783 results about "Piezoelectric actuators" patented technology

The invention relates to a finite time terminal sliding mode control method and system for a piezoelectric actuator and a medium, and the method specifically comprises the steps: collecting an operation signal of the piezoelectric actuator, the operation signal comprising input voltage and displacement output data; establishing a fractional order coupling model containing asymmetric hysteresis characteristics; parameter identification is carried out on parameters in the fractional order coupling model, and the parameters in the fractional order coupling model are adjusted; a hysteresis feed-forward compensator is constructed, and the fractional order coupling model after parameter identification is compensated; and for the compensated fractional order coupling model, through a finite time terminal sliding mode control algorithm, realizing tracking control on the track of the piezoelectric actuator. On the basis of asymmetric hysteresis effect compensation, a finite time terminal sliding mode control algorithm is introduced, it is ensured that tracking errors are rapidly converged to zero within finite time, and the trajectory tracking precision and stability of the piezoelectric actuator within the finite time are improved.

The invention relates to the technical field of fluid generators, in particular to a fluid generator and a fluid control device.The fluid generator comprises a piezoelectric actuator, a spacing part and a diaphragm, and a cavity is defined by the piezoelectric actuator, the spacing part and the diaphragm; the vibration antinode position of the diaphragm and the adjacent area of the antinode position protrude out of the surface of the diaphragm to form a convex part, so that the continuity of the rigidity of the diaphragm is broken, and a rigidity sudden change is formed at the outer peripheral edge of the convex part; as the amplitude of the antinode position and the amplitude of the area, closer to the outer side of the antinode, of the area adjacent to the antinode position are not in continuous gradient distribution any more, the area, opposite to the convex part, of the diaphragm can obtain larger vibration energy to generate larger amplitude, and then the output flow is increased; in addition, since the diaphragm forms stiffness abrupt change at the peripheral edges of the convex parts, at the same time, the first hole parts arranged in the areas, opposite to the convex parts, of the diaphragm are in or tend to the air outlet stroke or the exhaust stroke at the same time, and the output flow is further improved.

An electronic droplet delivery device having a mouthpiece of inhalation of droplets includes an aperture plate with a plurality of openings coupled to a piezoelectric actuator. A fluid reservoir supplies a solution with nicotine to the aperture plate for ejection out of the mouthpiece in a droplets stream.

The invention provides a packaging and sintering control method and device for a power semiconductor device, and the method comprises the steps: achieving the monitoring of a dynamic stress field of a chip and a substrate interface through an embedded pressure sensing array, and obtaining the real-time stress distribution data. And in combination with a material characteristic database, multivariable collaborative optimization is performed on sintering process parameters, so that dynamic adjustment of the parameters is realized. The temperature and pressure curves of all the areas of the sintering platform are dynamically adjusted according to the optimized technological parameters by means of the micro induction heating element and the piezoelectric actuator, and refined self-adaptive multi-area sintering control is achieved. The sintering interface is subjected to real-time nondestructive testing, the interface quality index is obtained and serves as a feedback parameter to be input into the optimization process, closed-loop control is formed, and the accuracy of the sintering process is improved. The problems of uneven stress distribution and inconsistent bonding strength in the prior art are solved through a comprehensive real-time monitoring and dynamic regulation and control method, and the packaging quality and reliability of the power semiconductor device are remarkably improved.

The invention discloses an ultrasonic-assisted broaching machine tool based on a resonance broach and a design method. The machine tool comprises a broaching machine structure; a groove of the ultrasonic broaching tool is located in the position corresponding to the vibration mode wave crest of the broaching tool; the main piezoelectric actuator device is arranged in the groove; the compensation piezoelectric actuator device is arranged at the position, corresponding to the radial vibration mode, of the ultrasonic broach; the frequency of the ultrasonic power supply and the main power supply is the corresponding frequency when the axial ultrasonic vibration amplitude is maximum and the radial ultrasonic vibration amplitude is minimum under different power supply frequencies, the main driving voltage is determined according to the frequency of the main power supply, the preset broaching maximum speed of the broach and an ultrasonic auxiliary broaching effectiveness coefficient, and the frequency of the compensation power supply is the same as the frequency of the main power supply; the phase difference is 180 degrees, and the compensation driving voltage is the corresponding driving voltage when the ratio of the radial ultrasonic vibration amplitude to the axial ultrasonic vibration amplitude in different driving voltages is smaller than or equal to a preset threshold value. The ultrasonic assistance of the broach which needs to be frequently clamped can be realized.

