Piezoelectric friction combined type micro-nano generator and prepared method thereof

Abstract

The invention relates to the field of micro-electromechanical systems (MEMS) integrated processing and particularly relates to a piezoelectric friction combined type micro-nano generator and a prepared method thereof. A piezoelectric type generator is formed by means of using a piezoelectric film, and a friction-type generator is formed by using a piezoelectric film metal electrode and the difference between other flexible polymer materials and an electric charge binding capacity. Compared with a traditional piezoelectric type generator and a traditional friction-type generator, the piezoelectric friction combined type micro-nano generator combines the piezoelectricity with the friction and uses reasonable external circuit connection modes , so that a capacitance can be charged effectively and voltage output which reaches hectovolt can be provided. The piezoelectric friction combined type micro-nano generator and the prepared method of the piezoelectric friction combined type micro-nano generator is low in cost, high in productivity and simple in process and is provided with high voltage output and strong charging ability. The structure of the generator comprises piezoelectric film, a piezoelectric film electrode, the flexible polymer materials with micro-nano composite structure and a polymer material electrode.

Description

technical field [0001] The invention relates to the field of MEMS integrated processing, in particular to a piezoelectric friction composite micro-nano generator and a preparation method thereof. Background technique [0002] Micro-electro-mechanical system (MEMS) is an emerging multi-field interdisciplinary subject, which has developed rapidly in recent years and has received extensive attention at home and abroad. For various MEMS devices, power supply is generally required, but traditional energy supply methods such as batteries and transmission lines can no longer meet the needs of miniaturization. In recent years, the development of nanogenerators provides a new energy supply method for MEMS devices. According to different working principles, nanogenerators can be divided into piezoelectric, pyroelectric, and frictional types. Among them, the piezoelectric type and the friction type both convert external vibration energy into electrical energy. [0003] For piezoelec...

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Problems solved by technology

The two surfaces are quickly separated by the arched structure [Wang, S., Lin, L. and Wang, Z.L. Nano Letters, vol.12, pp.6339, 2012], and a frictional nanogenerator with high voltage output can be obtained. The peak value of the output voltage is as high as several hundred volts, but the equivalent internal resistance of the friction nanogenerator is very large, and the single-layer friction structure is not strong enough to charge the capacitor.

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