Array substrate, preparation method thereof, display panel and device

Abstract

The invention discloses an array substrate, a preparation method thereof, a display panel and a device. The array substrate comprises a pixel circuit, the pixel circuit comprises a first transistor and a second transistor, the first transistor comprises a first active layer, the second transistor comprises a second active layer, and both the first active layer and the second active layer comprisesilicon; the array substrate further comprises a first type inorganic layer, a second type inorganic layer and a first via hole, the first via hole is located above the first active layer and at leastpenetrates through the second type inorganic layer, and the hydrogen ion concentration in the first active layer is smaller than that in the second active layer. The first active layer is subjected to high-temperature processing through the first via hole, so that the hydrogen ion concentration in the first active layer is smaller than that in the second active layer, the high-temperature processing frequency of the second transistor is reduced while good performance of the first transistor is guaranteed, and it is guaranteed that the second transistor is small in sub-threshold swing, good inturn-off characteristic and small in leakage current; and good overall characteristics of the pixel circuit are ensured.

Description

technical field [0001] Embodiments of the present invention relate to the field of display technology, and in particular to an array substrate and a manufacturing method thereof, a display panel and a device. Background technique [0002] Organic light-emitting display is currently the mainstream technology for displays such as mobile phones, TVs, and computers. Compared with traditional liquid crystal displays, organic light-emitting displays have the advantages of low energy consumption, low cost, self-illumination, wide viewing angle, and fast response speed. Therefore, organic light-emitting display gradually becomes a mainstream display technology. [0003] Since the organic light emitting display is driven by current, a stable current is required to control its light emission. The size and stability of the driving current of the organic light emitting display mainly depends on the driving transistor in the pixel circuit of the organic light emitting display. Therefor...

AI Technical Summary

Problems solved by technology

However, due to the different functions of the driving transistor and the switching transistor, the driving transistor and the switching transistor prepared by the same process often cannot meet the actual display requirements.

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