The utility model discloses a polishing head structure and polishing head drive device, wherein the polishing head structure includes bearing piece, flexible film and N pressure adjustment subassembly, N > = 2, the bearing piece includes side plate and transverse plate, side plate encloses to form the hollow cavity, transverse plate cover is provided the hollow cavity one side, flexible film and side plate inner side wall fixed connection, and the pressure adjustment subassembly is provided with the pressure adjustment subassembly. The flexible film is provided with a first surface and a second surface which are oppositely arranged, and the first surface is suitable for being attached to a to-be-polished part; any pressure adjusting assembly comprises at least one piezoelectric actuator and at least one pressure detection piece, the piezoelectric actuators are distributed on the second surface, the pressure detection pieces are located between the piezoelectric actuators and the flexible film, and the pressure detection pieces are used for obtaining pressure information generated by the corresponding piezoelectric actuators on the flexible film. Through cooperative use of the piezoelectric actuator and the pressure detection piece, the accuracy of the value of the pressure applied to the flexible film is improved, so that the planarization effect of the wafer is improved.

The invention relates to dosing system (1) for a dosing substance, which dosing system (1) comprises a housing (11) having a nozzle (60) and a feed channel (64) for dosing substance, a discharge element (51) arranged in the housing (11) for discharging dosing substance from the nozzle (60), at least one first actuator (20), preferably a piezo actuator (20), coupled to the discharge element (51) and / or the nozzle (60), and at least one second actuator (30), preferably an expansion material element (30), coupled to the first actuator (20). The second actuator (30) is designed to set a position of the at least one first actuator (20) relative to the housing (11), particularly with respect to the discharge element (51) and / or the nozzle (60). The invention further relates to a method for controlling such a dosing system (1).

The technology described herein is directed towards a metasurface arranged with unit cells for narrowband sound absorption, in which the unit cells are based on Helmholtz resonators that can have their resonant frequencies adjusted via a shared tuning element, e.g., a screw, or a piezoelectric actuator. A sound absorbing unit-cell is designed and constructed based on a general resonance frequency, and includes a neck portion and air chamber dimensioned to resonate close to the desired resonance frequency and thereby inverse phase cancel corresponding narrowband frequencies of incoming sound waves. Collectively moveable floors in the resonators facilitate changing the resonators' air cavity dimensions, to adjust the resonant frequencies to cancel acoustic waves of different frequencies corresponding to noise, which can change over time. The unit cells can be distributed as part of a metasurface, which can be positioned proximate to a noise source to phase cancel the noise.

Disclosed in the present invention are a displacement detection circuit for a piezoelectric actuator, and a piezoelectric actuator. The piezoelectric actuator is used for generating haptic feedback on the basis of a received haptic voltage signal when an external force is applied. The displacement detection circuit comprises: a charge storage element, which is used for detecting first charges generated by a piezoelectric actuator due to deformation; a compensation circuit, which is used for performing multiple charging operations or discharging operations on the charge storage element, so as to provide the charge storage element with second charges which are opposite to the first charges; a counting circuit, which is used for counting the number of charging operations or discharging operations performed on the compensation circuit, so as to obtain a count value; and a logic output circuit, which is used for calculating, on the basis of the count value, a total charge amount of the second charges provided by the compensation circuit, and obtaining a real-time displacement amount of the piezoelectric actuator on the basis of the total charge amount. A displacement amount of a piezoelectric element during a haptic feedback process can be detected without the provision of sensors, thereby being conducive to simplifying a circuit, reducing costs, improving the product performance and reducing the power consumption.

The invention discloses an active vibration suppression and deformation compensation device for high-precision thin-walled part machining, and relates to the technical field of machining equipment. The device comprises a base module, a clamping positioning module, a multi-source sensing monitoring module, a cooperative actuation vibration suppression module, a multi-point flexible compensation module, an intelligent control module and a machine tool cooperative interface module. The multi-source sensing monitoring module synchronously collects vibration, deformation, cutting force and temperature signals in the machining process. The intelligent control module processes signals and drives the cooperative actuation vibration suppression module (including a piezoelectric actuator group and a voice coil motor follow-up supporting unit) to perform broadband vibration suppression, and meanwhile drives the multi-point flexible compensation module (including a flexible supporting matrix and a path compensation interface) to perform local and overall deformation compensation. Synchronous monitoring and active cooperative control of vibration and deformation are achieved through closed-loop control, the machining precision, the surface quality and the machining efficiency of the thin-wall part are remarkably improved, compatibility is good, and the adaptive range is wide.

