51 results about "Driven element" patented technology

The invention provides a three-degree-of-freedom micro-motion bonding head for a wafer bonding machine, relates to the technical field of ultra-precision piezoelectric driving, and aims to solve the problems that a traditional bonding head structure is low in response speed and poor in multi-degree-of-freedom cooperative micro-motion stability. An external frame unit and an internal frame unit are fixedly assembled on the micropositioner main substrate; the external frame unit comprises an X-direction piezoelectric actuator, a Y-direction piezoelectric actuator, an X-direction balance weight, a Y-direction balance weight and a parallel guiding flexible hinge, wherein the X-direction balance weight and the Y-direction balance weight are symmetrically distributed, and the external frame unit is used for achieving X-direction linear motion and Y-direction linear motion. The internal frame unit comprises a Z-direction piezoelectric actuator, a wafer bonding head and a tandem decoupling flexible hinge, and is used for realizing Z-direction linear motion; the piezoelectric actuator is used as a driving element and is matched with the flexible hinge to form a guiding and transmission mechanism, three-degree-of-freedom micro-motion of the bonding head in space is achieved, and meanwhile the structural design is optimized to improve motion decoupling performance, compactness and adaptability of stroke and precision.

A foldable electronic device includes a first body, a second body, a pivot, and a sensing component. The pivot is pivotally connected between the first body and the second body. The first body and the second body are configured to rotate relative to each other through the pivot, and the pivot includes a driving element. The sensing component is coupled to the pivot and the second body, and includes a sensing substrate and an interfering element connecting the sensing substrate. The driving element structurally interferes with the interfering element while rotating along with the pivot, so as to drive the interfering element to rotate, such that the sensing substrate rotates between an initial position where the sensing substrate leans on a back surface of the second body, and an operating position where an acute angle is formed between the sensing substrate and the back surface of the second body.

The invention provides a resonance type compliant cavity composite structure pressure-resistant bending disc transducer which comprises a simply-supported ring, composite pressure-resistant assemblies are symmetrically arranged on the simply-supported ring up and down, the composite pressure-resistant assemblies and the simply-supported ring form an air cavity, and each composite pressure-resistant assembly comprises a watertight layer, a piezoelectric ceramic piece, a metal bending disc and a resonance type compliant pressure-resistant shell. The shell is arranged in the simply-supported ring, the metal bent disc is arranged above the shell, a medium cavity is formed between the shell and the metal bent disc, water permeable holes are formed in the side wall of the medium cavity, and the exterior of the transducer is communicated with the medium cavity. And a watertight layer covers the outer side. According to the composite shell structure, a pressure bearing structure and a driving structure are designed separately, pressure balance between driving force and a driving element is achieved through a coupling medium, and the anti-pressure capacity is improved; the shell is a bending vibration shell with the working frequency consistent with that of the transducer, the driving impedance is low, and the static pressure resistance is high.

Micromechanical structure (1), in particular a gyroscope, comprising a substrate (2) having a principal extension plane (100), a first detection mass element (11) and a second detection mass element (21), wherein the first detection mass element (11) is provided to be excitable by a first drive element (10) to a first vibration (101) parallel to the principal extension plane (100), wherein the second detection mass element (21) is provided to be excitable by a second drive element (20) to a second vibration (201) antiparallel to the first vibration (101), wherein a first Coriolis deflection of the first detection mass element (11) along a third direction (Z) perpendicular to the principal extension plane (100) is detectable by a first detection means,wherein a second Coriolis deflection of the second detection mass element (21) along the third direction (2) is detectable by a second detection means and wherein the first and the second detection mass elements (11, 21) are coupled to each other by means of a first coupling element (3), characterized in that the first detection mass element (11) is designed as a first rocker structure (11') and the second detection element (21) as a second rocker structure (21'), wherein the first and second rocker structures (11' and 21') are attached to the first and second drive elements (10 and 20) by means of a first and second torsion spring (13 and 23, respectively), respectively, wherein the first and second torsion axis (13' and 23') of the first and second torsion spring (13, 23) are parallel to the first and second directions (X, 2, 3, 4, 5, 6, 7, 8, 9, 10 ...Y) is provided and the first or second rocker structure (11' or 21') has an asymmetric mass distribution with respect to the first or second torsion axis (13' or 23'), wherein the first and / or the second torsion spring (13, 23) are designed as a conductor spring, wherein the first and / or the second torsion spring (13, 23) are designed as a double conductor spring.

