1748 results about "Cantilevered beam" patented technology

A method of making an acoustic sensor includes forming or providing a mold having one or more grooves extending in a direction of the length of the mold to a distal end of the mold. The method also includes forming or depositing a structure having one or more piezoelectric layers over the top surface of the mold to define a beam with a proximal portion and a distal portion, the distal portion having a corrugated section including one or more grooves that correspond to the one or more grooves of the mold. The method also includes forming or applying an electrode to the proximal portion of the structure and releasing the structure from the mold to form one or more cantilever beams. The corrugated section inhibits bending of the corrugated section along the length of the distal portion of the structure when the acoustic sensor is subjected to sound pressure.

The invention discloses a calculation and measurement fused high-fidelity digital twinning dynamic monitoring method for a cantilever beam structure. Firstly, a real-time updated database is constructed based on a physical entity system; secondly, constructing a three-dimensional digital model by using SolidWorks, and performing multi-physics field simulation analysis in combination with Ansys to obtain high-precision mechanism data of a structural key area; thirdly, performing reduced-order calculation on a simulation result by using MWorks, training and optimizing a reduced-order model through a feedforward neural network, and reducing an error between simulation data and reduced-order data; fusing the one-dimensional system data order reduction model and the three-dimensional field data order reduction model based on a Modelica language; and finally, integrating a mechanism-data hybrid model, constructing a dynamic response characteristic and spatial distribution characteristic integrated high-fidelity digital twinborn body, comparing twinborn body calculation data with sensor actual measurement data in real time, and accurately representing geometric morphology, mechanical properties and dynamic behaviors of a physical system. The method is suitable for high-precision monitoring, real-time state evaluation and performance optimization of the cantilever beam structure.

The invention discloses a bionic TENG sensor unit for an artificial throat and a preparation method thereof, and relates to the field of artificial throats, and the sensor unit comprises a gradient micro-dome friction layer, a strain amplification layer, an electrode layer and a back cavity substrate layer. The gradient micro-dome array realizes gradual contact through gradient change of height and diameter; the strain amplification layer converts vertical vibration into horizontal strain by using a cantilever beam-sliding block structure; the back cavity array selectively amplifies vibration at a specific frequency based on the Helmholtz resonance principle. The invention further provides a corresponding preparation method. The preparation method comprises the steps of back cavity forming, electrode deposition, microstructure manufacturing, surface treatment and the like. The sensor has the advantages of high sensitivity, good frequency selectivity and strong durability, and is particularly suitable for detecting weak laryngeal vibration signals of laryngeal patients.

Embodiments of the present application provide a case, a battery and an electric device. The case comprises a case body, provided with an accommodation space having an opening, and the accommodation space is used for accommodating a battery cell; the case body comprises a supporting plate and a beam body, the supporting plate is arranged opposite to the opening, and the beam body is arranged at an end of the supporting plate; the beam body comprises a main body portion and a cantilever beam which are connected, and the cantilever beam extends from the main body portion towards the accommodation space; the cantilever beam is fixedly connected to the supporting plate, and the surface of the cantilever beam facing the accommodation space is flush with the surface of the supporting plate facing the accommodation space to form a first surface, which is adapted to be fixedly connected to the battery cell. According to the case, the battery and the electric device provided by embodiments of the present application, the charging and discharging performance of the battery can be improved without wasting the battery assembly space.

The multifunctional acoustic device is formed by periodically arranging unit cells in the horizontal direction, and each unit cell comprises an upper frame body, a lower frame body and a vibration absorption sandwich layer located between the upper frame body and the lower frame body; the upper frame body is provided with a through hole; the vibration absorption sandwich layer comprises a central cantilever beam located at the transverse center position, a sandwich plate surrounding the periphery of the central cantilever beam and fixed between the upper frame body and the lower frame body, and vibrator mass blocks arranged above and below the central cantilever beam; the sandwich plate is connected with the central cantilever beam through a plurality of L-shaped beams; and the plurality of L-shaped beams surround the periphery of the central cantilever beam. The lattice sandwich structure is used as a basic frame, a local resonance system with a spring mass part is formed, a sub-wavelength elastic wave band gap frequency band is obtained, a low-frequency vibration reduction effect is generated, holes are formed in the upper frame body, the remaining part in the structure is used as an air spring, a Helmholtz resonant cavity is formed, and meanwhile low-frequency vibration reduction and broadband sound absorption are achieved.

