493 results about "Piezoelectric actuators" patented technology

The invention relates to dosing system (1) for a dosing substance, which dosing system (1) comprises a housing (11) having a nozzle (60) and a feed channel (64) for dosing substance, a discharge element (51) arranged in the housing (11) for discharging dosing substance from the nozzle (60), at least one first actuator (20), preferably a piezo actuator (20), coupled to the discharge element (51) and / or the nozzle (60), and at least one second actuator (30), preferably an expansion material element (30), coupled to the first actuator (20). The second actuator (30) is designed to set a position of the at least one first actuator (20) relative to the housing (11), particularly with respect to the discharge element (51) and / or the nozzle (60). The invention further relates to a method for controlling such a dosing system (1).

The technology described herein is directed towards a metasurface arranged with unit cells for narrowband sound absorption, in which the unit cells are based on Helmholtz resonators that can have their resonant frequencies adjusted via a shared tuning element, e.g., a screw, or a piezoelectric actuator. A sound absorbing unit-cell is designed and constructed based on a general resonance frequency, and includes a neck portion and air chamber dimensioned to resonate close to the desired resonance frequency and thereby inverse phase cancel corresponding narrowband frequencies of incoming sound waves. Collectively moveable floors in the resonators facilitate changing the resonators' air cavity dimensions, to adjust the resonant frequencies to cancel acoustic waves of different frequencies corresponding to noise, which can change over time. The unit cells can be distributed as part of a metasurface, which can be positioned proximate to a noise source to phase cancel the noise.

The invention discloses an active vibration suppression and deformation compensation device for high-precision thin-walled part machining, and relates to the technical field of machining equipment. The device comprises a base module, a clamping positioning module, a multi-source sensing monitoring module, a cooperative actuation vibration suppression module, a multi-point flexible compensation module, an intelligent control module and a machine tool cooperative interface module. The multi-source sensing monitoring module synchronously collects vibration, deformation, cutting force and temperature signals in the machining process. The intelligent control module processes signals and drives the cooperative actuation vibration suppression module (including a piezoelectric actuator group and a voice coil motor follow-up supporting unit) to perform broadband vibration suppression, and meanwhile drives the multi-point flexible compensation module (including a flexible supporting matrix and a path compensation interface) to perform local and overall deformation compensation. Synchronous monitoring and active cooperative control of vibration and deformation are achieved through closed-loop control, the machining precision, the surface quality and the machining efficiency of the thin-wall part are remarkably improved, compatibility is good, and the adaptive range is wide.

The invention belongs to the field of wind tunnel experiments in a hypersonic flow field environment, and discloses a multi-degree-of-freedom high-frequency motion simulation device for an aircraft dynamic stability test and a calculation method for realizing an actuation angle. According to the technical method, calculation is carried out on the basis of an electromechanical coupling equation, determined by electrical parameters and mechanical parameters, of a piezoelectric material. Modeling can be carried out according to a piezoelectric equation to obtain a calculation method between the voltage applied by the piezoelectric actuator and the pitching and yawing actuation angles of the device, so that the excitation effect of the device in the ground test process can be accurately controlled and predicted. The method is not only suitable for pitching and yawing two-degree-of-freedom actuation calculation, but also can be used for calculating the actuation angle of a three-axis degree-of-freedom experimental device added with rolling drive through coordinate transformation under the condition of adding parameters such as rolling angular velocity and the like in the face of the three-axis degree-of-freedom experimental device added with rolling drive. At present, according to a calculation method based on the device, calculation is carried out only by considering the degree of freedom of the pitching axis and the yawing axis.

The technology described herein is directed towards a metasurface arranged with unit cells for narrowband sound absorption, in which the unit cells are based on Helmholtz resonators that can have their resonant frequencies adjusted via actuators, e.g., piezoelectric motors. A sound absorbing unit-cell is designed and constructed based on a general resonance frequency, and includes a neck portion and air chamber dimensioned to resonate close to the desired resonance frequency and thereby inverse phase cancel corresponding narrowband frequencies of incoming sound waves. Moveable partitions in the resonators, controlled by piezoelectric actuators, facilitates changing of the resonators' air cavity dimensions, to adjust the resonant frequencies to cancel acoustic waves of different frequencies corresponding to noise, which can change over time. The unit cells can be distributed as part of a metasurface, which can be positioned proximate to a noise source to phase cancel the noise.

