2094 results about "Integrated processing" patented technology

Stress of a silicon nitride layer may be enhanced by deposition at higher temperatures. Employing an apparatus that allows heating of a substrate to substantially greater than 400° C. (for example a heater made from ceramic rather than aluminum), the silicon nitride film as-deposited may exhibit enhanced stress allowing for improved performance of the underlying MOS transistor device. In accordance with alternative embodiments, a deposited silicon nitride film is exposed to curing with ultraviolet (UV) radiation at an elevated temperature, thereby helping remove hydrogen from the film and increasing film stress. In accordance with still other embodiments, a silicon nitride film is formed utilizing an integrated process employing a number of deposition/curing cycles to preserve integrity of the film at the sharp corner of the underlying raised feature. Adhesion between successive layers may be promoted by inclusion of a post-UV cure plasma treatment in each cycle.

The present invention generally provides a precleaning process prior to metallization for submicron features on substrates. The method includes cleaning the submicron features with radicals from a plasma of a reactive gas such as oxygen, a mixture of CF4/O2, or a mixture of He/NF3, wherein the plasma is preferably generated by a remote plasma source and the radicals are delivered to a chamber in which the substrate is disposed. Native oxides remaining in the submicron features are preferably reduced in a second step by treatment with radicals from a plasma containing hydrogen. Following the first or both precleaning steps, the features can be filled with metal by available metallization techniques which typically include depositing a barrier/liner layer on exposed dielectric surfaces prior to deposition of aluminum, copper, or tungsten. The precleaning and metallization steps can be conducted on available integrated processing platforms.

A method and apparatus for depositing a tantalum nitride barrier layer is provided for use in an integrated processing tool. The tantalum nitride is deposited by atomic layer deposition. The tantalum nitride is removed from the bottom of features in dielectric layers to reveal the conductive material under the deposited tantalum nitride. Optionally, a tantalum layer may be deposited by physical vapor deposition after the tantalum nitride deposition. Optionally, the tantalum nitride deposition and the tantalum deposition may occur in the same processing chamber.

A micro integrated Global Positioning System (GPS)/Inertial Measurement Unit (IMU) System, which is adapted to apply to output signals proportional to rotation and translational motion of a carrier and GPS measurements of the carrier, respectively from angular rate sensors, acceleration sensors, and GPS chipset, is employed with MEMS angular rate and acceleration sensors and GPS chipset. Compared with a conventional IMU/GPS system, the system of the present invention uses an integrated processing scheme by means of digital closed loop control of the dither driver signals for MEMS angular rate sensors, a feedforward open-loop signal processing scheme of the IMU, digital temperature control and compensation, the earth's magnetic field-based heading damping, robust error estimator, and compact sensor and circuit architecture and dramatically shrinks the size of mechanical and electronic hardware and power consumption, meanwhile, obtains highly accurate motion measurements.

The present invention relates generally to an improved process for providing complete via fill on a substrate and planarization of metal layers to form continuous, void-free contacts or vias in sub-half micron applications. In one aspect of the invention, a refractory layer is deposited onto a substrate having high aspect ratio contacts or vias formed thereon. A CVD metal layer, such as CVD Al or CVD Cu, is then deposited onto the refractory layer at low temperatures to provide a conformal wetting layer for a PVD Cu. Next, a PVD Cu is deposited onto the previously formed CVD Cu layer at a temperature below that of the melting point temperature of the metal. The resulting CVD/PVD Cu layer is substantially void-free. The metallization process is preferably carried out in an integrated processing system that includes both a PVD and CVD processing chamber so that once the substrate is introduced into a vacuum environment, the metallization of the vias and contacts occurs without the formation of an oxide layer over the CVD Cu layer. The via fill process of the present invention is also successful with air-exposure between the CVD Cu and PVD Cu steps.

Embodiments of the inventive concept include solid state drive (SSD) multi-card adapters that can include multiple solid state drive cards, which can be incorporated into existing enterprise servers without major architectural changes, thereby enabling the server industry ecosystem to easily integrate evolving solid state drive technologies into servers. The SSD multi-card adapters can include an interface section between various solid state drive cards and drive connector types. The interface section can perform protocol translation, packet switching and routing, data encryption, data compression, management information aggregation, virtualization, and other functions.

