The invention discloses a
palladium alloy film
hydrogen sensor and a
hydrogen detection
system and method.The sensor comprises a substrate, the substrate is provided with a first surface and a second surface which are opposite, the first surface is provided with a first
hydrogen-sensitive film responding to the
hydrogen concentration within a first detection range, and the second surface is provided with a second hydrogen-sensitive film responding to the
hydrogen concentration within a second detection range; a second hydrogen-sensitive film which responds to the
hydrogen concentration in a second detection range is arranged on the second surface, and the material components and / or microstructures of the first hydrogen-sensitive film and the second hydrogen-sensitive film are different; a temperature measuring element for measuring temperature and a
heating element for heating are also arranged on the substrate; wherein the
lower limit value of the first detection range is larger than the
lower limit value of the second detection range and smaller than or equal to the upper
limit value of the second detection range, and the upper
limit value of the first detection range is larger than the upper
limit value of the second detection range. According to the invention, the problems of complex design,
large size, high
power consumption, high cost and large error of an existing dual-
sensing system are solved through integrated double-sided design of high and low measuring ranges and shared temperature compensation.