The embodiment of the invention provides a wafer testing device and testing method, and belongs to the technical field of wafer testing. The wafer testing device comprises an MEMS probe chip installed and connected on a testing machine, and a testing position used for fixing a tested chip. A test contact of a probe of the MEMS probe chip is in contact with a PAD of a tested chip during testing, and the MEMS probe chip is used for collecting a detection signal of the tested chip; wherein a probe of the MEMS probe chip is integrated in the MEMS probe chip based on a cantilever beam type; and the test machine is used for generating a test result corresponding to the tested chip based on the detection signal of the tested chip. The MEMS probe chip in the scheme of the invention adopts a modular design, is convenient to quickly replace, reduces the maintenance cost and time, and provides a better solution for the test requirements of high-frequency and high-density packaged chips.

The invention provides a crystal oscillator and an atomic clock, and relates to the technical field of oscillators, the crystal oscillator comprises a packaging cavity, a crystal, a temperature sensor and a cantilever beam assembly, the crystal, the temperature sensor and the cantilever beam assembly are arranged in a containing cavity of the packaging cavity, and the packaging cavity is of a vacuum packaging structure. The crystal and the temperature sensor are arranged on the cantilever beam assembly, the crystal and the temperature sensor are electrically connected with different connection points of the packaging cavity through the cantilever beam assembly, and the temperature sensor is arranged around the crystal; the cantilever beam assembly comprises a heating module, and when the temperature sensor monitors that the temperature of the area where the crystal is located is smaller than a preset temperature threshold value, the heating module heats the crystal. The energy loss of air damping to the high-frequency vibration of the crystal is eliminated, the Q value is improved, and the phase noise suppression capability is enhanced; accurate control over the temperature of the area where the crystal is located is achieved, the thermal response speed and the temperature control precision are improved, and the problem that an existing crystal oscillator is poor in stability is solved.

The invention relates to the technical field of metering and testing, and discloses a strain sensor calibration device and method, and the device comprises a pedestal, the pedestal is provided with an overturning part, the overturning part is provided with a stand column, the stand column is provided with an equal-strength cantilever beam, and one end, away from the stand column, of the equal-strength cantilever beam is provided with a positioning laser. The rays of the positioning laser device face the base and are parallel to the end face of the equal-strength cantilever beam, and the equal-strength cantilever beam is used for pasting a measured strain sensor; a sliding block is in sliding fit with the sliding rail, a first pulley is arranged on the sliding block, a steel wire rope is wound around the first pulley, one end of the steel wire rope is connected with the end, away from the stand column, of the equal-strength cantilever beam, and the other end is connected with a force application assembly; the data acquisition module is connected with the measured strain sensor and the deflection measurement module, the data acquisition module is further connected with an upper computer, errors caused by stress concentration are reduced, the consistency and stability of measurement are effectively improved, and the flexibility of the device is improved.

A push-pull type optical fiber MEMS accelerometer based on a Michelson interferometer comprises a mechanical assembly and two sensing optical fibers, the mechanical assembly is composed of a fixed base and an acceleration sensing chip, the acceleration sensing chip comprises an external frame, a mass block and two sets of spring cantilever beams, the external frame is provided with a thin optical fiber groove, and the thin optical fiber groove is provided with an optical fiber. The mass block is provided with two convex structures serving as reflecting surfaces, and two air cavities are formed between the end face of the sensing optical fiber and the top faces of the convex structures of the mass block and serve as sensing arms of the Michelson interferometer. When the accelerometer is subjected to the action of external acceleration, the mass block moves relative to the external frame to drive the cavity lengths of the two air cavities to change in a push-pull manner, so that the optical path is changed and an interference signal is generated. Interference signals are acquired and demodulated through a photoelectric detector, a data acquisition circuit and a computer, and vibration acceleration signals can be obtained. The invention has the advantages of high sensitivity, strong common-mode noise suppression capability and the like, and is suitable for various dynamic vibration response measurement occasions.

