The invention provides a
semiconductor structure and a preparation method thereof, the
semiconductor structure comprises a substrate and a
superlattice structure, the
superlattice structure comprises more than one periodic
unit structure, each periodic
unit structure comprises more than two
layers of Al (1-x) ScxN, and x is a number greater than 0 and less than 1; x of Al (1-x) ScxN in each layer in the periodic
unit structure is sequentially reduced from the direction far away from the substrate to the direction close to the substrate. According to the invention, a periodic unit structure composed of Al (1-x) ScxN arranged according to the preset
scandium doping concentration is formed on the substrate to form a
superlattice structure, abnormal grains generated when aluminum
nitride doped with high
scandium concentration grows on the substrate are inhibited, the
crystal quality and the
surface roughness of Al (1-x) ScxN are optimized, the piezoelectric and ferroelectric properties of Al (1-x) ScxN are improved, and relatively high polarization intensity is realized; meanwhile, the thickness of each layer of Al (1-x) ScxN in the superlattice structure is set, so that the thick high-
scandium-concentration doped aluminum
nitride inhibits the generation of high-resistance doped abnormal grains, the thin high-scandium-concentration doped aluminum
nitride reduces the ferroelectric coercive
field intensity of the film, and the dual improvement of the performance reliability and ferroelectric performance of the Al (1-x) ScxN is realized.