981 results about "Piezoelectric actuators" patented technology

The invention provides a chip welding method based on machine vision and control, and the method comprises the steps: obtaining a three-dimensional model of a chip and a substrate, obtaining an initial relative position of a chip welding spot and a substrate welding pad, and generating a mechanical arm initial motion instruction; images of the chip and the substrate are shot, pose deviation is calculated through image registration, if the deviation exceeds a threshold value, a compensation instruction is generated to be fused with an initial instruction, and the track of a mechanical arm is adjusted to be aligned with a bonding pad; a temperature sensor array is constructed to monitor the temperature of the welding area, the average temperature is calculated, and if a difference exists between the average temperature and the ideal welding temperature interval, the heater power is adjusted through a proportional integral differential algorithm; a piezoelectric sensor is used for obtaining a mechanical arm joint vibration signal, the dominant vibration frequency and amplitude are extracted through fast Fourier transform, and a piezoelectric actuator is used for generating an anti-phase driving signal to counteract vibration.

The invention relates to a finite time terminal sliding mode control method and system for a piezoelectric actuator and a medium, and the method specifically comprises the steps: collecting an operation signal of the piezoelectric actuator, the operation signal comprising input voltage and displacement output data; establishing a fractional order coupling model containing asymmetric hysteresis characteristics; parameter identification is carried out on parameters in the fractional order coupling model, and the parameters in the fractional order coupling model are adjusted; a hysteresis feed-forward compensator is constructed, and the fractional order coupling model after parameter identification is compensated; and for the compensated fractional order coupling model, through a finite time terminal sliding mode control algorithm, realizing tracking control on the track of the piezoelectric actuator. On the basis of asymmetric hysteresis effect compensation, a finite time terminal sliding mode control algorithm is introduced, it is ensured that tracking errors are rapidly converged to zero within finite time, and the trajectory tracking precision and stability of the piezoelectric actuator within the finite time are improved.

The invention belongs to the field of characteristic measurement of piezoelectric actuators, and relates to a modeling and compensating method for dynamic composite hysteresis of a piezoelectric actuator under a time-varying large load. A dynamic hysteresis characteristic test system of the piezoelectric actuator is built to collect load and displacement signals. Based on an improved asymmetric slope Prantl-Ishlinskii algorithm, carrying out modeling on asymmetry and zero drift characteristics of hysteresis rings, fitting static hysteresis rings of force-bit and electricity-bit, and superposing the static hysteresis rings to form a static composite hysteresis model; a dynamic composite hysteresis model is established according to the wide-frequency-domain excitation requirement of the driver, and an ASI parameter controller is designed based on an LSTM algorithm to dynamically regulate and control the slope and the threshold value of the model; a parameter controller fault-tolerant mechanism is designed to restrain model instability caused by sudden disturbance and control over-regulation, and high-precision real-time hysteresis prediction is ensured; and calculating the real-time control voltage and compensating the dynamic hysteresis by solving the inverse model of the dynamic composite hysteresis model and inputting the expected displacement.

The invention relates to the technical field of fluid generators, in particular to a fluid generator and a fluid control device.The fluid generator comprises a piezoelectric actuator, a spacing part and a diaphragm, and a cavity is defined by the piezoelectric actuator, the spacing part and the diaphragm; the vibration antinode position of the diaphragm and the adjacent area of the antinode position protrude out of the surface of the diaphragm to form a convex part, so that the continuity of the rigidity of the diaphragm is broken, and a rigidity sudden change is formed at the outer peripheral edge of the convex part; as the amplitude of the antinode position and the amplitude of the area, closer to the outer side of the antinode, of the area adjacent to the antinode position are not in continuous gradient distribution any more, the area, opposite to the convex part, of the diaphragm can obtain larger vibration energy to generate larger amplitude, and then the output flow is increased; in addition, since the diaphragm forms stiffness abrupt change at the peripheral edges of the convex parts, at the same time, the first hole parts arranged in the areas, opposite to the convex parts, of the diaphragm are in or tend to the air outlet stroke or the exhaust stroke at the same time, and the output flow is further improved.

An electronic droplet delivery device having a mouthpiece of inhalation of droplets includes an aperture plate with a plurality of openings coupled to a piezoelectric actuator. A fluid reservoir supplies a solution with nicotine to the aperture plate for ejection out of the mouthpiece in a droplets stream.

