connecting a direct current voltage source and an energy storage inductor in series and provides stable direct current for a follow-up circuit. The bipolar narrow pulse generation part comprises two completely independent and symmetrical unipolar narrow pulse generation circuits, and unipolar narrow pulses with opposite polarities and consistent parameters can be synchronously generated; the input end of the three-winding transformer is connected with the two unipolar narrow pulse generating circuits, unipolar narrow pulses are synthesized into bipolar narrow pulses through electromagnetic coupling, and the bipolar narrow pulses are output to a load. According to the invention, the required bipolar narrow pulse waveform can be accurately provided for the excimer lamp, the efficient excitation and stable operation of the excimer lamp can be ensured, and the device can be widely applied to various dielectric barrier discharge loads such as an ozone generator and the like, and is high in universality.
Owner:GUANGDONG UNIV OF TECH

Excimer lamp

The invention provides an excimer lamp, which suppresses the defects in the conduction between an electrode arranged on the tube wall of a light-emitting tube and a power supply component for applying voltage to the electrode. The excimer lamp includes: a light emitting tube formed of a dielectric and extending in a first direction; the luminous gas is sealed in the luminous tube; a base made of a conductive material and having an insertion opening which is recessed in the first direction and into which one end of the light-emitting tube in the first direction is inserted; the first electrode is arranged on the tube wall of the light-emitting tube, and at least one part of the first electrode is located in the insertion opening; the second electrode and the first electrode are separately arranged on the tube wall of the light-emitting tube; and an elastic member which is disposed on the inner wall surface of the insertion opening, is in contact with the first electrode, is elastically deformed in a second direction parallel to a plane orthogonal to the first direction, is made of a conductive material, and is disposed in a half or more region of the inner wall surface of the insertion opening in the outer circumferential direction of the light-emitting tube.
Owner:USHIO INC

Multi-electrode hexahedral excimer lamp and manufacturing process thereof

The invention relates to the technical field of excimer lamps, in particular to a multi-electrode hexahedral excimer lamp and a manufacturing process thereof. The excimer lamp comprises a lamp tube main body, a first electrode pair and a second electrode pair, wherein a lamp cavity for accommodating discharge gas is formed in the lamp tube main body; the lamp tube body is of a hexahedron structure and comprises two first side plates arranged oppositely and two second side plates arranged oppositely. The first electrode pair comprises two first electrodes which are respectively arranged on the outer side surfaces of the two first side plates; the second electrode pair comprises two second electrodes which are respectively arranged on the two second side plates; an electric field generated by the first electrode pair intersects with an electric field generated by the second electrode pair. The technical problem that in the prior art, an auxiliary electrode only plays a role when the excimer lamp is started, and the radiation efficiency of the excimer lamp in the working state cannot be improved is effectively solved.
Owner:SUZHOU HUI YING OPTICAL TECH CO LTD

An eb-cured matte skin-feel coating, and a preparation method and application thereof

The application discloses an EB-cured matt skin-feeling paint as well as a preparation method and application thereof, and belongs to the technical field of functional paint, and comprises the following raw materials in parts by weight: 20-30 parts of polyester modified polyurethane acrylate, 10-30 parts of organic silicon modified polyurethane acrylate, 10-30 parts of amine modified polyurethane acrylate, 20 parts of 1,6-hexanediol diacrylate, 0.2 parts of a leveling agent, 0.5 parts of a wetting agent, 0.2 parts of a defoaming agent and 1 part of silica matting powder; after being uniformly mixed in a dispersing machine, the EB-cured matt skin-feeling paint is obtained; then the paint is coated on the surface of a wood board, EB preliminary curing is carried out in an aerobic environment, then curing is carried out in an anaerobic environment by using a 172nm excimer lamp, and finally EB final curing is carried out, so that a matt skin-feeling coating with excellent comprehensive performances such as high hardness, scratch resistance, yellowing resistance and easy cleaning is formed; the curing process is more simple and efficient, and is suitable for industrialized continuous production.
Owner:HUANGSHAN SHANGFU TECH CO LTD

Method and system for controlling a multi-mode germicidal excimer lamp

The present application belongs to the field of control of excimer lamps, and particularly relates to a control method and system of a multi-mode germicidal excimer lamp. The method comprises: acquiring real-time sampling values of lamp tube current and voltage of the excimer lamp, determining a current target working mode according to a preset germicidal strategy or external instruction; determining an aging characteristic factor by calculating a lamp tube instantaneous dynamic resistance and an equivalent impedance weighted average value, and combining a lamp tube aging two-dimensional lookup table, and correcting a current reference center line according to the aging characteristic factor; analyzing current ripple frequency domain characteristics, and calculating a dynamic bandwidth of hysteresis control through a preset multivariate function; determining a dynamic transition period when mode switching, so that the target values of the current reference center line and the dynamic bandwidth are smoothly transitioned; and generating a control signal by comparing the current with a dynamic threshold value, and controlling the on-off of a power switch tube. The present application effectively solves the defects of the existing driving control scheme of excimer lamps in aging adaptation, mode switching and bandwidth regulation.
Owner:SUZHOU HUI YING OPTICAL TECH CO LTD

Excimer lamp and UV irradiation unit including the same

An excimer lamp (10, Fig. 1) for a UV irradiation unit (1001) includes an ultra-thin, band-shaped foil electrode 40 provided in a discharge tube 20, and a dielectric 30 configured to cover and maintai
Owner:ORC MFG