The invention discloses a cosmetic packaging tube used through pressing. The cosmetic packaging tube comprises a middle bundle core, a base, a pressing piece, a transmission piece and an elastic piece. The median bundle core comprises a storage element, a guide element and a driving element; the base is matched with the median bundle core in an inserted mode, a channel extending in the axial direction is formed in the base, a plurality of protruding blocks arranged in the circumferential direction are arranged on the inner wall of the channel, and a sliding way is formed between every two adjacent protruding blocks. The pressing piece is movably arranged in the channel of the base and provided with protruding teeth matched with the sliding way. A transmission structure is arranged between the transmission piece and the driving element or the guiding element, and the transmission piece is provided with transmission teeth which are matched with the sliding way and meshed with the protruding teeth. When the cosmetic storage device is used, the pressing piece moves in the channel in the axial direction and drives the transmission piece to move in the axial direction, after the transmission teeth are separated from the sliding way, the transmission piece is driven to rotate in the circumferential direction, then the driving element or the guiding element is driven to rotate synchronously, compared with the prior art, the storage element does not need to rotate to move up and down, and cosmetic pressing is more stable.

The invention relates to a scanning device having a transmitting arrangement (20) for transmitting signals in the form of electromagnetic radiation and / or having a receiving arrangement (30) for receiving signals in the form of electromagnetic radiation, wherein the scanning device has a micromechanical device having a carrier plate (4), which is held on a frame (1) by means of spring elements (2a, 2b, 2c, 2d), and having a drive device (2a, 2b, 2c, 2d, 11a, 11b, 11c, 11d), which is configured to drive the carrier plate relative to the frame, wherein the carrier plate has a transmitting arrangement (20, 30) and / or a receiving arrangement (20, 30), and wherein the drive device (2a, 2b, 2c, 2d, 11a, 11b, 11c, 11d) has piezoelectric drive elements which are directly connected to one of the spring elements in each case, or are part of one of the spring elements.

To an acoustic wave transmitting and receiving device and a method for constructing the acoustic wave transmitting and receiving device, which are capable of lowering the frequency of the resonance mode of a front mass.SOLUTION: An acoustic wave transmitting and receiving device according to the present disclosure includes a driving element having a first end and a second end, a gap portion having a plurality of gaps distributed in a direction away from the first end, a front mass connected to the first end, and a rear mass connected to the second end.SELECTED DRAWING: Figure 9

The invention relates to a MEMS component (1) for a MEMS loudspeaker (30), having a carrier structure (2) with a first through-hole (3) leading to a front volume (4) of the MEMS component (1) and a second through-hole (5) leading to a rear volume (6) of the MEMS component (1), displacement elements (7) which are fixed to the carrier structure (2) and are movable relative to one another, a variable volume chamber (8) being configured between each two adjacent displacement elements (7), an electrically actuatable drive unit (9) for generating a movement of the displacement elements (7), at least one displacement element (7) being fixed to a carrier beam (11) of the carrier structure (2) via a carrier membrane (10), the drive unit (9) having at least one piezoelectric drive element (12) which is arranged on the carrier membrane (10) and which, by way of a deformation of the carrier membrane (10), causes a pivoting movement (13) of the displacement element (7) about a pivot axis (14) which extends along the fixing of the displacement element (7) on the carrier membrane (10).

There is provided a driving method of a liquid ejecting apparatus in which a liquid ejects from a first nozzle by driving a first driving element with a first driving signal. The first drive signal includes a first ejection pulse having a first ejection waveform element that changes in potential to eject a liquid from a first nozzle, and a first micro-vibration pulse having a first micro-vibration waveform element that changes in potential to not eject the liquid from the first nozzle. The driving method includes: determining the first ejection pulse; and setting a potential change width of the first micro-vibration waveform element based on a maximum potential change width in the first ejection waveform element and a first upper limit threshold value. The first upper limit threshold value is a value of the potential change width with which the ejection of the liquid is stabilized.

