Field effect transistor based on negative capacitance and preparation method thereof, and biosensor and preparation method thereof

Abstract

The present invention provides a field effect transistor based on negative capacitance and a preparation method thereof, and a biosensor and a preparation method thereof. The preparation method of thefield effect transistor comprises the steps of: providing a semiconductor substrate comprising underlying silicon, buried oxide and top silicon; defining a channel figure, and a source figure and a drain figure which are connected with two ends; performing ion implantation to positions corresponding to the source figure and the drain figure to form a channel region, a source region and a drain region; forming a dielectric layer at the surface of the channel region; forming a conductive layer at the surface of the dielectric layer, and forming a ferroelectricity material layer at the surface of the conductive layer; and making a source electrode, a drain electrode and a gate electrode. According to the scheme, a traditional field effect transistor is integrated with the ferroelectricity negative capacitance to reduce the subthreshold amplitude of a device, improve the sensing sensitivity and the response speed and facilitate reduction of the device power; and moreover, the ferroelectric-doping hafnium oxide is taken as a ferroelectric negative capacitance medium so as to solve the problem that inorganic ferroelectric materials are difficult to a CMOS technology.

Description

technical field [0001] The invention belongs to the technical field of semiconductor device manufacturing, and in particular relates to a negative capacitance-based field effect transistor, a biosensor and a preparation method. Background technique [0002] Today in the 21st century, science and technology have made great progress, but environmental pollution, food pollution, and malignant diseases still seriously threaten human health and survival. Biochemical molecular sensing technology can capture the information of the environment, food and organisms, and provide technical support for environmental monitoring, food analysis, clinical medical diagnosis, biomedical research, etc. [0003] As a new type of semiconductor sensing technology, semiconductor field effect transistor has the advantages of high sensitivity, easy integration, and low cost, and it opens up a comprehensive way for the rapid and sensitive detection of biochemical molecules. Sub-threshold swing (Sub-t...

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Problems solved by technology

[0007] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a field effect transistor structure based on negative capacitance, a biosensor and a preparation method thereof, which are used to solve the problem of high sub-threshold swing, sensitivity and response in the prior art. Issues such as low speed and high device power

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