The invention discloses a low-power-consumption photonic integrated device preparation method and a corresponding device, and relates to the technical field of semiconductor optoelectronic integrated devices.The device comprises a substrate, a cantilever beam type grating layer, two gain layers, two modulator layers, a wrapping layer and an electric contact layer, the two gain layers and the two modulator layers are symmetrically distributed, and the wrapping layer and the electric contact layer form a shallow ridge waveguide structure. The two symmetrically-distributed gain layers and the middle cantilever beam type grating layer jointly form a double-end resonant cavity structure, the structure shares a unified grating and a thermal tuning platform to achieve continuous, synchronous and high-precision control over cavity mode wavelengths, and balanced modulation and phase synchronization of double-end output are achieved in cooperation with the symmetrically-integrated high-speed modulator layers on the two sides. According to the technical scheme, the gain layer, the grating layer and the modulator layer are symmetrically integrated on the same substrate, the alignment error of a multi-cavity structure is reduced, synchronous scanning, low drift and strong anti-interference high-quality laser output can be obtained, meanwhile, efficient thermal tuning is conducted through the cantilever beam type grating layer, and power consumption is remarkably reduced.

The invention discloses an MEMS composite film stress gradient measuring device and method. The measuring device comprises a V-shaped thermal actuator structure, a displacement measuring structure connected with the V-shaped thermal actuator structure and a multi-layer cantilever beam structure. The method comprises the steps that a V-shaped thermal actuator structure is used for pushing a displacement measurement structure to move towards a multi-layer cantilever beam structure, and when a contact electrode of the displacement measurement structure makes contact with a to-be-measured beam of the multi-layer cantilever beam structure, a horizontal displacement value s is obtained through reading of the displacement measurement structure; calculating the equivalent stress gradient of the composite film according to the geometric dimension of the measuring device, the horizontal displacement value s and the Young modulus of each layer of film; the MEMS composite film stress gradient measuring device and method have the advantages of being easy to operate, low in cost and high in measuring speed, and can be used for parameter monitoring of a process line.

A power transmission line vibration energy collection device based on a triboelectricity-electromagnetic effect belongs to the technical field of power transmission line self-powered equipment, and comprises a shell, a wire clamp device, a triboelectricity unit, a vibrator structure and a cantilever beam structure, and can collect multi-frequency and multi-amplitude vibration energy of a power transmission line in the vertical direction. And the cantilever beam-magnetic coupling structure is adopted to improve the low-order modal frequency, so that the vibration frequency response range of the self-powered device is widened, and the self-powered device has the following advantages that 1, efficient low-frequency energy collection is realized, and the vibrator structure can effectively collect low-frequency vibration energy by virtue of the gravity of the vibrator structure and the action of the supporting spring; 2, the fatigue resistance is excellent, and the cantilever beam does not directly participate in excitation of the triboelectric energy harvesting unit, so that the risk of fatigue fracture of the cantilever beam is effectively reduced; and 3, the energy collection capability of the device is improved, and friction electricity energy harvesting and electromagnetic energy harvesting are combined, so that the collection efficiency of high-frequency excitation energy can be further improved.

The invention relates to the technical field of soil pressure sensors, and discloses a lever structure-based soil pressure sensor, which comprises a shell, a bearing plate, a constant-strength cantilever beam, a force transmission lever and a measurement optical fiber, and is characterized in that the shell is internally provided with a containing cavity with an upward opening, the bearing plate is arranged at the top of the shell, and one end of the constant-strength cantilever beam is arranged on the side wall of the containing cavity; the force transmission lever is rotationally arranged in the accommodating cavity, and the measuring optical fiber is arranged at the bottom of the equal-strength cantilever beam; the equal-strength cantilever beam guarantees equal strain in the axial direction, micro deformation of the force bearing plate is amplified and transmitted to the equal-strength cantilever beam through the force transmission lever, deformation is converted into optical signals through the measuring optical fiber, and an anti-electromagnetic interference optical fiber measuring mode and an external collecting and demodulating technology are combined. Not only is small-size design and high sensitivity realized, but also interference on the original structure and stress distribution of the soil body is reduced, and the measurement precision in a complex rock-soil environment is improved.