The application discloses a folding and unfolding mechanism of a four-surface array antenna, which comprises a mounting platform, a lifting mechanism arranged on the mounting platform, the lifting mechanism comprising a lifting upper frame, a lifting driving element, a swing rod I and a swing rod II, the lifting driving element being arranged between the lifting upper frame and the mounting platform, a front array surface and a rear array surface being hingedly connected to the front and rear ends of the lifting upper frame, the front array surface and the rear array surface being hingedly connected to the swing rod I between the mounting platform, left and right unfolding mechanisms being arranged on the lifting upper frame, a left array surface and a right array surface being hingedly connected to the left and right ends of the left and right unfolding mechanisms, the left array surface and the right array surface being hingedly connected to the swing rod II between the mounting platform. The application has the advantages that a folding and unfolding mode of a vehicle-mounted large-caliber four-surface array antenna from a transportation state to a working state is provided, single-vehicle transportation of the large-caliber four-surface array antenna can be realized and the transportation limit requirements of roads and railways can be met, the four-surface array antenna can be automatically and quickly unfolded, precious battlefield time is saved, and the battlefield survival capability is improved.

Coupling device (1) for force-transmitting connection of a first Bowden cable (3) with a second Bowden cable (4), wherein the coupling device (1) comprises a first coupling part (9) to which a sheath (5) and a core (6) of the first Bowden cable (3) can be attached, and a second coupling part (10) to which a sheath (7) and a core (8) of the second Bowden cable (4) can be attached, wherein the first of the coupling parts (9) comprises a first housing (11) connectable to the sheath (5) of the first Bowden cable (3) and a first slide (12) connectable to the core (6) of the first Bowden cable (3) and longitudinally displaceable within the housing (11), and wherein the coupling parts (9, 10) are positively interlocking or joined together.wherein the second of the coupling parts (10) has a second housing (21) connectable to the sheath (7) of the second Bowden cable (4) and a second slide (22) connectable to the inner tube (8) of the second Bowden cable (4) and longitudinally displaceable within the second housing (21), wherein the housings (11, 21) of the coupling parts (9, 10) on the one hand and the slides (12, 22) of the coupling parts (9, 10) on the other hand are each positively interlocking or joined to one another in a joining direction transverse to the force transmission direction of the Bowden cables (3, 4), and wherein at least one of the slides (22) has at least one guide surface (33) inclined to the joining direction for the other of the slides (12), which interacts with the other of the slides (12) when the coupling parts (9, 10) are joined in the joining direction such that at least one of the slides (22) is displaced in the direction of power transmission,wherein the second slide (22) has several guide surfaces (33) arranged at intervals from each other in the direction of force transmission, wherein the first slide (12) has at least one drive element (31) which interacts with at least one of the guide surfaces (33), characterized in that the drive element (31) is a drive bolt or cylinder oriented transversely to the direction of force transmission.

The communication system includes a push-pull transmitter circuit (2) that includes a reflection signal attenuator circuit (10) configured to keep the reflection signals outside of the amplitude direction of communication signals to prevent contamination thereof. The reflection signal attenuator circuit (10) includes first and second rectifier elements (D1 and D2) connected in series to a high-side drive element and a low-side drive element (Q1 and Q2), respectively, to prevent the reflection signals from the communication signals from flowing back to a power supply side, and first and second voltage cap elements (ZD1 and ZD2) connected in parallel to the high-side drive element and the low-side drive element (Q1 and Q2), respectively, to provide (add or subtract) capping voltages equal to approximately 1.5 to 3 times upper or lower boundaries for a HIGH level voltage of the communication signals when passing the reflection signals from the communication signals therethrough.

For example, the present invention provides an improved novel optical module having a configuration in which multiple optical modulation units and driving elements are not aligned in the longitudinal direction of the waveguide in the multiple optical modulation units. [Solution] The optical module comprises, for example, an optical modulation element having a first optical modulation section having a first waveguide extending in a first direction, and a second optical modulation section having a second waveguide that is spaced away from the first waveguide in a second direction intersecting the first direction and substantially parallel to the first waveguide, a driving element that is spaced away from the second waveguide in a second direction and drives the first optical modulation section and the second optical modulation section, and a base on which the optical modulation element and the driving element are mounted, wherein the optical modulation element is provided on a first surface, and the base has a pair of differential wirings that pass through a position spaced away from the first surface in the opposite direction to a third direction and electrically connect a pair of output terminals of the optical modulation element to a pair of electrodes of the first waveguide, respectively.

