Semiconductor unit with a
semiconductor region (40) having a first principal surface and a second principal surface opposite the first principal surface, wherein the
semiconductor region has the following: - alternating first support
layers (13) with a first
conductivity type and second support
layers (14) with a second
conductivity type along the first main surface; - a first trough layer (21) with the second
conductivity type, located within each of the first support
layers (13) on an upper surface of the first support layer (13); - a first source layer (22) with the first conductivity type, which is located within the first trough layer (21) on an upper surface of the first trough layer (21); - a first
dielectric layer (35) on a lateral surface, which is located on a lateral surface in a first trench (74) which is located at boundaries between the first support layers (13) and the second support layers (14), wherein the first
dielectric layer on the lateral surface is in contact with the first trough layer (21) and the first source layer (22); - a first
dielectric layer (36) on a
soil surface located on a
soil surface in the first trench, wherein the first
dielectric layer (36) on the
soil surface is at least partially in contact with one of the second support layers (14); and - a first gate
electrode (71) located in the first trench, opposite the first trough layer (21) and the first source layer (22) by the first
dielectric layer (35) on the lateral surface and opposite the second support layer (14) by the first
dielectric layer (36) on the bottom surface, - wherein each of the second support layers (14) has a
second source layer (27) of the first conductivity type located within the second support layer on an upper surface of the second support layer, - wherein the first dielectric layer (35) is located on opposite lateral surfaces in the first trench and is in contact with an area (26) with the second conductivity type within the second support layer (14) and the
second source layer (27), - wherein the first dielectric layer on the bottom surface is in contact with the area with the second conductivity type within the second support layer (14) and - wherein a lower surface of the
second source layer (27) is located closer to the second main surface than a lower surface of the first source layer (22) is located.