The invention relates to the technical field of
semiconductor packaging, and discloses a packaging method and equipment for a strong exhaust
chip, and the packaging method comprises the steps: carrying out the thin film deposition of the surface of a
chip body, carrying out the micromachining of a porous
ceramic substrate, forming an installation groove and an air flow channel, fixing a pretreatment body in the installation groove based on a preset
adhesive, and carrying out the packaging of a strong exhaust
chip. Carrying out
lead bonding on the conductive layer and the conductive path,
coating the electric connection
assembly with multiple
layers of preset polymers, carrying out enhanced filling on the pre-packaged
assembly based on a preset filler, and carrying out surface
smoothing treatment on the pre-packaged
assembly after enhanced filling to obtain a strong exhaust chip; after the pretreatment body is fixed, the
cofferdam structure is dispensed with the
silicone-based
adhesive and is dynamically cured, the
cofferdam structure effectively prevents external pollutants from entering, and the
conductivity of the electric connection assembly is optimized due to the combination of
lead bonding and the
silicone-based
adhesive; and the stable working state of the chip in the high-efficiency heat dissipation and gas emission process is further ensured.