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84results about How to "Threshold Voltage Stability" patented technology

Transistor and formation method thereof

The invention discloses a transistor and a formation method thereof. The formation method of the transistor comprises: providing a semiconductor substrate, wherein the surface of the semiconductor substrate is provided with a threshold voltage adjusting film, the surface of the threshold voltage adjusting film is provided with a barrier film, the surface of the barrier film is provided with a channel film, the threshold voltage adjusting film is internally provided with doped irons, the channel film is at an intrinsic state, and the barrier film is used for preventing penetration by the doped irons in the threshold voltage adjusting film; forming a grid structure on the surface of the channel film; forming a first side wall on the surface of the channel film at the two sides of the grid structure; by taking the grid structure and the first side wall as masks, etching the channel film, the barrier film, the threshold voltage adjusting film and a part of the semiconductor substrate to form a channel layer, a barrier layer and a threshold voltage adjusting layer; and forming a doping layer on the surface of the semiconductor substrate at the two sides of the threshold voltage adjusting layer, the barrier layer, the channel layer and the grid structure, wherein the surface of the doping layer is not lower than the surface of the channel layer. The performance of the formed transistor is improved.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Pixel circuit structure of silicon-based organic light-emitting diode (OLED) display chip and drive method thereof

The invention discloses a pixel circuit structure of a silicon-based OLED display chip and a drive method thereof. The pixel circuit structure at least has a reading-in p-channel metal oxide semiconductor (PMOS) pipe, a polysilicon-isolator-polysilicon (PIP) capacitor, a drive PMOS pipe, a writing-out PMOS pipe, a ground wire protection PMOS pipe, a video data serial bit line, a power wire which is connected with a PIP upper electrode connecting wire and a source connecting wire of the drive PMOS pipe at the same time, a 0V ground wire connected with a drain of the ground wire protection PMOS pipe through a drain connecting wire of the ground wire protection PMOS pipe, a positive phase row selection wire connected with a grid of the writing-in PMOS pipe through a grid connecting wire of the writing-in PMOS pipe, a negative phase row selection wire connected with the gird of the writing-out PMOS pipe through the grid connecting wire of the writing-out PMOS pipe, and an OLED luminescent layer drive electrode connected with a drive electrode connecting wire. The drive method comprises 9 steps which are carried out circularly after energization. The pixel circuit structure and the drive method thereof reduce production cost, the weight and space volume of the control drive circuit, and the power consumption of the whole machine.
Owner:GUANGDONG SINODISPLAY TECH

Transistor and forming method thereof

Provided are a transistor and a forming method thereof. The transistor comprises a semiconductor substrate, a groove located in the semiconductor substrate, a gate dielectric layer located on the lateral wall and the bottom surface of the groove, a gate electrode layer located on the surface of the gate dielectric layer, a source region and a drain region. The groove is formed by a first sub groove and a second sub groove located below the first sub groove, wherein the second sub groove is communicated with the first sub groove, an opening of the first sub groove is larger than that of the second sub groove, the lateral wall of the first sub groove is inclined relative to the surface of the semiconductor substrate, and the lateral wall of the second sub groove is perpendicular to the surface of the semiconductor substrate. The gate electrode layer fully fills the groove and the surface of the gate electrode layer is level to that of the semiconductor substrate. The source region is located in the semiconductor substrate on two sides of the groove. The drain region is located in the semiconductor substrate on one side opposite to the groove and is opposite to the second sub groove. The transistor is stable in threshold voltage and good in performance.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Semiconductor structure and fin field-effect tube forming method and etching device

