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667 results about "Negative bias" patented technology

A negative bias is a lamprey of the mind, a deadly parasite, and this parasite uses your lifeblood, your energy, your mind, to breed and spread to other minds, using and destroying life force wherever it goes.

Semiconductor circuit device simulation method and semiconductor circuit device simulator

A simulator for accurately simulating a deterioration amount and a recovery amount of transistor characteristics, by which a semiconductor device can be designed with high reliability, and the method are provided. When a gate voltage of a negative level (a negative bias voltage) “Vg” is applied to a gate of the transistor, characteristics of the transistor are deteriorated. When application of the negative level gate voltage “Vg” is terminated (when applying a bias free voltage), the deteriorated transistor characteristics are recovered. In a deterioration period and a recovery period, a logarithm “log(t)” is obtained for an application time “t” of the gate voltage, a deterioration amount ΔPD(t)=CD+BD·log(t) is calculated by using constants CD and BD depending on the negative bias voltage, a recovery amount ΔPR(t)=CR+BR·log(t) is calculated by using constants CR and BR depending on the bias free voltage, and the deterioration amount (ΔPD), the recovery amount (ΔPR) and a basic deterioration amount (XD) are summed up. Preferably, passage of time is divided, and a deterioration amount and a recovery amount are obtained for each time zone by using different deterioration and recovery functions for each time zone.
Owner:SONY CORP

Forming method of metal gate, forming method of MOS transistor and forming method of CMOS structure

The invention discloses a forming method of a metal gate, a forming method of an MOS (metal oxide semiconductor) transistor and a forming method of a CMOS (complementary metal oxide semiconductor) structure. The forming method of the metal gate comprises the following steps: after removing a pseudo polycrystalline silicon gate and forming a groove, forming high-K gate medium layers at the bottom and on the side wall of the groove, fluoridizing the high-K gate medium layers, and forming a function layer and a metal layer on the surfaces of the high-K gate medium layers. As fluorine bonds such as fluorine-silicon bonds and fluorine-hafnium bonds can be formed among the high-K gate medium layers and a semiconductor substrate after fluoridization and the bond energy of the fluorine bonds is higher than that of original hydrogen bonds, the instability of the negative bias temperature of a device is reduced; as fluorine is strong in oxidability, oxygen vacancies can be prevented from generating donor level in a band gap and becoming positively charged oxygen vacancies, the oxygen vacancies are passivated, and the instability of the positive bias temperature of the device is reduced.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Preparation of high-hardness diamond-like multi-layer film

The invention discloses a preparation method of a multilayer diamond-like film with high hardness, which comprises the following steps: a substrate is sputter cleaned, the diamond-like film is deposited by a depositing method with magnetic filtering and cathode vacuum arc, and the depositing method comprises steps of closing a vacuum chamber, vacuumizing the vacuum chamber to the pressure of 10<-3> Pa, turning on a pot lead cathode arc source, exerting negative bias voltage from minus 50 V to minus 200 V on the substrate and simultaneously and periodically letting in argon of 99.99 percent; furthermore, a control period lasts for 120 to 600 seconds, the time for letting in the argon is 10 to 50 percent of the control period, and the argon pressure in the vacuum chamber during argon inletting is 0.01 to 0.1 Pa; time for shutting off the argon is 90 to 50 percent of the control period, and the vacuum degree of the vacuum chamber at the time is 10<-4> to 10<-3> Pa; the number of the control periods is 3 to 50. The preparation method of the multilayer diamond-like film with high hardness has simple technique, low cost, produced films with strong bonding force, high hardness, large thickness, small stress and excellent mechanical and tribology performance; as well as wide application space in the industrial application field.
Owner:SOUTHWEST JIAOTONG UNIV

Manufacturing method for CVD (Chemical Vapor Deposition) diamond/diamond-like composite coating tool with complex shape

ActiveCN102650053AExcellent film-substrate adhesion strengthSmooth surface qualityVacuum evaporation coatingSputtering coatingDiamond-like carbonAlloy
The invention discloses a manufacturing method for a CVD (Chemical Vapor Deposition) diamond/diamond-like composite coating tool with a complex shape. The manufacturing method comprises the steps as follows: depositing a layer of MCD (Micro Crystalline Diamond) film on the surface of the tool by a hot wire CVD method, and generating ion bombardment by negative bias in the depositing process so as to ensure that the surface of the MCD film is smooth; and continuously depositing a layer of DLC (Diamond-like Carbon) film, carrying out ion bombardment on the tool surface coated with the MCD film by positive and negative pulse ion power so as to remove impurities on the tool surface in the initial period, and removing the sharp crystalline grain edge of the coating surface to enhance the flatness of the coating and improve the surface activity of the coating so as to achieve the effect of enhancing the interlayer adhesion strength. Due to the manufacturing method, the surface of the integrated hard alloy tool with the complex shape can be deposited to obtain the CVD diamond/diamond-like composite coating with excellent film-based adhesion strength, surface wear and friction resistance and self lubricating property, and the composite coating also has the characteristics of low internal stress, smooth and flat surface, uniform thickness and the like.
Owner:SHANGHAI JIAO TONG UNIV +1
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