The invention belongs to the technical field of power
semiconductor devices, and relates to a super-junction IGBT device with a split gate structure and a preparation method of the super-junction IGBT device. The device comprises collector
metal, a P-type collector, an N-type field stop layer, a super junction N column, a super junction P column, a P-type buried layer, a
trench gate structure and a trench emitter structure which are sequentially stacked from bottom to top, and the
trench gate structure and the trench emitter structure are connected with an N-type charge storage layer, a P-type base region and an N + emitter region. The P columns / N columns of the device are alternately arranged in the Y direction, the
cell width is reduced, meanwhile, the parasitic PMOS introduced by only adding one photoetching plate acts, and the device has high
channel density and a wide short-circuit safe working area. In addition, the Miller
capacitance of the super-junction IGBT is reduced, the negative
gate capacitance effect is suppressed, the surge current of the device is reduced, and the control capability of the gate of the device on dv / dt is improved. According to the invention, an extra path is provided for redundant holes stored in the drift region, the turn-off speed of the device is obviously improved, and the switching loss is reduced.