The invention discloses an operation method of a cell operation platform combining a piezoelectric actuator and a six-axis mechanical arm, which integrates the large-stroke positioning capability of the mechanical arm and the nano-scale fine operation capability of the piezoelectric actuator, and combines the large-stroke positioning capability of the mechanical arm and the nano-scale fine operation capability of the piezoelectric actuator on the basis of macroscopic mechanical arm movement. The piezoelectric driving unit can accurately approach and control target cells in various postures, so that cell-level fine operation tasks such as cell surface treatment, single cell grabbing and cell injection are completed at high precision, and reliable technical support is provided for single cell analysis and operation.

The invention provides a packaging and sintering control method and device for a power semiconductor device, and the method comprises the steps: achieving the monitoring of a dynamic stress field of a chip and a substrate interface through an embedded pressure sensing array, and obtaining the real-time stress distribution data. And in combination with a material characteristic database, multivariable collaborative optimization is performed on sintering process parameters, so that dynamic adjustment of the parameters is realized. The temperature and pressure curves of all the areas of the sintering platform are dynamically adjusted according to the optimized technological parameters by means of the micro induction heating element and the piezoelectric actuator, and refined self-adaptive multi-area sintering control is achieved. The sintering interface is subjected to real-time nondestructive testing, the interface quality index is obtained and serves as a feedback parameter to be input into the optimization process, closed-loop control is formed, and the accuracy of the sintering process is improved. The problems of uneven stress distribution and inconsistent bonding strength in the prior art are solved through a comprehensive real-time monitoring and dynamic regulation and control method, and the packaging quality and reliability of the power semiconductor device are remarkably improved.

The invention discloses an ultrasonic-assisted broaching machine tool based on a resonance broach and a design method. The machine tool comprises a broaching machine structure; a groove of the ultrasonic broaching tool is located in the position corresponding to the vibration mode wave crest of the broaching tool; the main piezoelectric actuator device is arranged in the groove; the compensation piezoelectric actuator device is arranged at the position, corresponding to the radial vibration mode, of the ultrasonic broach; the frequency of the ultrasonic power supply and the main power supply is the corresponding frequency when the axial ultrasonic vibration amplitude is maximum and the radial ultrasonic vibration amplitude is minimum under different power supply frequencies, the main driving voltage is determined according to the frequency of the main power supply, the preset broaching maximum speed of the broach and an ultrasonic auxiliary broaching effectiveness coefficient, and the frequency of the compensation power supply is the same as the frequency of the main power supply; the phase difference is 180 degrees, and the compensation driving voltage is the corresponding driving voltage when the ratio of the radial ultrasonic vibration amplitude to the axial ultrasonic vibration amplitude in different driving voltages is smaller than or equal to a preset threshold value. The ultrasonic assistance of the broach which needs to be frequently clamped can be realized.

The invention provides a pressure release valve with an active silencing function, which comprises a valve body provided with a liquid inlet cavity and a pressure release cavity which are communicated with each other; the bypass pipe is communicated with the liquid inlet cavity; the pressure relief assembly comprises an adjusting part, a pressure relief elastic part and a pressure relief valve element, the pressure relief valve element and the pressure relief elastic part are arranged in the pressure relief cavity, the adjusting part is movably arranged on the valve body, and the pressure relief elastic part is arranged between the adjusting part and the pressure relief valve element in a pressed mode; the piezoelectric actuator is arranged on the liquid inlet cavity, the noise reduction elastic piece is arranged between the driving end of the piezoelectric actuator and the pressure relief valve element in a pressed mode, and the piezoelectric actuator is configured to drive the noise reduction elastic piece. According to the pressure release valve with the active noise elimination function, an active noise elimination technology is introduced into pulsating noise control of the pressure release valve in the mode of arranging the piezoelectric actuator, and the acting force applied to the pressure release valve element can be adjusted through the noise reduction elastic piece so that transient noise caused by pulsating pressure when the pressure release valve element moves can be eliminated.

According to the Bayesian optimization CNN-LSTM-based piezoelectric actuator temperature rise prediction method provided by the invention, the prediction precision is improved by combining a convolutional neural network and a long-short-term memory network and through a prediction result of a Bayesian optimization model; according to the method, the convolutional neural network part can effectively extract local features of piezoelectric actuator data, the long-term and short-term memory network part is good at capturing the long-term dependency relationship of time sequence data, the design of the LSTM network structure enhances the anti-noise capability of the model, the parameters of the CNN-LSTM model are automatically adjusted and optimized through Bayesian optimization, and the accuracy of the model is improved. In the Bayesian optimization, an objective function is approached by constructing an agent model, and a search process is guided by using an acquisition function, so that the evaluation frequency of the objective function is reduced, the calculation efficiency is improved, and the prediction effect of the temperature rise phenomenon of the piezoelectric actuator is further improved. The method comprises the steps of temperature rise data collection, training data construction, CNN data input, LSTM data input and Bayesian optimization, and finally a final prediction result is obtained.