The utility model belongs to the technical field of stroke detection of driving elements, and particularly relates to a stroke detection device of a thread piezoelectric actuator, which comprises a sliding seat integrated in the thread piezoelectric actuator, and the sliding seat is configured to rotate relative to a screw rod and can synchronously move along with the screw rod along the axial direction of the screw rod; a limiting assembly is arranged between the sliding base and the base and can prevent the sliding base from rotating relative to the base. The reading head and the encoder are oppositely arranged. According to the utility model, through arranging the sliding seat which is rotatably connected with the screw rod and slidably connected with the base and prevents rotation through the limiting assembly, the composite motion of the screw rod is decomposed into pure axial translation of the sliding seat relative to the base, and the reading head and the encoder are respectively arranged on the sliding seat and the base or the screw rod and the sliding seat, so that the closed-loop control of the thread piezoelectric actuator is realized; and the driving precision and the long-term reliability under various loads and working conditions are obviously improved.

The invention discloses a laser resonant cavity thermal drift suppression method and system and a laser, relates to a thermal lens effect and cavity length drift adaptive compensation technology of a high-power laser system, and aims to solve the problems of low cavity length adjustment sensitivity and slow response speed in the prior art. The method comprises the following steps: monitoring the central wavelength of a Raman Stokes spectral line in a laser resonant cavity in real time by adopting a spectral analysis module and obtaining the drift distance of the Raman Stokes spectral line; the FPGA controller determines the cavity length compensation amount of the laser resonant cavity according to the drift distance; and the FPGA controller controls the piezoelectric actuator according to the cavity length compensation amount to adjust the cavity length of the laser resonant cavity in real time so as to suppress thermally induced wavelength drift. The laser comprises a pumping source, a laser resonant cavity, a crystal arranged in the laser resonant cavity and a laser resonant cavity thermal drift suppression system, pumping light generated by the pumping source enters the laser resonant cavity, and Stokes light output by the laser resonant cavity enters the laser resonant cavity thermal drift suppression system.

The invention provides a three-degree-of-freedom micro-motion bonding head for a wafer bonding machine, relates to the technical field of ultra-precision piezoelectric driving, and aims to solve the problems that a traditional bonding head structure is low in response speed and poor in multi-degree-of-freedom cooperative micro-motion stability. An external frame unit and an internal frame unit are fixedly assembled on the micropositioner main substrate; the external frame unit comprises an X-direction piezoelectric actuator, a Y-direction piezoelectric actuator, an X-direction balance weight, a Y-direction balance weight and a parallel guiding flexible hinge, wherein the X-direction balance weight and the Y-direction balance weight are symmetrically distributed, and the external frame unit is used for achieving X-direction linear motion and Y-direction linear motion. The internal frame unit comprises a Z-direction piezoelectric actuator, a wafer bonding head and a tandem decoupling flexible hinge, and is used for realizing Z-direction linear motion; the piezoelectric actuator is used as a driving element and is matched with the flexible hinge to form a guiding and transmission mechanism, three-degree-of-freedom micro-motion of the bonding head in space is achieved, and meanwhile the structural design is optimized to improve motion decoupling performance, compactness and adaptability of stroke and precision.

The present application relates to pipeline system damping and noise reduction technical field, provide a kind of active noise cancellation pressure relief valve, comprising: valve body, with the liquid inlet cavity and pressure relief cavity being communicated are formed;Bypass pipe, with liquid inlet cavity is communicated;Piezoelectric actuator and pressure relief component, pressure relief component includes adjusting piece, pressure relief elastic piece and pressure relief valve core, pressure relief valve core and pressure relief elastic piece are set in pressure relief cavity, adjusting piece is movably arranged on valve body, piezoelectric actuator is arranged on adjusting piece, pressure relief elastic piece is pressed between piezoelectric actuator and pressure relief valve core;Piezoelectric actuator is configured to drive pressure relief elastic piece, to eliminate the transient noise caused by pulsating pressure when pressure relief valve core moves.The active noise cancellation pressure relief valve provided by the present application introduces active noise cancellation technology into the active noise cancellation pressure relief valve pulsating noise control by arranging piezoelectric actuator, can be adjusted by pressure relief elastic piece The force exerted on the pressure relief valve core can eliminate the transient noise caused by pulsating pressure when the pressure relief valve core moves.

