The invention provides a junction-free
transistor with a planar core-shell structure, which comprises a substrate, a core layer, a shell layer, a source-drain region, a grid
electrode and a first side wall, the substrate, the core layer, the shell layer and the source-drain region are sequentially stacked along the stacking direction, the grid
electrode and the first side wall are arranged on the same layer, the first side wall is arranged between the grid
electrode and the source-drain region, and the first
dielectric constant of the first side wall is greater than 7.5. In the stacking direction, the projection area of the shell layer in the plane where the substrate is located at least covers the projection areas of the grid electrode and the side wall in the plane where the substrate is located. By arranging the first side wall with a relatively high
dielectric constant, the trend that the
threshold voltage drops along with the shortening of the channel length can be slowed down, the roll-off of the
threshold voltage can be inhibited, and the first side wall with the relatively high
dielectric constant can also enhance the control capability of the grid electrode on the channel, improve the switching characteristic and inhibit the
subthreshold swing degradation. And the modulation of the leakage
voltage on the
threshold voltage can be effectively suppressed, the leakage induced barrier lowering effect is weakened, and the suppression effect on the
short channel effect is realized.