The invention belongs to the field of wind tunnel experiments in a hypersonic flow field environment, and discloses a multi-degree-of-freedom high-frequency motion simulation device for an aircraft dynamic stability test and a calculation method for realizing an actuation angle. According to the technical method, calculation is carried out on the basis of an electromechanical coupling equation, determined by electrical parameters and mechanical parameters, of a piezoelectric material. Modeling can be carried out according to a piezoelectric equation to obtain a calculation method between the voltage applied by the piezoelectric actuator and the pitching and yawing actuation angles of the device, so that the excitation effect of the device in the ground test process can be accurately controlled and predicted. The method is not only suitable for pitching and yawing two-degree-of-freedom actuation calculation, but also can be used for calculating the actuation angle of a three-axis degree-of-freedom experimental device added with rolling drive through coordinate transformation under the condition of adding parameters such as rolling angular velocity and the like in the face of the three-axis degree-of-freedom experimental device added with rolling drive. At present, according to a calculation method based on the device, calculation is carried out only by considering the degree of freedom of the pitching axis and the yawing axis.

The invention belongs to the technical field of machining, and particularly relates to an ultrasonic internal broaching test platform and an ultrasonic vibration mode control method.The test platform comprises a base, a broach and a clamping mechanism, and the clamping mechanism comprises a supporting ring and a clamping sleeve; a clamping groove is formed in the broach, and a protrusion matched with the clamping groove is arranged on the clamping sleeve. A plurality of supporting columns are arranged on the base, and the supporting columns are arranged in a circular shape. The broach is arranged in a space defined by the multiple supporting columns. And a piezoelectric actuator is arranged on the broach. Based on the platform, the invention provides the control method of the ultrasonic vibration mode, modal drift can be optimized and reduced by adjusting the pre-tightening force and the ultrasonic power supply driving frequency, the pre-tightening force is adopted to adjust and stabilize the contact rigidity, and the energy loss can be reduced; through frequency tracking, resonance points are matched in real time, and energy transfer can be maximized; the two modes are cooperatively controlled, response speed and stability are both considered, and the method adapts to high-dynamic loads.

The technology described herein is directed towards a metasurface arranged with unit cells for narrowband sound absorption, in which the unit cells are based on Helmholtz resonators that can have their resonant frequencies adjusted via actuators, e.g., piezoelectric motors. A sound absorbing unit-cell is designed and constructed based on a general resonance frequency, and includes a neck portion and air chamber dimensioned to resonate close to the desired resonance frequency and thereby inverse phase cancel corresponding narrowband frequencies of incoming sound waves. Moveable partitions in the resonators, controlled by piezoelectric actuators, facilitates changing of the resonators' air cavity dimensions, to adjust the resonant frequencies to cancel acoustic waves of different frequencies corresponding to noise, which can change over time. The unit cells can be distributed as part of a metasurface, which can be positioned proximate to a noise source to phase cancel the noise.

The invention provides a self-adaptive pipeline vibration suppression system and method based on multi-mode coupling analysis. The system comprises a sensing module, a vibration analysis module and a control execution module, multiple sensing signals in the vibration process are obtained through measurement of a multi-sensor array, the vibration analysis module comprises a wavelet decomposition feature extraction unit, a prediction network unit and a judgment unit, and the wavelet decomposition feature extraction unit extracts feature data of the multiple sensing signals and sends the feature data to the control execution module; the prediction network unit obtains the probability distribution of various vibration modes according to the characteristic data, the judgment unit determines the dominant vibration frequency according to the probability distribution of various vibration modes, and the fuzzy adaptive unit of the control execution module dynamically distributes the output value of an actuator according to the dominant vibration frequency. And the hybrid execution unit controls the piezoelectric actuator and the magneto-rheological damper to perform hybrid suppression on vibration according to the dynamically distributed output value of the actuator. The system can accurately identify the vibration source, improve the control responsivity, and improve the overall high temperature resistance of the system.