The utility model discloses a cantilever beam impact testing machine, and relates to the technical field of testing machines. The cantilever beam impact testing machine comprises a testing machine base, a cantilever beam body is fixedly connected to the testing machine base, an electric push rod is arranged on the cantilever beam body, an impact head is arranged at the output end of the electric push rod, and a positioning mechanism used for limiting a test sample is arranged above the testing machine base. The positioning mechanism comprises a positioning seat fixedly connected to the testing machine base, and the positioning seat is provided with a clamping assembly and an impact positioning assembly. According to the cantilever beam impact testing machine, through the design of the positioning mechanism, during operation, the position of the impact positioning assembly is firstly adjusted, so that the impact width position of a test sample is quickly clamped to form positioning, then the test sample is clamped and positioned by utilizing the clamping assembly, and the toughness of the test sample is quickly tested; the test sample can be conveniently and quickly positioned, and the operation process is time-saving and labor-saving.

The invention discloses a PT symmetrical hot-pressing resistance MEMS wind speed and wind direction sensor. The sensor comprises four groups of PT symmetrical MEMS resonators which are orthogonally distributed and have hot-pressing resistance feedback; the PT symmetrical MEMS resonator comprises two cantilever beam resonators with completely same structures, a coupling spring beam connected with the two resonators, and a constant current source connected with one resonator, each cantilever resonator comprises two anchor areas, a wide beam connected with the anchor areas, a narrow beam with a piezoresistive effect, a warped thin plate structure and external electrodes located on the two sides of the thin plate structure. Wind speed and wind direction signals are converted into rigidity change of the resonator array through mechanical action by means of a warped thin plate structure, and the rigidity change enables the PT symmetrical MEMS system to deviate from an EP point, so that system frequency splitting is caused. As the frequency splitting quantity of the PT symmetric system is in direct proportion to the square root of the disturbance quantity, the wind speed and direction sensor can detect tiny wind speed signals, and has the advantages of very high sensitivity, simple process, high integration level and the like.

A MEMS microphone includes a substrate, a base, a capacitance system, and at least one cantilever structure. The substrate includes a back cavity, the base is disposed on one side of the substrate, and the capacitance system is disposed on the base. The capacitance system includes at least one back plate assembly, at least one first vibration diaphragm, and at least one second vibration diaphragm. The at least one first vibration diaphragm includes a first sub-vibration diaphragm, and the at least one second vibration diaphragm includes a second sub-vibration diaphragm. The sub-vibration diaphragm and the second sub-vibration diaphragm form a cantilever beam structure on the base, which increase compliance of the at least one first vibration diaphragm and the at least one second vibration diaphragm and reduce tension of the at least one first vibration diaphragm and the at least one second vibration diaphragm, thereby improving sensitivity of the microphones.

The utility model discloses a static calibration and calibration platform for a precise six-dimensional force sensor. The static calibration and calibration platform comprises a detection platform, and a calibration clamping table, a calibration and calibration module and a plurality of counterweight modules which are arranged on the detection platform. And the counterweight modules are respectively arranged at the calibration ends of the calibration module. The calibration module comprises a force loading tool, an X-axis force calibration assembly, a Y-axis force calibration assembly and a Z-axis force calibration assembly. The force loading tool is fixed on the top of the tested six-dimensional force sensor. The force loading tool comprises a sensor chuck and a cantilever beam frame fixed on the sensor chuck. According to the utility model, the force loading tool is matched with the steel cables and the counterweight modules in multiple directions to form a multi-direction and multi-dimensional force-torque system calibration system, the design is precise, the structure is simple and easy to realize, a worker can quickly complete the installation and detection calibration of the detected six-dimensional force sensor, the detection precision is ensured, and the detection efficiency is improved. The device structure is simplified and the device cost is reduced.