Excimer lamp

The technology described herein relates to an excimer lamp, by way of example, that includes a dielectric forming at least one side of an enclosed cavity, an electrode array disposed on a surface of the dielectric and including a plurality of electrodes of alternating polarity spaced at respective positions across at least one dimension of the excimer lamp, and a gas within the enclosed cavity capable of emitting ultraviolet light in response to excitation of the electrode array.
Owner:EXCELITAS TECHNOLOGIES CORP

Unipolar narrow pulse type power supply suitable for excimer lamp

The invention discloses a unipolar narrow pulse type power supply suitable for an excimer lamp. The unipolar narrow pulse type power supply is used for generating high-frequency unipolar narrow pulse excitation on a dielectric barrier discharge type excimer lamp. The power supply mainly comprises a direct-current power supply, two power switch tubes, an energy storage capacitor and a high-frequency boosting transformer. Wherein the direct current power supply, one power switch tube are used for generating a first unipolar narrow pulse excitation in a period, and the other power switch tube and the energy storage capacitor are used for generating a second unipolar narrow pulse excitation in a period. According to the invention, two unipolar narrow pulse excitation can be provided for the excimer lamp in one work period, and the defect that the existing unipolar narrow pulse power supply can only generate one unipolar narrow pulse excitation in one work period is overcome. In addition, the power supply can also be applied to other types of dielectric barrier discharge loads, such as an ozone generator and the like.
Owner:GUANGDONG UNIV OF TECH

Ultraviolet-induced surface cross-linked phthalazinone polyarylether dielectric film and preparation method thereof

The invention belongs to the technical field of high-temperature dielectric film materials, and discloses an ultraviolet-induced surface cross-linked poly (phthalazinone ether) dielectric film and a preparation method thereof. The preparation method comprises the following steps: synthesizing a novel phthalazinone polyarylether copolymer containing an adamantane structure through solution polycondensation, preparing a dielectric film, and then carrying out ultraviolet explosion treatment on the dielectric film by using a 172nm Xe2 excimer lamp. Cyclic ketone in a phthalazinone structure on the surface of the dielectric film is crosslinked with adamantane in an ultraviolet bursting process, so that electrode charge injection and intramolecular charge transfer can be inhibited, and the conductivity loss is reduced. Therefore, the phthalazinone polyarylether containing the adamantane structure shows ultrahigh discharge energy density which respectively reaches 10.20 Jcm <-3 > and 7.91 Jcm <-3 > at room temperature and 150 DEG C. Besides, the self-healing performance of the dielectric film after ultraviolet bursting treatment is obviously improved, excellent cycling stability and reliability are shown, and the dielectric film can be cycled for 30,000 times under the conditions of 200 MVm <-1 > and 150 DEG C.
Owner:DALIAN UNIV OF TECH

High-frequency resonant pulsed bipolar dielectric barrier discharge power supply

The application discloses a high-frequency resonant pulse type bipolar dielectric barrier discharge power supply, which is composed of two symmetrical multi-resonance circuits. The front stage of the multi-resonance circuit utilizes a first resonant circuit composed of a diode, a resonant inductor and a resonant capacitor to realize the charging of the resonant capacitor. The rear stage of the multi-resonance circuit utilizes a second resonant circuit composed of a resonant capacitor, a transformer leakage reactance and a load to generate high-frequency pulse excitation on the dielectric barrier load. By controlling the switching frequency of the symmetrical multi-resonance circuit, bipolar pulse excitation of different frequencies can be generated on the dielectric barrier load. The secondary side of the transformer can be connected to various different forms of loads, such as excimer lamps, ozone generators and the like.
Owner:JIYUAN FENGYUAN ELECTRIC EQUIP CO LTD

Excimer lamp cooperative control method based on multi-source data fusion

The invention relates to the technical field of control, in particular to an excimer lamp cooperative control method based on multi-source data fusion. The method comprises the steps of obtaining multi-source sensing data of an excimer lamp system, initializing a system state vector, a state covariance matrix and inverse Wishart distribution prior parameters of a process and measurement noise covariance matrix, obtaining a prediction state mean value and a prediction covariance matrix based on posterior state estimation, and performing calculation innovation. The method comprises the following steps of: calculating a state-measurement cross covariance matrix, updating a process and measuring a noise covariance matrix, calculating a state-measurement cross covariance matrix and a measurement innovation covariance matrix, determining an optimal Tikhonov regularization parameter and calculating a Kalman gain, updating state estimation and the state covariance matrix, and generating an operation instruction of each excimer lamp based on the updated state. According to the scheme, the limitation of a standard unscented Kalman filter can be overcome, and the reliability of Kalman gain is ensured, so that the uniformity and the stability of a system output light field are improved.
Owner:SUZHOU HUI YING OPTICAL TECH CO LTD

Excimer lamp

Provided is an excimer lamp in which the occurrence of microcracks on the inner wall surface of an inner tube is suppressed. The excimer lamp is characterized by being provided with: a light-emitting tube including an outer tube extending in the axial direction of the tube and an inner tube extending in the axial direction of the tube and disposed in the outer tube, the outer tube and the inner tube being sealed at the ends in the axial direction of the tube; a light-emitting gas sealed in a light-emitting space sandwiched between the outer tube and the inner tube; an outer electrode arranged on the outer wall surface of the outer tube and having a net shape or a line shape; and an inner electrode disposed on the inner wall surface of the inner tube and extending in the circumferential direction from one end toward the other end, the inner electrode being disposed on the inner wall surface of the inner tube and extending in the circumferential direction from one end toward the other end at an end portion in the tube axial direction. A corner portion located at a circumferential end portion in the circumferential direction is located further inward than an outer edge region formed by virtually extending both a side of the inner electrode extending in the tube axis direction and a side of the inner electrode extending in the circumferential direction.
Owner:USHIO INC