The invention provides an MEMS component and a vibration cavity structure and a liquid ejection head thereof, the MEMS component comprises a piezoelectric actuator structure, and the vibration cavity structure is in contact with the piezoelectric actuator structure; the vibration cavity structure comprises a vibration cavity and a cavity wall, and the inner side wall of the cavity wall is arc-shaped; the vibration cavity structure is made of silicon and / or silicon oxide. The cavity wall of the vibration cavity structure disclosed by the invention adopts the design of the arc-shaped inner side wall, so that the deformation volume of the vibration cavity is increased on the premise that the density of the spray holes of the liquid spray head is not changed, and the size of liquid drops is effectively increased; and meanwhile, the liquid ejection head can realize ejection of liquid drops with the same size by using relatively small driving voltage, so that the energy consumption is reduced.

The invention provides an epinephrine automatic injection patch and method for cardiovascular first aid, and the injection patch comprises a flexible biosensing layer which obtains the subcutaneous impedance value and vital sign parameters of a patient; the microneedle array is used for adjusting the penetration depth based on the subcutaneous impedance value and controlling the deformation quantity through a piezoelectric actuator; the micro-fluidic pulse drug delivery module is connected with the micro-needle array and is used for executing pulse type drug injection according to the penetration depth; and the control module is used for judging an autonomous circulation recovery state based on the vital sign parameters and triggering the microfluidic pulse administration module to stop injection. According to the application, by constructing a first-aid closed loop of'multi-mode physical sign dynamic monitoring-self-adaptive microneedle administration-ROSC intelligent termination ', the response speed of epinephrine injection is increased, the bioavailability is improved, the risk of excessive medication is reduced, and the gold rescue efficiency and the neurological function prognosis rate of pre-hospital cardiac arrest patients are remarkably improved.

A piezo actuator system includes a piezo actuator; and a driving circuit configured to apply a pulse width modulation (PWM) voltage waveform to the piezo actuator. An envelope of the PWM voltage waveform includes a first period in which a first voltage rising with a first slope is applied, a second period in which a second voltage rising with a second slope is applied, and a third period in which a third voltage rising with a third slope is applied. The third slope is greater than the second slope.

A piezoelectric actuator comprises a stack of a plurality of piezoelectric films, a piezoelectric element having electrodes disposed between the piezoelectric films and at both end surfaces, and a drive circuit. Each of the plurality of piezoelectric films has asymmetric polarization-voltage hysteresis characteristics with two different absolute values of coercive voltage. The drive circuit applies a unipolar voltage waveform that generates an electric field in the same direction as the direction of spontaneous polarization in at least one layer from among the plurality of piezoelectric films and generates an electric field in the direction opposite to the direction of spontaneous polarization in the other piezoelectric films. A minimum voltage value V1 having a minimum absolute value in the unipolar voltage waveform is set such that the ratio of the slope T0 at 0 [V] to the slope T1 at the minimum voltage value V1 [V] in a hysteresis curve indicating bipolar polarization-hysteresis characteristics in another piezoelectric film satisfies |T0 / T1| ≥ 1.5.

The invention relates to the technical field of electrical engineering and high-voltage insulation, discloses a multi-objective optimized green insulating gas and solid material configuration method and system, and aims to solve the problems of nanometer air gap accumulation and insulation failure caused by asynchronous static matching and control of a gas-solid interface under a dynamic electric field. According to the method, nanoscale strain and temperature data are obtained in real time through an interface state high-precision sensing module, electric field gradient information is combined, the data are input into a multi-target collaborative optimization control module based on a Hamiltonian mechanical model, and a 100-nanosecond-level synchronous solid pre-tightening force and gas pressure regulation and control instruction is generated with the purpose of minimizing the system energy change rate; and the piezoelectric actuator and the micro valve array are used for executing microsecond-level dynamic adjustment. According to the system, ultrahigh temporal-spatial resolution monitoring, hardware-level synchronous regulation and control and predictive control of physical model driving are realized, the reliability of green insulation equipment is remarkably improved, and the service life of the green insulation equipment is remarkably prolonged.

