The invention discloses a back grid
graphene FET biosensing
chip and a preparation method thereof, and the preparation method comprises the steps: employing an ICP
etching and chemical
copper plating technology, and fully plating Cu in an
etching hole region to form a Cu-containing connection site to connect a source
electrode and a drain
electrode; the method comprises the following steps of: opening holes in a Cu-containing part and a grid
electrode overlapping region on the back surface of a
wafer, plating
copper, communicating
copper Cu in an opening region with the Cu part in a hole middle region, and then carrying out
electron vapor film plating Cu / Ti, so that the back surface is communicated with a grid electrode, a source electrode and a drain electrode, thereby obtaining a
graphene FET sensor
chip containing a back grid electrode. And the manufactured
chip is connected with the
tail end part of the corresponding gold wire of the PCB on the Cu layer part containing the back communicated grid electrode, source electrode and drain electrode in a
ball bonding manner, and the bottom
surface electrode part of the chip is welded on the PCB. According to the back grid
graphene FET biosensing chip, higher current driving capability and lower
on resistance are realized, the overall performance of a device is improved, and the effects of low cost, high stability and strong performance are realized.