The invention belongs to the technical field of optical fiber gas sensing, and discloses an optical fiber photoacoustic gas sensing system and method suitable for a low-pressure environment. The system comprises a programmable logic gate array circuit, a distributed feedback laser, a laser transmission optical fiber, an optical fiber photoacoustic sensing probe, a super-radiation light-emitting diode light source, an optical fiber circulator and a spectrograph. The air pressure is monitored according to the linear relation between the resonance frequency of the cantilever beam and the ambient air pressure, the characteristic that the acoustic sensitivity at the resonance position of the cantilever beam is enhanced under the low air pressure is utilized to make up for signal attenuation in the photoacoustic excitation process, and the sensitivity is corrected in combination with the air pressure measured by the cantilever beam. Therefore, high-precision and high-sensitivity detection of trace gas in a low-pressure environment is realized. The system only adopts a single cantilever beam and a single demodulator, has the functions of gas pressure and gas concentration detection, and can realize accurate detection of trace gas in a gas pressure change environment. And an all-fiber scheme is adopted, so that intrinsic safety is realized, and remote measurement and multi-point network group detection are easy.

The invention discloses a height-level adjustable eddy-current type edge sensor probe, which comprises a transmitting end cantilever beam, a receiving end cantilever beam and an eddy-current type sensor, and is characterized in that a receiving unit of the eddy-current type sensor is fixedly arranged on the top surface of the cantilever end of the receiving end cantilever beam; a transmitting unit of the eddy current type sensor is fixedly arranged on the bottom surface of the cantilever end of the transmitting end cantilever beam and is parallel to a receiving unit; a height adjusting disc is arranged at the bottom of the transmitting end cantilever beam, and the bottom face of the transmitting end cantilever beam is connected with the top face of the height adjusting disc through a BV structure with a multi-stage height adjusting function. A BV structure is adopted between the transmitting end cantilever beam and the height adjusting disc to achieve accurate positioning and restraining of the transmitting end cantilever beam, rapid and accurate debugging and fine adjustment of the vertical height of the transmitting end cantilever beam are achieved, therefore, compensation is conducted on relative position changes, generated by environmental factors, of the detection end of the eddy current inductor, adjustment operation is convenient, and the adjustment precision is high. And the working stability of the eddy current sensor can be ensured after adjustment.

The invention provides a packaging structure, an optical module and an optical system, the packaging structure comprises an optical fiber unit and a chip unit, the chip unit comprises a photon chip and a chip cover plate, the photon chip is buckled with the chip cover plate, a spot size converter is arranged in the photon chip, and the spot size converter is composed of a cantilever beam waveguide and a first groove; the optical fiber unit comprises an optical fiber, a bottom plate and an optical fiber cover plate bottom plate; the waveguide is coupled with the optical fiber; wherein a first bonding part is arranged between the chip cover plate and the bottom plate, and a second bonding part is arranged between the photon chip and the optical fiber cover plate; or a first bonding part is arranged between the chip cover plate and the optical fiber cover plate, and a second bonding part is arranged between the photon chip and the bottom plate. In the packaging structure, a chip cover plate is arranged on a photon chip to form a chip unit, so that the bonding area between the chip unit and an optical fiber array is increased, the mechanical stability of the packaging structure is improved, and alignment of waveguides in the photon chip and optical fibers in the optical fiber array is realized.

The present application discloses a method for measuring impact force of debris flow and application, and a design method for barrier energy dissipation pile array. The method for measuring vertical impact force of debris flow measures the tangential velocity of debris flow at the impact point to measure the vertical impact force distribution of debris flow on the impact point. Further, the design method for pile array simplifies the free section of energy dissipation pile as a cantilever beam, which generates a bending resistance when impacted by debris flow, and the bending resistance continuously works to dissipate the impact kinetic energy of debris flow. According to the motion characteristics of debris flow, the impact time and distance parameters are further derived to solve the problems of measuring and designing the stability parameters of single energy dissipation pile, the energy dissipation parameters of barrier energy dissipation pile array, and the number parameters of barrier energy dissipation pile array. The present application also provides the application of each measuring and designing method. The present application provides a more scientific and perfect solution for the energy dissipation design of barrier energy dissipation pile array to resist the impact damage of rockfall and debris flow caused by landslide disaster.

