Piezoelectric friction combined type micro-nano generator and prepared method thereof

A composite, generator technology, applied in the directions of triboelectric generators, generators/motors, piezoelectric effect/electrostrictive or magnetostrictive motors, etc. The problem of poor charging capacity of capacitors, etc., achieves the effect of low cost, improved charging capacity, and simple process

Inactive Publication Date: 2013-05-15
PEKING UNIV
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Problems solved by technology

The two surfaces are quickly separated by the arched structure [Wang, S., Lin, L. and Wang, Z.L. Nano Letters, vol.12, pp.6339, 2012], and a frictional nanogenerator with high voltage output can be obtained. The peak value of

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  • Piezoelectric friction combined type micro-nano generator and prepared method thereof
  • Piezoelectric friction combined type micro-nano generator and prepared method thereof
  • Piezoelectric friction combined type micro-nano generator and prepared method thereof

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Embodiment Construction

[0040] The present invention is further described below in conjunction with embodiment. The scope of the present invention is not limited by these examples, and the scope of the present invention is set forth in the claims.

[0041] Attached below figure 1 - Figure 4 illustrates the specific steps of the piezoelectric friction composite micro-nano generator and its preparation method provided by the present invention.

[0042] refer to figure 1 , figure 1 It is a structural schematic diagram of the piezoelectric friction compound generator of the present invention, and its structure includes: PVDF piezoelectric film 1, piezoelectric film electrode 2, PDMS film 3 with micro-nano composite structure, PET film 4, polymer material electrode 5. refer to figure 2 , figure 2 It is a scanning electron micrograph of the PVDF piezoelectric thin film of the present invention. refer to image 3 , image 3 It is a scanning electron micrograph of the mold with micro-nano composite s...

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Abstract

The invention relates to the field of micro-electromechanical systems (MEMS) integrated processing and particularly relates to a piezoelectric friction combined type micro-nano generator and a prepared method thereof. A piezoelectric type generator is formed by means of using a piezoelectric film, and a friction-type generator is formed by using a piezoelectric film metal electrode and the difference between other flexible polymer materials and an electric charge binding capacity. Compared with a traditional piezoelectric type generator and a traditional friction-type generator, the piezoelectric friction combined type micro-nano generator combines the piezoelectricity with the friction and uses reasonable external circuit connection modes , so that a capacitance can be charged effectively and voltage output which reaches hectovolt can be provided. The piezoelectric friction combined type micro-nano generator and the prepared method of the piezoelectric friction combined type micro-nano generator is low in cost, high in productivity and simple in process and is provided with high voltage output and strong charging ability. The structure of the generator comprises piezoelectric film, a piezoelectric film electrode, the flexible polymer materials with micro-nano composite structure and a polymer material electrode.

Description

technical field [0001] The invention relates to the field of MEMS integrated processing, in particular to a piezoelectric friction composite micro-nano generator and a preparation method thereof. Background technique [0002] Micro-electro-mechanical system (MEMS) is an emerging multi-field interdisciplinary subject, which has developed rapidly in recent years and has received extensive attention at home and abroad. For various MEMS devices, power supply is generally required, but traditional energy supply methods such as batteries and transmission lines can no longer meet the needs of miniaturization. In recent years, the development of nanogenerators provides a new energy supply method for MEMS devices. According to different working principles, nanogenerators can be divided into piezoelectric, pyroelectric, and frictional types. Among them, the piezoelectric type and the friction type both convert external vibration energy into electrical energy. [0003] For piezoelec...

Claims

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Application Information

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IPC IPC(8): H02N2/18H02N1/04B81C1/00B81C99/00
Inventor 张海霞韩梦迪张晓升刘雯
Owner PEKING UNIV
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