A mobile terminal, including: middle frame, main screen and secondary screen arranged at the middle frame. The secondary screen is arranged, in folded state, at back side of the main screen or at side of the main screen. The mobile terminal further includes at least one piezoelectric actuator fixed in the middle frame. The middle frame includes bottom wall and side wall bent and extending from the bottom wall to form receiving space. The piezoelectric actuator has one side fixed to the bottom wall, and another side fixed to the secondary screen. The piezoelectric actuator converts transverse deformation of the piezoelectric actuator into longitudinal driving force to drive the secondary screen to vibrate and sound and provide tactile feedback for the secondary screen. The piezoelectric actuator can improve overall firmness of the mobile terminal, and facilitating waterproof and dustproof effects, thereby enriching use experience.

The utility model belongs to the technical field of stroke detection of driving elements, and particularly relates to a stroke detection device of a thread piezoelectric actuator, which comprises a sliding seat integrated in the thread piezoelectric actuator, and the sliding seat is configured to rotate relative to a screw rod and can synchronously move along with the screw rod along the axial direction of the screw rod; a limiting assembly is arranged between the sliding base and the base and can prevent the sliding base from rotating relative to the base. The reading head and the encoder are oppositely arranged. According to the utility model, through arranging the sliding seat which is rotatably connected with the screw rod and slidably connected with the base and prevents rotation through the limiting assembly, the composite motion of the screw rod is decomposed into pure axial translation of the sliding seat relative to the base, and the reading head and the encoder are respectively arranged on the sliding seat and the base or the screw rod and the sliding seat, so that the closed-loop control of the thread piezoelectric actuator is realized; and the driving precision and the long-term reliability under various loads and working conditions are obviously improved.

The invention discloses a laser resonant cavity thermal drift suppression method and system and a laser, relates to a thermal lens effect and cavity length drift adaptive compensation technology of a high-power laser system, and aims to solve the problems of low cavity length adjustment sensitivity and slow response speed in the prior art. The method comprises the following steps: monitoring the central wavelength of a Raman Stokes spectral line in a laser resonant cavity in real time by adopting a spectral analysis module and obtaining the drift distance of the Raman Stokes spectral line; the FPGA controller determines the cavity length compensation amount of the laser resonant cavity according to the drift distance; and the FPGA controller controls the piezoelectric actuator according to the cavity length compensation amount to adjust the cavity length of the laser resonant cavity in real time so as to suppress thermally induced wavelength drift. The laser comprises a pumping source, a laser resonant cavity, a crystal arranged in the laser resonant cavity and a laser resonant cavity thermal drift suppression system, pumping light generated by the pumping source enters the laser resonant cavity, and Stokes light output by the laser resonant cavity enters the laser resonant cavity thermal drift suppression system.

Aircraft ice protection systems and methods include an aircraft component having an internal layer and an external layer, a piezoelectric actuator element embedded within the aircraft component between material of the internal layer and the external layer, and a control system operably connected to the piezoelectric actuator element and configured to drive actuation of the piezoelectric actuator element to at least one of remove ice formed on the aircraft component and prevent the formation of ice on the aircraft component.

The invention provides a three-degree-of-freedom micro-motion bonding head for a wafer bonding machine, relates to the technical field of ultra-precision piezoelectric driving, and aims to solve the problems that a traditional bonding head structure is low in response speed and poor in multi-degree-of-freedom cooperative micro-motion stability. An external frame unit and an internal frame unit are fixedly assembled on the micropositioner main substrate; the external frame unit comprises an X-direction piezoelectric actuator, a Y-direction piezoelectric actuator, an X-direction balance weight, a Y-direction balance weight and a parallel guiding flexible hinge, wherein the X-direction balance weight and the Y-direction balance weight are symmetrically distributed, and the external frame unit is used for achieving X-direction linear motion and Y-direction linear motion. The internal frame unit comprises a Z-direction piezoelectric actuator, a wafer bonding head and a tandem decoupling flexible hinge, and is used for realizing Z-direction linear motion; the piezoelectric actuator is used as a driving element and is matched with the flexible hinge to form a guiding and transmission mechanism, three-degree-of-freedom micro-motion of the bonding head in space is achieved, and meanwhile the structural design is optimized to improve motion decoupling performance, compactness and adaptability of stroke and precision.

