The invention discloses a uniformly polarized biological piezoelectric film, a preparation method and application. The biological piezoelectric film comprises a substrate layer and a deposition layer on the surface of the substrate layer, the method comprises the following steps: cleaning and
drying a substrate, placing the substrate in a substrate area of
physical vapor deposition equipment, and preassembling parallel
electrode plates on the back surface of the substrate; then, the biological piezoelectric material to be deposited is placed in a
crucible in the
physical vapor deposition equipment, and a cavity of the
physical vapor deposition equipment is closed; vacuumizing a cavity of the physical vapor deposition equipment to a preset vacuum degree, heating the substrate to a first preset temperature, setting an
electric field of a parallel
electrode plate on the back surface of the substrate as a preset
voltage, and heating the
crucible filled with the biological piezoelectric material to a second preset temperature; starting to grow the biological piezoelectric film on the surface of the substrate, and stopping growth after the film reaches a preset thickness; closing the
electric field of the parallel
electrode plate on the back of the substrate, cooling the substrate and the
crucible to
room temperature, closing the vacuum
system of the physical vapor deposition equipment, and opening the cavity after the cavity returns to normal pressure to obtain a biological piezoelectric material film; the prepared biological piezoelectric film is applied to manufacturing a piezoelectric energy collector. The preparation of the biological piezoelectric film with uniform polarization is realized through the
electric field of the substrate area, the direct integration of the device is realized by adopting the physical vapor deposition technology, the method is compatible with the existing
semiconductor process, the cost is low, the efficiency is high, and the improvement of the performance of the biological piezoelectric device is also promoted.