The invention discloses a
step height and flatness measuring method based on a
laser interference method, which comprises the following steps of: determining that a calibrated step is put into a
laser interference measuring device, moving a reflector distance to obtain an interference image, and
processing the interference image to obtain a step
surface phase distribution diagram. Determining the position of a calculation point according to a step boundary, calculating a step measurement result, optimizing
device parameters according to the step measurement result and step calibration value deviation to obtain optimal
device parameters, and constructing a step device parameter
library; and according to the step parameters of the to-be-measured step, matching the optimal
device parameters in the step device parameter
library to obtain
reference device parameters, adjusting the
laser interference
measurement device, and measuring the to-be-measured step by using the adjusted
laser interference measurement device to obtain the
step height and the step flatness. The method can timely and accurately measure the height and flatness of the step, and has important significance for promoting the development of a high-precision measurement technology in the field of micro-
nano manufacturing.