The invention provides a wafer jacking device and wafer transfer equipment, and the wafer jacking device comprises a supporting plate which is used for supporting a wafer, an optical fiber channel is embedded in the supporting plate, an optical fiber grating sensor is arranged in the optical fiber channel, the optical fiber grating sensor comprises a distributed optical fiber grating array, and the distributed optical fiber grating array is arranged in the optical fiber channel; the number of the fiber grating sensors is three or more than three. The lifting mechanism is used for controlling the supporting plate to ascend or descend, and an accelerometer and a piezoelectric actuator are arranged at the joint of the lifting mechanism and the supporting plate; the fiber bragg grating demodulator is used for receiving and demodulating the reflected light signal of the fiber bragg grating sensor so as to obtain temperature change information; and the vibration controller is used for controlling the piezoelectric actuator to work according to the measurement data of the accelerometer so as to offset the vibration noise. According to the wafer jacking device and the wafer transfer equipment, the surface temperature of the wafer on the supporting plate can be reversely calculated, the problem of uneven contact or pollution during temperature measurement of the wafer is solved, and the temperature measurement precision is improved.

The present invention is a piezoelectric actuator drive method, a piezoelectric actuator drive circuit, and a piezoelectric actuator drive system capable of causing a piezoelectric element to vibrate in a maximum amplitude state. The piezoelectric actuator drive circuit includes: an obtainment unit that obtains operation information pertaining to operation of the piezoelectric element in a period that is a part of one cycle of a drive cycle in which the piezoelectric element is driven; and a control unit that performs feedback control of a drive parameter for driving the piezoelectric element based on the operation information.

An information handling system may include a processor, a data storage device, a power management unit, a thermo-haptic mouse, including an array of thermoelectric generators of a thermo-haptic module to selectively heat or cool a portion of the thermo-haptic mouse to be felt by a user of the thermo-haptic mouse, and a piezoelectric actuator of the thermo-haptic module to selectively apply a vibration to the portions of the thermo-haptic mouse to be felt by the user of the thermo-haptic mouse, and the processor executing code of a mouse training machine learning system to: receive, as training input, captured images during the execution of a gaming application and provide, as output, image recognition dataset descriptive of recognized game action event environmental data during execution of the gaming application, the image recognition dataset to be used by the processor executing a thermo-haptic feedback model evaluation system to provide thermo-haptic signals to the array of thermoelectric generators and the piezoelectric actuator to provide thermo-haptic feedback commensurate with the game action event environment during game play.

Inconclusive and inconsistent results from existing haptic testing systems, e.g. for trackpads, which include rigidly mounted resistive load cells and accelerometers, prevent accurate results, especially in a high-volume production context. The use of a rigidly mounted sensor is unsuitable because a trackpad will generally be softer than the actuation system, whereby, when the haptic event is fired, the vast majority of the energy will be lost in the trackpad, while the sensor remains almost stationary. Accordingly, an improved test probe for a haptic device configured for mounting on a robotic arm, comprises: a contact tip configured for contacting the haptic device; a sensor configured for measuring a threshold force of the piezoelectric actuator device, and an haptic characteristic, e.g. acceleration, of a resulting haptic response thereof at a same time and a same location; and a compliant element configured for enabling the sensor to move relative to the haptic device.

The invention relates to a switch closing holding device and a vacuum switch. The device comprises a piezoelectric actuator, an energy taking coil arranged on a main loop of the vacuum switch, and a first friction surface and a second friction surface which are arranged in parallel, wherein the input end of the piezoelectric actuator is connected with the output end of the energy taking coil, the output end of the piezoelectric actuator is connected with the first friction surface, and the second friction surface is fixed on an operating mechanism transmission rod of the vacuum switch; the energy taking coil is used for sensing a current signal on the main loop and outputting a corresponding voltage signal to the piezoelectric actuator according to the current signal; the piezoelectric actuator is used for applying a driving force to the first friction surface under the condition that the change amplitude of the detected voltage signal is greater than a preset threshold value; the driving force is used for driving the first friction surface and the second friction surface to generate friction force, so that the vacuum switch is kept in a closed state under a short-circuit fault. The device can ensure that the switch is kept in a closed state during a fault.

