The invention discloses a micro-
mechanics comb-typed
gate capacitance top having an electric tuning function, and belongs to the field of micro-
mechanics inertial sensors. An electric tuning variable area
capacitor is distributed in a driving or detecting direction of the top; in each unit
capacitor of the electric tuning variable area
capacitor, the positive surface of a movable
electrode is parallel to the positive surface of a fixed
electrode, wherein the positive surface of the movable
electrode is rectangular and the positive surface of the fixed electrode is triangular or saw tooth-shaped, or the positive surface of the movable electrode is triangular or saw tooth-shaped and the positive surface of the fixed electrode is rectangular, and the triangular positive surface and a long edge of the rectangular positive surface are overlapped. The top tunes a
resonance frequency in the driving or detecting direction by the electric tuning variable area capacitor distributed in the driving or detecting direction of the top, so that the top devices in the same batch have similar properties; and the
resonance frequencies in the driving and detecting directions are close or even equal, and the sensitivity of the top is greatly improved.