The invention relates to a power transmission box whose bearing (9) comprises a driving element (10) and a driven element (11) each having two bearing tracks (10a, 10b;11a, 11b) forming two paths (12, 13) in each of which a row (14, 15) of spherical rolling bodies (16) is arranged, the rows (14, 15) being arranged opposite an upstream portion (10a1, 10b1) – respectively downstream portion (11a2, 11b2) – of the leading tracks (10a, 10b) – respectively driven tracks (11a, 11b) –, the leading element (10) comprising a leading ring (17) and the driven element (11) comprising two driven rings (18, 19) on each of which is formed a portion (11a4, 11a2) of the first track (11a), the osculation rates of the upstream portion (10a1) and the downstream portion (11a2) are each between 0.51 and 0.57, the sum the osculation rates of the upstream portion (10b1) and the downstream portion (11b2) being less than the sum of the osculation rates of the upstream portion (10a1) and the downstream portion (11a2). Figure 3;

The invention relates to an acoustic modulator (100) having: - a housing (110) having a front-side opening (111-111f) and a rear-side opening (112-112f); a drive element (120-120b); and a modulation unit (130-130c), wherein the modulation unit (130-130c) is arranged in an interior space (113) of the housing (110) and divides the interior space (113) into a first interior space volume (114-114c) and a second interior space volume (115-115c), wherein the modulation unit (130-130c) is configured to close and release the front-side opening (111-111f), wherein the modulation unit (130-130c) is configured to close and release the rear-side opening (112-112f), wherein the drive element (120-120b) is arranged opposite the modulation unit (130-130c) and delimits the second interior space volume (115-115c), and wherein the drive element (120-120b) is configured to reduce and enlarge the second interior space volume (115).

The invention relates to the technical field of digital broadcasting equipment, in particular to an anti-vibration and noise-reduction digital broadcasting transmitting microphone supporting device which comprises a supporting assembly and a connecting assembly. The supporting assembly is provided with a bearing table, a multi-stage adjusting arm and a supporting foot embedded with a piezoelectric detection element. The connecting assembly comprises an annular fixing piece, a piezoelectric driver, a control unit and a buffering connecting piece. Active damping and noise reduction are achieved through cooperation of piezoelectric detection and a driving element, and the stability is improved by combining the design of a buffer layer, a damping ring and a rubber ring. And the magnetic element and the bulge-groove structure are convenient for quick disassembly and assembly. The application can effectively counteract the influence of external vibration, adapt to a complex environment, and meet the requirement of high-quality audio acquisition.

A multi-turn limiting device for limiting movement of an element driven by a motor includes a sensor configured to provide a sensor signal corresponding to a position of the element, a movable member mechanically couplable to the element via a transmission having a non-unitary first transmission ratio and a further sensor configured to provide a further sensor signal corresponding to the position of the movable member. A controller switches the motor via a switching signal determined on the basis of the two sensors. A method of limiting movement of an element driven by a motor includes sensing the position of the element using two sensors and a movable member which is coupled to the element via a non-unitary transmission ratio.

The application provides a device for driving a wafer carrier, comprising: a wedge and a shock-absorbing seat; the wedge comprises a wedge body and a piezoelectric driving element embedded therein, the piezoelectric driving element is configured to expand when energized, drive a part of the wedge body to generate micro motion, and lift the wafer carrier; the upper surface of the shock-absorbing seat is arranged to be higher than the upper surface of the wedge in the initial state, so that the wafer carrier preferentially contacts the shock-absorbing seat to achieve buffering when falling. The application cooperatively designs the shock-absorbing seat and the piezoelectric driving wedge, which can not only realize high-precision driving at the nanometer level, but also effectively buffer the falling impact and protect the wafer.

For example, the present invention provides an improved novel optical module that can suppress excessive temperature rise associated with the operation of the drive element. [Solution] The optical module comprises, for example, an optical modulation element having an optical modulation section having a waveguide extending in a first direction, a drive element having a drive circuit for driving the optical modulation section, a base on which the optical modulation element and the drive element are mounted, having a first surface substantially aligned with the first direction and substantially aligned with a second direction intersecting the first direction, an insulator, and a conductor. The optical modulation element is provided on the first surface, the drive element is spaced apart from the optical modulation element in the second direction, and a heat dissipation section is provided on the base in a third direction aligned with the drive element in both the first and second directions. The heat dissipation section may be a conductor at ground potential.

The driving element is used for driving the passive element (4) to move relative to the active element (1). The active element (1) comprises a resonator (2) and an oscillation excitation device (23), and at least one arm (21) extending in an arm direction (21a). The arm (21) comprises, at the outer end, a contact element (31) which can be moved by an oscillating movement of the arm (21) in order to drive the passive element (4). The outer end of the arm (21) contains a contact element (31) which drives a contact area (41) of the passive element (4). At least one of the following cases is provided: the contact element (31) comprises an insert (80) made of a material different from the material of the resonator (2), in particular a harder material than the material of the resonator (2); in the contact region (41), a first wear suppression element (83) is arranged on the contact element (31) and a second wear suppression element (84) is arranged on the passive element (4). The passive element (4) is made of a wear-inhibiting material.