A valve including a pressurised fluid inlet and a fluid outlet, and including a fixed plate with first channels, a flap with second channels, the flap movable between: an opening position where the flap is spaced apart from the plate, the first channels and the second channels being in fluidic communication and allowing the flow of the fluid, a closing position where the flap is in contact with the plate, the first channels and the second channels not being in fluidic communication and blocking the flow of the fluid, a piezoelectric actuator acting upon the flap to move it between the closing position and opening position, the inlet is arranged in such a way that the pressurised fluid exerts a force on an active face of the flap stressing said flap to the closing position. The embodiments also relate to a system for generating electricity.

The invention belongs to the technical field of piezoelectric driving, and relates to a piezoelectric driver, a working method thereof and a driving mechanism. The piezoelectric actuator is mainly composed of a driving body, a driving foot, a pre-tightening force mechanism and a bolt. The driving body generates a non-resonance induction mode and brings first direction displacement and second direction displacement to be generated near a resonance mode under the excitation of a plurality of paths of driving electric signals due to the synergistic strain effect of a plurality of piezoelectric bodies, and the tail end of the driving foot forms an elliptical motion track through the synergistic effect of the displacements in two orthogonal directions. The driving mechanism comprises a piezoelectric actuator, a sliding block, a carrying platform and a fixing mechanism, the piezoelectric actuator is fixed to the sliding block and moves together with the sliding block during driving, a fixed piezoelectric actuator in a traditional scheme is converted into a moving part, and the advantages of being long in stroke and large in thrust are achieved. According to the invention, the beneficial effects of wide frequency band, large output and high-precision driving can be achieved, and miniaturization of a driving system is facilitated.

A mirror device includes a mirror portion, a pair of first support portions, a pair of movable frames, a pair of second support portions, a drive portion having a plurality of piezoelectric actuators, a fixed frame, a pair of connecting portions connecting the drive portion and the fixed frame, and a piezoelectric sensor that generates a signal corresponding to swing of the mirror portion around the first axis or the second axis. The piezoelectric sensor is electrically isolated from the plurality of piezoelectric actuators. The plurality of piezoelectric actuators and the piezoelectric sensor are each formed of an upper electrode, a piezoelectric film, and a lower electrode. The upper electrodes of the plurality of piezoelectric actuators are connected in common via a first metal wire. The lower electrode of the piezoelectric sensor is connected to a second metal wire that is electrically isolated from the first metal wire.

A piezoelectric actuator includes: a substrate having an opening; a diaphragm having one face on the substrate in a first direction, the diaphragm facing the opening; a lower electrode on another face of the diaphragm opposite to the one face of the diaphragm in the first direction; a piezoelectric body on the lower electrode in the first direction; and an upper electrode on the piezoelectric body in the first direction, wherein the lower electrode has a thick portion on a part of the lower electrode, the thick portion has a thickness larger than a portion other than the part of the lower electrode in the first direction, and the upper electrode has a raised portion on a part of the upper electrode covering at least a portion of the thick portion of the lower electrode in a second direction orthogonal to the first direction.

A workpiece support (18) for supporting a workpiece (14), the workpiece support (18) comprising a workpiece support body (54) and a workpiece support element (20) associated with the workpiece support body (54) for engaging the workpiece (14) and a piezo electric actuator (32) being associated with the workpiece support body (54) for moving the workpiece support element (20) for supporting the workpiece (14). The workpiece support body (54) comprising one or more flexures (44) that enable a movable portion (42) of the workpiece support body (54) to move when acted on by the piezo electric actuator (32) and to move the workpiece support element (20). The workpiece support (18) can comprise two or more workpiece support bodies (54) and a piezo electric actuator (32) being associated with each workpiece support body (54) for moving the respective workpiece support elements (20).