The invention provides a self-powered autonomous vibration suppression method for a large flexible solar panel, and belongs to the field of spacecraft structures and vibration control. The problem that in the prior art, when the size of a sailboard is large, multi-channel signal collection and power supply circuit design greatly consume resources such as satellite power and control interfaces is solved. According to the method, an autonomous vibration suppression device is installed on a large flexible solar panel, the flexible solar panel converts solar energy into electric energy and stores the electric energy in a battery for power supply, and piezoelectric fiber sheets convert structural strain energy generated by vibration of the large flexible solar panel into electric energy and stores the electric energy in the battery through the inverse piezoelectric effect to supply power to a bidirectional piezoelectric actuator. Under the power supply of the battery, the bidirectional piezoelectric actuator inhibits the deformation and vibration of the large flexible solar panel according to the local strain information on the large flexible solar panel. The flexible solar panel is mainly used for large flexible solar panels.

The present application relates to pipeline system damping and noise reduction technical field, provide a kind of active noise cancellation pressure relief valve, comprising: valve body, with the liquid inlet cavity and pressure relief cavity being communicated are formed;Bypass pipe, with liquid inlet cavity is communicated;Piezoelectric actuator and pressure relief component, pressure relief component includes adjusting piece, pressure relief elastic piece and pressure relief valve core, pressure relief valve core and pressure relief elastic piece are set in pressure relief cavity, adjusting piece is movably arranged on valve body, piezoelectric actuator is arranged on adjusting piece, pressure relief elastic piece is pressed between piezoelectric actuator and pressure relief valve core;Piezoelectric actuator is configured to drive pressure relief elastic piece, to eliminate the transient noise caused by pulsating pressure when pressure relief valve core moves.The active noise cancellation pressure relief valve provided by the present application introduces active noise cancellation technology into the active noise cancellation pressure relief valve pulsating noise control by arranging piezoelectric actuator, can be adjusted by pressure relief elastic piece The force exerted on the pressure relief valve core can eliminate the transient noise caused by pulsating pressure when the pressure relief valve core moves.

This disclosure includes description of various micro-cooling devices, systems, and methods. An example micro-cooling device includes a first substrate, a second substrate coupled to the first substrate, and a microfluidic channel formed between the first substrate and the second substrate. The example micro-cooling device further includes a fluid contained within the microfluidic channel, and a set of one or more piezoelectric actuators positioned adjacent to the microfluidic channel and configured to govern flow of the fluid within the microfluidic channel. An example micro-cooling system includes one or more of the micro-cooling devices as well as one or more sensors and control circuitry coupled to the one or more sensors and configured to govern operation of the micro-cooling device(s) accordingly.

The invention provides an MEMS component and a vibration cavity structure and a liquid ejection head thereof, the MEMS component comprises a piezoelectric actuator structure, and the vibration cavity structure is in contact with the piezoelectric actuator structure; the vibration cavity structure comprises a vibration cavity and a cavity wall, and the inner side wall of the cavity wall is arc-shaped; the vibration cavity structure is made of silicon and / or silicon oxide. The cavity wall of the vibration cavity structure disclosed by the invention adopts the design of the arc-shaped inner side wall, so that the deformation volume of the vibration cavity is increased on the premise that the density of the spray holes of the liquid spray head is not changed, and the size of liquid drops is effectively increased; and meanwhile, the liquid ejection head can realize ejection of liquid drops with the same size by using relatively small driving voltage, so that the energy consumption is reduced.

The invention relates to the technical field of control systems, in particular to a piezoelectric actuator hysteresis compensation control method for improving tangential amplitude, which comprises the following steps: acquiring input voltage data and displacement data of a piezoelectric actuator to construct a voltage hysteresis curve; performing segmentation processing on the voltage hysteresis curve to obtain a local hysteresis curve; obtaining a change difference coefficient according to the difference of the local change trend between every two local hysteresis curves and the position distribution between the data points on every two local hysteresis curves; according to the distribution range of the change difference coefficients corresponding to all the local hysteresis curves on the voltage hysteresis curve, a curve change characteristic value is obtained by combining the distribution of the change trend of all the data points on the voltage hysteresis curve; and determining the number of operators based on the curve change characteristic value, constructing a PI model of the piezoelectric actuator, and performing hysteresis compensation control on the piezoelectric actuator. According to the method, the most appropriate number of operators can be dynamically obtained, and the hysteresis curve change characteristics are accurately and smoothly described.

Provided is a dielectric thin film including a metal oxide. The metal oxide includes bismuth, sodium, barium, and titanium, at least a part of the metal oxide is a tetragonal crystal having a perovskite structure, and a (100) plane of at least a part of the tetragonal crystal is oriented in a normal direction of a surface of the dielectric thin film.

