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775 results about "Piezoelectric coefficient" patented technology

Piezoelectric coefficient or Piezoelectric Modulus, aka D₃₃, quantifies the volume change when a piezoelectric material is subject to an electric field, or the polarization on application of a stress: d=P/σ where P is polarization, and σ is the stress. There are actually many Piezoelectric coefficients: Dxy. See Piezoelectricity § Mechanism.

Vibratory drive composite micro-power source based on piezoelectric effect and electromagnetic induction

The invention relates to the micro-energy field, in particular to a vibratory drive composite micro-power source based on the piezoelectric effect and the electromagnetic induction. The micro-power source adapts the requirement of the micro electro mechanical system development for the micro-energy and comprises a substrate, a peripheral base, cantilevers and a mass block, wherein the substrate is fixed with the lower surface of the peripheral base by bonding; a vertical through hole is arranged in the middle of the mass block; an induction coil is processed on the upper surface and/or the lower surface of the mass block; a micro permanent columnar magnet is fixed on the upper surface of the substrate; PZT piezoelectric thin films are arranged on the cantilevers; a plurality of external lead bonding pads are arranged on the peripheral base; and the two ends of the induction coils and the two polarized surfaces of the PZT piezoelectric thin films are respectively connected with the corresponding external lead bonding pads by leads. The power source has reasonable and concise structure, is liable to miniaturization and integration, and can provide power to the micro electro mechanical systems at high output energy density and high output efficiency, realize self power supply of the micro electro mechanical systems and meet the requirement of the micro electro mechanical system development for the micro-energy.
Owner:ZHONGBEI UNIV

Piezoelectric friction combined type micro-nano generator and prepared method thereof

The invention relates to the field of micro-electromechanical systems (MEMS) integrated processing and particularly relates to a piezoelectric friction combined type micro-nano generator and a prepared method thereof. A piezoelectric type generator is formed by means of using a piezoelectric film, and a friction-type generator is formed by using a piezoelectric film metal electrode and the difference between other flexible polymer materials and an electric charge binding capacity. Compared with a traditional piezoelectric type generator and a traditional friction-type generator, the piezoelectric friction combined type micro-nano generator combines the piezoelectricity with the friction and uses reasonable external circuit connection modes , so that a capacitance can be charged effectively and voltage output which reaches hectovolt can be provided. The piezoelectric friction combined type micro-nano generator and the prepared method of the piezoelectric friction combined type micro-nano generator is low in cost, high in productivity and simple in process and is provided with high voltage output and strong charging ability. The structure of the generator comprises piezoelectric film, a piezoelectric film electrode, the flexible polymer materials with micro-nano composite structure and a polymer material electrode.
Owner:PEKING UNIV

Micro wind turbine generator based on wind-induced vibration mechanism and piezoelectric effect

The invention provides a method of using the wind-induced vibration phenomenon of a micro structure to generate power and a micro generator based on wind-induced vibration mechanism and piezoelectric effect, wherein the micro generator comprises a silicon underlay, a composite beam/membrane comprising a piezoelectric layer and metal electrodes on the upper surface and the lower surface thereof, and the like. When the load of environmental wind causes the vibration of the composite beam/membrane structure comprising the piezoelectric layer, the vibration of the beam/membrane structure can cause the alternative change of the stress of the piezoelectric layer; due to the piezoelectric effect, the upper metal electrode and the lower electrode of the piezoelectric layer can generate an alternatively changed electric potential difference; and the electric potential difference can supply power for the load or a power accumulator. The composite beam/membrane structure comprising the piezoelectric layer can adopt a plurality of structure forms comprising a cantilever composite bema, a double-end fixedly supported composite beam, a multi-point fixedly supported composite part or a composite membrane which is partially and fixedly supported in the boundary. The micro wind turbine generator based on wind-induced vibration mechanism does not need a rotating mechanism, has a simple structure, is convenient to adopt silicon micro-processing technology to implement batch processing, has low cost, and is suitable for supplying power for wireless sensing network nodes, and the like.
Owner:CHONGQING UNIV

Piezoelectric driven and detected miniature hemispherical resonant gyroscope and manufacturing method thereof

The invention provides a piezoelectric driven and detected miniature hemispherical resonant gyroscope and a manufacturing method thereof. The gyroscope comprises a monocrystalline silicon base, a center-fixed supporting column, a miniature hemispherical resonator, a common electrode, eight film piezoelectrics and eight uniformly-distributed signal electrodes, wherein the monocrystalline silicon base and the miniature hemispherical resonator are connected through the center-fixed supporting column; the common electrode has the same shape as that of the miniature hemispherical resonator and is located between the miniature hemispherical resonator and the piezoelectrics; the piezoelectrics have the same shapes as those of the signal electrodes and are located between the common electrode and the signal electrodes. The miniature hemispherical resonator is excited to work by adopting a piezoelectric driven manner, and a drive mode and a detection mode are matched with each other. The gyroscope is manufactured by combining an MEMS (Micro-Electromechanical Systems) bulk silicon processing process and a surface silicon processing process. According to the piezoelectric driven and detected miniature hemispherical resonant gyroscope and the manufacturing method thereof, the miniature gyroscope is driven and detected by using the inverse piezoelectric effect and the piezoelectric effect, so that the gyroscope has the characteristics of high degree of integration, low power consumption, convenience in mass production, and the like.
Owner:SHANGHAI JIAO TONG UNIV
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