2results about How to "Reduced subthreshold swing" patented technology

This application provides a semiconductor device and a method for manufacturing the same. The semiconductor device includes a substrate, a source electrode, a drain electrode, and a channel structure disposed on one side of the substrate. The channel structure is located between the source electrode and the drain electrode. The channel structure includes a stack of multiple nanosheets, a gate electrode surrounding the nanosheets, and a cavity. The cavity is located at least between the channel structure and the substrate. The cavity is formed by the channel structure, the source electrode, the drain electrode, and the substrate surrounding the cavity. In other words, the cavity is located below the channel structure, the source electrode, and the drain electrode, without any contacting film layers, thus forming a fully floating structure. This can significantly improve the gate control performance of the semiconductor device, reduce the subthreshold swing of the semiconductor device, reduce leakage current and parasitic capacitance, increase the drive current, and improve the performance of the semiconductor device.

This invention provides a low-voltage, high-linearity heterojunction HEMT device based on junction field-effect modulation, comprising a substrate, a buffer layer, and a multilayer heterostructure of at least two alternating layers of barrier and channel layers. Source and drain electrodes are located on either side of the barrier layer and extend into the buffer layer. A passivation layer is formed on the upper surface of the barrier layer. A gate trench is formed in the middle region of the passivation layer, extending through the passivation layer to the upper surface of the barrier layer. The gate electrode includes multiple discrete gate pillars and a gate cap. The multiple discrete gate pillars are periodically arranged along the gate width direction, located within the gate trench, and extend through at least two alternating layers of barrier and channel layers into the buffer layer. The gate cap is located on the upper surface of the multiple discrete gate pillars, supported by the pillars, and has no contact with the passivation and barrier layers. A metal interconnect layer is electrically connected to the source and drain electrodes. This design achieves both low subthreshold swing and meets the application requirements of low power consumption and high linearity.