The utility model discloses a polishing head structure and polishing head drive device, wherein the polishing head structure includes bearing piece, flexible film and N pressure adjustment subassembly, N > = 2, the bearing piece includes side plate and transverse plate, side plate encloses to form the hollow cavity, transverse plate cover is provided the hollow cavity one side, flexible film and side plate inner side wall fixed connection, and the pressure adjustment subassembly is provided with the pressure adjustment subassembly. The flexible film is provided with a first surface and a second surface which are oppositely arranged, and the first surface is suitable for being attached to a to-be-polished part; any pressure adjusting assembly comprises at least one piezoelectric actuator and at least one pressure detection piece, the piezoelectric actuators are distributed on the second surface, the pressure detection pieces are located between the piezoelectric actuators and the flexible film, and the pressure detection pieces are used for obtaining pressure information generated by the corresponding piezoelectric actuators on the flexible film. Through cooperative use of the piezoelectric actuator and the pressure detection piece, the accuracy of the value of the pressure applied to the flexible film is improved, so that the planarization effect of the wafer is improved.

The invention relates to dosing system (1) for a dosing substance, which dosing system (1) comprises a housing (11) having a nozzle (60) and a feed channel (64) for dosing substance, a discharge element (51) arranged in the housing (11) for discharging dosing substance from the nozzle (60), at least one first actuator (20), preferably a piezo actuator (20), coupled to the discharge element (51) and / or the nozzle (60), and at least one second actuator (30), preferably an expansion material element (30), coupled to the first actuator (20). The second actuator (30) is designed to set a position of the at least one first actuator (20) relative to the housing (11), particularly with respect to the discharge element (51) and / or the nozzle (60). The invention further relates to a method for controlling such a dosing system (1).

To provide a piezoelectric element and a piezoelectric actuator at low cost, which are capable of obtaining large driving force, have good responsiveness, and have long-term reliability.SOLUTION: In a piezoelectric element and an actuator, the piezoelectric element includes a first electrode, a first piezoelectric film, a second electrode, a second piezoelectric film, and a third electrode in this order on a substrate, the first piezoelectric film and the second piezoelectric film each have a perovskite-type oxide as a main component, one of the first piezoelectric film and the second piezoelectric film is an epitaxial film and the other is a uniaxially oriented film.SELECTED DRAWING: Figure 1

The invention relates to a piezoelectric element and an actuator. The present invention addresses the problem of providing, at low cost, a piezoelectric element and a piezoelectric actuator that can obtain a large driving force, have good responsiveness, and can obtain long-term reliability. In the piezoelectric element and the actuator, the piezoelectric element includes a first electrode, a first piezoelectric film, a second electrode, a second piezoelectric film, and a third electrode in this order on a substrate, the first piezoelectric film and the second piezoelectric film each have a perovskite oxide as a main component, one of the first piezoelectric film and the second piezoelectric film is an epitaxial film, and the other is a uniaxially oriented film.

The technology described herein is directed towards a metasurface arranged with unit cells for narrowband sound absorption, in which the unit cells are based on Helmholtz resonators that can have their resonant frequencies adjusted via a shared tuning element, e.g., a screw, or a piezoelectric actuator. A sound absorbing unit-cell is designed and constructed based on a general resonance frequency, and includes a neck portion and air chamber dimensioned to resonate close to the desired resonance frequency and thereby inverse phase cancel corresponding narrowband frequencies of incoming sound waves. Collectively moveable floors in the resonators facilitate changing the resonators' air cavity dimensions, to adjust the resonant frequencies to cancel acoustic waves of different frequencies corresponding to noise, which can change over time. The unit cells can be distributed as part of a metasurface, which can be positioned proximate to a noise source to phase cancel the noise.