The invention provides a rising edge waveform optimization method for a stick-slip piezoelectric actuator of a steady impact driving mechanism, and relates to the technical field of piezoelectric driving and control, the method comprises the following steps: collecting an input voltage and an output displacement signal, and establishing a coupling dynamic model fusing a Bouc-Wen hysteresis model and a LuGre friction model; constructing a parameterized rising edge (a power exponent is a shape control quantity) of a power function based on the model, and defining a single-cycle net step displacement maximization optimization function; global optimization is carried out on the power exponent through a particle swarm optimization algorithm, and an optimized rising edge and a fixed falling edge form a complete driving waveform to be applied to the piezoelectric actuator. According to the method, under the driving voltages of 30 V, 50 V and 80 V, the single-cycle net stepping displacement is increased by 41%-118%, 29.0%-61.6% and 26.0%-46.3% respectively, displacement fluctuation can be restrained, hardware does not need to be changed, engineering implementation is easy, and the method is suitable for precise positioning and other scenes.

A piezoelectric actuator includes a piezoelectric element, and a vibrating plate that vibrates through driving of the piezoelectric element. The vibrating plate includes a first layer containing zirconium oxide as a main constituent material. When zirconium oxide contained in the first layer is measured by X-ray diffraction, and when an intensity related to a cubic crystal (111) is defined as a first intensity and an intensity related to a monoclinic crystal (111) is defined as a second intensity, the ratio of the first intensity to the sum of the first intensity and the second intensity is 40% or more.

The present invention relates to the field of optical devices, specifically to tunable optical lens assemblies. These assemblies utilize piezoelectric actuators, including those made from lead-free materials, to dynamically adjust the shape and optical properties of the lens. The invention addresses the need for environmentally friendly and regulatory-compliant alternatives to traditional lead-based piezoelectric materials while maintaining or enhancing the performance characteristics required for applications in consumer electronics, medical devices, industrial machine vision systems, augmented reality devices, and other precision optical systems. Additionally, the invention encompasses the integration of advanced driver integrated circuits (ICs) for efficient control and actuation of the lens system.

To provide a piezoelectric actuator which suppresses a flow-out of fine dust from the inside of the piezoelectric actuator to the outside, and a manipulation system.SOLUTION: A piezoelectric actuator 30 comprises: a housing 32; rolling bearings 342 and 343 disposed inside of the housing 32; a shaft part 344 which is inserted through the rolling bearings 342 and 343 in an axial direction A and protrudes from a tip end opening 323a of the housing 32 to a tip end side A1 in the axial direction A; a tool holder 35 which is fixed to the shaft part 344 and capable of holding a micro tool; a vibration part 33 which is disposed inside of the housing 32 and capable of vibrating the rolling bearings 342 and 343, the shaft part 344 and the tool holder 35 in the axial direction A; and a tip end sealing member 37b which is provided in the tip end opening 323a and in contact with the shaft part 344 and the housing 32 in a radial direction D of the rolling bearings 342 and 343.SELECTED DRAWING: Figure 3

An electronic device includes a first button, a second button, at least one processor, comprising processing circuitry, a pressure sensor configured to provide a first signal to the at least one processor, a piezo actuator configured to output a vibration via the first button, and memory storing instructions. The instructions, when executed by at least one processor individually or collectively, cause the electronic device to: based on receiving a second signal from the piezo actuator, while the first signal is not provided to the at least one processor from the pressure sensor, detect a malfunction associated with the first button, and based on the malfunction associated with the first button, in response to the second signal and a third signal indicating a pressure on the second button being maintained during reference time, execute a function allocated to a combination of the pressure on the first button and a pressure on the second button.

The application provides a deformable mirror assembly, comprising: a deformable mirror mirror body, a back surface of which is provided with a telescopic piezoelectric actuator, which comprises a plurality of linearly arranged actuating units; a pad, which is arranged on the back surface of the deformable mirror mirror body; a control system, which is used for providing an actuating alternating voltage to the telescopic piezoelectric actuator, so that the sinusoidal vibration of different actuating units adopts random amplitude and random phase; the peak-to-valley maximum amplitude of the mirror surface of the deformable mirror mirror body caused by the sinusoidal vibration overcomes the Rayleigh criterion, and the periodicity of the spatial frequency is destroyed through the randomness of the phase of the actuating unit, so that the homogenization of the light beam speckle is realized when the deformable mirror mirror body is used for light beam deflection. The application also provides a corresponding two-dimensional optical system. The deformable mirror assembly of the application improves the speckle homogeneity in the imaging process and reduces the influence of the speckle.