The invention discloses a
trench gate charge storage-type IGBT and a manufacturing method thereof, which belong to the technical field of power
semiconductor devices. Through reasonably introducing asplit
trench gate structure and an air floating P-type region, in a condition of not influencing the
threshold voltage of the IGBT and conduction, Miller
capacitance is reduced, and bad influences brought by Miller effects are improved; the overall
gate capacitance is reduced, the device switching speed is improved, the switching losses of the device are reduced, and the compromise between forwardconduction
voltage drop and turn-off losses of the traditional CSTBT structure is improved; current and
voltage oscillations and EMI problems in the device dynamic starting process are avoided, and the device reliability is improved;
electric field concentration effects at the bottom part of the trench are improved, and the
breakdown voltage of the device is improved; carrier enhancement effectsat an emitter end of the device are improved, the carrier concentration distribution in a drift region is improved, and the compromise between forward condition
voltage drop and turn-off losses is further improved; and besides, the manufacturing method disclosed in the invention has the advantages of low realization difficulty, high product rate and low cost.