The invention discloses a semiconductor structure and fin field-effect tube forming method and an etching device. The fin field-effect tube forming method comprises the step of providing a semiconductor substrate; the step of etching the semiconductor substrate to form a plurality of fin parts, wherein first grooves are formed between every two adjacent fin parts; the step of filling the first grooves with isolation materials to form an isolation structure; the step of spraying liquid, spraying a layer of liquid on the surface of the isolation structure and the surfaces of the fin parts, wherein the semiconductor substrate is rotated in the process of spraying; the step of supplying reaction gas, wherein the reaction gas is blended with the layer of liquid spraying the surface of the isolation structure and the surfaces of the fin parts to form an etching solution used for etching the isolation structure; the step of executing the liquid spraying process and the reaction gas supplying process repeatedly until the isolation structure is removed by certain thickness to form a second groove and to expose the fin parts by certain height; the step of forming a gate structure striding the surfaces and the side walls of the fin parts which are exposed by the certain height. The precision of removing the isolation structure by the certain thickness is improved.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Groove type power device and manufacturing method thereof

The invention provides a groove type power device and a manufacturing method thereof. The method comprises the following steps: providing a substrate sequentially comprising a first conductive type heavily doped layer and a first conductive type lightly doped epitaxial layer from bottom to top; forming a cellular region groove and a terminal region groove in the lightly doped epitaxial layer; forming a gate dielectric layer on the side wall and the bottom surface of the groove and the top surface of the lightly doped epitaxial layer; forming a polycrystalline silicon layer so as to fill the cellular region groove and the terminal region groove, and carrying out second conduction type doping on the polycrystalline silicon layer; etching the polycrystalline silicon layer until the polycrystalline silicon layer is flush with the top surface of the lightly doped epitaxial layer to obtain a cellular region groove gate and terminal region groove polycrystalline silicon; performing first conduction type doping on the cellular region groove gate and the terminal region groove polycrystalline silicon; forming a body region in the lightly doped epitaxial layer; and forming a source region in the body region. According to the invention, the groove type terminal is adopted, and body region injection can be carried out by adopting relatively high energy, so that the device has more stable threshold voltage and breakdown voltage.
Owner:CHINA RESOURCES MICROELECTRONICS (CHONGQING) CO LTD

Method for stabilizing flash memory unit word line threshold voltage

The invention provides a method for stabilizing flash memory unit word line threshold voltage. The method includes the steps that photoresist is distributed on a silicon wafer, the photoresist on an active area of the silicon wafer is removed, and the photoresist on the peripheral portion of the silicon wafer is left; first injection treatment is executed on a flash memory unit forming area of the active area of the silicon wafer, and an injection condition of the first injection treatment is selected so that an expected floating gate lower threshold can be formed on a final flash memory unit; the flash memory unit forming process is executed on the silicon wafer so that the flash memory unit can be formed on the flash memory unit forming area of the active area; second injection treatment is executed on the active area of the silicon wafer so that doping can be formed on the positions, corresponding to the silicon wafer area, of word lines on the two sides of the flash memory unit, and an injection condition of the second injection treatment is selected so that an expected word line lower threshold can be formed on the final flash memory unit, wherein ion injection is not carried out on the flash memory unit forming area in the flash memory unit forming process.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Method for forming complementary metal oxide semiconductor tube

A forming method of a complementary type metal-oxide semiconductor tube comprises the following steps: providing a semiconductor substrate which comprises a first area and a second area, wherein the surface of the semiconductor substrate is provided with an insulating layer, the surface of the first area is provided with a first opening, the bottom of the first opening is provided with a first high-K dielectric layer, the surface of the first high-K dielectric layer is provided with a dummy gate layer, the surface of the second area is provided with a second opening, and the bottom of the second opening is provided with a second high-K dielectric layer; forming a second work function layer on the side wall of the second opening and the surface of the second high-K dielectric layer; forming a second gate electrode layer on the surface of the second work function layer, wherein the second gate electrode layer is made of copper; afterwards eliminating the dummy gate layer in the first opening; successively forming the first work function layer on the side wall of the first opening and the surface of the first high-K dielectric layer; and successively forming a first barrier layer and a first gate electrode layer on the surface of the first work function layer, wherein the first gate electrode layer is made of aluminum. The formed complementary type metal-oxide semiconductor tube has stable performance.
Owner:SEMICON MFG INT (SHANGHAI) CORP
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