The invention discloses a stacked
quantum chip supporting structure. The stacked
quantum chip supporting structure comprises a first
chip and a second chip, a
cut-off layer is arranged on the end face between the first chip and the second chip, the
cut-off layer is provided with multiple sets of limiting columns, and the first chip and the one or more second chips are aligned and bonded through the limiting columns to form a multi-layer stacked structure. According to the invention, a plurality of groups of limiting columns are arranged at the corresponding positions of one or more
cut-off
layers between the chips, so that the stress can be better balanced without influencing the wiring of the chips, the stress is more uniform and the chips are not deformed when the chips are subjected to flip-chip bonding or stacking design, and the sizes of the gaps between the chips can be determined by controlling the heights of the limiting columns, so that the yield of the chips is improved. Gaps and design are ensured to be consistent, and the problems of inclination, collapse and the like after multiple
layers of chips are stacked are effectively solved; in addition, a
lantern ring structure is formed by mutually embedding and connecting the
coating cavities, so that the supporting stability is further improved, interconnected
metal can be effectively prevented from overflowing to influence an
external circuit structure, and the gap distance between the chips can be accurately controlled.