Disclosed in the present invention are a displacement detection circuit for a piezoelectric actuator, and a piezoelectric actuator. The piezoelectric actuator is used for generating haptic feedback on the basis of a received haptic voltage signal when an external force is applied. The displacement detection circuit comprises: a charge storage element, which is used for detecting first charges generated by a piezoelectric actuator due to deformation; a compensation circuit, which is used for performing multiple charging operations or discharging operations on the charge storage element, so as to provide the charge storage element with second charges which are opposite to the first charges; a counting circuit, which is used for counting the number of charging operations or discharging operations performed on the compensation circuit, so as to obtain a count value; and a logic output circuit, which is used for calculating, on the basis of the count value, a total charge amount of the second charges provided by the compensation circuit, and obtaining a real-time displacement amount of the piezoelectric actuator on the basis of the total charge amount. A displacement amount of a piezoelectric element during a haptic feedback process can be detected without the provision of sensors, thereby being conducive to simplifying a circuit, reducing costs, improving the product performance and reducing the power consumption.

According to the fretting wear experimental device for different high-temperature gas atmosphere environments, the temperature of the experimental environment is accurately regulated and controlled through the heating unit, and the stability of the experiment in the high-temperature environment is ensured. The fretting wear behavior of the sample in a real working environment can be accurately simulated through the control of the piezoelectric actuator; the inert gas control module is used for simulating oxidation, corrosion and other high-temperature environments possibly encountered in actual industrial application, so that the application range of the experiment is expanded; samples with different sizes and shapes, including steel wires, tubular samples and the like, can be fixed through the sample clamp and the opposite grinding pair clamp, so that the flexibility and the applicability of an experiment are greatly improved, and different experiment requirements are met; the temperature, normal force, friction force, vibration frequency and the like in the experiment process can be collected and monitored in real time through the data control module, real-time visualization and accurate recording of experiment results are provided, and follow-up data analysis and model establishment are facilitated.

A piezo-electric actuator on the side of a mobile device will enable pressure exerted by the user to be sensed at the conventional button locations, while providing a haptic feedback. Unfortunately, mechanical integration of piezo-electric actuators at the side of a mobile device is challenging. A mobile device in accordance with the present disclosure comprises a PCB; an outer frame surrounding the PCB; and a switch. The switch comprises: a first piezo-electric actuator configured to generate a first actuator voltage signal in response to a first force applied by a user, and to generate a first haptic feedback to the user in response to a first haptic voltage signal transmitted from the controller thereto; and a first virtual button in the outer frame configured to transmit the first force to the first piezo-electric actuator, and to transmit the first haptic feedback to the user.

The invention discloses an active vibration suppression and deformation compensation device for high-precision thin-walled part machining, and relates to the technical field of machining equipment. The device comprises a base module, a clamping positioning module, a multi-source sensing monitoring module, a cooperative actuation vibration suppression module, a multi-point flexible compensation module, an intelligent control module and a machine tool cooperative interface module. The multi-source sensing monitoring module synchronously collects vibration, deformation, cutting force and temperature signals in the machining process. The intelligent control module processes signals and drives the cooperative actuation vibration suppression module (including a piezoelectric actuator group and a voice coil motor follow-up supporting unit) to perform broadband vibration suppression, and meanwhile drives the multi-point flexible compensation module (including a flexible supporting matrix and a path compensation interface) to perform local and overall deformation compensation. Synchronous monitoring and active cooperative control of vibration and deformation are achieved through closed-loop control, the machining precision, the surface quality and the machining efficiency of the thin-wall part are remarkably improved, compatibility is good, and the adaptive range is wide.

The invention belongs to the field of wind tunnel experiments in a hypersonic flow field environment, and discloses a multi-degree-of-freedom high-frequency motion simulation device for an aircraft dynamic stability test and a calculation method for realizing an actuation angle. According to the technical method, calculation is carried out on the basis of an electromechanical coupling equation, determined by electrical parameters and mechanical parameters, of a piezoelectric material. Modeling can be carried out according to a piezoelectric equation to obtain a calculation method between the voltage applied by the piezoelectric actuator and the pitching and yawing actuation angles of the device, so that the excitation effect of the device in the ground test process can be accurately controlled and predicted. The method is not only suitable for pitching and yawing two-degree-of-freedom actuation calculation, but also can be used for calculating the actuation angle of a three-axis degree-of-freedom experimental device added with rolling drive through coordinate transformation under the condition of adding parameters such as rolling angular velocity and the like in the face of the three-axis degree-of-freedom experimental device added with rolling drive. At present, according to a calculation method based on the device, calculation is carried out only by considering the degree of freedom of the pitching axis and the yawing axis.

