Vibratory drive composite micro-power source based on piezoelectric effect and electromagnetic induction

Abstract

The invention relates to the micro-energy field, in particular to a vibratory drive composite micro-power source based on the piezoelectric effect and the electromagnetic induction. The micro-power source adapts the requirement of the micro electro mechanical system development for the micro-energy and comprises a substrate, a peripheral base, cantilevers and a mass block, wherein the substrate is fixed with the lower surface of the peripheral base by bonding; a vertical through hole is arranged in the middle of the mass block; an induction coil is processed on the upper surface and / or the lower surface of the mass block; a micro permanent columnar magnet is fixed on the upper surface of the substrate; PZT piezoelectric thin films are arranged on the cantilevers; a plurality of external lead bonding pads are arranged on the peripheral base; and the two ends of the induction coils and the two polarized surfaces of the PZT piezoelectric thin films are respectively connected with the corresponding external lead bonding pads by leads. The power source has reasonable and concise structure, is liable to miniaturization and integration, and can provide power to the micro electro mechanical systems at high output energy density and high output efficiency, realize self power supply of the micro electro mechanical systems and meet the requirement of the micro electro mechanical system development for the micro-energy.

Description

technical field

[0001] The invention relates to the field of micro-energy sources, in particular to a vibration-driven composite micro-power source based on piezoelectric effects and electromagnetic induction phenomena. Background technique

[0002] Micro Electro Mechanical Systems (MEMS--Micro Electro Mechanical Systems) is a system that integrates micromechanical components, microsensors, micromechanical actuators, microelectronic components, circuits and energy supply components in a small physical size. According to the current development status of MEMS, the development status of energy supply components in the system is the biggest obstacle restricting MEMS from being practical and automated. Therefore, striving to realize the miniaturization of energy supply components and making them a micro energy source suitable for the development of MEMS is one of the hot development goals that need to be realized urgently.

[0003] At present, the application and research and d...

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