The invention discloses a 
trench gate charge storage-type IGBT and a manufacturing method thereof, which belong to the technical field of power 
semiconductor devices. Through reasonably introducing asplit 
trench gate structure and an air floating P-type region, in a condition of not influencing the 
threshold voltage of the IGBT and conduction, Miller 
capacitance is reduced, and bad influences brought by Miller effects are improved; the overall 
gate capacitance is reduced, the device switching speed is improved, the switching losses of the device are reduced, and the compromise between forwardconduction 
voltage drop and turn-off losses of the traditional CSTBT structure is improved; current and 
voltage oscillations and EMI problems in the device dynamic starting process are avoided, and the device reliability is improved; 
electric field concentration effects at the bottom part of the trench are improved, and the 
breakdown voltage of the device is improved; carrier enhancement effectsat an emitter end of the device are improved, the carrier concentration distribution in a drift region is improved, and the compromise between forward condition 
voltage drop and turn-off losses is further improved; and besides, the manufacturing method disclosed in the invention has the advantages of low realization difficulty, high product rate and low cost.