The utility model provides guide rail type vertical axis wind power generation equipment. The lifting force blades generate lifting force under the action of wind to push the rail moving mechanism to annularly move along the annular rail, then the driving shaft is pulled to rotate through the traction rope, and the driving shaft enables the generator to generate electricity through the step-up gear box. A cantilever beam structure in which blades and a vertical shaft are directly connected in existing vertical shaft wind power generation equipment is avoided, the driving shaft does not bear cantilever torque any more, the requirement for the strength of the driving shaft is greatly lowered, the size and height of the driving shaft are reduced, an overlong vertical shaft can be omitted, the material cost is greatly lowered, machining and installation are easy, and the service life of the driving shaft is prolonged. The number of the lifting force blades and the number of the track moving mechanisms are designed according to the unit power, the larger the diameter of the annular track is, the larger the number of the lifting force blades and the number of the track moving mechanisms are, and then the power generation efficiency is improved.

The invention relates to the technical field of electrical variable measurement, in particular to a multi-dimensional force measurement device giving consideration to static measurement and dynamic measurement, and solves the technical problems that a traditional six-dimensional force sensor is complex and tedious in structure, relatively heavy in overall weight, incapable of giving consideration to static measurement and dynamic measurement and relatively low in measurement precision, and the multi-dimensional force measurement device comprises a measurement assembly and a vibration isolation assembly; the measuring assembly comprises a bottom plate, a top plate and a cantilever beam; the cantilever beam is connected to the bottom plate, the cantilever beam is clamped into a limiting groove of the top plate through a supporting arm, and a uniaxial strain gauge, a first biaxial strain gauge, a second biaxial strain gauge, an X-type piezoelectric crystal, a first Y-type piezoelectric crystal and a second Y-type piezoelectric crystal are arranged on the cantilever beam; the vibration isolation assembly comprises a first horizontal supporting plate, a second horizontal supporting plate, multiple layers of isolation sleeves and supporting columns, and an interlayer between every two adjacent isolation sleeves is filled with an elastic material. The device realizes the combination of static measurement and dynamic measurement, and can capture quickly changing torque and force while keeping high precision.

The invention belongs to the technical field of engineering geological disaster monitoring, and discloses a fiber bragg grating angle type three-way joint meter based on an equal-strength beam theory. The fiber bragg grating angle type three-way joint meter is mainly composed of a guide rail type shell, a connecting rod, a beam fixing connecting piece, a positioning fixing piece, a constant-strength cantilever beam, a guide steel ball and an optical fiber sensing unit. Through an integrated fiber grating sensing technology, the joint meter can accurately measure displacement changes of a crack in three directions of opening and closing, shearing and settling. According to the design, the deformation characteristic of the hyperelastic equal-strength beam is fully utilized, the precision and response speed of crack monitoring are remarkably improved, it is ensured that efficient and accurate crack displacement monitoring can be achieved in various complex structures, and wide application potential and excellent monitoring performance are achieved.

The invention discloses a probe structure of an eddy current type edge sensor, which comprises an eddy current type sensor, a first clamping mechanism fixedly arranged on the back surface of a first sub-mirror, a second clamping mechanism fixedly arranged on the back surface of a second sub-mirror adjacently connected with the first sub-mirror, and a U-shaped notch structure with one end, close to the second clamping mechanism, of a U-shaped block, a cantilever beam is clamped on the second clamping mechanism, the cantilever end of the cantilever beam is inserted into the notch structure, and detection components of the eddy current type sensor are fixedly arranged on the cantilever end and the upper surface and the lower surface of the notch structure respectively. The probe structure shows excellent stability under specified environmental conditions, drifting among the sensors is kept within a small range, and the probe structure has high reliability and performance consistency under temperature change and humidity fluctuation.

The invention discloses a piezoelectric air cooling device based on a piezoelectric film PZT technology, and relates to the technical field of MEMS. The device adopts a two-layer packaging structure of a piezoelectric cantilever beam MEMS chip and a PCB (Printed Circuit Board) with a vent hole. A cantilever beam of the MEMS chip is integrated with an SOI top silicon layer and an ultrathin PZT driving stack, low rigidity and high driving force are achieved, and the surface of the cantilever beam is covered with a PDMS flexible sealing layer to achieve dynamic sealing. When the device works, the cantilever beam is driven to resonate in an ultrasonic frequency band, and efficient synthetic jet is generated at the vent hole by periodically changing the volume of the pump cavity. The technical bottleneck that miniaturization and high performance are difficult to consider at the same time is broken through, and the device has the advantages of being compact in structure, mute and efficient and is suitable for precise heat dissipation of miniature electronic equipment.

