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2463 results about "Conductive membrane" patented technology

Substrate processing apparatus and method of manufacturing semiconductor device

Provided are a substrate processing apparatus and a method of manufacturing a semiconductor device which are able to form a conductive film, which is dense, includes a low concentration of source-derived impurities and has low resistivity, at a higher film-forming rate. The substrate processing apparatus includes a processing chamber configured to stack and accommodate a plurality of substrates; a first processing gas supply system configured to supply a first processing gas into the processing chamber; a second processing gas supply system configured to supply a second processing gas into the processing chamber; and a control unit configured to control the first processing gas supply system and the second processing gas supply system. Here, at least one of the first processing gas supply system and the second processing gas supply system includes two nozzles which are vertically arranged in a stacking direction of the substrates and have different shapes, and the control unit is configured to supply at least one of the first processing gas and the second processing gas into the processing chamber through the two nozzles having different shapes when films are formed on the substrates by supplying the first processing gas and the second processing gas into the processing chamber at pulses having different film-forming rates.
Owner:KOKUSA ELECTRIC CO LTD

Graphical flexible transparent conductive film and preparation method thereof

The invention discloses a graphical flexibility transparent conductive film and a preparation method of the graphical flexible transparent conductive film, comprising a flexible transparent substrate, transparent embossing glue and a conductive material embedded in the transparent embossing glue from bottom to top; a graphical and communicated groove network is formed on the surface of the transparent embossing glue, the sum of the areas outside the groove network accounts for more than 80 percent of total superficial area of the film, and the depth of the groove is less than the thickness ofthe transparent embossing glue; the conductive material is respectively conductive ink and a conductive film before and after sintering, the conductive ink is uniformly filled at the bottom of the groove network and is communicated, and the thickness of the conductive film is less than the depth of the groove, and the film is provided with a conductive network covered by the conductive film and alight-transmitting area outside the groove network. Besides, in the invention, a design scheme of the conductive network is provided, and the preparation is realized based on the technologies such asembossing, conductive ink scraping and the like; the graphical flexibility transparent conductive film and the preparation method of the graphical flexible transparent conductive film have the beneficial effects that the scratching-prevention scraping-resisting characteristics of the film are greatly improved and the electric conductivity of the transparent conductive film is improved to the maximum extent.
Owner:ANHUI JINGZHUO OPTICAL DISPLAY TECH CO LTD
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