There is provided piezoelectric actuator including: vibration plate; first and second piezoelectric layers; a plurality of individual electrodes arranged on actuator surface, of the second piezoelectric layer, on first side in first direction of the second piezoelectric layer; first and second common electrodes; first surface electrode arranged on the actuator surface at an end portion in second direction orthogonal to the first direction; second surface electrode arranged on the actuator surface; and non-conductive electrodes arranged at end portions in the second direction of at least two of the actuator surface, and the first and second boundary surfaces, and which are not in conduction with any of the individual electrodes, and the first and second common electrodes. The non-conductive electrodes are arranged at least in an area of an end portion in the second direction of a stack of the vibration plate, and the first and second piezoelectric layers.

The invention belongs to the technical field of machining, and particularly relates to an ultrasonic internal broaching test platform and an ultrasonic vibration mode control method.The test platform comprises a base, a broach and a clamping mechanism, and the clamping mechanism comprises a supporting ring and a clamping sleeve; a clamping groove is formed in the broach, and a protrusion matched with the clamping groove is arranged on the clamping sleeve. A plurality of supporting columns are arranged on the base, and the supporting columns are arranged in a circular shape. The broach is arranged in a space defined by the multiple supporting columns. And a piezoelectric actuator is arranged on the broach. Based on the platform, the invention provides the control method of the ultrasonic vibration mode, modal drift can be optimized and reduced by adjusting the pre-tightening force and the ultrasonic power supply driving frequency, the pre-tightening force is adopted to adjust and stabilize the contact rigidity, and the energy loss can be reduced; through frequency tracking, resonance points are matched in real time, and energy transfer can be maximized; the two modes are cooperatively controlled, response speed and stability are both considered, and the method adapts to high-dynamic loads.

The invention relates to the technical field of maskless digital photoetching equipment, in particular to an LDI machine bionic compliant flight exposure mechanism and an exposure method, the flight exposure mechanism comprises a machine table, a digital exposure system arranged on the machine table and an alignment system used for driving a substrate to move in a three-dimensional space; the piezoelectric actuator and the bionic compliant mechanism are installed on the machine table, the range finder is connected to the digital exposure system, the piezoelectric actuator is connected with the digital exposure system through the bionic compliant mechanism, and the range finder, the alignment system and the piezoelectric actuator are in communication connection with the control system. The distance between the to-be-exposed area and the digital exposure system is monitored in real time through the range finder, the alignment system controls the substrate to move for macroscopic alignment and controls the substrate to ascend and descend for coarse focusing, and meanwhile, the piezoelectric actuator controls the digital exposure system to ascend and descend for fine focusing through the bionic compliant mechanism, so that the focusing precision is improved; and the exposure precision and the yield are effectively improved.

The technology described herein is directed towards a metasurface arranged with unit cells for narrowband sound absorption, in which the unit cells are based on Helmholtz resonators that can have their resonant frequencies adjusted via actuators, e.g., piezoelectric motors. A sound absorbing unit-cell is designed and constructed based on a general resonance frequency, and includes a neck portion and air chamber dimensioned to resonate close to the desired resonance frequency and thereby inverse phase cancel corresponding narrowband frequencies of incoming sound waves. Moveable partitions in the resonators, controlled by piezoelectric actuators, facilitates changing of the resonators' air cavity dimensions, to adjust the resonant frequencies to cancel acoustic waves of different frequencies corresponding to noise, which can change over time. The unit cells can be distributed as part of a metasurface, which can be positioned proximate to a noise source to phase cancel the noise.

The invention provides a phase difference coherent Fourier scattering surface particle detection device and method, belongs to the technical field of flexible substrate surface particle detection, and solves the problem of low nano-scale particle detection sensitivity under the condition of low illumination power of a visible light band. The detection device comprises a laser, a collimating lens, a first diaphragm, a polarization state modulation module, a first beam splitter prism, a plane mirror, a piezoelectric actuator, an infinite correction microscope objective, a sample, a three-dimensional piezoelectric scanning table, a two-dimensional coarse adjustment displacement table, a second beam splitter prism, a tube lens, a camera, a wide-field illumination light source, a second diaphragm, a first lens, a third diaphragm and a second lens. The system comprises a two-quadrant photoelectric detector, a weak signal amplification circuit, a data acquisition module and a computer control system.