The present invention discloses a novel method to implement a Smart Device Network Application Infrastructure (SDNA) that supports and facilitates the development, deployment and management of device networks and device network applications. The Smart Device Network Application infrastructure (SDNA) refers to an integrated processing platform that supports and facilitates the development, deployment and management of distributed applications based on device networks. It involves the concurrent execution of several processes that interact to provide support and resources for said applications.

Integrated processing of multimedia signals can eliminate unnecessary signal processors and converters without losing the functionality of typical home entertainment system components. The integrated multimedia system includes a main player that captures and processes signals digitally. The main player may adjust the audio signal to provide audio output of equal loudness across all frequencies by accounting for sensitivity of the human ear for sounds of varying frequencies. The main player can also account for perceived differences in loudness based on the angle of a listener to a speaker by detecting the position of a user and making an adjustment accordingly. The invention further provides a speaker that has embedded performance characteristics or an identifier that allows the system to provide an optimal speaker driving current for a particular system or determine how that speaker would be best implemented in the integrated system.

This invention relates to an automatic driving system of a road vehicle, especially to a system which providing automatic driving information indication for traveling vehicles and realizing vehicle automatic driving through the vehicle automatic control system, which is characterized by comprising: fixing markers at interval along a road travelling line, receiving information feedback by the fixed markers through a set relay information station and forming the vehicle and road information on the road, and constantly supplying the road and vehicle information of the road where the vehicle is to a vehicle automatic receiving processor after the received GPS(Global Position System) information and the vehicle and road information on the road are overall treated, installing an automatic driving software in a vehicle-mounted computer which can receive and treat relevant information of the relay information station at any time, constantly sending operation instructions to a vehicle automatic controller so as to keep the vehicle travelling information direction line consistent with the vehicle driving speed direction line, and sending instructions to the vehicle automatic controller according to the selected mode by a driver so as to realize vehicle automatic driving.

The present invention discloses a block chain-based electronic invoice integrated processing method and system and belongs to the electronic invoice technical field. The method includes the following steps that: tax payment clients acquire user digital certificates and add the user digital certificates to a block chain network; the tax payment clients arrange the content of electronic invoices into the optional data fields of transactions, sign the transactions and submit the transactions; a plurality of accounting nodes are deployed, some accounting nodes endorse the submitted transactions and send the endorsed transactions to the tax payment clients; the tax payment clients judge whether the endorsed transactions accord with endorsement strategies, if the endorsed transactions accord with the endorsement strategies, the tax payment clients send the endorsed transactions to a consensus service node; and the consensus service nodes performs consensus sorting and send formed blocks to all the accounting nodes; and all the accounting nodes verify whether the identities of drawers are consistent with identities in the user digital certificates of the drawers, add transactions of which the identities are consistent with the identities in the user digital certificates of the drawers to a block chain, and send transaction IDs to the corresponding tax payment clients. With the block chain-based electronic invoice integrated processing method and system of the invention adopted, decentralization can be realized, so that the paralysis of the entire system or a network caused by a single-point fault can be avoided.

A web based insurance estimating system. The system includes a client computer that can launch client-side integrated processing software through a web-based application. The system also includes a server that generates information for a repair cost estimate web page. The repair cost estimate web page is displayed at the client computer. The repair cost estimate web page has properties that can be configured by a user at the client computer. The server can automatically populate fields of one or more web pages in response to a vehicle identification number entered by the user. The system can provide estimates for vehicles with less than four wheels such as motorcycles, snowmobiles and personal watercraft. One of the insurance damage web pages may graphically identify the location(s) of a paint code plate on a vehicle. The web page may also provide a list of selectable paint codes that allows the user to select a paint code for a vehicle.

The invention provides an intelligent parking monitoring and management system and a vehicle in-position detection method under a parking mode. The system comprises a vehicle detector, a wireless communication unit and a parking monitoring and management center, wherein the vehicle detector comprises an infrared detection module and a GMI detection module; the vehicle detector is used for carrying out comprehensive processing on a vehicle existence signal, which is detected by the infrared detection module, of a parking space and a vehicle disturbance geomagnetic field magnetic anomaly signal, which is detected by the GMI detection module, of the parking space, generating vehicle information of the parking space, and sending the vehicle information of the parking space to the wireless communication unit; and the parking monitoring and management center is used for processing the received vehicle information of the parking space, and carrying out monitoring, management and charge management on the parking space information according to a processing result. The intelligent parking monitoring and management system and the vehicle in-position detection method under the parking mode are applicable to the technical field of vehicle detection.