The invention provides a full-depth low-frequency broadband high-directivity underwater acoustic transducer, and belongs to the technical field of underwater acoustic transducers. The main structure comprises a Helmholtz cavity and a driving element. The Helmholtz cavities are metal circular tubes with different sizes and cavity openings with different sizes. The three Helmholtz cavities are fixed to the two ends and the middle of the driving element respectively. The invention has the characteristics of full-depth working, low frequency, high power, wide band, strong directivity and simple structure, and can be applied to the fields of underwater acoustic detection, communication, navigation, confrontation and the like.

The present application provides a kind of liquid ejection head driving method of liquid droplet can be ejected even if the viscosity of liquid is high, and liquid ejection device.The liquid ejection head driving method of the present application has: first step, by supplying driving signal with first waveform to driving element, so that the liquid level in the ejection part is protruded to the ejection direction first liquid column formation;Second step, in the case where first liquid column is formed, by supplying driving signal with second waveform to driving element, so that after the liquid level in the ejection part is protruded to the ejection direction second liquid column formation, part or all of the liquid constituting second liquid column is ejected as liquid droplet, and in the case where driving signal with first waveform and without second waveform is supplied to driving element, no liquid droplet is ejected from the ejection part, in the case where driving signal with second waveform and without first waveform is supplied to driving element, no liquid droplet is ejected from the ejection part.

This invention discloses a single-ended excitation broadband transducer, comprising a front cover plate, a transducer drive element, and a rear cover plate sequentially fixedly connected by prestressed screws. The transducer drive element includes a piezoelectric ceramic drive crystal stack and a metal resonant structure arranged sequentially along the axial direction. The length of the piezoelectric ceramic drive crystal stack is one-quarter of its first-order longitudinal vibration wavelength; the length of the metal resonant structure is one-quarter of its first-order longitudinal vibration wavelength, and the longitudinal vibration resonant frequencies of the piezoelectric ceramic drive crystal stack and the metal resonant structure are the same. Because the transducer drive element of this invention includes a piezoelectric ceramic drive crystal stack and a metal resonant structure arranged sequentially along the transducer's axial direction, the transducer can still achieve full excitation of the first three longitudinal vibration modes, making the transducer's emission voltage response tend to be flat within the target frequency band. At the same time, it reduces the use of the piezoelectric ceramic drive crystal stack, avoiding waste and reducing manufacturing costs.

The present application belongs to the technical field of driving element stroke detection, and particularly relates to a stroke detection device of a piezoelectric driver, which comprises: a grating support, which is movably connected with the shell of the piezoelectric driver along a first direction; the grating support is movably connected with the mover of the piezoelectric driver through a flexible hinge, and the flexible hinge is configured to be capable of transmitting the movement of the mover along the first direction to the grating support; a grating strip, which is installed on the grating support, and the length direction of the grating strip is parallel to the first direction; and a reading head, which is fixedly arranged in the shell of the piezoelectric driver, and the reading head is oppositely arranged with the grating strip. By introducing the flexible hinge, on the one hand, the high precision and high reliability of the stroke detection system can be ensured; on the other hand, the sticking and stick-slip phenomenon between the mover and the guide rail caused by the complete rigid constraint of the mover can be avoided.

The invention relates to a coupling element (2, 60, 108) for coupling a drive element (102) to a stirring unit (110), comprising a base body (4), the base body (4) having a first fluid path (32) for conveying a first fluid and at least one further fluid path (34) for conveying a further fluid, and wherein the first fluid path (32) and the at least one further fluid path (34) are separated from each other in terms of fluid flow. The coupling element (2, 60, 108) is characterized in that the base body (4) has an outer part (6) with an inner space (14) and a middle part (12) with a first cavity (22, 26) and at least one further cavity (28, 24), the middle part (12) having a first connecting element (48) for transmitting a driving force and a second connecting element (50) for transmitting a driving force, the middle part (12) being rotatably mounted by the outer part (6), the middle part (12) is arranged at least partially in the inner space (14) of the outer part (6) and the inner space (14) is configured such that a free region (16) of the inner space (14) surrounds the middle part (12), the free region (16) of the inner space (14) of the outer part (6) and the first cavity (22, 26) of the middle part (12) together at least partially form a first fluid path (32), and at least one further cavity (28, 24) of the middle part (12) at least partially forms at least one further fluid path (34). A system and a use are also described.