The invention discloses a bimodal pressure sensor array and device.The bimodal pressure sensor array comprises a piezoelectric actuator, an elastic piezoresistive substrate array and a pressure sensor unit which are arranged from inside to outside, and the pressure sensor unit comprises a piezoelectric film array layer; the pressure measurement is realized based on the piezoelectric response of the piezoelectric film array layer and the vibration of the piezoelectric actuator; based on the piezoelectric response of the piezoelectric film array layer, the vibration of the piezoelectric actuator and the deformation of the elastic piezoresistive substrate array, the direction and angle measurement is realized. Pressure measurement and bending angle measurement can be simultaneously realized on a single device, and the unique dual-function sensing technology has huge application potential in the medical field.

The invention provides an epinephrine automatic injection patch and method for cardiovascular first aid, and the injection patch comprises a flexible biosensing layer which obtains the subcutaneous impedance value and vital sign parameters of a patient; the microneedle array is used for adjusting the penetration depth based on the subcutaneous impedance value and controlling the deformation quantity through a piezoelectric actuator; the micro-fluidic pulse drug delivery module is connected with the micro-needle array and is used for executing pulse type drug injection according to the penetration depth; and the control module is used for judging an autonomous circulation recovery state based on the vital sign parameters and triggering the microfluidic pulse administration module to stop injection. According to the application, by constructing a first-aid closed loop of'multi-mode physical sign dynamic monitoring-self-adaptive microneedle administration-ROSC intelligent termination ', the response speed of epinephrine injection is increased, the bioavailability is improved, the risk of excessive medication is reduced, and the gold rescue efficiency and the neurological function prognosis rate of pre-hospital cardiac arrest patients are remarkably improved.

The invention relates to the technical field of detection instruments, and provides an active vibration reduction sample table which comprises a sample table body used for bearing a test sample; the at least one Z-axis piezoelectric actuator is arranged at the bottom of the sample table; the at least one X-axis piezoelectric actuator is arranged at the top of the Z-axis piezoelectric actuator; the at least one Y-axis piezoelectric actuator is arranged at the bottom of the Z-axis piezoelectric actuator; and the vibration meter is arranged on the sample table and is used for measuring a vibration signal of the sample table and inputting the vibration signal to the Z-axis piezoelectric actuator, the Y-axis piezoelectric actuator and the X-axis piezoelectric actuator, so that the Z-axis piezoelectric actuator, the Y-axis piezoelectric actuator and the X-axis piezoelectric actuator carry out vibration correction on vibration received by the sample table according to the vibration signal. The vibration influence of the external environment on the sample can be actively reduced. Compared with an existing vibration isolation structure of a measuring instrument which can only realize micron-scale vibration at the sample stage, the vibration at the sample stage can be improved to nano-scale by using the scheme.

A piezo actuator system includes a piezo actuator; and a driving circuit configured to apply a pulse width modulation (PWM) voltage waveform to the piezo actuator. An envelope of the PWM voltage waveform includes a first period in which a first voltage rising with a first slope is applied, a second period in which a second voltage rising with a second slope is applied, and a third period in which a third voltage rising with a third slope is applied. The third slope is greater than the second slope.

The invention relates to a compliant constant force mechanism, a clamping mechanism and a clamping method of the clamping mechanism. The compliant constant force mechanism comprises a base, a double-beam connection type constant force mechanism, a bridge type displacement amplifier and a piezoelectric actuator. The bridge type displacement amplifier is connected to the base, the piezoelectric actuator is arranged in the bridge type displacement amplifier, and the bridge type displacement amplifier is provided with an output port; the double-beam connection type constant force mechanism is connected to the base and an output port of the bridge type displacement amplifier, and a mechanism output end face is arranged at the tail end of the double-beam connection type constant force mechanism. Wherein the output of the piezoelectric actuator generates first-stage amplified displacement at an output port through the bridge type displacement amplifier; and the displacement at the output port is subjected to second-stage amplification at the output end face of the mechanism through the double-beam connection type constant force mechanism. The driving structure is arranged in the flexible clamping mechanism, periodic offset of parts is achieved, self-adaptive alignment assembly of misaligned parts can be achieved by means of the active and controllable periodic movement, and higher engineering application value is achieved.