One end of an input optical fiber is connected with a light source emitting end, and the other end of the input optical fiber sequentially penetrates through a sensor base and an artificial cilia cantilever beam to be fixedly connected with an exposed optical fiber; the other end of the exposed fiber is fixedly connected with the output fiber; and the other end of the output optical fiber penetrates through the artificial cilium cantilever beam and is in communication connection with the light source receiving end. The sensor provided by the invention can monitor various parameters such as the flow velocity, the flow velocity direction, the salinity and the like at the same time, and can meet the multi-dimensional monitoring requirements in a complex marine environment. Meanwhile, by simulating the structure of lateral hair cells of fishes and adopting a bendable artificial cilia cantilever beam as a core sensing element, the speed and direction of water flow can be accurately detected. In addition, the sensor is in direct contact with the fluid through the exposed optical fiber part, and the salinity of the fluid is detected by utilizing the difference of refractive indexes of different fluids.

The invention discloses a piezoelectric cantilever beam energy collector, and the collector comprises a fixed part 1 which is used for fixing the collector at a certain position; the supporting beam and the fixing piece 1 are connected into a whole, the supporting beam comprises a bionic bamboo joint structure 2 close to one end of the fixing piece 1 and a mass structure 3 far away from one end of the fixing piece 1, and at least one micropore 6 penetrating through the upper surface and the lower surface of the supporting beam is formed in the bionic bamboo joint structure 2 and used for forming alternate rigid segments and flexible nodes on the bionic bamboo joint structure 2; the supporting beam swings with the end close to the fixing piece 1 as the circle center in the vibration environment. The mass block 5 is arranged on the mass structure 3; the number of the piezoelectric films 4 is two, the two piezoelectric films 4 are arranged on the upper surface and the lower surface of the bionic bamboo joint structure 2 respectively, and the piezoelectric films 4 cover the micropores 6 formed in the bionic bamboo joint structure 2.

The MEMS micro valve is arranged in a fluid channel and used for controlling closing and opening of the fluid channel, the technical problem that a valve body cannot be opened is solved, the MEMS micro valve comprises the valve body, a valve seat and a cantilever beam, the fluid channel is closed when the valve body covers the valve seat, and the fluid channel is opened when the valve body is separated from the valve seat. The cantilever beam is connected between the valve body and the inner wall of the fluid channel to play a role in supporting the valve body, and a separation space is arranged between the cantilever beam and / or the valve body and an object to reduce the contact area with the object. The invention further provides an MEMS micropump, the MEMS micropump comprises a pump cavity capable of changing the size, the pump cavity is provided with a liquid inlet fluid channel and a liquid outlet fluid channel, and the MEMS microvalve is adopted as a one-way valve of the liquid inlet fluid channel and the liquid outlet fluid channel. Separation spaces are arranged between the cantilever beam and an object (a related structure on the micropump) and between the valve body and the object (a valve seat) to reduce the contact area between the cantilever beam and the object and reduce the action of micro force, so that the microvalve is easier to open.

The invention relates to the field of vibration acceleration measurement, and discloses a two-dimensional fiber grating acceleration sensor and an acceleration measurement method.The sensor comprises a square plane rotating body, bases are arranged at the four corners of the rotating body in a forward extending mode, and each base is provided with a sensing unit; the sensing unit comprises cantilever beams, a mass block and an optical fiber, the fixed ends of the cantilever beams are installed on the base, the movable ends of the cantilever beams are connected with the mass block, and the four cantilever beams are parallel to the four edges of the square respectively; an optical fiber is arranged between the mass block and the base where the mass block is located, and an optical fiber grating is engraved in the middle of the optical fiber. The sensor structure disclosed by the invention has good stability, can reduce the influence of environments such as water flow erosion and the like, is compact in structure, realizes automatic temperature compensation while increasing the sensitivity, can resist Z-direction interference, and is suitable for being mounted in severe environments such as narrow space, high temperature and high pressure, strong electromagnetic interference and the like.