The invention relates to a transmission (1) comprising at least two transmission elements (12), (13), (14), (15), (16), wherein a first transmission element (12), (16) is axially movably mounted with respect to a second transmission element (13), (14), (15). The transmission further comprises at least one selector shaft (2), at least one axially displaceable shift element (3), (4) for axially moving the first transmission element (12), (16), a drive element (5) which drives the at least one shift element (3), (4), and at least two coupling elements provided between the drive element (5) and the shift element (3), (4). A first coupling element is in the form of a pin (6), a second coupling element is in the form of a slot (7), and the at least one shift element (3), (4) is axially moved by a movement of the pin (6) in the slot (7). The at least one selector shaft (2) is axially fixed with respect to the second transmission element (13), (14), (15), and the at least one shift element (3), (4) is displaced axially on the selector shaft (2) by the drive element (5) such that the axial movement of the at least one shift element (3), (4) follows a non-linear characteristic curve and such that the first transmission element (12), (16) is moved by the at least one shift element (3) (4) in such a way that a coupling of the first transmission element (12), (16) to the second transmission element (13), (14), (15) is alternatively established or released.

The invention provides a device for driving a wafer carrying disc. The device comprises a wedge block and a damping seat, the wedge block comprises a wedge block body and a piezoelectric driving element embedded in the wedge block body, and the piezoelectric driving element is configured to expand when being electrified to drive a part of the wedge block body to generate micro-motion so as to jack the wafer carrying disc; and the upper surface of the damping seat is arranged to be higher than the upper surface of the wedge block in an initial state, so that the wafer carrying disc is preferentially in contact with the damping seat to realize buffering when falling down. According to the invention, the damping seat and the piezoelectric driving wedge block are cooperatively designed, so that nanoscale high-precision driving can be realized, falling impact can be effectively buffered, and a wafer is protected.

The application discloses a wave compensation boarding bridge and a wave compensation method. The wave compensation boarding bridge comprises a base, a main bridge, an extendable bridge and a wave compensation assembly. The base comprises a base and a tower body rotatably installed on the base. A rotary drive assembly for driving the tower body to rotate is arranged in the tower body. The main bridge is rotatably connected with the tower body, and a swing drive element for driving the main bridge to swing is arranged between the main bridge and the tower body. The extendable bridge is slidably installed in the main bridge, and an extension drive assembly for driving the extendable bridge to extend and retract is arranged between the extendable bridge and the main bridge. The wave compensation assembly comprises a controller and a positioning receiver. The positioning receiver acquires position information of the extendable bridge and sends the position information to the controller. The controller receives the position information and controls the rotary drive assembly, the swing drive element and the extension drive assembly to start and stop according to the position information. The wave compensation boarding bridge is convenient for personnel to pass between a ship and a shore, and has the advantages of good adaptability, high flexibility and convenient and fast use.

The invention relates to a system (10) for transmitting, by power-line carriers, a data signal to be transmitted (S1), in a turbine engine, which system comprises a power supply device (20, 120) comprising at least one unmovable part (22, 122) rigidly connected to the frame portion and configured to receive an input power signal (Pp1, E1); as well as a rotating part (24, 124) rigidly connected to the rotary drive element for rotation therewith and magnetically coupled to the unmovable part such that it is configured to output an output power signal (Pd1') for electrically powering the electrical equipment; a modulation unit (30) configured to apply at least one modulation to the data signal to be transmitted (S1) so as to output a modulated data signal to be transmitted (S1m) having a reduced energy level and a frequency that is higher than the frequency of the input power signal; and a coupling module (40) configured to superimpose the modulated data signal to be transmitted (S1m) onto the input power signal.

In a drive element, suppressing breakage in a support part due to stress concentration caused by torsion of the support part. The drive element includes a movable part allowed to be turned about a turn axis, a fixture, support part extending along the turn axis and connecting the movable part and the fixture, and a drive part that turns the movable part about the turn axis. A plurality of recesses extending in a direction away from the movable part is formed in side surface of the support part side by side in a thickness direction of the support part. The recess formed in a first region including at least the center in a thickness direction of the side surface of the support part has a smaller size than the recess formed in a second region other than the first region on the side surface of the support part.