The invention discloses a
vanadium-doped LiNbO3 piezoelectric
coating with high piezoelectric performance and a preparation method of the
vanadium-doped LiNbO3 piezoelectric
coating, and relates to the technical field of
lithium niobate coatings and sensors. The preparation method of the
coating comprises the following steps: designing a
vanadium-doped
lithium niobate target material; cleaning the substrate and magnetron
sputtering equipment; installing a target material and a substrate in magnetron
sputtering equipment; vacuumizing the magnetron
sputtering equipment to an ideal vacuum degree, and heating to a target temperature; environment parameters are set, and the surface of the target material is cleaned; after cleaning of the target material is completed, the front face of the substrate and the surface of the target material are arranged to be in a relative state, the distance is adjusted, environment parameters are set for deposition, and the vanadium-doped LiNbO3 piezoelectric coating is prepared; the target material is a vanadium-doped
lithium niobate target material, and the vanadium-doped atom number accounts for 1.3-3.9%. The vanadium-doped LiNbO3 piezoelectric coating prepared by the method disclosed by the invention has an obvious columnar
crystal structure and does not contain
impurity phases such as NbO, Nb2O5 and LiNb3O8, and the O / Nb
atomic ratio reaches 2.9 and is close to an ideal form; compared with a pure
lithium niobate crystal / coating, the
lithium niobate crystal / coating has the advantages of high
piezoelectric constant, extremely strong ultrasonic
signal and excellent
temperature resistance.