A
semiconductor structure (and method for forming) having transistors having both
metal gates and polysilicon gates on a single substrate in a
single process is disclosed. The method forms a
gate dielectric layer on the substrate and forms the
metal seed layer on the
gate oxide layer. The method patterns the
metal seed layer to leave metal seed material in
metal gate seed areas above the substrate. Next, the method patterns a polysilicon layer into polysilicon structures above the substrate. Some of the polysilicon structures comprise sacrificial polysilicon structures on the
metal gate seed areas and the remaining ones of the polysilicon structures comprise the polysilicon gates. The patterning of the polysilicon gates forms the sacrificial gates above all the
metal gate seed areas. Following that, the invention forms sidewall spacers, and source and drain regions adjacent the polysilicon structures. Then, the invention protects the polysilicon gates, removes the sacrificial polysilicon structures, and plates the metal gate seed areas to form the metal gates. The sidewall spacers self-align the metal gates. The plating process forms the metal gates of pure metal. All thermal
processing that raises the temperature above a damage threshold for the metal is performed before the plating process.