Monocrystalline silicon solaode chemical etching, washing, drying method and integral processor belong to technique field of chemical etching technique and washing. It characterized in that it not only includes water, acid, alkali, but also ultrasonic participates in etching and washing course: it includes following steps: (1) ultrasonic washes and heats in advance, (2) ultrasonic removes damnification layer, (3) ultrasonic makes herbs into wool, (4) ultrasonic rinses, (5) washing with acid to counteract, (6) ultrasonic rinses, (7) cutting water, (8) hot enthalpy to dry. Positive effects of the invention are: adopting ultrasonic to etch and wash, liquid of making wool can be acted with silicon piece, similar coarseness degree can be generated on surface, perfect pyramid pattern can be obtained; it also eliminates kalium, natrium ion from alkalescent solution, and extends service life of silicon piece; pollution can be decreased, energy consumption and water source can be saved greatly, it is a practical invention.

The invention discloses a device and a method for real-time three-dimensionally sensing safe driving of a vehicle having mixed multi-visual information. A video image collecting device is provided with six cameras; a main processor comprises a DSP subsystem and an APM subsystem; an SDRAM storage unit is connected with the main processor and an FPGA controller; the FPGA controller controls the collection of images around the vehicle, pre-treats the images and then stores in the SDRAM storage unit; the DSP subsystem reads images from the SDRAM storage unit, matches a frame image and rebuilds a three-dimensional scene; and the DSP subsystem synthesizes a predicted back track data and a rebuilt three-dimensional image and sends to a liquid crystal display in order to display. When a driver drives or backs a car, the phenomenon that a common backing device always has a blind area is completely avoided.

The invention discloses an advanced treatment system and method for high-concentration percolate in a comprehensive garbage disposal plant, belonging to the field of industrial waste water treatment. The system is formed by connecting a regulating tank, a coagulative precipitation tank, an upflow anaerobic sludge bed reaction tank, a primary anoxic and aerobic membrane bioreactor, advanced oxidation treatment equipment, a secondary anoxic and aerobic membrane bioreactor, nanofiltration membrane treatment equipment, an ozone contact tank and an active carbon filtering tower in sequence. According to the system, garbage percolate can be treated comprehensively, different pollutants in garbage percolate are treated in a classified way by combining physical, chemical and biological treatment,advanced treatment of garbage percolate is realized, and classified treatment for removing pollutants such as organic matters, heavy metals, ammonia, nitrogen and the like is performed, so that treated effluent strictly reaches the requirement of water pollution discharge degree limit in the Household Garbage Landfill Pollution Control Standard, the system runs stably for a long time, and treatment cost is lower than that of a secondary disc pipe reverse osmosis membrane process.

The present invention relates generally to an improved apparatus and process for providing uniform step coverage on a substrate and planarization of conducting layers to form continuous, void-free interconnects in sub-half micron, high aspect ratio aperture width applications and highly oriented conducting layers. In one aspect of the invention, a dielectric layer is formed over a conducting or semiconducting layer and etched to form an aperture exposing the underlying conducting or semiconducting layer on the aperture floor. An ultra-thin nucleation layer is then deposited by physical vapor deposition onto the field of the dielectric layer. A CVD metal layer is then deposited onto the structure to achieve selective deposition on the floor of the aperture, while preferably also forming a highly oriented blanket layer on the field. The present apparatus and process reduce the number of steps necessary to fabricate CVD metal interconnects and layers that are substantially void-free and planarized. The metallization process is preferably carried out in an integrated processing system that includes both a PVD and CVD processing chamber so that once the substrate is introduced into a vacuum environment, the metallization of the apertures to form vias and contacts occurs without the formation of oxides between the layers.

The present invention relates generally to an improved apparatus and process to provide a thin self-aligning layer prior to forming a conducting film layer thereover to improve the film characteristics and deposition coverage. In one aspect of the invention, a dielectric layer is formed over a conducting or semiconducting layer and etched to form an aperture exposing the underlying conducting or semiconducting layer on the aperture floor. An ultra-thin nucleation layer is then deposited by either vapor deposition or chemical vapor deposition onto the field of the dielectric layer. A CVD metal layer is then deposited onto the structure to achieve selective deposition on the floor of the aperture, while preferably also forming a highly oriented blanket layer on the field. In another aspect of the invention, a thin, self-aligning layer is formed over a barrier layer prior to deposition of a conducting film thereover. It is believed that the self-aligning layer enhances the reflectivity of the films by improving the crystal structure in the resulting film and provides improved electromigration performance by providing <111> crystal orientation. The process is preferably carried out in an integrated processing system that includes both a PVD and CVD processing chamber so that once the substrate is introduced into a vacuum environment, the process occurs without the formation of oxides between the layers.