The invention provides a self-adaptive pipeline vibration suppression system and method based on multi-mode coupling analysis. The system comprises a sensing module, a vibration analysis module and a control execution module, multiple sensing signals in the vibration process are obtained through measurement of a multi-sensor array, the vibration analysis module comprises a wavelet decomposition feature extraction unit, a prediction network unit and a judgment unit, and the wavelet decomposition feature extraction unit extracts feature data of the multiple sensing signals and sends the feature data to the control execution module; the prediction network unit obtains the probability distribution of various vibration modes according to the characteristic data, the judgment unit determines the dominant vibration frequency according to the probability distribution of various vibration modes, and the fuzzy adaptive unit of the control execution module dynamically distributes the output value of an actuator according to the dominant vibration frequency. And the hybrid execution unit controls the piezoelectric actuator and the magneto-rheological damper to perform hybrid suppression on vibration according to the dynamically distributed output value of the actuator. The system can accurately identify the vibration source, improve the control responsivity, and improve the overall high temperature resistance of the system.

The invention discloses an intelligent end effector integrating monitoring, detection and control. The intelligent end effector comprises a machining subsystem, a detection subsystem and a monitoring subsystem. A machining subsystem and an electric spindle are used for driving a cutter handle and a cutter to rotate for machining, a detection subsystem is used for providing sound sensation, vision and ultrasonic sensing functions, a sound sensation module collects sound signals in real time and monitors the sound state in the machining process, and a vision module collects machining pictures and analyzes the machining quality. The ultrasonic detection module emits and collects an ultrasonic signal to detect internal damage of a workpiece after machining is completed, and the self-positioning module measures the distance between a cutter and the workpiece to complete self-positioning; the monitoring subsystem is used for sensing dynamic changes of states such as tool abrasion, flutter and machining quality in the machining process through vibration acceleration and vibration displacement sensing, timely early warning is conducted on state abnormity, the state of the machining process is regulated and controlled in real time through the piezoelectric actuator, and efficient and high-quality machining of parts is guaranteed.

A mobile terminal, including: middle frame, main screen and secondary screen arranged at the middle frame. The secondary screen is arranged, in folded state, at back side of the main screen or at side of the main screen. The mobile terminal further includes at least one piezoelectric actuator fixed in the middle frame. The middle frame includes bottom wall and side wall bent and extending from the bottom wall to form receiving space. The piezoelectric actuator has one side fixed to the bottom wall, and another side fixed to the secondary screen. The piezoelectric actuator converts transverse deformation of the piezoelectric actuator into longitudinal driving force to drive the secondary screen to vibrate and sound and provide tactile feedback for the secondary screen. The piezoelectric actuator can improve overall firmness of the mobile terminal, and facilitating waterproof and dustproof effects, thereby enriching use experience.

The utility model belongs to the technical field of stroke detection of driving elements, and particularly relates to a stroke detection device of a thread piezoelectric actuator, which comprises a sliding seat integrated in the thread piezoelectric actuator, and the sliding seat is configured to rotate relative to a screw rod and can synchronously move along with the screw rod along the axial direction of the screw rod; a limiting assembly is arranged between the sliding base and the base and can prevent the sliding base from rotating relative to the base. The reading head and the encoder are oppositely arranged. According to the utility model, through arranging the sliding seat which is rotatably connected with the screw rod and slidably connected with the base and prevents rotation through the limiting assembly, the composite motion of the screw rod is decomposed into pure axial translation of the sliding seat relative to the base, and the reading head and the encoder are respectively arranged on the sliding seat and the base or the screw rod and the sliding seat, so that the closed-loop control of the thread piezoelectric actuator is realized; and the driving precision and the long-term reliability under various loads and working conditions are obviously improved.

The invention discloses a laser resonant cavity thermal drift suppression method and system and a laser, relates to a thermal lens effect and cavity length drift adaptive compensation technology of a high-power laser system, and aims to solve the problems of low cavity length adjustment sensitivity and slow response speed in the prior art. The method comprises the following steps: monitoring the central wavelength of a Raman Stokes spectral line in a laser resonant cavity in real time by adopting a spectral analysis module and obtaining the drift distance of the Raman Stokes spectral line; the FPGA controller determines the cavity length compensation amount of the laser resonant cavity according to the drift distance; and the FPGA controller controls the piezoelectric actuator according to the cavity length compensation amount to adjust the cavity length of the laser resonant cavity in real time so as to suppress thermally induced wavelength drift. The laser comprises a pumping source, a laser resonant cavity, a crystal arranged in the laser resonant cavity and a laser resonant cavity thermal drift suppression system, pumping light generated by the pumping source enters the laser resonant cavity, and Stokes light output by the laser resonant cavity enters the laser resonant cavity thermal drift suppression system.