The embodiment of the invention provides a
chip carrier plate and a manufacturing method thereof, a
chip packaging structure, and a manufacturing method of the
chip carrier plate, and the method comprises the steps: forming a first
protection layer on a first surface of a glass substrate, forming a plurality of first through holes in the first
protection layer, carrying out the
laser induction of the glass substrate through the first through holes, and forming a plurality of induction regions, and in the induction area,
etching the glass substrate to form a plurality of second through holes penetrating through the glass substrate, and forming conductive connection parts in the second through holes. The first
protection layer with the first through hole is manufactured on one side of the glass substrate, the first protection layer exposes the area, needing
laser induction, on the glass substrate, the area, not needing
laser induction, on the glass substrate is protected, and it is avoided that when the glass substrate is etched subsequently,
etching damage is caused to other positions of the surface of the glass substrate. Therefore, the thickness of the glass substrate can be ensured, and the surface quality such as roughness of the surface of the glass substrate can be ensured.