The invention provides a process used for removing multiple contaminants in the off-gas of a sintering machine, as well as the system thereof. The process has the following steps: firstly, the machine tail off-gas undergoes SCR denitrification treatment; then, primary dedusting treatment is carried out to the denitrated machine tail off-gas and un-denitrated machine head off-gas at the same time, so as to remove the dust and ash particles in the off-gas; and then, circulating fluidized bed desulfurization treatment is carried out to the off-gas; finally, secondary dedusting treatment is carried out to the off-gas, so as to remove the resultant particles in the off-gas, the resultant particles are used for recycling, and the purified gas is separated out. The system thereof is mainly composed of a machine head off-gas header and a machine tail off-gas header which are used for collecting the machine head off-gas and the machine tail off-gas of the sintering machine, a SCR denitrification reactor which is used for removing the multiple contaminants in the off-gas, a primary dust remover, a circulating fluidized bed desulfurization reactor and a secondary dust remover. The process can carry out the classification integrated processing as well as the high efficient and synchronous removing to the sulfur dioxide, the nitrogen oxides and the dust in the sintering off-gas. The system has the characteristics of simple and compact whole design, low investment and running cost, and stable and reliable working.

The invention relates to a vehicle control technology, in particular to a method and a device to utilize the data of the life activity characteristics of a driver to carry out the monitoring of the state of the driver. The invention aims at overcoming the shortcomings of the prior art that the detection of the monitoring method of the driver is not convenient, the using scope is limited and the monitoring is inadequate, so as to disclose the vehicle driver state monitoring method and the system, further to carry out the identification and monitoring on the driver. The invention carries out the comprehensive processing of various data by collecting the data of the life activity characteristics of the driver, in particular to heart rate, head movement distance and the standard deviation of the changes, and finally accurate judgment is made. The invention can be used for the monitoring of fatigue driving of the driver, driving by another person on behalf of the driver, vehicle anti-theft and so on. The invention is characterized by accurate judgment and convenient usage.

The present invention provides a method for comprehensively treating high salt content organic industrial wastewater, and relates to the field of the organic material preparing technique. The method of the invention mainly comprises the following steps: executing acid-alkali adjustment to the organic wastewater until pH=7-9, preheating to 30-60 DEG C; introducing the wastewater into a triple effect evaporator for executing triple effect evaporation, executing salting out to the evaporated wastewater which is condensed to a certain degree so that the solid and liquid are separated; separating the concentrated liquid for continuing the condensation; when the separated liquid satisfies a certain requirement, atomizing into an incinerator for incinerating and discharging according to the standard, and introducing the triple effect evaporation condensation water into a biochemical treating system. The method of the invention can totally dispose and remove the organic matter in the high salt content organic industrial wastewater so that the high salt content organic industrial wastewater can be charged according to the standard. The method of the invention has the advantages of unique method, simple technical process, easy operation, low operation cost, large treating capacity, low regeneration energy consumption, no easy forming of secondary pollution after abandon, better economic and social benefit, and wide application range. The method of the invention can be widely applied for the treating of the high salt content organic wastewaters of garbage penetrating fluid, dye intermediate wastewater, etc.

The city traffic flow forecast and traffic information guidance system comprises the traffic information gathering subsystem, the communication subsystem, the traffic information integrated processing platform, the traffic information issuing subsystem and closed-circuit television monitoring subsystem. The traffic information gathering subsystem collects the traffic information of the scene, and transmits to the said traffic information integrated processing platform through the said communication subsystem, and the said traffic information integrated processing platform analyzes, integrates, and forecasts the traffic data, and then the real-time traffic information is directly transmitted to the traffic scene faced vehicles through the traffic information issuing subsystem. The invention can improve the passing efficiency of traffic system, and can significantly increase the drivers' understanding of the road traffic conditions, to adjust the arrived value of traffic volume, and make the arrived value of each trunk road to a balanced distribution, and avoid vehicles number exceeding over the actual capacity, thereby improving traffic jams, increase traffic smooth and traffic system operating efficiency.