The invention discloses a high-
gain diamond logic phase
inverter and a preparation method thereof, and aims to solve the problem that the
voltage gain of an existing logic phase
inverter is relatively small. According to the high-
gain diamond logic
inverter,
a diamond substrate is subjected to hydrotreating through
hydrogen plasma to form the
diamond substrate with a
hydrogen terminal, a
conducting channel is formed after the surface of the
hydrogen terminal is in contact with air, and a first source
electrode, a first drain
electrode, a
second source electrode and a second drain electrode are arranged on the
diamond substrate. A first ferroelectric medium layer and a second ferroelectric medium layer are deposited on
a diamond substrate, a first grid electrode is arranged on the first ferroelectric medium layer, and a second grid electrode is arranged on the second ferroelectric medium layer. According to the invention, an
electron beam
evaporation process is adopted to form an orthorhombic phase on a ferroelectric material deposited at a low temperature, the ferroelectric material has
convertible ferroelectric characteristics, and ultra-steep sub-threshold swing is realized; the
surface conductivity can be regulated and controlled by treating the surface of the hydrogen terminal diamond through the
oxygen plasma, current matching is achieved, and the logic inverter works in a deep subthreshold region.